CN101592626B - 准一维金属氧化物纳米材料生物传感器及其制作方法 - Google Patents
准一维金属氧化物纳米材料生物传感器及其制作方法 Download PDFInfo
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Abstract
Description
附图标记 | 含义 | 附图标记 | 含义 | 附图标记 | 含义 |
1 | 硅片 | 2 | 二氧化硅氧化层 | 3 | 栅极 |
4 | 准一维金属氧化物半导体纳米材料 | 5 | 源极 | 6 | 漏极 |
7 | 微流体通道 | A | DNA/RNA | B | 抗原/抗体 |
Claims (5)
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CN 200910030340 CN101592626B (zh) | 2009-03-19 | 2009-03-19 | 准一维金属氧化物纳米材料生物传感器及其制作方法 |
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CN101592626B true CN101592626B (zh) | 2013-03-06 |
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CN102242062B (zh) * | 2011-04-19 | 2012-12-19 | 浙江大学 | 一种高分辨率的生物传感器 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1618014A (zh) * | 2001-11-26 | 2005-05-18 | 索尼国际(欧洲)股份有限公司 | 使用一维半导体材料作为化学敏感材料及其在接近室温下生产和操作 |
CN201083712Y (zh) * | 2007-09-30 | 2008-07-09 | 董益阳 | 一种生物传感器和采用该传感器的检测装置 |
-
2009
- 2009-03-19 CN CN 200910030340 patent/CN101592626B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1618014A (zh) * | 2001-11-26 | 2005-05-18 | 索尼国际(欧洲)股份有限公司 | 使用一维半导体材料作为化学敏感材料及其在接近室温下生产和操作 |
CN201083712Y (zh) * | 2007-09-30 | 2008-07-09 | 董益阳 | 一种生物传感器和采用该传感器的检测装置 |
Non-Patent Citations (2)
Title |
---|
Chao Li et.al..Complementary Detection of Prostate-Specific Antigen Using In2O3 Nanowires and Carbon Nanotubes.《J.AM.CHEM.SOC.》.2005,第127卷12484-12485. * |
JP特开2008-82988A 2008.04.10 |
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