CN101750427B - Temperature controlling sample holder capable of adjusting incident ion energy and monitoring ion flux in real time - Google Patents
Temperature controlling sample holder capable of adjusting incident ion energy and monitoring ion flux in real time Download PDFInfo
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- CN101750427B CN101750427B CN2009102515995A CN200910251599A CN101750427B CN 101750427 B CN101750427 B CN 101750427B CN 2009102515995 A CN2009102515995 A CN 2009102515995A CN 200910251599 A CN200910251599 A CN 200910251599A CN 101750427 B CN101750427 B CN 101750427B
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Abstract
The present invention provides a temperature controlling sample holder capable of adjusting incident ion energy and monitoring ion flux in real time. An insulating active cooling sample holder and an insulating active cooling sample are subjected to the double insulation design, the negative bias voltage is applied by a sheathed thermocouple sheath, the ion flux is monitored in real time and a passive temperature adjusting gasket is used. The active cooling sample holder and the sheathed thermocouple sheath are both have independent and adjustable power supply for adjusting the energy arriving at the ions, measuring the total ion flux stricken on the effective area of the insulating active cooling sample and adjusting the temperature of the insulating active cooling sample being subjected to the experiment by adjusting the thickness of an insulating temperature controlling chip and the variety and the flow rate of cooling medium. The temperature controlling sample holder can accurately monitor the iron flux stricken on the effective area of the insulating active cooling sample being subjected to the experiment without using a probe and other auxiliary means and can be used for doing experiment on the insulating active cooling sample irradiation under different incident ion energy and different temperature of the insulating active cooling sample.
Description
Technical field:
The present invention relates to plasma and material interaction experimental provision parts, a kind ofly specifically adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time; Can guarantee by the current potential of control specimen holder and sample sample collection to gas current directly measured; Change the irradiate ion energy by the current potential of adjusting specimen holder; By sample temperature in the THICKNESS CONTROL experimentation that changes heat eliminating medium kind and flow and insulation temperature control sheet.
Background technology:
Nuclear fusion energy is the potential clean and safe energy, and its final realization is even more important to the solution of human energy problem, and the first wall problem of materials is the key that can following nuclear fusion energy source utilize in the reactor.The solution of problem of materials depends primarily on our article on plasma body and wall material interaction (Plasma-wallInteractions, PWI) the deep understanding of process and mechanism.The PWI problem also is considered to international thermonuclear fusion experimental reactor (International Thermonuclear Experimental Reactor, ITER) one of most critical issue of project construction.
Current, PWI research and lab setup that plasma and wall material experimental Study of Interaction are divided in the big-and-middle-sized fusion facility are simulated two kinds.Wherein, the research of carrying out in big-and-middle-sized fusion facility is subjected to many restrictions such as experimental period, the process that material experiences in device too much, too complicated, the work that can carry out is often just analyzed long-term comprehensive result.Therefore, a large amount of plasma and wall material repercussion study work are born by the laboratory simulation device.These devices can be studied the interactional underlying issue of plasma and material, as the influence to material etc. of breaking of hydrogen and helium delay/bubble problem, plasma in the physical sputtering of material and chemical etching, the material.
One of vitals of analogue means is exactly a specimen holder, and the function of specimen holder comprises to the clamping of sample with to the control of irradiation temperature, area.Current in some breadboard analogue means, in order to carry out the plasma radiation experiment of sample under different temperatures, specimen holder often needs additionally to install heating arrangement; Simultaneously, diagnostic means such as probe also is used near the specimen holder so that obtain corresponding plasma parameter; Sample itself must apply negative bias with control ion incidence energy.Above measure makes system become comparatively complicated, and sample temperature is wayward in the experimentation, and the accuracy of plasma parameter also can not get guaranteeing near the sample, and these have produced totally unfavorable influence for utilizing analogue means to carry out PWI research in the laboratory.
Summary of the invention:
Be to solve the problem that prior art exists, the invention provides and a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, this specimen holder can be used in all kinds of research plasmas and the interactional device of material.
The technical solution used in the present invention is:
A kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: have a specimen holder pedestal, the specimen holder base interior has cavity, cavity and cooling but medium into and out of cooling duct UNICOM, insulate between cooling duct and specimen holder pedestal; Specimen holder pedestal upper end is equipped with gland by bolt, there is perforate at the gland middle part, in the space between gland and the specimen holder pedestal, specimen holder pedestal top is equipped with the sample insulation sleeve of central openings, sample insulation sleeve top is equipped with ring baffle, ring baffle all closely contacts with both between gland lower surface and sample insulation sleeve upper surface; There is through hole at specimen holder pedestal middle part, described through hole passes the cavity of described specimen holder base interior, armoured thermocouple is installed in the through hole, armoured thermocouple is set with the thermopair insulation sleeve outward, the thermopair insulation sleeve closely contacts with the specimen holder pedestal, the armoured thermocouple upper end is passed insulation temperature control sheet successively, the conducting strip of insulation temperature control sheet upper end, clamp the placement sample between conducting strip upper surface and the sample insulation sleeve, the armoured thermocouple upper end withstands on the sample below, described insulation temperature control sheet and conducting strip all are positioned at the sample insulation sleeve, and plasma is through overpressure cap, ring baffle, the perforate of sample insulation sleeve central authorities shines on the sample; Described cooling duct and armoured thermocouple all are circumscribed with independently power supply.
Describedly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described specimen holder pedestal, its material are copper or aldary, internal cavities and cooling duct UNICOM, and cooling medium consumption is adjustable; The specimen holder pedestal is connected with screw with gland, and specimen holder is supported by cooling duct, does insulation between cooling duct and the specimen holder pedestal and handles, and specimen holder is equipped with independent adjustable power supply.
Describedly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described conducting strip, its material are copper or aldary, and positive center has aperture to be convenient to thermopair to pass, and hole and thermopair shell are interference fit; Conducting strip both sides surfaceness is all minimum.
Describedly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described insulation temperature control sheet: material is mica or all kinds of pottery, the porose thermopair of being convenient in center passes through, and is clearance fit between insulation temperature control sheet and the thermopair shell; Insulation temperature control sheet both sides surfaceness is all minimum.
Describedly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described ring baffle, material are tungsten or molybdenum, and ring baffle center pit area is effective area of irradiation; The both sides surfaceness is all minimum, and the baffle plate inner ring is done rounding and handled.
Describedly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described armoured thermocouple, closely contact with sample and conducting strip, the jacket outside surface of armoured thermocouple connects independent adjustable power supply.
Advantage of the present invention is:
Provided by the inventionly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, by insulation initiatively cool off specimen holder and insulated sample the double insulation design, apply negative bias and monitor the design of ionic flux in real time and the use of passive type temperature adjustment pad by the armoured thermocouple jacket; Initiatively cooling off specimen holder and thermopair jacket all has power supply independently to arrive energy of ions and measure the total flux of getting on the sample useful area in real time in order to adjust, and the sample temperature in thickness that can be by adjusting insulation temperature control sheet and heat eliminating medium kind and the flow adjustment experimentation.This design both can guarantee in the experimentation directly accurately to read the ionic flux of getting on the sample useful area and not need other supplementary meanss such as probe, also can carry out the sample irradiation experiment under different projectile energies and the sample temperature simultaneously.Simple in structure, the dependable performance of this specimen holder is applicable in all kinds of research plasmas and the interactional device of material.
Description of drawings:
Fig. 1 is a structural representation of the present invention;
Among the figure, initiatively cool off specimen holder pedestal 1, gland 2, sample insulation sleeve 3, ring baffle 4, sample 5, conducting strip 6, insulating trip 7, cooling duct 8, thermopair insulation sleeve 9, armoured thermocouple 10.
Embodiment:
A kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time: have a specimen holder pedestal 1, there is cavity specimen holder pedestal 1 inside, cavity and cooling be cooling duct 8 UNICOMs of media flow but, 1 insulation of cooling duct 8 and specimen holder pedestal; Specimen holder pedestal 1 upper end is equipped with the gland 2 of central openings by bolt, the sample insulation sleeve 3 that cavity between gland 2 and the specimen holder pedestal 1 is interior, specimen holder pedestal 1 top is equipped with central openings, sample insulation sleeve 3 tops are equipped with ring baffle 4, ring baffle 4 all closely contacts with both between gland 2 lower surfaces and sample insulation sleeve 3 upper surfaces; There is through hole at specimen holder pedestal 1 middle part, armoured thermocouple 10 is installed in the through hole, the armoured thermocouple 10 outer thermopair insulation sleeves 9 that are set with, thermopair insulation sleeve 9 closely contacts with specimen holder pedestal 1, insulation temperature control sheet 7, conducting strip 6 are passed in armoured thermocouple 10 upper ends, armoured thermocouple 10 upper ends withstand on sample 5 belows, and sample 5 clamps between sample insulation sleeve 3 and conducting strip 6, and described insulation temperature control sheet 7 and conducting strip 6 all are positioned at sample insulation sleeve 3; Described cooling duct 8 and armoured thermocouple 9 all are circumscribed with independently power supply.Plasma shines on the sample 5 through the perforate of overpressure cap 2, ring baffle 4, sample insulation sleeve 3 central authorities.
Described specimen holder pedestal 1, its material are copper or aldary, and inside has cooling duct and cavity, and cooling medium consumption is adjustable; The specimen holder pedestal is connected with screw with gland, and specimen holder is supported by cooling duct, does insulation between cooling duct and the specimen holder pedestal and handles, and specimen holder is equipped with independent adjustable power supply.
Described conducting strip 6, its material are copper or aldary, and positive center has aperture to be convenient to thermopair to pass, and hole and thermopair shell are interference fit; Conducting strip both sides surfaceness is all minimum.
Described insulation temperature control sheet 7: material is mica or all kinds of pottery, and the porose thermopair of being convenient in center passes through, and is clearance fit between insulation temperature control sheet and the thermopair shell; Insulation temperature control sheet both sides program list surface roughness is all minimum.
Described ring baffle 4, material are tungsten or molybdenum, and ring baffle center pit area is effective area of irradiation; The both sides surfaceness is all minimum, and the baffle plate inner ring is done rounding and handled.
Described armoured thermocouple closely contacts with sample and conducting strip, and the jacket outside surface of armoured thermocouple connects independent adjustable power supply.
During concrete the installation, wherein gland 2 usefulness screws closely are fixed on the specimen holder pedestal 1, and cooling duct 8 all has independently power supply with the jacket of armoured thermocouple 10, can adjust separately the two current potential is equated and the sampling negative bias.The specimen holder overall weight is supported by cooling duct 8, does insulation between cooling duct 8 and the device and handles.
Claims (6)
1. can adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time for one kind, it is characterized in that: have a specimen holder pedestal, the specimen holder base interior has cavity, cavity and cooling but medium into and out of cooling duct UNICOM, insulate between cooling duct and specimen holder pedestal; Specimen holder pedestal upper end is equipped with gland by screw, there is perforate at the gland middle part, in the space between gland and the specimen holder pedestal, specimen holder pedestal top is equipped with the sample insulation sleeve of central openings, sample insulation sleeve top is equipped with ring baffle, ring baffle all closely contacts with both between gland lower surface and sample insulation sleeve upper surface; There is through hole at specimen holder pedestal middle part, described through hole passes the cavity of described specimen holder base interior, armoured thermocouple is installed in the through hole, armoured thermocouple is set with the thermopair insulation sleeve outward, the thermopair insulation sleeve closely contacts with the specimen holder pedestal, the armoured thermocouple upper end is passed insulation temperature control sheet successively, the conducting strip of insulation temperature control sheet upper end, clamp the placement sample between conducting strip upper surface and the sample insulation sleeve, the armoured thermocouple upper end withstands on the sample below, described insulation temperature control sheet and conducting strip all are positioned at the sample insulation sleeve, and plasma is through overpressure cap, ring baffle, the perforate of sample insulation sleeve central authorities shines on the sample; Described cooling duct and armoured thermocouple all are circumscribed with independent adjustable power supply.
2. according to claim 1ly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described specimen holder pedestal, its material is copper or aldary, internal cavities and cooling duct UNICOM, and cooling medium consumption is adjustable; Specimen holder is supported by cooling duct, does insulation between cooling duct and the specimen holder pedestal and handles, and specimen holder is equipped with independent adjustable power supply.
3. according to claim 1ly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described conducting strip, its material is copper or aldary, and positive center has aperture to be convenient to thermopair to pass, and hole and thermopair shell are interference fit; Conducting strip both sides surfaceness is all minimum.
4. according to claim 1ly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described insulation temperature control sheet: material is mica or all kinds of pottery, the porose thermopair of being convenient in center passes through, and is clearance fit between insulation temperature control sheet and the thermopair shell; Insulation temperature control sheet both sides surfaceness is all minimum.
5. according to claim 1ly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described ring baffle, material are tungsten or molybdenum, and ring baffle center pit area is effective area of irradiation; The both sides surfaceness is all minimum, and the baffle plate inner ring is done rounding and handled.
6. according to claim 1ly a kind ofly adjust incident ionic energy, monitor the temperature control specimen holder of ionic flux in real time, it is characterized in that: described armoured thermocouple, closely contact with sample and conducting strip, the jacket outside surface of armoured thermocouple connects independent adjustable power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102515995A CN101750427B (en) | 2009-12-31 | 2009-12-31 | Temperature controlling sample holder capable of adjusting incident ion energy and monitoring ion flux in real time |
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| CN2009102515995A CN101750427B (en) | 2009-12-31 | 2009-12-31 | Temperature controlling sample holder capable of adjusting incident ion energy and monitoring ion flux in real time |
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| CN101750427A CN101750427A (en) | 2010-06-23 |
| CN101750427B true CN101750427B (en) | 2011-11-16 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102455715B (en) * | 2010-10-20 | 2013-12-25 | 北京卫星环境工程研究所 | Temperature control method of irradiation test |
| CN103926260A (en) * | 2014-03-31 | 2014-07-16 | 北京工业大学 | ECR-PECVD (electron cyclotron resonance-plasma enhanced chemical vapor deposition) device for ion irradiation experiment |
| CN107064992A (en) * | 2017-04-27 | 2017-08-18 | 厦门大学 | It is a kind of can high temperature rapid cooling irradiation cavity device |
| CN108895874B (en) * | 2018-07-04 | 2019-09-13 | 中国原子能科学研究院 | A kind of cooling device for proton beam irradiation experiment test target |
| CN111024462A (en) * | 2018-10-09 | 2020-04-17 | 中国科学院金属研究所 | Sample design and experiment method for realizing high hydrostatic pressure and accurate temperature measurement and control |
| CN110752134B (en) * | 2019-10-18 | 2022-06-03 | 合肥聚能电物理高技术开发有限公司 | Sample table for plasma device |
| CN111257351B (en) * | 2020-02-11 | 2021-12-03 | 大连理工大学 | Irradiation water-cooling sample platform |
| CN116145099A (en) * | 2023-04-21 | 2023-05-23 | 合肥铠柏科技有限公司 | Straight liquid nitrogen cooling sample holder |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1437764A (en) * | 2000-07-17 | 2003-08-20 | 东京毅力科创株式会社 | Holding device for treated body |
| CN1603466A (en) * | 2004-11-05 | 2005-04-06 | 哈尔滨工业大学 | Composite plasma surface treatment apparatus |
| CN1741252A (en) * | 2005-09-23 | 2006-03-01 | 中国科学院上海技术物理研究所 | The reactive ion etching equipment of mercury-cadmium-tellurium focal plane device micro-mesa array and method |
| CN101345204A (en) * | 2007-07-13 | 2009-01-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Retaining device and temperature control method for processed body |
| CN101482525A (en) * | 2009-02-05 | 2009-07-15 | 上海交通大学 | High-temperature heating equipment used for orientation texture measurement |
-
2009
- 2009-12-31 CN CN2009102515995A patent/CN101750427B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1437764A (en) * | 2000-07-17 | 2003-08-20 | 东京毅力科创株式会社 | Holding device for treated body |
| CN1603466A (en) * | 2004-11-05 | 2005-04-06 | 哈尔滨工业大学 | Composite plasma surface treatment apparatus |
| CN1741252A (en) * | 2005-09-23 | 2006-03-01 | 中国科学院上海技术物理研究所 | The reactive ion etching equipment of mercury-cadmium-tellurium focal plane device micro-mesa array and method |
| CN101345204A (en) * | 2007-07-13 | 2009-01-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Retaining device and temperature control method for processed body |
| CN101482525A (en) * | 2009-02-05 | 2009-07-15 | 上海交通大学 | High-temperature heating equipment used for orientation texture measurement |
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