CN101633442A - 浮起输送装置 - Google Patents

浮起输送装置 Download PDF

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Publication number
CN101633442A
CN101633442A CN200910163948A CN200910163948A CN101633442A CN 101633442 A CN101633442 A CN 101633442A CN 200910163948 A CN200910163948 A CN 200910163948A CN 200910163948 A CN200910163948 A CN 200910163948A CN 101633442 A CN101633442 A CN 101633442A
Authority
CN
China
Prior art keywords
floating
float
mentioned
fluid
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200910163948A
Other languages
English (en)
Chinese (zh)
Inventor
平田贤辅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to CN201210150843.0A priority Critical patent/CN102673939B/zh
Publication of CN101633442A publication Critical patent/CN101633442A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Catching Or Destruction (AREA)
  • Soil Working Implements (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
CN200910163948A 2008-06-09 2009-06-08 浮起输送装置 Pending CN101633442A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210150843.0A CN102673939B (zh) 2008-06-09 2009-06-08 浮起输送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008150957A JP5422925B2 (ja) 2008-06-09 2008-06-09 浮上搬送装置
JP2008150957 2008-06-09

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201210150843.0A Division CN102673939B (zh) 2008-06-09 2009-06-08 浮起输送装置

Publications (1)

Publication Number Publication Date
CN101633442A true CN101633442A (zh) 2010-01-27

Family

ID=41541200

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200910163948A Pending CN101633442A (zh) 2008-06-09 2009-06-08 浮起输送装置
CN201210150843.0A Active CN102673939B (zh) 2008-06-09 2009-06-08 浮起输送装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201210150843.0A Active CN102673939B (zh) 2008-06-09 2009-06-08 浮起输送装置

Country Status (4)

Country Link
JP (1) JP5422925B2 (https=)
KR (1) KR101049872B1 (https=)
CN (2) CN101633442A (https=)
TW (1) TW201010921A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103159028A (zh) * 2011-12-09 2013-06-19 株式会社妙德 悬浮输送单元
WO2025015614A1 (en) * 2023-07-20 2025-01-23 Kateeva Inc. Substrate loading and staging without lift pins

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5604940B2 (ja) * 2010-03-31 2014-10-15 株式会社Ｉｈｉ 浮上搬送装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2004196482A (ja) * 2002-12-18 2004-07-15 Maruyasu Kikai Kk ローラコンベア
JP4626205B2 (ja) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 基板の受渡し方法、及びその装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4780984B2 (ja) * 2005-03-18 2011-09-28 オリンパス株式会社 基板搬送装置
JP4529794B2 (ja) * 2005-05-19 2010-08-25 シンフォニアテクノロジー株式会社 気体浮上搬送装置
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device
JP4842748B2 (ja) * 2006-09-22 2011-12-21 オリンパス株式会社 基板搬送システム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103159028A (zh) * 2011-12-09 2013-06-19 株式会社妙德 悬浮输送单元
CN103159028B (zh) * 2011-12-09 2017-05-03 株式会社妙德 悬浮输送单元
WO2025015614A1 (en) * 2023-07-20 2025-01-23 Kateeva Inc. Substrate loading and staging without lift pins

Also Published As

Publication number Publication date
JP5422925B2 (ja) 2014-02-19
TWI378066B (https=) 2012-12-01
KR20090127818A (ko) 2009-12-14
JP2009292643A (ja) 2009-12-17
KR101049872B1 (ko) 2011-07-15
CN102673939B (zh) 2015-11-04
CN102673939A (zh) 2012-09-19
TW201010921A (en) 2010-03-16

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SE01 Entry into force of request for substantive examination
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RJ01 Rejection of invention patent application after publication

Application publication date: 20100127