CN101711423B - 通过向清洁溶液施加周期性的切变应力清洁半导体晶片表面的方法 - Google Patents

通过向清洁溶液施加周期性的切变应力清洁半导体晶片表面的方法 Download PDF

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Publication number
CN101711423B
CN101711423B CN2008800184169A CN200880018416A CN101711423B CN 101711423 B CN101711423 B CN 101711423B CN 2008800184169 A CN2008800184169 A CN 2008800184169A CN 200880018416 A CN200880018416 A CN 200880018416A CN 101711423 B CN101711423 B CN 101711423B
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CN
China
Prior art keywords
coupling
cleaning agent
particulate
wafer
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008800184169A
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English (en)
Chinese (zh)
Other versions
CN101711423A (zh
Inventor
埃里克·M·弗里尔
约翰·M·德拉里奥斯
迈克尔·拉夫金
米哈伊尔·科罗利克
弗里茨·C·雷德克
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Lam Research Corp
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Lam Research Corp
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Publication date
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Publication of CN101711423A publication Critical patent/CN101711423A/zh
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Publication of CN101711423B publication Critical patent/CN101711423B/zh
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN2008800184169A 2007-04-03 2008-03-27 通过向清洁溶液施加周期性的切变应力清洁半导体晶片表面的方法 Expired - Fee Related CN101711423B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/732,603 2007-04-03
US11/732,603 US20080245390A1 (en) 2007-04-03 2007-04-03 Method for cleaning semiconductor wafer surfaces by applying periodic shear stress to the cleaning solution
PCT/US2008/004033 WO2008123945A1 (en) 2007-04-03 2008-03-27 Method for cleaning semiconductor wafer surfaces by applying periodic shear stress to the cleaning solution

Publications (2)

Publication Number Publication Date
CN101711423A CN101711423A (zh) 2010-05-19
CN101711423B true CN101711423B (zh) 2012-02-01

Family

ID=39825889

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008800184169A Expired - Fee Related CN101711423B (zh) 2007-04-03 2008-03-27 通过向清洁溶液施加周期性的切变应力清洁半导体晶片表面的方法

Country Status (6)

Country Link
US (1) US20080245390A1 (https=)
JP (1) JP5476291B2 (https=)
KR (1) KR101530394B1 (https=)
CN (1) CN101711423B (https=)
TW (1) TW200849351A (https=)
WO (1) WO2008123945A1 (https=)

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US8828145B2 (en) * 2009-03-10 2014-09-09 Lam Research Corporation Method of particle contaminant removal
CA3085086C (en) 2011-12-06 2023-08-08 Delta Faucet Company Ozone distribution in a faucet
TWI595332B (zh) 2014-08-05 2017-08-11 頎邦科技股份有限公司 光阻剝離方法
CN108463437B (zh) 2015-12-21 2022-07-08 德尔塔阀门公司 包括消毒装置的流体输送系统
CN111889451A (zh) * 2020-07-21 2020-11-06 浙江红狮环保股份有限公司 一种超声波清洗塑料桶的方法
CN113201742B (zh) * 2021-04-27 2022-12-30 上海新阳半导体材料股份有限公司 一种化学机械抛光后清洗液的应用

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US5306350A (en) * 1990-12-21 1994-04-26 Union Carbide Chemicals & Plastics Technology Corporation Methods for cleaning apparatus using compressed fluids
US5261966A (en) * 1991-01-28 1993-11-16 Kabushiki Kaisha Toshiba Method of cleaning semiconductor wafers using mixer containing a bundle of gas permeable hollow yarns
US5336371A (en) * 1993-03-18 1994-08-09 At&T Bell Laboratories Semiconductor wafer cleaning and rinsing techniques using re-ionized water and tank overflow
US5464480A (en) * 1993-07-16 1995-11-07 Legacy Systems, Inc. Process and apparatus for the treatment of semiconductor wafers in a fluid
US5472502A (en) * 1993-08-30 1995-12-05 Semiconductor Systems, Inc. Apparatus and method for spin coating wafers and the like
US5656097A (en) * 1993-10-20 1997-08-12 Verteq, Inc. Semiconductor wafer cleaning system
US5417768A (en) * 1993-12-14 1995-05-23 Autoclave Engineers, Inc. Method of cleaning workpiece with solvent and then with liquid carbon dioxide
EP0681317B1 (en) * 1994-04-08 2001-10-17 Texas Instruments Incorporated Method for cleaning semiconductor wafers using liquefied gases
US5451295A (en) * 1994-04-12 1995-09-19 Micron Technology, Inc. Process for removing film from a substrate
US5498293A (en) * 1994-06-23 1996-03-12 Mallinckrodt Baker, Inc. Cleaning wafer substrates of metal contamination while maintaining wafer smoothness
US5834533A (en) * 1996-11-20 1998-11-10 Phillips Petroleum Company Stable liquid suspension compositions
KR100242942B1 (ko) * 1997-01-14 2000-02-01 윤종용 다중 발진 초음파 세정장치
JPH11102881A (ja) * 1997-09-26 1999-04-13 Sharp Corp 基板洗浄方法および基板洗浄装置
KR19990028062A (ko) * 1997-09-30 1999-04-15 김영남 액정기판의 세정방법
JP4011717B2 (ja) * 1998-03-06 2007-11-21 三菱電機株式会社 基板洗浄方法及び基板洗浄装置並びに液晶表示装置及びその製造方法
US20020157685A1 (en) * 2000-09-11 2002-10-31 Naoya Hayamizu Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device
JP2003037096A (ja) * 2001-07-26 2003-02-07 Mitsubishi Electric Corp 半導体製造装置のブラスト処理方法
US20030171239A1 (en) * 2002-01-28 2003-09-11 Patel Bakul P. Methods and compositions for chemically treating a substrate using foam technology
JP4036287B2 (ja) * 2002-05-01 2008-01-23 株式会社カイジョー 超音波洗浄装置
US20040016442A1 (en) * 2002-07-26 2004-01-29 Cawlfield B. Gene Megasonically energized liquid interface apparatus and method
US7648584B2 (en) * 2003-06-27 2010-01-19 Lam Research Corporation Method and apparatus for removing contamination from substrate
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JP4036815B2 (ja) * 2003-10-31 2008-01-23 シャープ株式会社 洗浄装置

Also Published As

Publication number Publication date
KR20100016111A (ko) 2010-02-12
WO2008123945A1 (en) 2008-10-16
JP2010524234A (ja) 2010-07-15
JP5476291B2 (ja) 2014-04-23
US20080245390A1 (en) 2008-10-09
CN101711423A (zh) 2010-05-19
KR101530394B1 (ko) 2015-06-29
TW200849351A (en) 2008-12-16

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SE01 Entry into force of request for substantive examination
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Granted publication date: 20120201

Termination date: 20170327