CN101533191A - Tft-lcd阵列基板结构及其制备方法 - Google Patents
Tft-lcd阵列基板结构及其制备方法 Download PDFInfo
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- CN101533191A CN101533191A CN 200810101906 CN200810101906A CN101533191A CN 101533191 A CN101533191 A CN 101533191A CN 200810101906 CN200810101906 CN 200810101906 CN 200810101906 A CN200810101906 A CN 200810101906A CN 101533191 A CN101533191 A CN 101533191A
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- tft
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- 239000010409 thin film Substances 0.000 claims abstract description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims description 73
- 238000002161 passivation Methods 0.000 claims description 52
- 238000005516 engineering process Methods 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 33
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- 125000002015 acyclic group Chemical group 0.000 claims description 6
- 150000002466 imines Chemical class 0.000 claims description 6
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 6
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 238000004380 ashing Methods 0.000 claims description 4
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- 239000003086 colorant Substances 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
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- 239000004973 liquid crystal related substance Substances 0.000 abstract description 3
- 239000012528 membrane Substances 0.000 description 19
- 238000010586 diagram Methods 0.000 description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910003818 SiH2Cl2 Inorganic materials 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
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- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
Abstract
Description
Claims (11)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200810101906 CN101533191B (zh) | 2008-03-13 | 2008-03-13 | Tft-lcd阵列基板结构及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200810101906 CN101533191B (zh) | 2008-03-13 | 2008-03-13 | Tft-lcd阵列基板结构及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN101533191A true CN101533191A (zh) | 2009-09-16 |
CN101533191B CN101533191B (zh) | 2012-02-29 |
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Family Applications (1)
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CN 200810101906 Active CN101533191B (zh) | 2008-03-13 | 2008-03-13 | Tft-lcd阵列基板结构及其制备方法 |
Country Status (1)
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102148195A (zh) * | 2010-04-26 | 2011-08-10 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
CN102263060A (zh) * | 2010-05-24 | 2011-11-30 | 北京京东方光电科技有限公司 | 阵列基板及其制造方法、液晶显示器 |
CN102608794A (zh) * | 2012-03-23 | 2012-07-25 | 深圳市华星光电技术有限公司 | 一种液晶显示面板及其制造方法 |
CN102629628A (zh) * | 2011-09-29 | 2012-08-08 | 京东方科技集团股份有限公司 | 一种tft阵列基板及其制造方法和液晶显示器 |
CN103149763A (zh) * | 2013-02-28 | 2013-06-12 | 京东方科技集团股份有限公司 | Tft-lcd阵列基板、显示面板及其制作方法 |
WO2014127573A1 (zh) * | 2013-02-22 | 2014-08-28 | 京东方科技集团股份有限公司 | Tft阵列基板的制造方法、tft阵列基板及显示装置 |
CN104409418A (zh) * | 2014-11-13 | 2015-03-11 | 京东方科技集团股份有限公司 | 一种薄膜晶体管阵列基板及其制备方法、显示装置 |
CN105082535A (zh) * | 2015-05-15 | 2015-11-25 | 京东方科技集团股份有限公司 | 光控制装置及其制作方法、3d打印系统 |
WO2017197678A1 (zh) * | 2016-05-20 | 2017-11-23 | 深圳市华星光电技术有限公司 | 一种阵列基板及其制备方法 |
US10170504B2 (en) | 2013-02-22 | 2019-01-01 | Boe Technology Group Co., Ltd. | Manufacturing method of TFT array substrate, TFT array substrate and display device |
CN109375413A (zh) * | 2018-12-20 | 2019-02-22 | 深圳市华星光电技术有限公司 | 显示面板的制备方法、显示面板及显示装置 |
CN109860217A (zh) * | 2019-03-01 | 2019-06-07 | 惠科股份有限公司 | 阵列基板及其制备方法、显示面板 |
CN109887942A (zh) * | 2019-03-01 | 2019-06-14 | 惠科股份有限公司 | 阵列基板及其制备方法、显示面板 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100378554C (zh) * | 2004-04-02 | 2008-04-02 | 统宝光电股份有限公司 | 液晶显示器的制造方法 |
KR101067052B1 (ko) * | 2004-05-31 | 2011-09-22 | 엘지디스플레이 주식회사 | 액정표시장치 |
-
2008
- 2008-03-13 CN CN 200810101906 patent/CN101533191B/zh active Active
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102148195B (zh) * | 2010-04-26 | 2013-05-01 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
CN102148195A (zh) * | 2010-04-26 | 2011-08-10 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
US8609477B2 (en) | 2010-04-26 | 2013-12-17 | Beijing Boe Optoelectronics Technology Co., Ltd. | Manufacturing method for array substrate with fringe field switching type thin film transistor liquid crystal display |
CN102263060A (zh) * | 2010-05-24 | 2011-11-30 | 北京京东方光电科技有限公司 | 阵列基板及其制造方法、液晶显示器 |
US20140071364A1 (en) * | 2011-09-29 | 2014-03-13 | Boe Technology Group Co., Ltd. | Tft array substrate and method for manufacturing the same and display device |
CN102629628B (zh) * | 2011-09-29 | 2016-06-01 | 京东方科技集团股份有限公司 | 一种tft阵列基板及其制造方法和液晶显示器 |
CN102629628A (zh) * | 2011-09-29 | 2012-08-08 | 京东方科技集团股份有限公司 | 一种tft阵列基板及其制造方法和液晶显示器 |
US9305942B2 (en) | 2011-09-29 | 2016-04-05 | Boe Technology Group Co., Ltd. | TFT array substrate having metal oxide part and method for manufacturing the same and display device |
WO2013139062A1 (zh) * | 2012-03-23 | 2013-09-26 | 深圳市华星光电技术有限公司 | 一种液晶显示面板及其制造方法 |
CN102608794A (zh) * | 2012-03-23 | 2012-07-25 | 深圳市华星光电技术有限公司 | 一种液晶显示面板及其制造方法 |
US10170504B2 (en) | 2013-02-22 | 2019-01-01 | Boe Technology Group Co., Ltd. | Manufacturing method of TFT array substrate, TFT array substrate and display device |
US9494837B2 (en) | 2013-02-22 | 2016-11-15 | Boe Technology Group Co., Ltd. | Manufacturing method of TFT array substrate, TFT array substrate and display device |
WO2014127573A1 (zh) * | 2013-02-22 | 2014-08-28 | 京东方科技集团股份有限公司 | Tft阵列基板的制造方法、tft阵列基板及显示装置 |
CN103149763A (zh) * | 2013-02-28 | 2013-06-12 | 京东方科技集团股份有限公司 | Tft-lcd阵列基板、显示面板及其制作方法 |
CN103149763B (zh) * | 2013-02-28 | 2016-04-13 | 京东方科技集团股份有限公司 | Tft-lcd阵列基板、显示面板及其制作方法 |
US10217773B2 (en) | 2013-02-28 | 2019-02-26 | Boe Technology Group Co., Ltd. | Array substrate and fabrication method thereof, display panel and fabrication method thereof |
CN104409418A (zh) * | 2014-11-13 | 2015-03-11 | 京东方科技集团股份有限公司 | 一种薄膜晶体管阵列基板及其制备方法、显示装置 |
US10651212B2 (en) | 2014-11-13 | 2020-05-12 | Boe Technology Group Co., Ltd. | Thin film transistor array substrate, method for manufacturing the same, and display device |
CN105082535A (zh) * | 2015-05-15 | 2015-11-25 | 京东方科技集团股份有限公司 | 光控制装置及其制作方法、3d打印系统 |
WO2017197678A1 (zh) * | 2016-05-20 | 2017-11-23 | 深圳市华星光电技术有限公司 | 一种阵列基板及其制备方法 |
CN109375413A (zh) * | 2018-12-20 | 2019-02-22 | 深圳市华星光电技术有限公司 | 显示面板的制备方法、显示面板及显示装置 |
CN109860217A (zh) * | 2019-03-01 | 2019-06-07 | 惠科股份有限公司 | 阵列基板及其制备方法、显示面板 |
CN109887942A (zh) * | 2019-03-01 | 2019-06-14 | 惠科股份有限公司 | 阵列基板及其制备方法、显示面板 |
CN109860217B (zh) * | 2019-03-01 | 2021-02-26 | 惠科股份有限公司 | 阵列基板及其制备方法、显示面板 |
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Publication number | Publication date |
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CN101533191B (zh) | 2012-02-29 |
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Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150701 Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150701 |
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Effective date of registration: 20150701 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
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Effective date of registration: 20201207 Address after: 215200 No. 1700, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu, Zhongshan North Road Patentee after: Gaochuang (Suzhou) Electronics Co.,Ltd. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Address before: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee before: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |