CN101570082A - Paste dispenser and method for controlling the same - Google Patents

Paste dispenser and method for controlling the same Download PDF

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Publication number
CN101570082A
CN101570082A CNA200910146445XA CN200910146445A CN101570082A CN 101570082 A CN101570082 A CN 101570082A CN A200910146445X A CNA200910146445X A CN A200910146445XA CN 200910146445 A CN200910146445 A CN 200910146445A CN 101570082 A CN101570082 A CN 101570082A
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China
Prior art keywords
substrate
nozzle
sensor element
jet element
distance
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CNA200910146445XA
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CN101570082B (en
Inventor
林永一
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Top Engineering Co Ltd
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Top Engineering Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The present invention provides a paste dispenser and a method for controlling the same. The paste dispenser comprises: a sensing part vertically movable along the vertical direction of the substrate face; a nozzle part mounted on the sensing part and relatively movable in relation to the sensing part along the vertical direction of the substrate face; and a position measuring sensor outputting as digital signals a positional difference between the sensing part moving along the vertical direction of the substrate face and the nozzle part. According to the present invention, the position of the nozzle part is output as digital signals relatively movable in relation to the sensing part along the vertical direction of the substrate face, and the electronic equivalent noise can not generate. Thus the distance between the nozzle and the substrate can be accurately measured, and the processing time of the vertical distance between the nozzle and the substrate can be set.

Description

The method of dispenser and control dispenser
The application be based on the applying date be April 14, application number in 2006 to be 200610072342.X, denomination of invention be the dividing an application of the patent application of " method of dispenser and control dispenser ", its full content is hereby expressly incorporated by reference.
Technical field
The present invention relates to distribute the distributor of pastel, relate in particular to the method that is used for that the distributor of the vertical range between substrate and the nozzle accurately is set and is used to control this distributor.
Background technology
Be used to distribute the distributor of pastel to be designed to multiple pastel (such as resistance paste and sealing compound) is distributed in substrate by predetermined pattern.
Distributor comprises workbench 40 and the head unit that is placed with substrate.Head unit 50 comprises: container is used to hold pastel; And nozzle, be connected to container, be used for pastel is distributed in substrate.Substrate is maintained fixed distributor by nozzle is moved, and nozzle is maintained fixed by substrate is moved, or by substrate and nozzle are moved along different directions, forms jelly pattern on substrate.
Before being distributed in pastel on the substrate, set in advance vertical range and distributive condition between substrate and the nozzle.Distributive condition comprises: vertical range between the speed difference between substrate and the nozzle (hereinafter referred to as " dispensing rate "), substrate and the nozzle (hereinafter referred to as " distributing height ") and the pressure (hereinafter referred to as " dispense pressure ") that is applied to container.The cross section of jelly pattern is measured to determine on substrate to form after the jelly pattern, whether is formed on jelly pattern on the substrate with consistent.In traditional distributor, before distributing pastel, the employing magnetic sensor is provided with the vertical range between substrate and the nozzle.Magnetic sensor comprises: magnet unit, have the N utmost point at an upper portion thereof, and have the S utmost point in its underpart; And detecting unit, be used to measure the change amount of magnetic force.
But traditional distributor has following problem.
When the vertical range that is provided with between substrate and the nozzle, magnetic sensor stands electronics equivalent noise (electronic equivalent of noise), thereby has reduced from the reliability of the signal of magnetic sensor output.
The first, magnetic sensor by measuring because the electric current change amount that the change of magnetic force causes is provided with the vertical range between substrate and the nozzle.
Magnetic sensor is very responsive to the electronics equivalent noise, and may be out of shape by the analog signal that its generation obtains.Thereby, be difficult to determine whether the analog signal that obtains is to produce under the situation that does not have the electronics equivalent noise, therefore can not measure the vertical range between substrate and the nozzle exactly.
Second, magnetic sensor in the traditional dispensers is measured is point when constituting the jet element 550 of head unit and sensor element 530 and being separated from each other, rather than the nozzle on the gaging nozzle parts 550 and substrate form when contacting the distance between jet element 550 and the sensor element 530.This requires when distribution height (that is, the vertical range between nozzle and the substrate) is set, and head unit 50 moves down lentamente.Therefore, increased the highly required time of distribution that is provided with.
When the distance between magnet unit and the detecting unit exceeded the acceptable tolerance scope, there was mistake in the detection that detects magnetic force.
Summary of the invention
The object of the present invention is to provide a kind of distributor that is used to distribute pastel, be used to be provided with the vertical range between nozzle and the substrate, and a kind of method that is used to control this distributor.
Another object of the present invention is to reduce the required time of vertical range that is provided with between nozzle and the substrate.
According to an aspect of the present invention, provide a kind of distributor that is used to distribute pastel, having comprised: sensor element 530, move along the vertical direction perpendicular to substrate; Jet element 550 is installed on the sensor element 530, moves along the direction perpendicular to substrate; And position measurement sensor, will export as data signal perpendicular to the change of the position on the substrate surface direction between sensor element 530 and the jet element 550.
Position measurement sensor can comprise light reflector element 571, reflection emission light; And light receiving unit 573, receive the light that is reflected.Light receiving unit 573 is used for changing perpendicular to the position on the substrate surface direction between measuring transducer parts 530 and the jet element 550.
Light reflector element 571 can be arranged on sensor element 530 and jet element 550 one, and light receiving unit 573 can be positioned on another.
Jet element 550 can be installed in the ZZ axle drive unit drives on the sensor element 530.When the nozzle of jet element 550 and substrate form when contacting, jet element 550 can separate with ZZ axle driver element, and when the nozzle of jet element 550 was on substrate, jet element can be connected to ZZ axle driver element.
ZZ axle driver element can comprise ZZ axle motor and driving arm, and driving arm moves on perpendicular to the direction of substrate by ZZ axle motor.
Jet element 550 can comprise: support unit is used to support the container that nozzle is installed on it; And nozzle holder, be used for the support unit parts are connected to driving arm.
When nozzle moves down and forms when contacting with substrate, driving arm can separate with nozzle holder.
When nozzle when substrate moves up, driving arm can be connected to nozzle holder.
Distributor can comprise distribution height measuring transducer, is installed on the sensor element 530, is used for the vertical range between gaging nozzle and the substrate.
According to an aspect of the present invention, provide a kind of distributor that is used to distribute pastel, having comprised: sensor element 530, move along the direction perpendicular to substrate; Z axle driver element is used for driving sensor parts 530; Jet element 550 is installed on the sensor element 530, moves along the direction perpendicular to substrate; ZZ axle driver element is used to drive jet element 550; Position measurement sensor will exported as data signal perpendicular to the change of the position on the substrate surface direction between sensor element 530 and the jet element 550; And control module, be used for the result that measures according to position measurement sensor, by moving of control jet element 550 and sensor element 530, control the nozzle that is installed on the jet element 550 and the distance between the substrate and be provided with.
According to a further aspect in the invention, provide a kind of method that is used to control the distributor that distributes pastel, having comprised: the sensor element 530 and the jet element 550 that are arranged on the distributor are moved along the direction perpendicular to substrate; Judge as the result who moves down sensor element 530 and jet element 550, be installed on the jet element 550 nozzle whether with substrate contacts; According to judgement be installed on the jet element 550 nozzle whether with the result of substrate contacts, move the driving arm that is installed on the sensor element 530; And measure between sensor element 530 by mobile driving arm generation and the jet element 550 perpendicular to the distance on the substrate surface direction.
The method that is used for control dispenser can comprise: will by distribute nozzle that the height measuring transducer measures and the distance adjustment between the substrate between sensor element 530 and the jet element 550 on perpendicular to the substrate surface direction measured distance, to determine to distribute height.
In the operation perpendicular to the distance on the substrate surface direction, the position measurement sensor that is installed on jet element 550 and the sensor element 530 can be exported the mobile distance value of jet element 550 (moving with driving arm) as data signal between measuring transducer parts 530 and jet element 550.
In the method, when nozzle and substrate form when contacting, driving arm is moved upward to the point of assignment of allocation height, the distance that moves as jet element 550, that is, between jet element 550 and the sensor element 530 can be measured perpendicular to the distance on the substrate surface direction.
When nozzle did not contact with substrate formation, driving arm was moved downward to a bit, and this point has the use location measuring transducer and changes measured value.
Above-mentioned and other purposes of the present invention, feature, aspect and advantage will be from below in conjunction with becoming more obvious the accompanying drawing detailed description of the present invention.
Description of drawings
Accompanying drawing provides further understanding of the present invention, and in conjunction with a part that constitutes specification in the present invention, has described embodiments of the invention, and explained principle of the present invention with specification.
In the accompanying drawings:
Fig. 1 is the perspective view that illustrates according to the embodiment of dispenser of the present invention;
Fig. 2 is the schematic diagram that illustrates according to the structure of the operation that is used to control dispenser of the present invention;
Fig. 3 is the schematic diagram that illustrates according to the structure of the head unit 50 of dispenser of the present invention;
Fig. 4 is the schematic diagram that illustrates according to the operation of the position measurement sensor of dispenser of the present invention;
Fig. 5 is the flow chart that illustrates according to the operation of the position of the nozzle that dispenser is set of the present invention;
Fig. 6 a illustrates the schematic diagram that head unit 50 according to the present invention is moved downward to the situation of assigned address;
Fig. 6 b is the schematic diagram that illustrates according to the situation that nozzle contacts with substrate formation after head unit 50 is moved downward to assigned address of the present invention;
Fig. 6 c illustrates the schematic diagram that driving arm according to the present invention and nozzle holder form situation about contacting;
Fig. 6 d is the schematic diagram that situation about being set up according to the vertical range between nozzle of the present invention and the substrate is shown; And
Fig. 7 illustrates the schematic diagram that head unit 50 according to the present invention is moved downward to the situation that nozzle separates with substrate after the assigned address.
The specific embodiment
With reference now to the preferred embodiments of the present invention, be described in detail example shown in the drawings.
Fig. 1 is the perspective view that illustrates according to the embodiment of dispenser of the present invention.With reference to figure 1, the structure of dispenser is described below.
Movably Y-axis platform 30 is arranged on the top of framework 10 on Y direction.Workbench 40 is positioned on the Y-axis platform 30 along the θ axle rotary unit of θ direction rotation.The workbench 40 that is placed with substrate on it is positioned at the top of θ axle rotary unit.
Movably the X-axis platform can be arranged on the top of framework 10 on X-direction.
At least one stature support unit 12 is arranged on the top of framework 10.Be arranged on the support unit 12 at movably a plurality of dispensing heads 50 on the X-direction, each head unit includes the nozzle 555 that distributes pastel.
The time that a plurality of dispensing heads 50 is installed in feasible shortening formation jelly pattern on substrate on the support unit 12 becomes possibility.
Support unit 12 can move along Y direction, to guarantee being loaded on the workbench 40 substrate or the space of unloading carried base board from workbench 40.
Obtaining picture is arranged on the support unit 12 with the camera 60 of the position of measuring substrate.
The control module 70 of the operation of control dispenser is arranged in the distributor, and is connected to the I/O unit 80 of the necessary information of distributor of input and output operated allocated pastel.
Control module 70 can directly receive the coordinate figure of indicating the position of jelly pattern on substrate from I/O unit 80 or personal computer 100.Control module 70 can receive from the coordinate figure of personal computer 100 inputs by I/O unit 80.
Fig. 2 is the schematic diagram that illustrates according to the structure of the operation that is used to control dispenser of the present invention, with reference to figure 2.
Motor controller 3, I/O unit 80 and personal computer (PC) are connected to control module 70 respectively.PC can be connected directly to I/O unit 80 and be not attached to control module 70.
Can not rely on distributor PC 100 is provided separately.The information that is produced in PC 100 can transfer to distributor by the transmitting device (not shown).
Motor controller 3 is connected to Y-axis table driver 3a that workbench is moved along Y direction, makes workbench around the θ axle table driver of θ axle rotation and the X-axis head unit driver 3c that head unit 50 is moved along X-direction.When a plurality of head units were mounted to support unit 12, head unit must have their X-axis driver separately, is connected to motor driver 3 respectively.
Motor controller 3 is connected to Y-axis nozzle driver that nozzle is moved along Y direction, make Z axle nozzle driver that nozzle moves along Z-direction and the ZZ axle nozzle driver that nozzle is moved along the ZZ direction of principal axis.Control module 3 is connected to the Y-axis support unit driver 3g that a support unit 12 is moved along Y direction.
What the ZZ axle was indicated in fact is the direction identical with the Z axle, but has provided the direction basis of regulating nozzle location, especially during at first nozzle being set.
Make nozzle itself can offer motor controller 3, and be connected to motor controller 3 along the X-axis nozzle driver that X-direction moves.The X-axis table driver that workbench 40 is moved along X-direction can offer motor controller 3 and be connected to motor controller 3.
With reference to figure 1 and Fig. 2, the operation that distributes pastel is described briefly now.
After determining on actual substrate, to form specific jelly pattern, pastel is distributed on the virtual substrate experimentally, be suitable for the distributive condition of specific jelly pattern with setting.After determining distributive condition, actual substrate is placed on the workbench 40.
The position of nozzle and substrate is measured by camera 60 and measurement mechanism, with the accurate distribution locations of location substrate.Then, nozzle begins to discharge pastel.During distributing pastel, nozzle moves and substrate is maintained fixed, substrate moves and nozzle is maintained fixed or substrate and nozzle all move along different directions.When forming jelly pattern on substrate, a support unit 12 is motionless, and workbench 40 moves along Y direction, and head unit 50 moves along X-direction.
Workbench 40 can move along X-direction and Y direction.Replacedly, nozzle can move along X-direction and Y direction.
With reference to figure 3 and Fig. 4, below will describe embodiment in detail according to the head unit 50 of dispenser of the present invention.
Head unit 50 comprises: sensor element 530, can move the direction of the surface of substrate (that is, perpendicular to) up and down; And jet element 550, can move up and down, while sensor element 530 does not move or sensor element 530 moves.
Sensor element 530 moves and by Z axle driver control along the direction perpendicular to the surface of substrate by Z axle driver element 510.By ZZ axle driver element 540 jet element 550 is moved, jet element is installed on the head unit 50 and by ZZ axle driver control.
More particularly, Z axle driver element 510 comprises Z axle motor 511 and the Z axle motor slide rails 513 that sensor element is moved.ZZ axle driver element 540 comprises ZZ axle motor 541 and the driving arm 542 that is moved by ZZ axle motor.Jet element 550 comprises: pastel container (not shown) is equipped with nozzle on it; Support unit 553 supports the pastel container; And nozzle holder 551, make support unit 553 be connected to driving arm.
The ZZ axle driver element 540 that jet element 550 is installed on the sensor element 530 moves.The position of depending on jet element 550 that contacts of jet element 550 and ZZ axle driver element 540.
Be connected to the end of pastel container from its nozzle 555 of discharging pastel.An end of nozzle holder 551 is fixed to the top of support unit, and another end of nozzle holder 551 be connected to driving arm 542 and with between driving arm 542 separates alternately.
Contact and can not further move down when the surface of nozzle 555 and substrate 200 forms, and sensor element 530 with its on nozzle is installed jet element 550 when moving down, ZZ axle driver element 540 separates with nozzle holder 551.
The height of the distribution of the distance between gaging nozzle and the substrate in real time measuring transducer 520 is arranged on the sensor element 530.More specifically, distribute height measuring transducer 520 to be arranged on the lower area of sensor element 530, and make the distance between measurement by laser beam nozzle and the substrate.
The position measurement sensor 570 of the distance of 550 processes of gaging nozzle parts (that is, between jet element 550 and the sensor element 530 perpendicular to the distance on the substrate surface direction) is arranged on the head unit 50.
Position measurement sensor 570 comprises: light reflector element 571 is installed on the sensor element 530; Light receiving unit 573 is installed on the jet element 550 corresponding to light reflector element 571.Light reflector element 571 comprises the reflection layer 571b of reflection lasering beam and covers the coating of reflection layer 571b.Light reflector element 571 is installed on the jet element 550, and light receiving unit 573 can be set on the sensor element 530.
The surface of the waveform shape of pitches (uniform pitch) such as reflection layer 571b has, as shown in Figure 3.The pitch of ripple changes according to user's needs.Pitch according to the ripple of the embodiment of the invention is about 1 μ m.Coating 571a is that laser beam is from its plane of passing through.
The operation of the distance (that is, between nozzle and the sensor element 530 perpendicular to the distance on the substrate surface direction) of use location measuring transducer 570 gaging nozzle parts 550 processes is described below.
Offer the luminescence unit 575 emission light of head unit.Be incident on the light receiving unit 573 from the light of luminescence unit 575 emissions.Here, the angle that is incident on the light on the light receiving unit 573 changes according to the lip-deep angled ripple of light reflector element 571.The position change of light reflector element 571 and/or luminescence unit 575 causes the angle of incident light different with the reference angle of incident light.Based on the angle of incident light and the number of times that produces with reference to the difference between the angle, calculate between jet element 550 and the sensor element 530 perpendicular to the distance on the substrate surface direction.Be converted into data signal in difference between jet element 550 and the sensor element 530 and be used for output perpendicular to the distance on the substrate surface direction.
When jet element 550 moves with identical speed with sensor element 530 or stops simultaneously, be " 0 " perpendicular to the distance on the substrate surface direction between jet element 550 and the sensor element 530.
When jet element 550 stops and sensor element 530 when moving, the angle that is incident on the light on the light receiving unit 573 changes, thereby obtains between jet element 550 and the sensor element 530 poor perpendicular to the distance on the substrate surface direction.Therefore, detect the change of angle of incident light to calculate between jet element 550 and the sensor element 530 perpendicular to the distance on the substrate surface direction.
Control module 70 is based on the measurement result obtained from position measurement sensor control sensor element 530 and jet element 550, to be provided with between nozzle and the substrate perpendicular to the vertical range on the substrate surface direction.
To Fig. 7, the operation that nozzle location is set will be described in detail belows with reference to figure 5.
Shown in Fig. 6 a, comprise that the head unit 50 of sensor element 530 and jet element 550 moves down (that is), before distributing pastel so that the vertical range (S10) between nozzle 555 and the substrate 200 to be set perpendicular to the direction on the surface of substrate.Here, by Z axle driver element 510 head unit 50 is moved.More specifically, head unit 50 moves down, up to distributing height measuring transducer 520 indication second assigned references points " a ".
Shown in Fig. 6 b, when nozzle 555 and substrate 200 forms when contacting, nozzle can not further move down, but sensor element 530 moves down.Nozzle and substrate form contact after, jet element 550 is maintained fixed, driving arm 542 separates with nozzle holder 551, and only has driving arm 542 to move down with sensor element 530.
Indicate second assigned references point " a " afterwards at the distribution height measuring transducer that is installed on the sensor element 530, control module 70 judges whether nozzle 555 contacts (S30) with substrate 200 formation.
Shown in Fig. 6 c, as judging whether nozzle 555 forms the result who contact with substrate 200, when nozzle 555 and substrate formation contact, driving arm 542 move up (S40).The position measurement sensor 570 that comprises light reflector element 571 and light receiving unit 573 is the point that separates with substrate of gaging nozzle accurately.The point that driving arm 542 combines with nozzle holder 551 is to be maintained fixed by the light reflector element 571 that the light receiving unit 573 that is installed on the jet element 550 is moved be installed on the sensor element 530 to measure.
When nozzle separated with substrate, ZZ axle motor 541 must stop constantly driving driving arm 542 at this, thereby driving arm 542 stops to move.But ZZ axle motor 541 can not stop driving arm accurately because of the delay of response time, thereby driving arm stops (S40) after further moving up a bit.
Position measurement sensor 570 is exported the change with respect to the position of sensor element 530 on perpendicular to the substrate surface direction of the position of jet element 550 as data signal, and does not produce the electronics equivalent noise.As a result, control module 70 is accurately discerned nozzle from the make progress distance of process of substrate.
Control module 70 is proofreaied and correct the errors present of nozzle based on the value of measuring by position measurement sensor.That is, by the ZZ axle motor 541 driving driving arms 540 of control module 70 controls, so that jet element 550 moves down.
The use of ZZ axle motor 541 (such as linear motors) can stop driving arm at accurate point, and this makes operation of ignoring the errors present of proofreading and correct nozzle become possibility.
Control module 70 moves up the head unit 50 that comprises sensor element 530 and jet element 550, up to distribution height measuring transducer 520 indication first assigned references points " 0 " that are installed on the sensor element 530.Thereby, shown in Fig. 6 d, distribute 520 indications " 0 " of height measuring transducer, and nozzle 555 stops in certain height " A " (that is the specific range between nozzle 555 and the substrate 200).
As shown in Figure 7, even head unit 50 moves down up to distributing height measuring transducer 520 indication second assigned references points " a ", nozzle does not form with substrate yet and contacts.In this case, driving arm 542 moves down with jet element 550, forms with substrate up to nozzle to contact, and sensor element 530 is maintained fixed simultaneously.
Shown in Fig. 6 b, ZZ axle motor 541 must form the moment that contacts at nozzle 555 and substrate and stop driving arm 550.But ZZ axle motor 541 is because the delay of response time can not make driving arm stop accurately, so driving arm 542 stops after further moving down a bit.
Position measurement sensor 570 is exported the change with respect to the position of sensor element 530 on perpendicular to the substrate surface direction of the position of jet element 550 as data signal, and does not produce the electronics equivalent noise.As a result, control module 70 is accurately discerned the distance that nozzle moves to substrate downwards.
The value that control module 70 position-based measuring transducers are measured is proofreaied and correct the errors present of nozzle.That is, drive driving arms 540, make jet element 550 move up (S600) by the ZZ axle motor 541 of control module 70 control.
The use of ZZ axle motor 541 (such as linear motors) can make driving arm stop accurately, and this makes the step of ignoring the errors present of proofreading and correct nozzle become possibility.
Control module 70 moves up the head unit 50 that comprises sensor element 530 and jet element 550, up to distribution height measuring transducer 520 indication first assigned references points " 0 " that are installed on the sensor element 530.Thereby, shown in Fig. 6 d, distribute height sensor 520 indications " 0 ", and nozzle 555 stops in certain height " A " (that is the specific range between nozzle 555 and the substrate 200).
According to the present invention, the change with respect to the position of sensor element 530 on perpendicular to the substrate surface direction of the position of jet element 550 is output as data signal, and does not produce the electronics equivalent noise.This make the distance between gaging nozzle and substrate accurately and significantly reduce percentage of defects and nozzle is set and substrate between processing time of vertical range become possibility.
Under the situation that does not break away from spirit of the present invention and essential characteristic, the present invention can implement in a variety of forms, should be understood that also the foregoing description is not limited to any details described above, unless otherwise indicated, but more should be interpreted as widely in the spirit and scope that claims limit, thereby all interior change and modifications of scope that fall into claim or its equivalent all should be included in the claims.

Claims (8)

1. dispenser comprises:
Sensor element moves along the vertical direction perpendicular to substrate;
Jet element is installed on the described sensor element, moves along the direction perpendicular to described substrate; And
Position measurement sensor is exported between described sensor element (530) and the described jet element (550) and is being changed perpendicular to the position on the described substrate surface direction.
2. dispenser according to claim 1, wherein, further comprise: control module, be used for controlling the operation of described sensor element and described jet element, substrate to be set and to be installed between the nozzle on the described jet element perpendicular to the vertical range on the described substrate surface direction by controlling according to the measurement result of described position measurement sensor.
3. dispenser according to claim 2, wherein, described control module is imported between described sensor element (530) and the described jet element (550) and is being changed as data signal perpendicular to the position on the direction of substrate surface.
4. method of controlling dispenser comprises:
The sensor element and the jet element that are arranged on the described dispenser are moved along the direction perpendicular to substrate;
Based on the result that described sensor element and described jet element move down, judge whether the described nozzle that is installed on the described jet element forms with described substrate to contact;
Whether form the result of determination that contacts according to the described nozzle that is installed on the described jet element, the driving arm (542) that is installed on the described sensor element is moved with described substrate; And
Measure by moving between described sensor element that described driver rack produces and the described jet element perpendicular to the distance on the direction of described substrate surface.
5. the method for control dispenser according to claim 4, further comprise based between measured described sensor element and the described jet element perpendicular to the distance on the direction of substrate surface, regulate the position of described jet element.
6. according to the method for claim 4 or 5 described control dispensers, wherein, the position measurement sensor that is installed on described sensor element and the described jet element will exported as data signal perpendicular to the change of the position on the direction of substrate surface between described sensor element and the described jet element.
7. according to the method for claim 4 or 5 described control dispensers, wherein, when described nozzle and described substrate form when contacting, described driving arm is moved upward to the point of assignment of allocation height, therefore the distance that moves of described jet element is being recorded perpendicular to the distance on the direction of described substrate surface between promptly described jet element and the described sensor element.
8. according to the method for claim 4 or 5 described control dispensers, wherein, when described nozzle and described substrate form when contacting, described driving arm is moved downward to the point of assignment of allocation height, therefore the distance that moves of described jet element is being recorded perpendicular to the distance on the direction of described substrate surface between promptly described jet element and the described sensor element.
CN200910146445XA 2005-04-15 2006-04-14 Paste dispenser and method for controlling the same Active CN101570082B (en)

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KR1020050031546 2005-04-15
KR1020050031546A KR100696932B1 (en) 2005-04-15 2005-04-15 Paste Dispenser and Method for Controlling the same

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