CN101599413B - 准分子灯 - Google Patents

准分子灯 Download PDF

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Publication number
CN101599413B
CN101599413B CN200910141045XA CN200910141045A CN101599413B CN 101599413 B CN101599413 B CN 101599413B CN 200910141045X A CN200910141045X A CN 200910141045XA CN 200910141045 A CN200910141045 A CN 200910141045A CN 101599413 B CN101599413 B CN 101599413B
Authority
CN
China
Prior art keywords
accumulation body
silicon dioxide
lamp
area
excimer lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200910141045XA
Other languages
English (en)
Chinese (zh)
Other versions
CN101599413A (zh
Inventor
松泽聪司
森本幸裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of CN101599413A publication Critical patent/CN101599413A/zh
Application granted granted Critical
Publication of CN101599413B publication Critical patent/CN101599413B/zh
Active legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
    • H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
    • H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
CN200910141045XA 2008-06-06 2009-05-18 准分子灯 Active CN101599413B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008149060 2008-06-06
JP2008149060A JP5245552B2 (ja) 2008-06-06 2008-06-06 エキシマランプ
JP2008-149060 2008-06-06

Publications (2)

Publication Number Publication Date
CN101599413A CN101599413A (zh) 2009-12-09
CN101599413B true CN101599413B (zh) 2013-08-14

Family

ID=41420799

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200910141045XA Active CN101599413B (zh) 2008-06-06 2009-05-18 准分子灯

Country Status (4)

Country Link
JP (1) JP5245552B2 (ko)
KR (1) KR101246481B1 (ko)
CN (1) CN101599413B (ko)
TW (1) TWI431659B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5151816B2 (ja) * 2008-08-29 2013-02-27 ウシオ電機株式会社 エキシマランプ
CN102097282A (zh) * 2010-11-30 2011-06-15 王颂 无极准分子灯及其应用
US11887835B2 (en) * 2021-08-10 2024-01-30 Kla Corporation Laser-sustained plasma lamps with graded concentration of hydroxyl radical

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1083793A (ja) * 1996-09-11 1998-03-31 Toshiba Lighting & Technol Corp 高圧放電ランプおよび照明装置
JP3346291B2 (ja) * 1998-07-31 2002-11-18 ウシオ電機株式会社 誘電体バリア放電ランプ、および照射装置
JP3591470B2 (ja) * 2001-03-19 2004-11-17 ウシオ電機株式会社 放電ランプ
JP4048998B2 (ja) * 2003-04-15 2008-02-20 ウシオ電機株式会社 ランプ及び紫外光照射装置
JP2006221984A (ja) * 2005-02-10 2006-08-24 Matsushita Electric Ind Co Ltd 蛍光ランプの製造方法および蛍光ランプ
JP4857939B2 (ja) * 2006-06-19 2012-01-18 ウシオ電機株式会社 放電ランプ
JP4788534B2 (ja) 2006-09-07 2011-10-05 ウシオ電機株式会社 エキシマランプ
JP4900011B2 (ja) * 2006-11-24 2012-03-21 ウシオ電機株式会社 放電ランプ

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2004-319200A 2004.11.11
JP特开2007-335350A 2007.12.27

Also Published As

Publication number Publication date
KR101246481B1 (ko) 2013-03-25
TW200952032A (en) 2009-12-16
JP5245552B2 (ja) 2013-07-24
CN101599413A (zh) 2009-12-09
TWI431659B (zh) 2014-03-21
JP2009295469A (ja) 2009-12-17
KR20090127215A (ko) 2009-12-10

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PB01 Publication
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SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant