CN101612032A - A kind of adaptive optics retina imaging system based on bimorph deformable mirror - Google Patents
A kind of adaptive optics retina imaging system based on bimorph deformable mirror Download PDFInfo
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Abstract
Based on the adaptive optics retina imaging system of double-piezoelectric plate deformed reflecting mirror, mainly comprise two double-piezoelectric plate deformed reflecting mirror, Hartmann wave front sensor, CCD camera, and control system.It is characterized in that: two double-piezoelectric plate deformed reflecting mirror adopt different structures, and one of them deformation reflection mirror unit number is less, is used for proofreading and correct the out of focus and the astigmatic image error of big amplitude; Another deformation reflection mirror unit number is more, is used for proofreading and correct the less relatively higher order aberratons of other amplitude.Two deformation reflection mirrors form the structure of cascade compensation in light path.Because the compact conformation of double-piezoelectric plate deformed reflecting mirror, the advantage that correcting value is big can be reduced the volume of existing system greatly and bigger calibration capability is provided; Its relatively low cost also can be reduced the cost of system.
Description
Technical field
The present invention relates to a kind of adaptive optics retina imaging system, a kind of adaptive optics retina imaging system based on bimorph deformable mirror, belong to adaptive optics wavefront correction technical field, be used for the armarium manufacturing technology field of human eye retina's imaging.
Background technology
Eyes are windows of human body, other disease of the disease of eyes itself and human body (as diabetes etc.) can obtain reflection on the optical fundus, so just can carry out early diagnosis to amphiblestroid observation to such disease if can realize.Ophthalmofundoscope is a kind of human eye retina's medical inspection instrument commonly used.But retina is baroque tissue, and because the aberration of each tissue of human eye itself is difficult to realize the high resolution observation of retina cell level fine structure with common ophthalmofundoscope.And adaptive optical technique has the ability of the dynamic wave front aberration of real-time correction, and the aberration of proofreading and correct human eye itself with it just might overcome this restriction, realizes observing near the living human eye retina high resolution of diffraction limit.
United States Patent (USP) 5777719,5949521,6095651,6379005B1,6948818B2 has introduced a kind of adaptive optics retina imaging system, measure human eye aberration with Hartmann wave front sensor, proofread and correct measured aberration, use the CCD imaging then with the discrete deformation reflection mirror of Unit 37, bore Φ 100mm.Though this cover system can obtain retina image-forming, because used deformation reflection mirror bore is too big, it is very huge that the volume of system seems; And the deflection of discrete deformation reflection mirror is more limited, limited system can gauged low order aberration amplitude, be difficult to satisfy the alignment requirements of actual persons aberration.
Chinese patent CN1282564, CN1282565, CN1306796, CN1306797 has introduced other several adaptive optics retina imaging system, mainly adopted technology such as Ze Nike phase-contrast technique and confocal worry glistening light of waves door screen to improve the quality of imaging, but wave-front corrector is not but effectively improved, the calibration capability of the big amplitude aberration of low order still is apparent not enough; Publication number is that the Chinese patent of CN2728418 has been introduced a kind of precompensation device and come the correcting value of increase system to low order aberration, but such device needs the frequent precorrection eyeglass of changing, trivial operations and often can not get ideal calibration result.
United States Patent (USP) 6331059B1 has introduced another kind of adaptive optics retina imaging system, adopt one 18 unitary double-piezoelectric plate deformed reflecting mirror to realize compensation to the low order aberration of big amplitude, the a series of Processing Algorithm of reuse is further improved image quality, but this algorithm flow more complicated and the calibration capability of higher order aberratons also be can not get guaranteeing.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the deficiencies in the prior art, and provide a kind of adaptive optics retina imaging system based on bimorph deformable mirror, this system adopts two small-bore double-piezoelectric plate deformed reflecting mirror as wave-front corrector, has improved the ability of the out of focus of the big amplitude of system compensation and astigmatic image error and has reduced the volume of system.
The technical solution adopted for the present invention to solve the technical problems is: a kind of adaptive optics retina imaging system based on double-piezoelectric plate deformed reflecting mirror comprises: laser instrument, first lens, first reflecting mirror, flash lamp, second lens, first spectroscope, second spectroscope, human eye, the 3rd lens, the 4th lens, first double-piezoelectric plate deformed reflecting mirror, second double-piezoelectric plate deformed reflecting mirror, second reflecting mirror, the 5th lens, the 6th lens, the CCD camera, the 3rd spectroscope, Hartmann wave front sensor, the wavefront Control Computer; Wherein the 3rd lens and the 4th lens are formed a beam expanding telescope, and main effect is that the beacon light beam that will reflect expands consistent size with the first bimorph deformable mirror clear aperture to, and keeps optical conjugate; The 5th lens and the 6th lens are formed the bundle telescope that contracts, and will be narrowed down to the required bore of Hartmann sensor by the light beam that second double-piezoelectric plate deformed reflecting mirror reflects; First double-piezoelectric plate deformed reflecting mirror and second double-piezoelectric plate deformed reflecting mirror adopt the structure of cascade compensation, the correcting unit of two double-piezoelectric plate deformed reflecting mirror is counted difference, the unit number of first double-piezoelectric plate deformed reflecting mirror wherein is less, the unit number of second double-piezoelectric plate deformed reflecting mirror is more, the out of focus and the astigmatic image error that are used for proofreading and correct big amplitude that unit number is few, and unit number many be used for proofreading and correct the less relatively higher order aberratons of other amplitude, the clear aperture of two double-piezoelectric plate deformed reflecting mirror is identical; The output of laser instrument is collimated into directional light behind first lens, behind first reflecting mirror and first spectroscope, second spectroscope, go into to inject tested person's eye again, this restraints incident directional light and focuses on the back at beacon luminous point of optical fundus formation through human eye, this beacon luminous point is by optical fundus retina retroreflection, again via the outgoing of human eye pupil, the outgoing beam of this moment is portable with the aberration information of tested human eye, it also no longer is the directional light before the incident time, but distortion has taken place in wavefront, and degreeof tortuosity is relevant with the aberration of tested human eye; The wavefront of this bundle distortion arrives first double-piezoelectric plate deformed reflecting mirror, second double-piezoelectric plate deformed reflecting mirror through second spectroscope, the 3rd lens, the 4th lens more successively, through second reflecting mirror and the 5th lens and the 6th lens, through the 3rd spectroscope, enter Hartmann wave front sensor again; Hartmann wave front sensor carries out the measurement of sub-aperture wavefront slope to this bundle beacon beam, the collection of wavefront Control Computer also calculates the wavefront slope in each sub-aperture, calculate through wave front restoration and control algolithm again, obtain for the first required double-piezoelectric plate deformed reflecting mirror of compensated wave front-distortion, the control signal of second each driver of double-piezoelectric plate deformed reflecting mirror, this control signal is given high-voltage amplifier, amplify rear drive first double-piezoelectric plate deformed reflecting mirror via high-voltage amplifier, second double-piezoelectric plate deformed reflecting mirror realizes the compensation of wavefront, closed-loop control system makes after the certain repeatedly number of times of this process, it is best that the effect of system compensation reaches, this moment, wavefront Control Computer trigger flashing lamp was through second lens, first spectroscope, second spectroscope illumination retina image-forming zone, the illumination light of retina retroreflection arrives the CCD camera, the picked-up retinal images along the same light path of the aforementioned process of beacon beam and by the reflection of the 3rd spectroscope.
What the structure that described first double-piezoelectric plate deformed reflecting mirror adopts the edge to be completely fixed, the arranging of discrete electrodes adopted is the shape that a central circular electrode adds 8 sector electrodes.
The structure that described second double-piezoelectric plate deformed reflecting mirror adopts the edge to be completely fixed, segmental discrete electrodes are divided into totally 35 on three circles.
The clear aperture of described first double-piezoelectric plate deformed reflecting mirror, second double-piezoelectric plate deformed reflecting mirror is all 20mm.
Shown in first spectroscope and the light path between second spectroscope insert the galvanometer modular device, the deflection angle of controlling X and Y direction galvanometer by wavefront Control Computer 19 is realized the XY scanning direction of imaging region.Control double-piezoelectric plate deformed reflecting mirror by wavefront Control Computer 19 and produce the longitudinal scanning of out of focus distortion realization retinal structure.
The advantage that the present invention is compared with prior art had:
(1) first double-piezoelectric plate deformed reflecting mirror that is adopted among the present invention is more outstanding to the calibration capability of out of focus and astigmatic image error, and second double-piezoelectric plate deformed reflecting mirror has also guaranteed correction accuracy simultaneously;
(2) bore of the double-piezoelectric plate deformed reflecting mirror that adopts has only 20mm among the present invention, and the system that compares the discrete distorting lens that adopts the 40mm bore can reduce the volume of whole system effectively;
(3) bore of two double-piezoelectric plate deformed reflecting mirror that adopted among the present invention is consistent, and the centre does not need the matched lenses group, makes whole system simple in structure, and cost is lower, can reduce the cost of system to a certain extent.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 a is the skiodrome of standard Ze Nike aberration; Fig. 2 b is 109 normal eyes' of Rochester university statistics a Ze Nike aberration profile;
Fig. 3 is the system structure sketch map of United States Patent (USP) 5777719;
Fig. 4 is the structural representation of the used double-piezoelectric plate deformed reflecting mirror of the present invention;
Fig. 5 a is the cell electrode distribution schematic diagram of the used low order double-piezoelectric plate deformed reflecting mirror of the present invention; Fig. 5 b is the cell electrode distribution schematic diagram of the used high-order double-piezoelectric plate deformed reflecting mirror of the present invention; Fig. 5 c is the cell electrode distribution schematic diagram of the possible double-piezoelectric plate deformed reflecting mirror of another kind;
Fig. 6 is a schematic diagram of realizing longitudinal scanning with double-piezoelectric plate deformed reflecting mirror;
Fig. 7 is a schematic diagram of realizing the XY scanning direction of imaging region with galvanometer.
The specific embodiment
As shown in Figure 1, the present invention includes: laser instrument 1, first lens 2, first reflecting mirror 3, flash lamp 4, second lens 5, first spectroscope 6, second spectroscope 7, human eye 8, the 3rd lens 9, the 4th lens 10, first double-piezoelectric plate deformed reflecting mirror 11, second double-piezoelectric plate deformed reflecting mirror 12, second reflecting mirror 13, the 5th lens 14, the 6th lens 15, CCD camera 16, the 3rd spectroscope 17, Hartmann wave front sensor 18, wavefront Control Computer 19, wherein the 3rd lens 9 and the 4th lens 10 are formed a beam expanding telescope, main effect is that the beacon light beam that will reflect expands consistent size with first bimorph deformable mirror, 11 clear apertures to, and keeps optical conjugate; The 5th lens 14 and the 6th lens 15 are formed the bundle telescope that contracts, and will be narrowed down to the required bore of Hartmann sensor 18 by the light beam that second double-piezoelectric plate deformed reflecting mirror 12 reflects; First double-piezoelectric plate deformed reflecting mirror 11 and second double-piezoelectric plate deformed reflecting mirror 12 adopt the structure of cascade compensation, the correcting unit of two double-piezoelectric plate deformed reflecting mirror is counted difference, the unit number of first double-piezoelectric plate deformed reflecting mirror 11 wherein is less, the unit number of second double-piezoelectric plate deformed reflecting mirror 12 is more, the out of focus and the astigmatic image error that are used for proofreading and correct big amplitude that unit number is few, and unit number many be used for proofreading and correct the less relatively higher order aberratons of other amplitude, the clear aperture of two double-piezoelectric plate deformed reflecting mirror is identical; The output of laser instrument 1 is collimated into directional light behind first lens 2, behind first reflecting mirror 3 and first spectroscope 6, second spectroscope 7, go into to inject tested person's eye 8 again, this restraints incident directional light and focuses on the back at beacon luminous point of optical fundus formation through human eye 8, this beacon luminous point is by optical fundus retina retroreflection, again via the outgoing of human eye pupil, the outgoing beam of this moment is portable with the aberration information of tested human eye, it also no longer is the directional light before the incident time, but distortion has taken place in wavefront, and degreeof tortuosity is relevant with the aberration of tested human eye; The wavefront of this bundle distortion arrives first double-piezoelectric plate deformed reflecting mirror 11, second double-piezoelectric plate deformed reflecting mirror 12 through second spectroscope 7, the 3rd lens 9, the 4th lens 10 more successively, through second reflecting mirror 13 and the 5th lens 14 and the 6th lens 15, through the 3rd spectroscope 17, enter Hartmann wave front sensor 18 again; Hartmann wave front sensor 18 carries out the measurement of sub-aperture wavefront slope to this bundle beacon beam, the wavefront slope in each sub-aperture is gathered and calculated to wavefront Control Computer 19, calculate through wave front restoration and control algolithm again, obtain for the first required double-piezoelectric plate deformed reflecting mirror 11 of compensated wave front-distortion, the control signal of second double-piezoelectric plate deformed reflecting mirror, 12 each driver, this control signal is given high-voltage amplifier 20, amplify rear drive first double-piezoelectric plate deformed reflecting mirror 11 via high-voltage amplifier 20, second double-piezoelectric plate deformed reflecting mirror 12 realizes the compensation of wavefront, closed-loop control system makes after the certain repeatedly number of times of this process, it is best that the effect of system compensation reaches, this moment, wavefront Control Computer 19 trigger flashing lamps 4 were through second lens 5, first spectroscope 6, second spectroscope, 7 illumination retina image-forming zones, the illumination light of retina retroreflection arrives CCD camera 16, the picked-up retinal images along the same light path of aforementioned beacon beam process and by 17 reflections of the 3rd spectroscope.
Fig. 2 a is the layout viewing that decomposes human eye aberration Ze Nike aberration commonly used.Wherein the 3rd is the out of focus aberration, and the 4th is the astigmatism of 0 ° of direction, and the 5th is the astigmatism of 45 ° of directions.Fig. 2 b is the statistics of U.S. Rochester university to 109 multistage aberration proportions of normal eye.Wherein out of focus (Defocus) and the shared proportion of astigmatism (Astigmatism) are maximum, and is the most outstanding with out of focus again, and near 3.5 microns, and the shared proportion of other higher order aberratons is much smaller relatively.If consider near-sighted hypermetropia and the more serious patient of astigmatism again, the amplitude of low order aberration is also much bigger so.So in order to be without loss of generality, adaptive optics retina imaging system must will have the correcting value of several microns even tens microns to out of focus, astigmatism etc. when human eye aberration is compensated, and existing systems all is difficult to reach this target.
Concerning system, the pupil of human eye size relative fixed, and the bore of distorting lens is big more, and the reducing and expansion bundle telescope light path that is provided with for the condition that satisfies optical conjugate will be long more, and the volume of whole system is also just big more.So adopt small-bore wave-front corrector, i.e. first double-piezoelectric plate deformed reflecting mirror 11 and second double-piezoelectric plate deformed reflecting mirror 12 volume of reduction system effectively just.First double-piezoelectric plate deformed reflecting mirror 11 among the present invention and the bore of second double-piezoelectric plate deformed reflecting mirror 12 are all 20 millimeters, the middle matched lenses group that does not need the reducing and expansion bundle, second double-piezoelectric plate deformed reflecting mirror 12 just introduced and can not caused being multiplied of light path.
Fig. 3 is the system structure sketch map that United States Patent (USP) 5777719 is adopted.Discrete deformation reflection mirror 118 as unique quilt before corrector, because the construction features of this wave-front corrector causes its stroke very limited, so although the clear aperture of deformation reflection mirror 118 has reached 40 millimeters, its correcting value to out of focus also can not satisfy application requirements far away.Because the deformation reflection mirror clear aperture is bigger, reducing and expansion bundle matching system correspondingly (being made up of lens 120,122 and 112,116 respectively) is also bigger, causes the bulky of system in addition.
Fig. 4 is the structural representation of the double-piezoelectric plate deformed reflecting mirror that adopts of present embodiment, the 1st, and the hollow cylinder microscope base of glass; The 2nd, circular glass mirror surface layer; The 3rd, circular piezoceramics layer; The 4th, at the copper electrode of piezoceramics layer upper surface plating, the zero utmost point during as making alive; The 5th, at the polylith discrete areas copper electrode of piezoceramics layer lower surface plating; During real work, microscope base 1 is fixing, according to the inverse piezoelectric effect of piezoelectric ceramics, adds that on these discrete electrodes certain voltage just can control piezoceramics layer together with the required distortion of specular layer generation, reaches the purpose of compensate for optical aberrations.
Fig. 5 is the cell electrode scattergram of the double-piezoelectric plate deformed reflecting mirror that adopts of present embodiment, Fig. 5 a correspondence be first double-piezoelectric plate deformed reflecting mirror 11 among Fig. 1, be divided into 9 unit: the centre is the electrode of a circle, is divided into 8 sector electrodes of 45 ° all around again.The deflection that divides less relatively unit number to make it to produce is bigger, and is used for proofreading and correct the out of focus and the astigmatic image error of big amplitude.And Fig. 5 b correspondence is second double-piezoelectric plate deformed reflecting mirror 12 among Fig. 1, has divided 35 unit, and the centre is a circular electrode, is divided into 3 circles on every side altogether, and 3 circles are divided into 6,12,16 sector electrodes again respectively equably from inside to outside.For double-piezoelectric plate deformed reflecting mirror, unit number increases correcting value and can decrease, but institute's gauged aberration of energy is also complicated more, so second double-piezoelectric plate deformed reflecting mirror 12 is well suited for proofreading and correct other higher order aberratons except out of focus and astigmatism in the human eye aberration.The uniting correction and can satisfy big amplitude and high-precision system compensation requirement simultaneously of first double-piezoelectric plate deformed reflecting mirror 11 and second double-piezoelectric plate deformed reflecting mirror 12.In the middle dotted line scope of Fig. 5 a and Fig. 5 b is effective clear aperture, is the border circular areas of 20 millimeters of diameters.Because the design of double-piezoelectric plate deformed reflecting mirror is more flexible, and it is diversified that possible cell electrode is arranged, at second double-piezoelectric plate deformed reflecting mirror, Fig. 5 c is the arrangement mode of the cell electrode of another possibility in addition.
In to amphiblestroid imaging process, not only need the imaging of pair cell layer sometimes, also will observe, and vertical degree of depth of this two layers of tissue is different, need system to regulate different focal lengths and come imaging respectively vascular lamina.And the function of focusing can utilize control double-piezoelectric plate deformed reflecting mirror 11 to realize.Fig. 6 is that present embodiment utilizes double-piezoelectric plate deformed reflecting mirror 11 to realize the schematic diagram of the longitudinal scanning of imaging region.Before double-piezoelectric plate deformed reflecting mirror 11 did not produce out of focus distortion, the one-tenth image focus of system was positioned at P point place, and additionally produced after the out of focus distortion that amplitude is D, and the one-tenth image focus of system then is positioned at P ' some place, between the two be the degree of depth of focusing apart from d.20 millimeters clear apertures by 6 millimeters pupil diameter and deformation reflection mirror calculate, and the out of focus distortion that deformation reflection mirror 11 generations are 1 micron can make imaging focal length produce about 75 microns vertical adjusting in retinal tissue.So thereby the extra out of focus distortion that wavefront controller control double-piezoelectric plate deformed reflecting mirror 11 produces just can be embodied as the longitudinal scanning of the successive controlled variation realization of picture depth of focus to the different layers structure of retinal tissue.
In addition, the transverse area of retina imaging system single calibration, imaging is generally at the hundreds of micron.In order to realize to carry out the scanning of X and Y direction to the imaging of big as far as possible retinal area.This can realize that with the mode of vibration mirror scanning operation principle as shown in Figure 7.When the A of the central area of observer's eyes retina, not deflection of galvanometer of directions X and Y direction; When needs are observed other regional retina, directions X galvanometer deflection α angle, Y direction galvanometer deflection β angle, corresponding imaging region has moved to regional A ' by central area A.The deflection angle of the galvanometer of control directions X and Y direction just can be realized the X to imaging region, the scanning of Y direction like this.The galvanometer modular device only need be inserted into first spectroscope 6 shown in Figure 1 and the light path between second spectroscope 7 gets final product, and is controlled the deflection angle of X and Y direction galvanometer equally by wavefront Control Computer 19.
Claims (5)
1, adaptive optics retina imaging system based on double-piezoelectric plate deformed reflecting mirror, it is characterized in that comprising: laser instrument (1), first lens (2), first reflecting mirror (3), flash lamp (4), second lens (5), first spectroscope (6), second spectroscope (7), human eye (8), the 3rd lens (9), the 4th lens (10), first double-piezoelectric plate deformed reflecting mirror (11), second double-piezoelectric plate deformed reflecting mirror (12), second reflecting mirror (13), the 5th lens (14), the 6th lens (15), CCD camera (16), the 3rd spectroscope (17), Hartmann wave front sensor (18), wavefront Control Computer (19), high-voltage amplifier (20), wherein first double-piezoelectric plate deformed reflecting mirror (11) and second double-piezoelectric plate deformed reflecting mirror (12) adopt the structure of cascade compensation, the correcting unit of two double-piezoelectric plate deformed reflecting mirror is counted difference, the unit number of first double-piezoelectric plate deformed reflecting mirror (11) wherein is less, be used for proofreading and correct the out of focus and the astigmatic image error of big amplitude, the unit number of second double-piezoelectric plate deformed reflecting mirror (12) is more, be used for proofreading and correct the less relatively higher order aberratons of other amplitude, the clear aperture of two double-piezoelectric plate deformed reflecting mirror is identical; The output of laser instrument (1) is collimated into directional light behind first lens (2), again through first reflecting mirror (3) and first spectroscope (6), go into to inject tested person's eye (8) behind second spectroscope (7), focus on the back at beacon luminous point of optical fundus formation through human eye (8), this beacon luminous point by optical fundus retina retroreflection via the outgoing of human eye pupil, again successively through second spectroscope (7), the 3rd lens (9), the 4th lens (10) arrive first double-piezoelectric plate deformed reflecting mirror (11), second double-piezoelectric plate deformed reflecting mirror (12), through second reflecting mirror (13) and the 5th lens (14) and the 6th lens (15), through the 3rd spectroscope (17), enter Hartmann wave front sensor (18) again; Hartmann wave front sensor (18) carries out the measurement of sub-aperture wavefront slope to this bundle beacon beam, the wavefront slope in each sub-aperture is gathered and calculated to wavefront Control Computer (19), calculate through wave front restoration and control algolithm again, obtain for required first double-piezoelectric plate deformed reflecting mirror (11) of compensated wave front-distortion, the control signal of each driver of second double-piezoelectric plate deformed reflecting mirror (12), this control signal is given high-voltage amplifier (20) again, amplify rear drive first double-piezoelectric plate deformed reflecting mirror (11) via high-voltage amplifier (20), second double-piezoelectric plate deformed reflecting mirror (12) realizes the compensation of wavefront, closed-loop control system makes after the certain repeatedly number of times of this process, it is best that the effect of system compensation reaches, wavefront Control Computer (19) trigger flashing lamp this moment (4) is through second lens (5), first spectroscope (6), second spectroscope (7) illumination retina image-forming zone, the illumination light of retina retroreflection arrives CCD camera (16), the picked-up retinal images along the same light path of aforementioned beacon beam process and by the 3rd spectroscope (17) reflection.
2, the adaptive optics retina imaging system based on double-piezoelectric plate deformed reflecting mirror according to claim 1, it is characterized in that: what the structure that described first double-piezoelectric plate deformed reflecting mirror (11) adopts the edge to be completely fixed, the arranging of discrete electrodes adopted is the shape that a central circular electrode adds eight sector electrodes.
3, the adaptive optics retina imaging system based on double-piezoelectric plate deformed reflecting mirror according to claim 1, it is characterized in that: the structure that described second double-piezoelectric plate deformed reflecting mirror (12) adopts the edge to be completely fixed, segmental discrete electrodes are divided into totally 35 on three circles.
4, the adaptive optics retina imaging system based on double-piezoelectric plate deformed reflecting mirror according to claim 1 is characterized in that: the clear aperture of described first double-piezoelectric plate deformed reflecting mirror (11), second double-piezoelectric plate deformed reflecting mirror (12) is all 20mm.
5, the adaptive optics retina imaging system based on double-piezoelectric plate deformed reflecting mirror according to claim 1, it is characterized in that: shown in first spectroscope (6) and the light path between second spectroscope (7) insert the galvanometer modular device, control the deflection angle of X and Y direction galvanometer by wavefront Control Computer (19).
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| CN109893083A (en) * | 2019-03-10 | 2019-06-18 | 长兴爱之瞳医疗科技有限公司 | Objective human eye wavefront aberration measurement system and method |
| CN112043232A (en) * | 2020-09-27 | 2020-12-08 | 中国科学院光电技术研究所 | Objective measuring apparatu of adaptive optics people's eye scattering |
| CN114911053A (en) * | 2022-07-14 | 2022-08-16 | 中国科学院长春光学精密机械与物理研究所 | Multi-stage serial system and working method thereof |
| CN114911053B (en) * | 2022-07-14 | 2022-10-28 | 中国科学院长春光学精密机械与物理研究所 | Multi-stage serial system and working method thereof |
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