CN101532124B - 溅射阴极、溅射设备及控制设备 - Google Patents

溅射阴极、溅射设备及控制设备 Download PDF

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Publication number
CN101532124B
CN101532124B CN2009101178763A CN200910117876A CN101532124B CN 101532124 B CN101532124 B CN 101532124B CN 2009101178763 A CN2009101178763 A CN 2009101178763A CN 200910117876 A CN200910117876 A CN 200910117876A CN 101532124 B CN101532124 B CN 101532124B
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CN
China
Prior art keywords
magnet
sputtering
target
distance
reciprocating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009101178763A
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English (en)
Chinese (zh)
Other versions
CN101532124A (zh
Inventor
板垣克则
内山智雄
开康子
斋藤广明
千叶俊伸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
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Canon Anelva Corp
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Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Publication of CN101532124A publication Critical patent/CN101532124A/zh
Application granted granted Critical
Publication of CN101532124B publication Critical patent/CN101532124B/zh
Expired - Fee Related legal-status Critical Current
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3455—Movable magnets

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CN2009101178763A 2008-03-13 2009-03-13 溅射阴极、溅射设备及控制设备 Expired - Fee Related CN101532124B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2008063515 2008-03-13
JP2008-063515 2008-03-13
JP2008063515 2008-03-13
JP2008168783 2008-06-27
JP2008-168783 2008-06-27
JP2008168783 2008-06-27

Publications (2)

Publication Number Publication Date
CN101532124A CN101532124A (zh) 2009-09-16
CN101532124B true CN101532124B (zh) 2012-05-30

Family

ID=41061816

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009101178763A Expired - Fee Related CN101532124B (zh) 2008-03-13 2009-03-13 溅射阴极、溅射设备及控制设备

Country Status (4)

Country Link
US (1) US8137519B2 (enExample)
JP (1) JP2010031353A (enExample)
KR (1) KR101061076B1 (enExample)
CN (1) CN101532124B (enExample)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010038271A1 (ja) * 2008-09-30 2010-04-08 キヤノンアネルバ株式会社 スパッタリング装置および薄膜形成方法
JP5687045B2 (ja) * 2010-12-20 2015-03-18 キヤノンアネルバ株式会社 スパッタリング装置およびスパッタリング方法
CN103094048B (zh) * 2011-11-01 2015-08-19 凌嘉科技股份有限公司 可位移调整磁控管的装置
DE102012109424A1 (de) * 2012-10-04 2014-04-10 Von Ardenne Anlagentechnik Gmbh Sputtermagnetron und Verfahren zur dynamischen Magnetfeldbeeinflussung
TWI482871B (zh) * 2012-10-05 2015-05-01 Mega Energy Vacuum Co Ltd 移動式細胞格磁控濺鍍靶
EP3211119B1 (en) * 2013-02-08 2018-09-05 Evatec AG Methof of sputtering and sputter system
CN103132038A (zh) * 2013-02-27 2013-06-05 蚌埠玻璃工业设计研究院 一种消除阴极背面辉光放电装置
US9418823B2 (en) * 2013-03-01 2016-08-16 Sputtering Components, Inc. Sputtering apparatus
KR101899008B1 (ko) * 2013-05-23 2018-09-14 (주)이루자 분할형 마그넷을 갖는 스퍼터링 장치
CN103602952B (zh) * 2013-11-13 2015-11-25 上海华力微电子有限公司 一种真空溅射设备
BE1021296B1 (nl) * 2014-04-18 2015-10-23 Soleras Advanced Coatings Bvba Sputter systeem voor uniform sputteren
KR102299128B1 (ko) * 2014-04-28 2021-09-08 스퍼터링 컴포넌츠 인코포레이티드 스퍼터링 장치
DE102014110001A1 (de) * 2014-07-16 2016-01-21 Von Ardenne Gmbh Magnetron-Anordnung, Verfahren zum Codieren und Übertragen von Information in einer Magnetron-Anordnung und Verwendung einer Magnetron- Anordnung
DE102014109991A1 (de) * 2014-07-16 2016-01-21 Von Ardenne Gmbh Magnetron-Anordnung, Prozessieranordnung, Verfahren und Verwendung einer Magnetron-Anordnung
US10056238B2 (en) * 2016-06-27 2018-08-21 Cardinal Cg Company Adjustable return path magnet assembly and methods
US10151023B2 (en) 2016-06-27 2018-12-11 Cardinal Cg Company Laterally adjustable return path magnet assembly and methods
CN108570648A (zh) * 2017-03-08 2018-09-25 中国南玻集团股份有限公司 可调平面阴极机构及真空镀膜装置
US10790127B2 (en) 2017-05-04 2020-09-29 Cardinal Cg Company Flexible adjustable return path magnet assembly and methods
KR102181087B1 (ko) * 2018-08-23 2020-11-20 주식회사 아바코 스퍼터링장치 및 스퍼터링장치 제어방법
KR20200056588A (ko) * 2018-11-15 2020-05-25 주식회사 아바코 스퍼터링장치 및 스퍼터링장치 제어방법
JP2020169352A (ja) * 2019-04-02 2020-10-15 株式会社アルバック マグネトロンスパッタリング装置用のカソードユニット
EP3734642A1 (en) * 2019-04-29 2020-11-04 INTERPANE Entwicklungs-und Beratungsgesellschaft mbH Method and system for adjustable coating using magnetron sputtering systems
EP3734643A1 (en) * 2019-04-29 2020-11-04 INTERPANE Entwicklungs-und Beratungsgesellschaft mbH Rotary magnetron sputtering with individually adjustable magnetic field
CN114026861B (zh) 2019-06-25 2023-11-17 北京字节跳动网络技术有限公司 对运动矢量差的约束
US12163215B2 (en) 2019-08-08 2024-12-10 Tokyo Electron Limited Film forming apparatus and film forming method
JP7374008B2 (ja) * 2019-08-08 2023-11-06 東京エレクトロン株式会社 成膜装置および成膜方法
KR102160158B1 (ko) * 2019-11-12 2020-09-28 삼성디스플레이 주식회사 스퍼터링 장치 및 그것을 이용한 스퍼터링 방법
DE102020112986A1 (de) 2020-05-13 2021-11-18 VON ARDENNE Asset GmbH & Co. KG Magnetronanordnung
US11728226B2 (en) * 2020-08-14 2023-08-15 Taiwan Semiconductor Manufacturing Co., Ltd. Deposition system and method
US11761078B2 (en) * 2021-05-25 2023-09-19 Applied Materials, Inc. Methods and apparatus for processing a substrate
KR102721678B1 (ko) * 2021-11-12 2024-10-24 주식회사 티에이치시스템 자기장 제어 기술이 적용된 스퍼터링 장치
DE102021129524A1 (de) * 2021-11-12 2023-05-17 VON ARDENNE Asset GmbH & Co. KG Magnetsystem und Sputtervorrichtung
CN116377408A (zh) * 2022-12-15 2023-07-04 天津南玻节能玻璃有限公司 一种镀膜均匀性调节方法
CN115910725A (zh) * 2022-12-23 2023-04-04 深圳市矩阵多元科技有限公司 一种分块式实时调控靶磁距的磁控管及磁控管装置
BE1031579B1 (nl) * 2023-05-04 2024-12-10 Soleras Advanced Coatings Bv Online regeling van magneetstaven in een magnetron
CN116855909B (zh) * 2023-09-05 2024-10-01 苏州迈为科技股份有限公司 提高靶材利用率的溅射方法、溅射阴极装置及溅射设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3879009B2 (ja) 1995-01-30 2007-02-07 キヤノンアネルバ株式会社 スパッタリングカソード
JP3808114B2 (ja) * 1995-06-02 2006-08-09 キヤノンアネルバ株式会社 スパッタリング装置
KR100262768B1 (ko) * 1996-04-24 2000-08-01 니시히라 순지 스퍼터성막장치
JP3649933B2 (ja) * 1999-03-01 2005-05-18 シャープ株式会社 マグネトロンスパッタ装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP平8-199354A 1996.08.06

Also Published As

Publication number Publication date
US20090229970A1 (en) 2009-09-17
KR20090098717A (ko) 2009-09-17
US8137519B2 (en) 2012-03-20
CN101532124A (zh) 2009-09-16
KR101061076B1 (ko) 2011-08-31
JP2010031353A (ja) 2010-02-12

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