CN101618519B - 硅片线切割方法及其装置 - Google Patents
硅片线切割方法及其装置 Download PDFInfo
- Publication number
- CN101618519B CN101618519B CN2008101329190A CN200810132919A CN101618519B CN 101618519 B CN101618519 B CN 101618519B CN 2008101329190 A CN2008101329190 A CN 2008101329190A CN 200810132919 A CN200810132919 A CN 200810132919A CN 101618519 B CN101618519 B CN 101618519B
- Authority
- CN
- China
- Prior art keywords
- steel wire
- guide wheel
- wire
- silicon
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 73
- 239000010703 silicon Substances 0.000 title claims abstract description 73
- 238000005520 cutting process Methods 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 27
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 68
- 239000010959 steel Substances 0.000 claims abstract description 68
- 238000005299 abrasion Methods 0.000 claims abstract description 8
- 238000004804 winding Methods 0.000 claims abstract description 5
- 239000013078 crystal Substances 0.000 claims description 27
- 230000009467 reduction Effects 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000011295 pitch Substances 0.000 abstract description 39
- 230000008901 benefit Effects 0.000 abstract description 13
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 3
- 230000008719 thickening Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 27
- 235000015220 hamburgers Nutrition 0.000 description 8
- 230000006872 improvement Effects 0.000 description 5
- 239000004570 mortar (masonry) Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 101100008050 Caenorhabditis elegans cut-6 gene Proteins 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (2)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008101329190A CN101618519B (zh) | 2008-07-01 | 2008-07-01 | 硅片线切割方法及其装置 |
PCT/CN2009/072132 WO2010000169A1 (zh) | 2008-07-01 | 2009-06-04 | 硅片线切割方法及其装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008101329190A CN101618519B (zh) | 2008-07-01 | 2008-07-01 | 硅片线切割方法及其装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101618519A CN101618519A (zh) | 2010-01-06 |
CN101618519B true CN101618519B (zh) | 2011-09-14 |
Family
ID=41465488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008101329190A Active CN101618519B (zh) | 2008-07-01 | 2008-07-01 | 硅片线切割方法及其装置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN101618519B (zh) |
WO (1) | WO2010000169A1 (zh) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101879759A (zh) * | 2010-04-01 | 2010-11-10 | 浙江硅宏电子科技有限公司 | 一种多线切割机的主辊开槽方法 |
CN101954674A (zh) * | 2010-05-26 | 2011-01-26 | 山东舜亦新能源有限公司 | 一种改良的薄膜硅片切割方法 |
CN101973082B (zh) * | 2010-08-20 | 2015-01-28 | 上海汉虹精密机械有限公司 | 一种定位精确的单晶切方机 |
CN102059749A (zh) * | 2010-12-13 | 2011-05-18 | 天津市环欧半导体材料技术有限公司 | 一种使用直径0.1mm钢线切割硅片的工艺 |
CN102059748A (zh) * | 2010-12-13 | 2011-05-18 | 天津市环欧半导体材料技术有限公司 | 一种使用直径0.11mm钢线切割硅片的工艺 |
JP5590001B2 (ja) * | 2011-10-04 | 2014-09-17 | 信越半導体株式会社 | ワークの切断方法及びワイヤソー |
CN102950659A (zh) * | 2012-10-18 | 2013-03-06 | 江西赛维Ldk太阳能高科技有限公司 | 一种硅块切割装置 |
CN103072211B (zh) * | 2013-02-17 | 2016-04-06 | 英利集团有限公司 | 一种线锯切割方法 |
CN103496043A (zh) * | 2013-10-16 | 2014-01-08 | 内蒙古中环光伏材料有限公司 | 一种太阳能硅片线切割槽轮 |
CN108527507A (zh) * | 2018-05-17 | 2018-09-14 | 海南汇帑实业投资有限公司 | 植物纤维果片(椰纤果)分片、颗粒切割机械及生产工艺 |
CN110561629A (zh) * | 2019-08-27 | 2019-12-13 | 大连昊霖智能装备有限公司 | 一种单晶硅棒开方机中双棒加工用切割头 |
CN111516160B (zh) * | 2020-05-11 | 2022-06-17 | 福建晶安光电有限公司 | 一种多线切割机 |
EP3943265A1 (de) * | 2020-07-21 | 2022-01-26 | Siltronic AG | Verfahren und vorrichtung zum gleichzeitigen abtrennen einer vielzahl von scheiben von einem werkstück |
CN112355811B (zh) * | 2020-11-03 | 2023-04-04 | 自贡硬质合金有限责任公司 | 一种非连贯环槽的加工方法 |
CN113635465A (zh) * | 2021-07-30 | 2021-11-12 | 隆基绿能科技股份有限公司 | 一种硅片切割方法 |
CN114872209A (zh) * | 2021-12-13 | 2022-08-09 | 广东金湾高景太阳能科技有限公司 | 一种提高硅片厚度集中度的切割加工方法 |
CN114734543A (zh) * | 2022-04-29 | 2022-07-12 | 江苏美科太阳能科技股份有限公司 | 一种大尺寸超薄硅片的切割方法 |
CN115489040A (zh) * | 2022-09-21 | 2022-12-20 | 宜春宇泽新能源有限公司 | 一种太阳能级大尺寸薄片化的硅片加工用主辊的开槽方法 |
CN115847639B (zh) * | 2022-12-19 | 2023-09-01 | 江苏茂硕新材料科技有限公司 | 一种用于切割硅片的金刚线用温度测量装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1180328A (zh) * | 1996-02-28 | 1998-04-29 | 东京制纲株式会社 | 钢丝式切断加工装置及方法 |
CN1246397A (zh) * | 1998-09-01 | 2000-03-08 | 住友特殊金属株式会社 | 用钢丝锯切断稀土类合金的方法及稀土类合金板的制造方法 |
CN1727167A (zh) * | 2004-07-29 | 2006-02-01 | 日本碍子株式会社 | 线锯装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10249701A (ja) * | 1997-03-17 | 1998-09-22 | Super Silicon Kenkyusho:Kk | インゴットのワイヤソー切断方法及び装置 |
WO2005095076A1 (en) * | 2004-03-30 | 2005-10-13 | Solaicx, Inc. | Method and apparatus for cutting ultra thin silicon wafers |
GB2414204B (en) * | 2004-05-18 | 2006-04-12 | David Ainsworth Hukin | Abrasive wire sawing |
CN201235584Y (zh) * | 2008-07-01 | 2009-05-13 | 内蒙古晟纳吉光伏材料有限公司 | 硅片线切割装置 |
-
2008
- 2008-07-01 CN CN2008101329190A patent/CN101618519B/zh active Active
-
2009
- 2009-06-04 WO PCT/CN2009/072132 patent/WO2010000169A1/zh active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1180328A (zh) * | 1996-02-28 | 1998-04-29 | 东京制纲株式会社 | 钢丝式切断加工装置及方法 |
CN1246397A (zh) * | 1998-09-01 | 2000-03-08 | 住友特殊金属株式会社 | 用钢丝锯切断稀土类合金的方法及稀土类合金板的制造方法 |
CN1727167A (zh) * | 2004-07-29 | 2006-02-01 | 日本碍子株式会社 | 线锯装置 |
Non-Patent Citations (2)
Title |
---|
JP特开2002-370154A 2002.12.24 |
JP特开平10-249701A 1998.09.22 |
Also Published As
Publication number | Publication date |
---|---|
CN101618519A (zh) | 2010-01-06 |
WO2010000169A1 (zh) | 2010-01-07 |
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GR01 | Patent grant | ||
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Owner name: SHANGHAI JINGMEI ELECTRONIC TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: INNER MOGOLIA SUNNERGY CO., LTD. Effective date: 20140312 |
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Free format text: CORRECT: ADDRESS; FROM: 010080 HOHHOT, INNER MONGOLIA AUTONOMOUS REGION TO: 200062 PUTUO, SHANGHAI |
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TR01 | Transfer of patent right |
Effective date of registration: 20140312 Address after: 200062, room 6, building 36, Xu Hui Century Square, 28 lane, Danba Road, Shanghai, Putuo District, China Patentee after: SHANGHAI JINGMEI ELECTRONIC TECHNOLOGIES CO., LTD. Address before: 010080 Hohhot export processing zone, Jinchuan West Road, the Inner Mongolia Autonomous Region, Hohhot Patentee before: Inner Mongolia Sunnergy Co.,Ltd. |