CN101602273A - A kind of diamond-like carbon film-coating glass and preparation method thereof - Google Patents
A kind of diamond-like carbon film-coating glass and preparation method thereof Download PDFInfo
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- CN101602273A CN101602273A CNA2009100897389A CN200910089738A CN101602273A CN 101602273 A CN101602273 A CN 101602273A CN A2009100897389 A CNA2009100897389 A CN A2009100897389A CN 200910089738 A CN200910089738 A CN 200910089738A CN 101602273 A CN101602273 A CN 101602273A
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Abstract
The invention discloses a kind of diamond-like carbon film-coating glass and preparation method thereof, this diamond-like carbon film-coating glass comprises: glass substrate; Functional film layer is sputtered at glass substrate surface; And the DLC rete, be sputtered at the functional film layer surface, but this functional film layer be the tempered and low-radiation rete, can not tempering low-radiation film layer or solar control film layer, wherein, the outermost material of this function film is Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3The DLC film that coats by the present invention has advantages of higher stability, wearability and oxidative resistance, in the process of glass transportation, storage, play the effect that prevents to scratch, delay oxidation, and, adhesive force is good between this diamond-film-like layer and the functional film layer, and it does not corrode mutually, reacts with other rete, and is volatilizable through Technology for Heating Processing.
Description
Technical field
The present invention relates to the coated glass technical field, relate in particular to a kind of diamond-like carbon film-coating glass and preparation method thereof.
Background technology
At present; coated glass is because its good performance has obtained application widely in every field; yet; it is in the process of transportation and storage; the substrate rete scratches easily, weares and teares; and; the easy oxidation of its silver layer, in addition, coated glass is carrying out various cold working and heat treatment; as section, edging; after interlayers etc. were handled, physical and chemical performance changed easily, at this problem; the organic pad pasting protection of present domestic most of glass deep processing use PE of enterprise substrate rete, it can play the certain protection effect.Yet, when using substrate, need manually take off film, this diaphragm can not reuse and be difficult for degraded, and use can cause a large amount of solid waste in batches, and this has caused serious negative effect to environment.
Therefore, it is imperative for this area to find a kind of suitable environment-friendly materials to substitute the PE organic protective film.
Summary of the invention
The object of the present invention is to provide a kind of diamond-like carbon film-coating glass and preparation method thereof, need manually take off film, be difficult for degraded and cause the defective of a large amount of solid waste to overcome existing PE organic protective film.
For achieving the above object, the present invention proposes a kind of diamond-like carbon film-coating glass, comprising: glass substrate; Functional film layer is sputtered at glass substrate surface; And the DLC rete, be sputtered at the functional film layer surface.
Wherein, but this functional film layer be the tempered and low-radiation rete, can not tempering low-radiation film layer or solar control film layer.
Wherein, preferably, the outermost material of this function film is Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3
Wherein, the outermost thickness of this functional film layer is preferably 10～120nm.
Wherein, the material of this diamond-film-like layer is preferably C or CN
4
Wherein, the thickness of this diamond-film-like layer is preferably 5～40nm, is more preferred from 10～30nm, and the best is 15～20nm.
And for achieving the above object, the present invention proposes a kind of preparation method of diamond-like carbon film-coating glass, may further comprise the steps:
Step 1 a: glass substrate is provided;
Step 2: in glass substrate surface deposition functional film layer;
Step 3: at this functional film layer surface deposition one DLC rete.
Wherein, the depositional mode in this step 2 and the step 3 is a magnetron sputtering deposition.
Preferably, this magnetron sputtering deposition is 10 at vacuum progression
-610
-3Under the work atmosphere of mbar level, in argon gas atmosphere, be under the condition of 1200sccm at argon flow amount and under the sputtering power of 8KW, carry out.
Wherein, but this functional film layer be the tempered and low-radiation rete, can not tempering low-radiation film layer or solar control film layer.
Preferably, the outermost material of this function film is Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3
Wherein, the outermost deposit thickness of this functional film layer is 10～120nm.
Wherein, the material of this diamond-film-like layer is preferably C or CN
4
Wherein, the thickness of the deposition of this diamond-film-like layer is preferably 5～40nm.
Wherein, in step 2, the employed target of outermost layer that deposits this functional film layer or this function film is preferably Si, SiAl, and Ti, Zn, Sn, ZnAl, ZnSn, the internal layer of this functional film layer can comprise TiO
2Layer, NiCr layer, Ag layer, Cu layer, SiO
2Layer, ZnO layer, SnZnO
3The film material that layer etc. are conventional.
Wherein, in step 3, the target that deposits this diamond-film-like layer is preferably graphite.
Diamond-like carbon film-coating glass provided by the present invention and preparation method thereof; because DLC film has high rigidity and non-oxidizability is strong; this rete can be avoided a series of problems of the organic pad pasting of PE; this film plays good protection effect to the substrate rete; in the process of transportation and storage, can prevent that the substrate rete from scratching, delaying the silver layer oxidation rate.And the present invention adopts the magnetron sputtering mode to prepare, and is coated with rete and has advantages such as hardness height, face outward appearance be even, and and adhesive force is good between the functional film layer, and simultaneously, the substrate that is coated with this rete still can carry out various cold working and heat treatment, as section, edging, interlayer, close double glazing etc.In addition, this film can pass through heat treatment modes such as tempering, half tempered or curved tempering to be removed, and removes meron and recovers original film layer structure and performance.
Description of drawings
Fig. 1 is the simple structure schematic diagram of diamond-like carbon film-coating glass of the present invention;
Fig. 2 is the structural representation of the diamond-like carbon film-coating glass of the embodiment of the invention 1;
Fig. 3 is the structural representation of the diamond-like carbon film-coating glass of the embodiment of the invention 2;
Fig. 4 is the structural representation of the diamond-like carbon film-coating glass of the embodiment of the invention 3;
Fig. 5 is the structural representation of the diamond-like carbon film-coating glass of the embodiment of the invention 4;
Fig. 6 is the schematic flow sheet of diamond-like carbon film-coating method for glass preparation of the present invention.
Wherein, Reference numeral:
100: glass substrate 200: functional film layer
300: the DLC rete
0: glass substrate
1: functional film layer
2:Si
3N
4Layer 3,6,9,12: DLC rete
4: functional film layer 5:SiO
2Layer
7: functional film layer 8:TiO
2Layer
10: functional film layer 11:SnZnO
3Layer
The specific embodiment
The present invention has set forth a kind of guard method of coated glass; promptly the outer surface at coated glass is coated with one deck DLC film; DLC (diamond-like carbon; abbreviation DLC) the carbon atom key of film mainly exists with sp2 and two kinds of hybrid forms of sp3; graphite is the metastable state structure that contains the sp3 key in the amorphous carbon; its optical transmittance, hardness, refractive index and diamond are very approaching; its chemical inertness and resistance to corrosion are used for the outermost layer of substrate, can play the effect of moistureproof and anti-chemical reagent corrosion.In addition, this film has lower film-forming temperature, atom smooth surface and bigger hardness, and therefore, DLC film is easy to evenly and the large tracts of land sputtering sedimentation, has advantages of higher stability after being coated with film forming, can satisfy suitability for industrialized production.After the outer surface of coated glass is coated with one deck DLC film, at wearability, anti-scratch, delay aspects such as oxidization time and protect original film layer structure.And this rete can be by the adjusting of thickness, and the control color value changes, and makes the bulk glass appearance color unaffected.After rete is coated with, in transportation, can save the safeguard measure between the glass, as pearl cotton, corrugated paper etc.
Based on above-mentioned, the invention provides a kind of diamond-like carbon film-coating glass, Fig. 1 as shown in Figure 1, comprising: glass substrate 100 for the simple structure schematic diagram of diamond-like carbon film-coating glass of the present invention; Functional film layer 200 is sputtered at glass substrate surface; And DLC rete 300, be sputtered at the functional film layer surface.
Wherein, but this functional film layer 200 be the tempered and low-radiation rete, can not tempering low-radiation film layer or solar control film layer.
Preferably, the outermost material of this function film is Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3And the best is Si for the outermost layer material
3N
4, because behind its tempering, the DLC layer promptly can be removed, its surface without any color distortion, do not have the mutual intrusion between the rete, and a Si yet
3N
4Adhesive force between layer and the C layer is stronger.
Preferably, the outermost thickness of this functional film layer is 10～120nm.
Wherein, this diamond-film-like layer 300 is sputtered at the outermost layer of coated glass, and this film material is C or CN
4, and C more preferably.
Wherein, these diamond-film-like layer 300 preferred thickness are 5-40nm, and more preferably thickness is 10-30nm, and most preferred thickness is 15-20nm.
Wherein, this CN
4The rete preferred thickness is 5-40nm, and more preferably thickness is 10-30nm, and most preferred thickness is 15-20nm.
The present invention is coated with one deck DLC film at the outer surface of coated glass; at wearability, anti-scratch, delay aspects such as oxidization time and protect original film layer structure, it can compare explanation by the data that the coated glass of coating diamond-like layer and not gold-plated hard rock layer is tested through modes such as salt fog, grinding, outdoor exposure.
Can show in the following table that the plating graphite linings changes by the value that sees through that the Abraser grinder grinds front and back, wherein:
1 is the common radiation coated glass capable of being toughened of plating diamond rete not;
2 is the radiation coated glass capable of being toughened of plating diamond rete.
Numeric ratio before and after table 1 ground
| Revolution | Before the T mill/% | T mill back (mean value)/% | |
|
| 1 | 50 | 57.86 | 56.50 | -1.36 |
| 2 | 50 | 56.62 | 56.26 | -0.36 |
| 2 | 100 | 56.65 | 55.80 | -0.85 |
| 2 | 200 | 56.54 | 57.10 | 0.56 |
No matter we be 50 to change or 200 change as can be seen from table 1, and the plating diamond rete is all well below the radiation coated glass capable of being toughened of coating diamond-like rete not.
Table 2 compares its wearability for being coated with the DLC rete of different-thickness μ, wherein:
1：μ＝35nm 2：μ＝20nm 3：μ＝15nm 4：μ＝6nm
The anti-wear performance of table 2 different-thickness relatively
| Revolution | Before the T mill/% | T mill back (mean value)/% | |
|
| 1 | 100 | 51.68 | 51.98 | 0.30 |
| 1 | 200 | 51.79 | 53.53 | 1.74 |
| 2 | 100 | 53.47 | 52.18 | -1.29 |
| 2 | 200 | 53.68 | 53.66 | -0.02 |
| 3 | 100 | 54.86 | 55.56 | 0.70 |
| 3 | 200 | 55.04 | 54.30 | -0.74 |
| 4 | 100 | 56.65 | 55.80 | -0.85 |
| 4 | 200 | 56.54 | 57.10 | 0.56 |
From table 2, we are not that rete is thick more as can be seen, and its wearability is just good more.In the print 1, when the DLC thicknesses of layers was 35nm, it is relatively poor relatively that its wearability just shows when 200 change, and when the DLC thicknesses of layers was 15～20nm, its effect can reach reasonable effect on the contrary.Therefore the DLC rete wants to reach optimum efficiency, and takes all factors into consideration stock utilization, and thickness most preferably is 15～20nm.
Following table is the salt spray test record, further verifies the effect of DLC rete aspect oxidation resistance.
The diamond-film-like oxidization time of table 3 different-thickness
| DLC thicknesses of layers/nm | Rete begins the |
|
| 1 | 0 | 3 |
| 2 | 5 | 6 |
| 3 | 10 | 8 |
| 4 | 15 | 13 |
| 5 | 20 | 12 |
| 6 | 25 | 9 |
| 7 | 30 | 10 |
Also as can be seen, have the substrate of DLC rete from table 3, its oxidation resistance obviously strengthens.In addition, for glass substrate, be not that the DLC rete is thick more with DLC rete, its antioxygenic property effect is best, and thickness is the DLC film of 15nm～20nm, has reached best effect aspect antioxygenic property.
Above-mentioned three forms can draw, and the DLC thicknesses of layers is 15-20nm most preferably.
In addition, the invention provides the preparation method of this diamond-like carbon film-coating glass, Fig. 6 is the schematic flow sheet of diamond-like carbon film-coating method for glass preparation of the present invention, and as shown in Figure 6, this method may further comprise the steps:
Step 1: glass substrate is provided;
Step 2: in glass substrate surface deposition functional film layer;
Step 3: at this functional film layer surface deposition one DLC rete.
Wherein, in this step 2 and the step 3, technological parameter for depositing operation and depositing operation does not have concrete restriction, wherein, the multiple known deposition process that can deposit each rete can be selected for use, for example, chemical vapour deposition (CVD) and cathodic arc evaporation mode deposition etc., embodiment deposits all retes with magnetically controlled sputter method in the present invention.Simultaneously, for forming the multiple known deposition process that comprises magnetron sputtering of the present invention, those skilled in the art have the ability to select suitable deposition process parameters according to the composition and the thickness of target rete fully.Wherein technological parameter comprises sputtering atmosphere, sputter vacuum, target material, sputtering power and the sputtering time etc. that may relate in the magnetron sputtering for example.Therefore, the relevant depositing operation that provides in this manual and the selection of parameter thereof are exemplary, are not construed as limiting the invention.
And, magnetron sputtering deposition mode preferred for this invention, this magnetron sputtering deposition is under the work atmosphere of 10-6～10-3mbar level at vacuum progression, in argon gas atmosphere, is under the condition of 1200sccm at argon flow amount and carries out under the sputtering power of 8KW.
Wherein, in the step 2, but this rete can be the low radiation coated glass rete of tempering, low radiation coated glass rete or sunlight controlling coated glass rete that can not tempering.
Wherein, when this functional film layer was individual layer, its rete material was preferably Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3When this functional film layer was multilayer, its internal layer can comprise TiO
2Layer, NiCr layer, Ag layer, Cu layer, SiO
2Layer, ZnO layer, SnZnO
3The film material that layer etc. are conventional, its outermost material is preferably Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3, the best is Si
3N
4And, in the magnetron sputtering deposition process of step 2, deposit this functional film layer or the employed target of this function film outermost layer is Si, SiAl, Ti, Zn, Sn, ZnAl, ZnSn, and the outermost deposit thickness of this functional film layer is preferably 10～120nm.
Wherein, the material of this diamond-film-like layer is C or CN
4, in step 3, the target of this diamond-film-like layer of magnetron sputtering deposition is that purity is 99.99% graphite target, sputter obtains C or CN
4Rete as the outermost layer of coated glass, has characteristics such as anti-scratch, oleophobic, waterproof, and in following process, film layer structure can well be protected.And the thickness that deposits the deposition of this diamond-film-like layer is preferably 5～40nm, is more preferred from 10-30nm, and the best is 15-20nm.
DLC protective film provided by the present invention can be removed by the above heat treatment of 650 degree, more preferably more than 670 degree, most preferably is more than 690 degree.After Overheating Treatment, the removal of can volatilizing of DLC rete, substrate recovers original film layer structure and performance.But these characteristics can be used for the protection of radiation coated glass capable of being toughened and tempering sunlight controlling coated glass rete.
In addition, this rete also can be applied in non-heat-treatable low radiation coated glass glass, improves the wearability of the structure of dawdling, and prevents to scratch, and delays the silver layer oxidization time.
The coated glass of doing the outermost layer protection by the DLC layer of the present invention; its substrate can be any coated glass glass; for example Dan Yin, two silver and three silver medal glass; but tempering or low radiation coated glass that can not tempering; also can be sunlight control type coated glass, in other words, this substrate can directly be above-mentioned various coated glass; and at this direct plating diamond film in coated glass surface, to prepare this diamond-like carbon film-coating glass.That is, the preparation method of DLC film comprises step:
1, provides glass substrate.This substrate can be low radiation coated glass, sunlight controlling coated glass and relevant various coated glasses;
2, on this substrate, deposition one deck DLC film.
Wherein, an optimal way of the present invention is coated glass glass outermost layer is Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, materials such as ZnO, one most preferably mode be that the outermost layer of its former coated glass glass is Si
3N
4Because behind its tempering, the DLC layer promptly can be removed, its surface without any color distortion, do not have the mutual intrusion between the rete, and a Si yet
3N
4Adhesive force between layer and the C layer is stronger.
Be the method that the example explanation prepares DLC film in the magnetron sputtering mode below.
At first, provide glass substrate, and optionally glass substrate is polished and cleans, polishing and the concrete mode of cleaning are well known to those skilled in the art, and do not specify here.
Secondly, with the glass substrate magnetron sputtering chamber of packing into, prepare magnetron sputtering chamber, the base vacuum degree of magnetron sputtering chamber is preferably 10
-6-10
-5The work atmosphere of mbar level.
Then, the needed functional film layer of sputter on glass substrate, but comprise tempering and low-radiation film layer and solar control film layer that can not tempering, wherein the target of this rete outermost layer material is preferably Si, SiAl, Ti, Zn, Sn, ZnAl, ZnSn, more preferably Si.
At last, plating diamond film on this functional film layer deposits the employed target of this rete and is preferably graphite, and its purity is 99.99%.
For this DLC film, can satisfy following processing request, after handling through following processing, its every property retention is constant:
1) substrate behind the sputtering sedimentation DLC rete can satisfy machinery or artificial cutting, processing such as corase grind or correct grinding, and its glass optical property is constant substantially, and defective such as surface no any scuffing rete erosion, and it protects effect unaffected.
2) substrate behind the sputtering sedimentation DLC rete can satisfy face and walks towards roller-way, and its glass optical property is constant substantially, and vestiges such as the no any scuffing in surface, roller-way seal, still possesses the face protective value.
3) substrate behind the sputtering sedimentation DLC rete can satisfy hot-working such as tempering, half tempered and curved tempering, the volatilization voluntarily after Overheating Treatment of DLC film this moment, the original film layer structure of substrate is constant, physical and chemical performance originally remains unchanged, can carry out various following process, as interlayer, hollow etc.
In an embodiment of the invention, DLC film can use on common coated glass, and the membrane stratiform condition is good after technologies such as section, edging, and optical property and thermal property remain unchanged substantially.
In the present invention, the optical property of coated glass is the ColorQuest XE optical instrument mensuration that U.S. Hunter Lab company produces, and color parameter is for pressing the definition of international practice to chrominance space.The instrument that uses for the mensuration of DLC thicknesses of layers among the present invention is Semiconductor institute, Chinese Academy of Sciences's step tester.
To face cover glass of the present invention be described by specific embodiment below; need to prove; though thicknesses of layers in an embodiment and optical parametric are a number range; but it will be appreciated by those skilled in the art that this scope only produces owing to the inevitable inhomogeneities of rete and error.
The present invention adopts conventional vacuum magnetic-control sputtering equipment preparation, and it is 10 that the vacuum progression after feeding process gas guarantees
-3Under the condition of the work atmosphere of mbar level, use former fresh of (date of manufacture is no more than two months) architectural grade float glass process to be coated with.
As Fig. 2, on glass substrate 0, be coated with multilayer functional film layer 1, the internal layer of this functional film layer can comprise TiO
2Layer, NiCr layer, Ag layer, Cu layer, SiO
2Layer, ZnO layer, SnZnO
3The film material that layer etc. are conventional, and be coated with Si outer 2
3N
4, form Si
3N
4Layer, its sputter thickness can be 10-120nm.
DLC rete 3: at Si
3N
4Graphite target is used in the outside of layer, in argon gas atmosphere, is under the condition of 1200sccm at argon flow amount, and under the sputtering power of 8KW, sputter thickness is the oxide skin(coating) C of 15-20nm.
Behind the plating diamond film, the wearability and the antioxygenic property of substrate obviously improve.
The variation of table 4 deposition C layer color value
| T | Rg | Lg | a*g | b*g | Rf | Lf | a*f | b*f | |
| No C | 58.09 | 18.09 | 49.61 | -3.37 | -5.22 | 4.25 | 24.49 | 5.84 | -30.42 |
| C is arranged | 54.81 | 17.90 | 49.37 | -4.13 | -2.24 | 3.48 | 21.86 | 4.18 | -28.25 |
See through before and after table 5 deposition C layer grinds and change
Salt fog oxidization time before and after the table 6 plating C layer
| Oxidation point time/sky appears in salt fog | |
| No C | 4 |
| C is arranged | 13 |
Color value relatively before and after table 7 tempering
| T | Rg | Lg | a*g | b*g | Rf | Lf | a*f | b*f | |
| No C | 60.23 | 15.20 | 45.91 | -2.80 | -5.43 | 3.41 | 21.62 | 8.68 | -22.06 |
| C is arranged | 60.34 | 14.87 | 45.45 | -2.47 | -5.60 | 3.09 | 20.41 | 9.95 | -21.71 |
The present invention adopts conventional vacuum magnetic-control sputtering equipment preparation, and it is 10 that the vacuum progression after feeding process gas guarantees
-3Under the condition of the work atmosphere of mbar level, use former fresh of (date of manufacture is no more than two months) architectural grade float glass process to be coated with.
As Fig. 3, on glass substrate 0, be coated with one deck or multilayer functional film layer 4, comprise SnO
2Layer, SiO
2Layer, TiO
2Layer is coated with SiO outer 5
2Layer, its sputter thickness can be 20-110nm.
The outermost layer protective film, promptly the DLC rete 6: at SiO
2Graphite target is used in the outside of layer, in argon gas atmosphere, is under the condition of 1200sccm at argon flow amount, and under the sputtering power of 8KW, sputter thickness is the oxide skin(coating) C of 15-20nm.Behind the plating diamond film, the wearability and the antioxygenic property of substrate obviously improve.
The variation of color value before and after the table 8 deposition C layer
| T | Rg | Lg | a*g | b*g | Rf | Lf | a*f | b*f | |
| No C | 92.91 | 4.81 | 26.17 | 3.62 | -8.96 | 4.44 | 25.08 | 3.16 | -9.37 |
| C is arranged | 87.87 | 7.90 | 20.37 | -5.15 | -6.24 | 6.08 | 23.87 | 4.15 | -5.25 |
See through before and after table 9 deposition C layer grinds and change
Salt fog oxidization time before and after the table 10 plating C layer
| Oxidation point time/sky appears in salt fog | |
| No C | 194 |
| C is arranged | Place the back non-oxidation |
Color value relatively before and after table 11 tempering
| T | Rg | Lg | a*g | b*g | Rf | Lf | a*f | b*f | |
| No C | 93.01 | 4.86 | 26.66 | 3.90 | -8.50 | 4.74 | 25.75 | 3.50 | -9.21 |
| C is arranged | 93.31 | 4.91 | 26.97 | 3.88 | -8.63 | 4.80 | 25.33 | 3.13 | -9.29 |
Embodiment 3
The present invention adopts conventional vacuum magnetic-control sputtering equipment preparation, and it is 10 that the vacuum progression after feeding process gas guarantees
-3Under the condition of the work atmosphere of mbar level, use former fresh of (date of manufacture is no more than two months) architectural grade float glass process to be coated with.
As Fig. 4, on glass substrate 0, be coated with one deck or multilayer functional film layer 7, comprise Cr layer, SnZnO
3Layer, the skin 8 of its glass function rete is TiO
2Layer, its sputter thickness can be 10-100nm.
The outermost layer protective film, promptly the DLC rete 9: at TiO
2Graphite target is used in the outside of layer, in argon gas atmosphere, is under the condition of 1200sccm at argon flow amount, and under the sputtering power of 8KW, sputter thickness is the oxide skin(coating) C of 15-20nm.
Behind the plating diamond film, the wearability and the antioxygenic property of substrate obviously improve.
The variation of color value before and after the table 12 deposition C layer
| T | Rg | Lg | a*g | b*g | Rf | Lf | a*f | b*f | |
| No C | 47.41 | 5.45 | 27.99 | 10.38 | -11.99 | 24.80 | 56.88 | 5.32 | 5.27 |
| C is arranged | 50.21 | 5.90 | 29.37 | 10.13 | -12.24 | 23.48 | 57.89 | 5.18 | 5.25 |
See through before and after table 13 deposition C layer grinds and change
Salt fog oxidization time before and after the table 14 plating C layer
| Oxidation point time/sky appears in salt fog | |
| No C | 5 |
| C is arranged | 13 |
The present invention adopts conventional vacuum magnetic-control sputtering equipment preparation, and it is 10 that the vacuum progression after feeding process gas guarantees
-3Under the condition of the work atmosphere of mbar level, use former fresh of (date of manufacture is no more than two months) architectural grade float glass process to be coated with.
As Fig. 5, on glass substrate 0, be coated with one deck or multilayer functional film layer 10, comprise SnZnO
3Layer, NiCr layer, Ag layer, its glass function rete skin is coated with SnZnO
3, form SnZnO
3Layer 11, its sputter thickness can be 10-120nm.
The outermost layer protective film, promptly the DLC rete 12: at SnZnO
3Graphite target is used in the outside of layer, in argon gas atmosphere, is under the condition of 1200sccm at argon flow amount, and under the sputtering power of 8KW, sputter thickness is the oxide skin(coating) C of 15-20nm.
Behind the plating diamond film, the wearability and the antioxygenic property of substrate obviously improve.
The variation of color value before and after the table 15 deposition C layer
| T | Rg | Lg | a*g | b*g | Rf | Lf | a*f | b*f | |
| No C | 36.37 | 23.83 | 55.92 | -1.74 | -8.58 | 11.54 | 40.47 | 4.83 | 22.57 |
| C is arranged | 42.10 | 19.90 | 59.39 | -2.13 | -9.24 | 9.72 | 41.86 | 4.18 | 24.25 |
See through before and after table 16 deposition C layer grinds and change
Salt fog oxidization time before and after the table 17 plating C layer
| Oxidation point time/sky appears in salt fog | |
| No C | 3 |
| C is arranged | 14 |
Color value relatively before and after table 18 tempering
| T | Rg | Lg | a*g | b*g | Rf | Lf | a*f | b*f | |
| No C | 36.37 | 23.83 | 55.92 | -1.74 | -8.58 | 11.54 | 40.47 | 4.83 | 22.57 |
| C is arranged | 36.10 | 24.90 | 56.39 | -2.03 | -8.24 | 11.72 | 41.86 | 4.68 | 23.25 |
Effect of the present invention:
Diamond-like carbon film-coating glass provided by the present invention and preparation method thereof; this DLC film is coated on the substrate outermost layer; because DLC film has high rigidity and non-oxidizability is strong; this film plays good protection effect for substrate retes such as low radiation coated glass and sunlight control type coated glasses; be in particular in that this DLC film can improve the wearability of substrate; delay oxidization time; in the process of transportation and storage, can prevent that the substrate rete from scratching, delaying the silver layer oxidation rate.And the substrate that is coated with this rete still can carry out various cold working and heat treatment, as section, edging, interlayer, closes double glazing etc., does not influence the original physical and chemical performance of substrate.In addition, this film can pass through heat treatment mode volatilizations such as tempering, half tempered or curved tempering to be removed, and removes meron and recovers original film layer structure and performance.Compare with the organic pad pasting protected mode of the PE of routine, this rete has favorable environment protection, has a wide range of applications in the coated glass industry.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (18)
1, a kind of diamond-like carbon film-coating glass is characterized in that, comprising:
Glass substrate;
Functional film layer is sputtered at glass substrate surface; And
The DLC rete is sputtered at the functional film layer surface.
2, diamond-like carbon film-coating glass according to claim 1 is characterized in that, but this functional film layer be the tempered and low-radiation rete, can not tempering low-radiation film layer or solar control film layer.
3, diamond-like carbon film-coating glass according to claim 1 and 2 is characterized in that, this functional film layer or the outermost material of this function film are Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3
4, diamond-like carbon film-coating glass according to claim 3 is characterized in that, the outermost thickness of this functional film layer is 10～120nm.
5, diamond-like carbon film-coating glass according to claim 1 is characterized in that, the material of this diamond-film-like layer is C or CN
4
6, diamond-like carbon film-coating glass according to claim 5 is characterized in that, the thickness of this diamond-film-like layer is 5～40nm.
7, diamond-like carbon film-coating glass according to claim 6 is characterized in that, the thickness of this diamond-film-like layer is 10～30nm.
8, diamond-like carbon film-coating glass according to claim 7 is characterized in that, the thickness of this diamond-film-like layer is 15～20nm.
9, a kind of preparation method of diamond-like carbon film-coating glass is characterized in that, may further comprise the steps:
Step 1 a: glass substrate is provided;
Step 2: in glass substrate surface deposition functional film layer;
Step 3: at this functional film layer surface deposition one DLC rete.
10, the preparation method of diamond-like carbon film-coating glass according to claim 9 is characterized in that, the depositional mode in this step 2 and the step 3 is a magnetron sputtering deposition.
11, the preparation method of diamond-like carbon film-coating glass according to claim 10 is characterized in that, this magnetron sputtering deposition is 10 at vacuum progression
-6～10
-3Under the work atmosphere of mbar level, in argon gas atmosphere, be under the condition of 1200sccm at argon flow amount and under the sputtering power of 8KW, carry out.
12, the preparation method of diamond-like carbon film-coating glass according to claim 9 is characterized in that, but this functional film layer be the tempered and low-radiation rete, can not tempering low-radiation film layer or solar control film layer.
According to the preparation method of any described diamond-like carbon film-coating glass in the claim 9 to 12, it is characterized in that 13, this functional film layer or the outermost material of this function film are Si
3N
4, Ti
3N
4, TiO
2, SnO
2, SiO
2, ZnO or SnZnO
3
14, the preparation method of diamond-like carbon film-coating glass according to claim 13 is characterized in that, the outermost deposit thickness of this functional film layer is 10～120nm.
15, the preparation method of diamond-like carbon film-coating glass according to claim 9 is characterized in that, the material of this diamond-film-like layer is C or CN
4
16, the preparation method of diamond-like carbon film-coating glass according to claim 15 is characterized in that, the thickness of the deposition of this diamond-film-like layer is 5～40nm.
17, the preparation method of diamond-like carbon film-coating glass according to claim 13 is characterized in that, in step 2, deposits this functional film layer or the employed target of this function film outermost layer is Si, SiAl, Ti, Zn, Sn, ZnAl, ZnSn.
18, the preparation method of diamond-like carbon film-coating glass according to claim 15 is characterized in that, in step 3, the target that deposits this diamond-film-like layer is a graphite.
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|---|---|---|---|
| CNA2009100897389A CN101602273A (en) | 2009-07-22 | 2009-07-22 | A kind of diamond-like carbon film-coating glass and preparation method thereof |
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Family
ID=41468233
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