CN101598742B - Direct contact type probe card - Google Patents
Direct contact type probe card Download PDFInfo
- Publication number
- CN101598742B CN101598742B CN2008101342443A CN200810134244A CN101598742B CN 101598742 B CN101598742 B CN 101598742B CN 2008101342443 A CN2008101342443 A CN 2008101342443A CN 200810134244 A CN200810134244 A CN 200810134244A CN 101598742 B CN101598742 B CN 101598742B
- Authority
- CN
- China
- Prior art keywords
- circuit board
- printed circuit
- flexible printed
- platform
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
Abstract
The present invention relates to a direct contact type probe card which is a double-plate probe card, wherein the probe card comprises the following components: a main PCB which is of a disc shape, is formed with a quadrilateral opening at the central part and is formed with FPCB contact tables on two side surfaces; a plate which is a square component formed by steel and is connected with the bottom central part of the main PCB; a plurality of probe blocks which are arranged with a plurality of probes on the upper ends of the probe blocks and are fixedly equipped on the plate and projects from the upper surface of the main PCB; an FPCB which is formed with a probe contact table on one end and is formed with a PCB contact table corresponding with the FPCB contact table of the main PCB; FPCB blocks which are respectively provided at the side surface of each probe block and has an upper surface fixedly adhibited with the probe contact table of the FPCB; and an extrusion which is used for squeezing the PCB contact platform of the FPCB and the FPCB contact platform of the main PCB. The direct contact type probe card of the invention can simplify the structure and cancel the wiring and welding position for relatively reducing the incidence of undesirable phenomena and shortening the manufacturing time.
Description
Technical field
The present invention relates to a kind of direct contact type probe (direct contact probe card); Especially relate to a kind of pin piece (Needle block) and flexible printed circuit board (FPCB) piece that is formed with the FBCB that contacts with the probe of pin piece of forming respectively; Be incorporated into afterwards on the plate of establishing in addition, and the direct contact type probe that plate is combined with printed circuit board (PCB) (PCB).
Background technology
Probe is used for confirming the whether good test jobs of semiconductor element.Recently, the packaged form of semiconductor element is various, and therefore, probe also is designed to various forms according to the packaged configuration of the semiconductor element that will test.
Fig. 1 representes the summary floor map of veneer probe of the prior art (Needle Probe Card) 10.Usually, probe 10 comprises: probe stationary substrates 12 such as PCB substrate or Al substrate; Be fixed on the said probe stationary substrate 12 through epoxy resin 14, and its end is contacted with a plurality of probes 30 of test board; Reach, be used to strengthen the ceramic ring stiffener 16 of said epoxy resin 14.And, though illustrate circular probe stationary substrate 12 among Fig. 1,, also can be different shapes such as square.
On veneer probe 10, be as the criterion with the above-below direction of Fig. 1, probe group places two places of probe stationary substrate 12, can only test a product.And in order to improve testing efficiency, two plate probe are that above-mentioned veneer probe is improved and obtains, and can detect two products simultaneously.That is, on two plate probe, probe groups is disposed on 4 positions, two locational probes of a side are tested a product, and two locational probes of opposite side are tested another product.
Below, with reference to Fig. 2 the structure of two plate probe is described in more details.Fig. 2 is in order to detect winding and to combine (TAB) winding 50 automatically and the partial cross section synoptic diagram of two plate probe 10 of the prior art that is provided with down.As shown in Figure 2, two plate probe 10 comprise probe stationary substrate 12 and utilize epoxy resin 14 to be fixed in a plurality of probe groups 32,34,36,38 on the said probe stationary substrate 12.
When vertically (being above-below direction among Fig. 1) cut above-mentioned pair of plate probe 10, be installed with probe groups through epoxy resin 14 4 positions on the said probe stationary substrate 12.With said probe stationary substrate 12 is the center, and left side (among Fig. 2) is provided with the 1st group of probe 32,34, and the right side is provided with the 2nd group of probe 36,38.The 1st group and the 2nd group of probe comprise the inboard probe 34,36 of the center that is arranged at probe stationary substrate 12 respectively and the outside probe 32,38 in the outside thereof.
With regard to said probe 32,34,36, with regard to 38; The leading section (probe end) that contacts with the test board of the end that is attached to TAB winding 50 samples is called the 1st terminal 32a, 34a, 36a, 38a, and the 1st terminal opposite end is called the 2nd terminal 32b, 34b, 36b, 38b.
In order to utilize above-mentioned probe 10 to detect TAB winding 50, at first the 1st terminal 32a, 34a, 36a, the 38a with above-mentioned probe is contacted with on the test board of the sample end that is attached to the TAB winding 50 that will test.Afterwards, through the electric signal of above-mentioned probe 32,34,36,38 reception and registration test macros, detect the defective (short and open) of the said goods 50.
At this moment, utilize the non-contacting sensor that is arranged at terminal interior pin (inner lead) side of sample, promptly lower sensor 42, and whether the opening of sample of the said goods confirmed.Undeclared mark 50a is a mounting hole.
But the complicated connection of a plurality of electric wires is arranged at the probe stationary substrate top of above-mentioned existing probe or bottom, and its distribution and welding are all very difficult, are easy to occur bad phenomenon, and exists the long problem of its manufacturing time.
And, on PCB, adhere to and be fixed with ceramic ring stiffener, if bad phenomenon occurs, then be difficult to keep in repair at probe or electric wire and welding position.
Moreover, the hardness of PCB a little less than, if therefore long-time use then buckling phenomenon can occur also exists the problem points that the probe poor contact phenomenon takes place.
Summary of the invention
In order to address the above problem, the purpose of this invention is to provide a kind of direct contact type probe, form pin piece and the FPCB piece that is formed with the FBCB that contacts with the probe of pin piece respectively; Be incorporated into afterwards on the plate of establishing in addition; And plate combined with PCB, thereby make designs simplification, cancellation distribution and welding position; With the incidence of relative reduction bad phenomenon, shorten Production Time.
Another object of the present invention provides a kind of direct contact type probe, when the operation bad phenomenon takes place, after PCB decomposes plate, changes appropriate section, makes its repairing be more prone to.
Another purpose of the present invention provides a kind of direct contact type probe, and the plate of steel is set in the bottom of PCB, forms pin piece and FPCB piece onboard, to prevent the generation of buckling phenomenon in advance.
In order to achieve the above object; The present invention provides a kind of direct contact type probe, and said probe is two plate probe, it is characterized in that; This probe comprises: main PCB; Said main PCB is a disc-shape, and centre portion is formed with tetragonal open pore therein, and the two sides of said open pore are formed with the FPCB contact and use platform; Plate, said plate are square component formed by steel, and said plate is connected in the bottom central part of said main PCB; A plurality of pin pieces; The upper end of said a plurality of pin pieces is arranged with a plurality of probes; Said a plurality of pin piece is fixedly arranged on above the said plate; Tab-likely be formed in FPCB above the said main PCB, the end of said FPCB is formed with the probe contact and use platform, the other end to be formed with to contact with the corresponding PCB of platform with the FPCB contact of said main PCB and use platform; The FPCB piece, said FPCB piece is arranged at the side of each said pin piece respectively, the contact of the probe of said FPCB with the platform adhesion be fixed in said FPCB piece above; And extrusion, the PCB contact that said extrusion is used to push said FPCB contacts with the FPCB of platform and said main PCB and uses platform.
Here, said plate above be formed with a plurality of pin-and-holes of being used for fixing said pin piece and the 1st bolt hole and a plurality of groove and the 2nd bolts hole of setting firmly that are used to set firmly said FPCB piece.
The inside center of said pin-and-hole is fixed with guide ring through clay.
Also be formed with the FPCB exhaust opening on the said plate, make said FPCB discharge from the back side of said main PCB.
Said pin piece is a square, and its two ends, bottom surface combine to be formed with the fixed pin of the guide ring that is inserted in said pin-and-hole.
The shape of the probe of said pin piece is pin shape or foliated lamellar.
Top and the bottom surface of said main PCB is formed with said FPCB respectively accordingly and contacts and use platform.
When said FPCB adhered to the said FPCB piece that is positioned on the said plate gabarit, said PCB contact contacted with platform with said FPCB above being formed on said main PCB with platform and contacts.
Said FPCB adheres to when being positioned at the inboard said FPCB piece of said plate, and said PCB contact contacts with platform with the said FPCB that is formed on said main PCB bottom surface with platform and contacts.
Said extrusion comprises: silicon rubber, said silicon rubber are that quadrangle is tabular, and is fixing through sticker and said FPCB adhesion; Stripper plate, said stripper plate are steel and tabular for quadrangle, are used for silicon rubber and said FPCB extruding are fixed in said main PCB.
The circuit change when taking place in said direct contact type probe; With circuit change formation accordingly interconnector; Between said FPCB and said main PCB, also be provided with auxiliary PCB, the two sides of said auxiliary PCB is formed with the PCB that contacts with platform and said FPCB with the FPCB of said main PCB and contacts with the corresponding change pattern of platform.
The as above direct contact type probe of the present invention of structure; Earlier form pin piece and the FPCB piece that is formed with the FBCB that contacts with the probe of pin piece respectively, be incorporated into afterwards on the plate of establishing in addition, and plate is combined with PCB; Thereby can make designs simplification; Cancellation distribution and welding position with the incidence of relative reduction bad phenomenon, shorten Production Time.
And, when the operation bad phenomenon takes place, can, PCB change appropriate section after decomposing plate, and make its repairing be more prone to.
Moreover, the plate of steel is set in the bottom of PCB, form pin piece and FPCB piece onboard, thereby can prevent the generation of buckling phenomenon in advance.
Description of drawings
Fig. 1 is the summary floor map of veneer probe in the prior art;
Fig. 2 is the summary schematic cross-section of veneer probe in the prior art;
Fig. 3 is the structural representation of the direct contact type probe that the present invention relates to;
Fig. 4 is the structure synoptic diagram of the direct contact type probe that the present invention relates to;
Fig. 5 is the sectional view of the direct contact type probe that the present invention relates to;
Fig. 6 is the sectional view of the pin piece in the direct contact type probe that the present invention relates to;
Fig. 7 is the sectional view of FPCB piece in the direct contact type probe that the present invention relates to;
Fig. 8 is the decomposition texture synoptic diagram of the direct contact type probe that the present invention relates to;
Fig. 9 is that the direct contact type probe that the present invention relates to is provided with the sectional view of assisting PCB;
The structural representation of the direct contact type probe that Figure 10 relates to for another embodiment of the present invention;
The sectional view of the direct contact type probe that Figure 11 relates to for another embodiment of the present invention.
Wherein, Reference numeral:
110: main PCB 120: plate
130: pin piece 140:FPCB
150:FPCB piece 160: extrusion
170: auxiliary PCB
Embodiment
Below, be elaborated in conjunction with the structure of accompanying drawing to the direct contact type probe among the present invention.
When the present invention will be described,, will omit its explanation if think and technological thought of the present invention is produced unnecessary influence about the explanation meeting of relevant known function or structure.And the term that below uses is to consider function in the present invention and the term that defines, can change to some extent according to the intention or the convention of user or operator.Therefore, its definition entirety that should be based in this instructions defines.
Fig. 3 is the structural representation of the direct contact type probe that the present invention relates to; Fig. 4 is the structure synoptic diagram of the direct contact type probe that the present invention relates to; Fig. 5 is the sectional view of the direct contact type probe that the present invention relates to; Fig. 6 is the sectional view of the pin piece in the direct contact type probe that the present invention relates to; Fig. 7 is the sectional view of FPCB piece in the direct contact type probe that the present invention relates to; Fig. 8 is the decomposition texture synoptic diagram of the direct contact type probe that the present invention relates to; Fig. 9 is that the direct contact type probe that the present invention relates to is provided with the sectional view of assisting PCB; The structural representation of the direct contact type probe that Figure 10 relates to for another embodiment of the present invention; The sectional view of the direct contact type probe that Figure 11 relates to for another embodiment of the present invention.
With reference to Fig. 3 to Figure 11, the direct contact type probe 100 that the present invention relates to comprises: main PCB 110, plate 120, pin piece 130, FPCB140, FPCB piece 150, extrusion 160 and auxiliary PCB170.
At first, main PCB 110 forms with disc-shape, and its central portion is formed with four horn shape open pores 111, is formed with the FPCB contact on the two sides of this open pore 111 with platform 113.Here, the top and bottom surface of said main PCB 110 is formed with FPCB respectively and contacts with platform 113.And, identical with existing structure, can be formed with platform (pad) on the gabarit of main PCB 110 with through hole 115.
And, plate 120 be form by steel material and for foursquare, be connected in the bottom central part of main PCB 110 through bolt.Here, plate 120 above be formed with: a plurality of pin-and-holes 121 and the 1st bolt hole 122 that are fixed with the following pin piece 130 that will explain; Set firmly a plurality of grooves 123 that set firmly of the following FPCB piece 150 that will explain; The 2nd bolt hole 124 and the 3rd bolt hole 125.And pin-and-hole 121 portion center within it utilizes clay (mortar) 127 to be fixed with guide ring (guide ring) 126, until till clay 127 curing, it is good utilizing precise clamp to keep the tram of guide ring 126.Moreover; Be formed with FPCB exhaust opening 128 on the plate 120; The FPCB140 that states after making discharges from the back side of main PCB 110,128 of FPCB exhaust openings be positioned at the inboard groove 123 that sets firmly and be connected, make to be incorporated into the FPCB140 that is positioned at inboard FPCB piece 150 bottom surface discharge from main PCB 110.
In addition, pin piece 130 is 4, and each upper end all is arranged with a plurality of probes 131, and this pin piece 130 is fixedly arranged on above the plate 120, through open pore 111 tab-like being formed in above the main PCB 110 of main PCB 110.Here, pin piece 130 is a square, and the fixed pin 133 in the two ends, bottom surface combine to be provided with the guide ring 126 of the pin-and-hole 121 that is inserted in plate 120 also is formed with 4th bolt hole 135 corresponding with the 1st bolt hole 122.To shown in Figure 9, the probe 131 of pin piece 130 can be to form with the pin mode of utilizing fixing its pin of epoxy resin like Fig. 3, also can be like Figure 10 and shown in Figure 11, and the blade mode that is fixed in pottery with insertion forms, and also can be other any form.If probe forms with the pin mode, then the probe with some is a crowd, forms probe with the diagonal line form, and on FPCB140, also forms identical platform, thereby improve integrated level.
In addition, FPCB140 is formed with the probe contact with platform 141 at the one of which end, and the other end is formed with the FPCB contact of main PCB 110 and contacts with platform 143 with platform 113 corresponding PCB.Here, if FPCB140 is contacted with the FPCB piece 150 that is positioned on the plate 120 gabarit, then the PCB contact with platform 143 be formed at main PCB 110 top FPCB and contact with platform 113 and contact; If FPCB140 is contacted with the FPCB piece 150 that is positioned at plate 120 inboards, then its PCB contact contacts with the FPCB that is formed at main PCB 110 bottom surfaces with platform 113 contacts with platform 143.And for the adhesion with FPCB piece 150 is more prone to, FPCB140 forms good according to the curved shape of FPCB piece 150.
FPCB piece 150 is four, is fixedly arranged on the side of each pin piece 130, promptly plate 120 above, open pore 111 outstanding being formed on above the main PCB 110 through main PCB 110.Here, FPCB piece 150 adhere in the above be fixed with FPCB140 probe contact with platform 141, adhere and be fixed with FPCB140 in its side.And FPCB piece 150 is outstanding in its bottom surface to be formed with the fixed projection 151 in the groove 123 that sets firmly that is fixedly arranged on plate 120, and is formed with 5th bolt hole 153 corresponding with the 2nd bolt hole 124.
And; Its circuit change of reply in time when changing for circuit in probe 100; Be formed with on the two sides of auxiliary PCB170 with the FPCB contact of main PCB 110 and contact with the corresponding change pattern (pattern) of platform 143, its inside formation line and tackle the change of circuit with the PCB of platform 113 and FPCB.Here, auxiliary PCB170 is arranged between FPCB140 and the main PCB 110.
Below, the assembling process and the effect of the direct contact type probe that present invention will be described in detail with reference to the accompanying relates to.
At first; Pour clay in each pin-and-hole 121 on the plate of having processed 120, set firmly the guide ring 126 that is fixed in precise clamp, afterwards the center of alignment guide ring 126; Until till clay 127 solidifies, keep the tram of guide ring 126 and accomplish the fixing of guide ring 126.
Afterwards, the FPCB piece 150 that adhesion is fixed with FPCB140 is fixedly arranged on the plate 120, and the projection 151 that sets firmly of FPCB piece 150 is fixedly arranged on setting firmly in the groove 123 on the plate 120, the interim stud bolt 101 that connects in the 3rd bolt hole 125 of plate 120.At this moment, be adhered to the FPCB140 that is positioned at FPCB piece 150 inboard on the plate 120, be discharged to the bottom surface of main PCB 110 through the FPCB exhaust opening 128 of plate 120.
In this state; The pin piece 130 that arrangement is fixed with probe 131 is fixedly arranged on respectively above the plate 120; The fixed pin 133 that is about to pin piece 130 is inserted in after the guide ring 126 of the pin-and-hole 121 that is fixed on plate 120, and bolt 103 is connected in the 1st bolt hole 122 with the 4th bolt hole 135 and the operation that completion is fixed in plate 120 with pin piece 130.
Then; Utilize the height of stud bolt 101 rising FPCB pieces 150; Make probe 131 contact (degree that elastic deformation slightly takes place probe) fully with FPCB140, afterwards coupling bolt 103 and FPCB piece 150 is fixed on the plate 120 in the 5th bolt hole 153 of the 2nd bolt hole 124 of plate 120 and FPCB piece 150.
Then, the PCB contact that will be positioned at the FPCB140 above the main PCB 110 is contacted with the FPCB that is formed on above the main PCB 110 with platform 143 and contacts with platform 113, is to utilize sticker to fix at this moment, and arranges with naked eyes.
Then, on FPCB140, coat sticker once more, and fixing silicon rubber 161.
And the FPCB140 that discharges from the bottom surface of main PCB 110 contacts the PCB contact with platform 113 with the FPCB that platform 143 is contacted with the bottom surface that is formed on main PCB 110 also as stated, is to utilize sticker to fix at this moment, and with the naked eye arranges.
Then, on FPCB140, coat sticker once more, and fixing silicon rubber 161.
In this state; With the bottom surface of being fixed in the silicon rubber 161 of main PCB 110 bottom surfaces stripper plate 163 is set respectively above the silicon rubber 161 on be fixed in main PCB 110; With bolt stripper plate 163 is fixed on the main PCB 110; Make silicon rubber 161 leaned on by card and be arranged at main PCB 110 with FPCB140, thus the assembling of completion probe 100.
The present invention can carry out various distortion and have various forms, in the specific embodiment of foregoing invention, has only narrated specific embodiments.But the present invention is not limited to the special form in the above-mentioned specific embodiment, but should comprise all deformations and impartial sub in the spirit of the present invention that defines in the appended claims.
Claims (11)
1. direct contact type probe, said probe are two plate probe, it is characterized in that this probe comprises:
Main printed circuit board, said main printed circuit board are disc-shape, and centre portion is formed with tetragonal open pore therein, and the two sides of said open pore are formed with the flexible printed circuit board contact and use platform;
Plate, said plate are square component formed by steel, and said plate is connected in the bottom central part of said main printed circuit board;
A plurality of pin pieces, the upper end of said a plurality of pin pieces is arranged with a plurality of probes, and said a plurality of pin pieces are fixedly arranged on above the said plate, tab-like being formed in above the said main printed circuit board;
Flexible printed circuit board, an end of said flexible printed circuit board are formed with probe contact and use platform, the other end to be formed with to contact with the corresponding printed circuit board (PCB) of platform with the flexible printed circuit board contact of said main printed circuit board and use platform;
The flexible printed circuit board piece, said flexible printed circuit board piece is arranged at the side of each said pin piece respectively, the contact of the probe of said flexible printed circuit board with the platform adhesion be fixed in said flexible printed circuit board piece above; And
The printed circuit board (PCB) contact that extrusion, said extrusion are used to push said flexible printed circuit board contacts with the flexible printed circuit board of platform and said main printed circuit board and uses platform.
2. direct contact type probe according to claim 1 is characterized in that, is formed with a plurality of pin-and-holes and the 1st bolt hole and a plurality of groove and the 2nd bolts hole of setting firmly that are used to set firmly said flexible printed circuit board piece that are used for fixing said pin piece above the said plate.
3. direct contact type probe according to claim 2 is characterized in that the inside center of said pin-and-hole is fixed with guide ring through clay.
4. direct contact type probe according to claim 2 is characterized in that, also is formed with the flexible printed circuit board exhaust opening on the said plate, makes said flexible printed circuit board discharge from the back side of said main printed circuit board.
5. direct contact type probe according to claim 3 is characterized in that, said pin piece is a square, and its two ends, bottom surface combine to be formed with the fixed pin of the guide ring that is inserted in said pin-and-hole.
6. direct contact type probe according to claim 1 is characterized in that, the shape of the probe of said pin piece is pin shape or foliated lamellar.
7. direct contact type probe according to claim 1 is characterized in that, the top and bottom surface of said main printed circuit board is formed with said flexible printed circuit board respectively accordingly and contacts and use platform.
8. direct contact type probe according to claim 7; It is characterized in that; When said flexible printed circuit board adhered to the said flexible printed circuit board piece that is positioned on the said plate gabarit, said printed circuit board (PCB) contact contacted with platform with platform and said flexible printed circuit board above being formed on said main printed circuit board and contacts.
9. direct contact type probe according to claim 7; It is characterized in that; Said flexible printed circuit board adheres to when being positioned at the inboard said flexible printed circuit board piece of said plate, and said printed circuit board (PCB) contact contacts with platform with the said flexible printed circuit board that is formed on said main printed circuit board bottom surface with platform and contacts.
10. direct contact type probe according to claim 1 is characterized in that, said extrusion comprises:
Silicon rubber, said silicon rubber are that quadrangle is tabular, and is fixing through sticker and the adhesion of said flexible printed circuit board;
Stripper plate, said stripper plate are steel and tabular for quadrangle, are used for silicon rubber and the extruding of said flexible printed circuit board are fixed in said main printed circuit board.
11. direct contact type probe according to claim 1; It is characterized in that; The circuit change when taking place in said direct contact type probe; With circuit change formation accordingly interconnector; Between said flexible printed circuit board and said main printed circuit board, also be provided with auxiliary printing circuit board, the two sides of said auxiliary printing circuit board is formed with the printed circuit board (PCB) that contacts with platform and said flexible printed circuit board with the flexible printed circuit board of said main printed circuit board and contacts with the corresponding change pattern of platform.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020080053244 | 2008-06-05 | ||
| KR10-2008-0053244 | 2008-06-05 | ||
| KR1020080053244A KR100962130B1 (en) | 2008-06-05 | 2008-06-05 | Direct contact probe card |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101598742A CN101598742A (en) | 2009-12-09 |
| CN101598742B true CN101598742B (en) | 2012-01-11 |
Family
ID=41420246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101342443A Expired - Fee Related CN101598742B (en) | 2008-06-05 | 2008-07-23 | Direct contact type probe card |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100962130B1 (en) |
| CN (1) | CN101598742B (en) |
| TW (1) | TWI380022B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101047460B1 (en) * | 2008-11-21 | 2011-07-07 | (주)유비프리시젼 | Micro Coaxial Cable Type Probe Card |
| CN102043074A (en) * | 2009-10-14 | 2011-05-04 | 旺矽科技股份有限公司 | High-frequency probe card |
| CN102375080B (en) * | 2010-08-20 | 2014-08-13 | 旺矽科技股份有限公司 | Combined type probe head |
| KR101044118B1 (en) * | 2010-11-25 | 2011-06-28 | 김재길 | Probe card with multi-layer cantilever |
| KR101227547B1 (en) * | 2011-07-15 | 2013-01-31 | 주식회사 세디콘 | Probe card |
| CN103869109B (en) * | 2012-12-12 | 2017-10-10 | 华邦电子股份有限公司 | Probe card and its welding method |
| KR101823141B1 (en) | 2016-10-05 | 2018-01-30 | (주)이큐이엔지 | The needle assembly for the probe card |
| KR102367167B1 (en) * | 2022-01-07 | 2022-02-25 | 이시훈 | Probe block |
| KR102654553B1 (en) * | 2023-12-13 | 2024-04-04 | 주식회사 프로이천 | Nest plate |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200416956Y1 (en) | 2006-03-07 | 2006-05-23 | 임이빈 | Probe Card of using Flexible Printed Circuit Board |
| JP2008082912A (en) | 2006-09-28 | 2008-04-10 | Micronics Japan Co Ltd | Electrical connection device |
| KR100760538B1 (en) | 2007-06-01 | 2007-09-19 | 나노세미텍(주) | Needle block for probe block with blade needle of supporter type |
-
2008
- 2008-06-05 KR KR1020080053244A patent/KR100962130B1/en not_active IP Right Cessation
- 2008-07-23 CN CN2008101342443A patent/CN101598742B/en not_active Expired - Fee Related
- 2008-08-08 TW TW097130296A patent/TWI380022B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200951440A (en) | 2009-12-16 |
| KR100962130B1 (en) | 2010-06-10 |
| KR20090126897A (en) | 2009-12-09 |
| CN101598742A (en) | 2009-12-09 |
| TWI380022B (en) | 2012-12-21 |
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