CN101566739B - System and method for maintaining array circuit - Google Patents
System and method for maintaining array circuit Download PDFInfo
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- CN101566739B CN101566739B CN2008101050159A CN200810105015A CN101566739B CN 101566739 B CN101566739 B CN 101566739B CN 2008101050159 A CN2008101050159 A CN 2008101050159A CN 200810105015 A CN200810105015 A CN 200810105015A CN 101566739 B CN101566739 B CN 101566739B
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Abstract
The invention discloses a system and a method for maintaining an array circuit, which relate to the technical field of circuit fault detection and maintenance and are invented for solving the problem of abandon maintenance of defectiveness which cannot be determined. The system comprises a system control unit connected with a motor unit, wherein the motor unit is provided with a searching positioning unit, a maintenance unit and a linear scanning detection unit. The method comprises the following steps: performing linear scanning detection on uncertain defectiveness of coordinates of the arraycircuit so as to obtain correct defectiveness information; searching and positioning the defectiveness according to the defectiveness information; and maintaining the defectiveness. The system can be applied to the detection of the array circuit, and by performing the linear scanning detection on the uncertain defectiveness, specific point coordinates of the defectiveness are obtained and maintai ned, thus the yield is improved and the cost is saved.
Description
Technical field
The present invention relates to fault and detect and the maintenance technique field, relate in particular to array circuit maintenance system and method for maintaining.
Background technology
In the manufacturing process of liquid crystal display device, mainly comprise the making of array base palte, the making of colored filter, two-layer substrate to box and inject liquid crystal, is formed main display unit, pass through module process then, increase peripheral drive circuit and back light system, finally form display module.
After array circuit on the array base palte forms or in the forming process, need detect process results, on the one hand be to detect exist in the product bad, badly keep in repair or reprocess at dissimilar then, simultaneously the effect of technological parameter is monitored.Bad position is to represent by its coordinate in matrix, and described coordinate comprises data coordinates and door coordinate; The door coordinate can be called the grid coordinate, and as shown in Figure 1, wherein data coordinates is positioned on the data line 101, and the door coordinate is positioned on the grid line 102.Data line 101 is orthogonal with grid line 102, the q remarked pixel unit among the figure.
Bad at array circuit on the array base palte, existing checkout equipment adopts electricity and optical detection unit; Existing maintenance of equipment comprises: system control unit, moving cell, Search and Orientation unit and maintenance unit; Wherein, the Search and Orientation unit is the CCD camera, is used to carry out bad Search and Orientation; Maintenance unit is a laser instrument, is used for the bad maintenance of fixing a point.
Concrete detection and maintenance process are as follows:
Described testing process comprises: array circuit is carried out electrical detection and optical detection; Normally cooperate and realize that reason is because that the defective of electrical detection equipment self and testing conditions are provided with is reasonable inadequately by both, electrical detection only can detect the important bad of 90%-95%, and the bad of about 5%-10% will realize detecting by optical detection in addition; Checkout equipment can upload to data server with detected flame, and these flames mainly comprise bad position coordinates, the rank that bad rude classification and array base palte are possible etc.
Described maintenance process comprises: the flame that maintenance of equipment is uploaded according to checkout equipment at first carries out bad Search and Orientation, keeps in repair bad then.
But, sometimes checkout equipment detected bad be inaccurate bad, comprise two kinds of situations; The first, the bad of checkout equipment report is that a vacation is bad, and it is bigger, bad accurately in the bad peripheral region of vacation that reason is that appointed condition is provided with deviation, can not find bad in microscopical narrow and small visual field; The second, the coordinate of checkout equipment report departs from bad actual position far away, the coordinate that checkout equipment is uploaded be data coordinates accurately, grid coordinate mistake, or the grid coordinate is accurately and the data coordinates mistake can not find bad equally in microscopical narrow and small visual field.
Meet with like this when bad, treatment principle of the prior art is that this information is skipped, and the consequence that causes may be the bad not maintenance that should keep in repair, and the product degradation has influence on yields; Maybe should be judged as low-level product and judge and become high-levelly, cause bad spilling and the waste of back operation material.
Summary of the invention
A technical matters to be solved by this invention provides a kind of array circuit maintenance system, when searching less than bad accurate coordinate, can carry out the detection of bad point coordinate to bad zone, data line or grid line takes place in the array circuit, and to this bad maintenance.
For addressing the above problem, array circuit maintenance system of the present invention adopts following technical scheme:
A kind of array circuit maintenance system comprises: system control unit, and described system control unit is connected with moving cell, and described moving cell is provided with Search and Orientation unit and maintenance unit, also is provided with the linear sweep detecting unit on the described moving cell, wherein
The linear sweep detecting unit is used for badly carrying out linear sweep and detecting coordinate is uncertain, obtains flame accurately, and described linear sweep detecting unit comprises: line camera and be installed in optical system unit on the line camera.
Described system control unit comprises the programmed control microcomputer, and described programmed control microcomputer one end is connected with the man-machine interaction subelement, and the other end is connected with maintenance control sub unit and motion control subelement, wherein,
Described maintenance control sub unit also links to each other with described maintenance unit;
Described motion control subelement also links to each other with described moving cell.
Described moving cell comprises motor and kinematic axis, and described motion control subelement comprises motion control card and motor driver.
Described line camera links to each other with image collection card on being located at described programmed control microcomputer.
Described Search and Orientation unit comprises the CCD camera and is installed in optical system unit on the CCD camera; Wherein, described CCD camera links to each other with image collection card on being located at described programmed control microcomputer, or
When described line camera is in the time of can realizing the line camera of static chromatic image, the function of described Search and Orientation unit is realized by described line camera and the optical system unit that is installed on the line camera, wherein, described line camera links to each other with image collection card on being located at described programmed control microcomputer.
Described maintenance unit is laser instrument and is installed in optical system unit on the laser instrument that described maintenance control sub unit is a laser controller.
Described optical system unit comprises catoptron, optical filter, anti-dazzling screen, attenuator and microlens.
Described line camera can rotate freely.
Described kinematic axis quantity is one; Described Search and Orientation unit, maintenance unit and linear sweep detecting unit become one, and are co-located on the described kinematic axis.
Described kinematic axis quantity can be two; Described Search and Orientation unit and maintenance unit, linear sweep detecting unit are separately positioned on described two kinematic axiss.
Array circuit maintenance system of the present invention can obtain bad accurately point coordinate to carrying out linear sweep and detect through searching can't determine bad, and to this bad maintenance, thereby can improve the yields of array base palte, saves cost.
Another technical matters to be solved by this invention provides a kind of array circuit method for maintaining, when searching less than bad accurate coordinate, can carry out the detection of bad point coordinate to bad zone, data line or grid line takes place in the array circuit, and to this bad maintenance.
For addressing the above problem, array circuit method for maintaining of the present invention adopts following technical scheme:
A kind of array circuit method for maintaining comprises step:
The linear sweep detecting unit that comprises line camera and be installed in the optical system unit on the line camera obtains flame accurately to the uncertain bad linear sweep detection of carrying out of array circuit coordinate;
The Search and Orientation unit that comprises the CCD camera and be installed in the optical system unit on the CCD camera carries out bad Search and Orientation according to described flame;
To described bad the maintenance.
Described to the uncertain bad linear sweep detection of carrying out of array circuit coordinate, obtaining accurately, the step of flame comprises:
To the uncertain bad linear sweep detection of carrying out of coordinate, obtain scanning information;
The scanning result of line camera is transferred to the image collection card of programmed control microcomputer, through calculation process, obtains bad accurately point coordinate.
Array circuit method for maintaining of the present invention can obtain bad accurately point coordinate to carrying out linear sweep and detect through searching can't determine bad, and to this bad maintenance, thereby can raise the efficiency, save cost.
Description of drawings
Fig. 1 is the matrix structure synoptic diagram of array circuit in the prior art;
Fig. 2 is the cellular construction synoptic diagram of array circuit maintenance system of the present invention;
Fig. 3 is the modular construction synoptic diagram of array circuit maintenance system of the present invention;
Fig. 4 carries out linear sweep for the present invention to array circuit by line camera synoptic diagram;
Fig. 5 is the perspective view of one for CCD camera, laser instrument and line camera collection in the array circuit maintenance system of the present invention;
Fig. 6 is that the CCD camera of one carries out the coaxial perspective view of control respectively with laser instrument and described line camera for collection in the array circuit maintenance system of the present invention;
Fig. 7 carries out the perspective view that disalignment is controlled respectively for collection in the array circuit maintenance system of the present invention for the CCD camera of one and laser instrument and described line camera;
Fig. 8 is the schematic flow sheet of array circuit method for maintaining of the present invention;
Fig. 9 is in the array circuit method for maintaining of the present invention, to the method flow synoptic diagram that can't exactly determined defective region detects.
Embodiment
The present invention aims to provide a kind of array circuit maintenance system, when searching less than bad accurate coordinate, can carry out linearity test to defective region special in the array circuit, data line or grid line, and to this bad maintenance, thereby improve the yields of array base palte, save cost.
Describe below in conjunction with accompanying drawing and specific embodiment.
As shown in Figure 2, described array circuit maintenance system comprises: system control unit 200, described system control unit 200 is connected with moving cell 208, and moving cell 208 is provided with Search and Orientation unit 206 and maintenance unit 207, and described system also comprises a linear sweep detecting unit 205.
Wherein, system control unit controlled motion unit moves, and accurately locate bad control Search and Orientation unit, and the control maintenance unit is to the bad maintenance of fixing a point; If the flame that system control unit receives is inaccurate flame, the linear sweep detecting unit scans detection to the zone at described flame place or the data line and the grid line at place, obtain bad specific coordinate, carry out Search and Orientation and fixed point maintenance then.
In the system of the present invention, system control unit 200 comprises programmed control microcomputer 202, programmed control microcomputer 202 1 ends are connected with man-machine interaction subelement 201, the other end is connected with maintenance control sub unit 203 and motion control subelement 204, wherein said maintenance control sub unit 203 links to each other with described maintenance unit 207, and described motion control subelement 204 links to each other with described moving cell 208.
Wherein, the programmed control microcomputer is responsible for detecting the download of data and uploading of local mantenance data, and total system is integrated operation interface of formation, is convenient to operation; The man-machine interaction subelement is used to check the flame of programmed control microcomputer transmission, and sends motion control commands, scanning sense command and maintenance control command to the programmed control microcomputer; The motion control subelement is realized bad addressing, detection and is played the maintenance that laser is fixed a point by the motion of controlled motion unit; The maintenance control sub unit is used to control maintenance unit and keeps in repair.
Preferred embodiment of the present invention is that linear sweep detecting unit 205, Search and Orientation unit 206 and maintenance unit 207 collection are the situation of one, as Fig. 3, Fig. 4, shown in Figure 5,
Wherein, the motor driver 309 that described motion control subelement 204 comprises the motion control card (not shown) and is attached thereto, wherein motion control card is installed in the programmed control microcomputer 202; Described moving cell 208 comprises motor and kinematic axis 306; Described man-machine interaction subelement 201 is called human-computer interaction device 301, comprises display, mouse, keyboard etc.
Linear sweep detecting unit 205 is a line camera 304; Search and Orientation unit 206 is a CCD camera 303; Maintenance unit 207 is a laser instrument 305.As Fig. 3, shown in Figure 5, the shared optical system unit 209 of line camera, CCD camera and laser instrument A1 and motor and kinematic axis 306; Line camera 304, CCD camera 303 respectively be arranged on programmed control microcomputer 202 on image collection card 310 link to each other.
The image collection card is used to set the data line or the grid line that need carry out linear sweep, receives bad accurate information and calculates bad specific coordinate; Line camera is used for obtaining bad accurate information to determining that accurately bad zone, data line or grid line scans detection; The CCD camera is located bad in detail according to the linear sweep testing result; Laser instrument is to the bad maintenance of fixing a point.
Described optical system unit 209 comprises catoptron, optical filter, anti-dazzling screen, attenuator, the first-class parts of microscope, be used for assistance system neutral line scanning detecting unit and carry out linearity test, determine bad specific coordinate, assist the Search and Orientation unit to carry out bad Search and Orientation, and assist maintenance unit to carry out bad fixed point maintenance.
Except above-mentioned parts, system of the present invention also comprises: data server 302, support system (not shown) and illuminator unit 307.Data server is used for sending flame to the programmed control microcomputer; Support system is used for each parts of system are fixed and supported; The illuminator unit links to each other with the programmed control microcomputer, as the illumination of total system.
The detailed process that described array circuit maintenance system keeps in repair is as follows:
The programmed control microcomputer is by downloading and upload the flame of product with the data server communication; Operating personnel check these information by the human-computer interaction device; After the programmed control microcomputer receives maintenance instructions, can send corresponding repair orders to laser controller and motor driver.Motor driver is controlled each kinematic axis and is moved to the target location.At this moment CCD phase chance is given the image collection card of programmed control microcomputer with the image transfer of gathering, and the processing by microcomputer transfers to the human-computer interaction device with operable image, carries out bad accurate location, then by the laser instrument maintenance of fixing a point.
As shown in Figure 4, when finding that certain bad point can not correctly be searched,, set the data line and the grid line that need carry out linear sweep to there being bad special area by the image collection card on the programmed control microcomputer; Can't determine the bad of coordinate if exist on the data line, then line camera 304 to be scanned along corresponding data line 101, to move, to carry out optical detection in the zonule along data line 101 directions by the controlled of microlens; Can't determine the bad of coordinate if exist on the grid line 102, then line camera 304 to be revolved and turn 90 degrees, to scan along grid line 102 then.
Then, scanning result can be shown to the respective interface place of master routine automatically, draws bad point coordinate through calculation process, and the operator can carry out bad detailed location to this testing result by the CCD camera.At this moment the programmed control microcomputer says the word to motor driver, and the latter controls each axle and moves to corresponding position, keeps in repair bad by laser controller control laser instrument.
The line camera that has can realize reading of static chromatic image, therefore can simultaneously it be used as the CCD camera, thereby in order to save manufacturing cost, reduce the use number of camera, can use this kind line camera as searching and detecting unit.
In the system of the present invention, line camera, CCD camera, laser instrument also can have optical system unit separately respectively, are used for realizing that the optical scanning of specific position detects bad accurate location and maintenance; Also can the CCD camera, the shared optical system unit of line camera, laser instrument has the optical system unit of oneself; Also can CCD camera and the shared optical system unit of laser instrument, line camera has the optical system unit of oneself.
In the system of the present invention, CCD camera and laser instrument A2, line camera A3 can adopt coaxial control, as shown in Figure 6; Also can the CCD camera and laser instrument A2 use a motor and kinematic axis, line camera A3 has the kinematic axis of oneself, as shown in Figure 7; Can the CCD camera and line camera adopt same motor and kinematic axis, laser instrument has motor and the kinematic axis of oneself.(not shown)
In sum, system of the present invention carries out optical detection by line camera to specific defective region, data line or grid line, thus can be to the coordinate that finds out previously fuzzy or even inaccurate bad point accurately locate; And keep in repair by maintenance unit, thereby improve maintenance efficiency, improve yields, reduce cost.
The present invention provides a kind of array circuit method for maintaining simultaneously, when searching less than bad accurate coordinate, can scan detection to array circuit defective region, data line or grid line, determine bad specific coordinate, and this is badly positioned and keep in repair, thereby can improve yields, reduce cost.
As shown in Figure 8, the invention provides a kind of array circuit method for maintaining, the idiographic flow of described method is as follows:
At first, carrying out array circuit when detecting with maintenance, master routine on the programmed control microcomputer and data server communication download to this locality with the flame of current production, and the operator checks each bad point in order.When having the bad dot information that to determine, set the data line or the grid line that need carry out linear sweep by the image pick-up card on the programmed control Control Program for Microcomputers [Digital Research]; By line camera corresponding data line or grid line are scanned then.Mainly be to move, carry out optical detection in the zonule along data line or grid line direction by the controlled of microlens.
The scanning result of line camera is transferred to the image collection card of programmed control microcomputer, draws bad specific coordinate through calculation process.
The operator can carry out bad detailed location to the testing result of this linear sweep by the CCD camera.
Check when certain is bad, the coordinate system that the motion control unit of system can set according to system self, with reference to bad specific coordinate, with microlens is that laser head moves to this coordinate top, the operator observes the tft array on the current point in the main frame display interface, find bad and definite method for maintaining, cut with laser at bad ad-hoc location then, realize maintenance.
Array circuit method for maintaining of the present invention carries out linearity test by array circuit being existed bad special area, data line or grid line, determines to exist bad specific coordinate; And array circuit is carried out laser maintaining according to described bad specific coordinate, and therefore can improve yields, searching the time when reducing operation reduces bad spilling, thereby saved cost, created benefit.
The above; only be the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain that claim was defined.
Claims (12)
1. array circuit maintenance system comprises: system control unit, and described system control unit is connected with moving cell, described moving cell is provided with Search and Orientation unit and maintenance unit, it is characterized in that, also be provided with the linear sweep detecting unit on the described moving cell, wherein
The linear sweep detecting unit is used for badly carrying out linear sweep and detecting coordinate is uncertain, obtains flame accurately, and described linear sweep detecting unit comprises: line camera and be installed in optical system unit on the line camera.
2. array circuit maintenance system according to claim 1 is characterized in that described system control unit comprises the programmed control microcomputer, described programmed control microcomputer one end is connected with the man-machine interaction subelement, the other end is connected with maintenance control sub unit and motion control subelement, wherein
Described maintenance control sub unit also links to each other with described maintenance unit;
Described motion control subelement also links to each other with described moving cell.
3. array circuit maintenance system according to claim 2 is characterized in that,
Described moving cell comprises motor and kinematic axis, and described motion control subelement comprises motion control card and motor driver.
4. array circuit maintenance system according to claim 2 is characterized in that,
Described line camera links to each other with image collection card on being located at described programmed control microcomputer.
5. array circuit maintenance system according to claim 3 is characterized in that,
Described Search and Orientation unit comprises the CCD camera and is installed in optical system unit on the CCD camera, and wherein, described CCD camera links to each other with image collection card on being located at described programmed control microcomputer, or
When described line camera is in the time of can realizing the line camera of static chromatic image, the function of described Search and Orientation unit is realized by described line camera and the optical system unit that is installed on the line camera, wherein, described line camera links to each other with image collection card on being located at described programmed control microcomputer.
6. array circuit maintenance system according to claim 3 is characterized in that, described maintenance unit is laser instrument and is installed in optical system unit on the laser instrument that described maintenance control sub unit is a laser controller.
7. according to claim 4,5 or 6 described array circuit maintenance systems, it is characterized in that described optical system unit comprises catoptron, optical filter, anti-dazzling screen, attenuator and microlens.
8. according to claim 4 or 5 described array circuit maintenance systems, it is characterized in that described line camera can rotate freely.
9. array circuit maintenance system according to claim 3 is characterized in that, described kinematic axis quantity is one;
Described Search and Orientation unit, maintenance unit and linear sweep detecting unit become one, and are co-located on the described kinematic axis.
10. array circuit maintenance system according to claim 3 is characterized in that, described kinematic axis quantity is two;
Described Search and Orientation unit and maintenance unit, linear sweep detecting unit are separately positioned on described two kinematic axiss.
11. an array circuit method for maintaining is characterized in that, comprises step:
The linear sweep detecting unit that comprises line camera and be installed in the optical system unit on the line camera obtains flame accurately to the uncertain bad linear sweep detection of carrying out of array circuit coordinate;
The Search and Orientation unit that comprises the CCD camera and be installed in the optical system unit on the CCD camera carries out bad Search and Orientation according to described flame;
To described bad the maintenance.
12. array circuit method for maintaining according to claim 11 is characterized in that, described to the uncertain bad linear sweep detection of carrying out of array circuit coordinate, obtaining accurately, the step of flame comprises:
To the uncertain bad linear sweep detection of carrying out of coordinate, obtain scanning information;
The scanning result of line camera is transferred to the image collection card of programmed control microcomputer, through calculation process, obtains bad accurately point coordinate.
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| CN2008101050159A CN101566739B (en) | 2008-04-25 | 2008-04-25 | System and method for maintaining array circuit |
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| CN2008101050159A CN101566739B (en) | 2008-04-25 | 2008-04-25 | System and method for maintaining array circuit |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103885231B (en) * | 2014-03-11 | 2016-04-20 | 京东方科技集团股份有限公司 | Display panel labelling apparatus and display panel labeling method |
| CN105204195B (en) * | 2015-09-21 | 2018-05-25 | 京东方科技集团股份有限公司 | A kind of liquid crystal panel detects integrated system into box |
| CN109634005A (en) * | 2018-11-30 | 2019-04-16 | 深圳市华星光电技术有限公司 | Method for repairing and mending in array substrate manufacturing process |
| CN110428764B (en) * | 2019-07-16 | 2022-10-04 | Tcl华星光电技术有限公司 | Display panel detection method |
| CN110890043B (en) * | 2019-11-26 | 2023-06-02 | 深圳市华星光电半导体显示技术有限公司 | Cross line defect detection method and system, array substrate and display panel |
| CN111221157B (en) * | 2020-01-16 | 2023-03-07 | 深圳谦华益科技有限公司 | LCD display detection system with optical scanning |
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