CN101776338B - 太阳能高温吸热CrFeON薄膜及其制备工艺 - Google Patents
太阳能高温吸热CrFeON薄膜及其制备工艺 Download PDFInfo
- Publication number
- CN101776338B CN101776338B CN2009102647301A CN200910264730A CN101776338B CN 101776338 B CN101776338 B CN 101776338B CN 2009102647301 A CN2009102647301 A CN 2009102647301A CN 200910264730 A CN200910264730 A CN 200910264730A CN 101776338 B CN101776338 B CN 101776338B
- Authority
- CN
- China
- Prior art keywords
- crfeon
- heat
- temperature
- layer
- absorbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000005516 engineering process Methods 0.000 claims abstract description 18
- 229910002467 CrFe Inorganic materials 0.000 claims abstract description 16
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 27
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 26
- 239000007789 gas Substances 0.000 claims description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 17
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 229910052786 argon Inorganic materials 0.000 claims description 13
- 239000004615 ingredient Substances 0.000 claims description 12
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 239000012528 membrane Substances 0.000 claims description 11
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000000740 bleeding effect Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000004062 sedimentation Methods 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 28
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102647301A CN101776338B (zh) | 2009-12-30 | 2009-12-30 | 太阳能高温吸热CrFeON薄膜及其制备工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102647301A CN101776338B (zh) | 2009-12-30 | 2009-12-30 | 太阳能高温吸热CrFeON薄膜及其制备工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101776338A CN101776338A (zh) | 2010-07-14 |
CN101776338B true CN101776338B (zh) | 2011-06-15 |
Family
ID=42512864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009102647301A Expired - Fee Related CN101776338B (zh) | 2009-12-30 | 2009-12-30 | 太阳能高温吸热CrFeON薄膜及其制备工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101776338B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102226593A (zh) * | 2011-05-07 | 2011-10-26 | 常州龙腾太阳能热电设备有限公司 | 用于聚光太阳能热发电集热管内管的高温抗氧化选择性吸收膜的膜系结构 |
CN104934490B (zh) * | 2015-04-13 | 2017-10-27 | 许昌学院 | 一种原位大面积合成氧化亚锡半导体光电薄膜材料的方法 |
CN113727554B (zh) * | 2021-08-27 | 2023-07-14 | 北京北方华创微电子装备有限公司 | 电源组件、等离子体浸没离子注入设备及其使用方法 |
-
2009
- 2009-12-30 CN CN2009102647301A patent/CN101776338B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101776338A (zh) | 2010-07-14 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Suzhou Reci Optoelectronics Technology Co., Ltd. Assignor: Stararc Coating Technologies (Suzhou) Co., Ltd. Contract record no.: 2012320010059 Denomination of invention: Solar high-temperature and heat-absorbing CrFeON film and preparation process thereof Granted publication date: 20110615 License type: Exclusive License Open date: 20100714 Record date: 20120401 |
|
ASS | Succession or assignment of patent right |
Owner name: SUZHOU RECHI PHOTOELECTRIC TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: STARARC COATING TECHNOLOGIES (SUZHOU) CO., LTD. Effective date: 20130306 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130306 Address after: Suzhou 215022, Jiangsu Province Industrial Park Weiting Kezhi Road No. 1 Patentee after: Suzhou Reci Optoelectronics Technology Co., Ltd. Address before: 215022, 2, Tong Jing Road, Suzhou Industrial Park, Jiangsu, China Patentee before: Stararc Coating Technologies (Suzhou) Co., Ltd. |
|
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Suzhou Reci Optoelectronics Technology Co., Ltd. Assignor: Stararc Coating Technologies (Suzhou) Co., Ltd. Contract record no.: 2012320010059 Date of cancellation: 20130222 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110615 Termination date: 20161230 |
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CF01 | Termination of patent right due to non-payment of annual fee |