CN101521136A

CN101521136A - Multi x-ray generating apparatus and x-ray imaging apparatus

Info

Publication number: CN101521136A
Application number: CN200910118644A
Authority: CN
Inventors: 奥贯昌彦; 辻井修; 清水英; 小仓隆
Original assignee: Canon Inc
Current assignee: Canon Inc
Priority date: 2008-02-28
Filing date: 2009-02-27
Publication date: 2009-09-02
Anticipated expiration: 2029-02-27
Also published as: US8422637B2; CN101521136B; US7991120B2; US8666024B2; KR20090093815A; US20110249802A1; US20130202082A1; JP5294653B2; RU2399907C1; US20090232270A1; JP2009205992A

Abstract

A multi X-ray generating apparatus which has a plurality of electron sources arranged two-dimensionally and targets arranged at positions opposite to the electron sources includes a multi electron source which includes a plurality of electron sources and outputs electrons from driven electron sources by selectively driving a plurality of electron sources in accordance with supplied driving signals, and a target unit which includes a plurality of targets which generate X-rays in accordance with irradiation of electrons output from the multi electron source and outputs X-rays with different radiation qualities in accordance with the generation locations of X-rays. The generation locations and radiation qualities of X-rays from the target unit are controlled by selectively driving the electron sources of the multi electron source.

Description

Multi x-ray generates equipment and X ray picture pick-up device

Technical field

The multi x-ray that the present invention relates to be used for non-destructive radiography, diagnosis etc. in the field of Medical Devices that use x-ray source and industrial equipment generates equipment, and uses this multi x-ray to generate the X ray picture pick-up device of equipment.

Background technology

Usually, X-ray tube uses thermionic ion source (thermion source) as electron source, to be sent to Wehnelt cylinder (Wehneltelectrode), extraction electrode (extraction electrode), accelerating electrode and lens electrode from the thermion of the filament that is heated to high temperature, and electron beam will be accelerated into high energy electron beam.After (shaping) shape for expectation that electron beam is shaped, X-ray tube generates X ray by utilizing electron beam to shine metal x-ray target (target).

Recently, developed cold cathode (cold cathode) the electron source electron source of thermionic ion source as an alternative, and with cold-cathode electron source as broad research with the application of flat-panel detector (FPD) combination.As typical cold cathode, known have a Spindt type electron source, and it applies high electric field by the needle point to tens nanometer sizes and draws electronics.Available also have, and for example, uses the electronic emitter of carbon nano-tube (CNT) as material, and come the surface conductive type electron source of emitting electrons by the micro-structural that forms nanometer (nm) level on the surface of glass substrate.

As the application of these electron sources, Japanese kokai publication hei 09-180894 and TOHKEMY 2004-329784 have proposed by using Spindt type electron source or carbon nano tube type electron source to form the technology that single electron beam is drawn X ray.Japanese kokai publication hei 08-264139 and Applied Physics Letters 86,184104 (2005), thus J.Zhang ＂ Stationary scanning x-ray source based on carbon nanotube fieldemitters ＂ discloses by being used to shine the technology that x-ray target generates X ray from the electron beam that uses the multiple electron source of a plurality of cold-cathode electron sources.

In addition, TOHKEMY 2007-265981 discloses and will form the X-ray equipment of multi x-ray bundle no any phase mutual interference, that have good characteristic from a plurality of X-ray beams in multi x-ray source.

Can utilize rotary target type x-ray source as traditional single focus X-ray source.Existing have the method for the X ray of different radiation quality (radiationquality) by using this x-ray source to generate.As the object lesson of this method, Japanese kokai publication hei 05-028939 and 05-036368 disclose two types target material 102 utilizing electron beam to shine respectively to be placed on the rotary target 101 and the method for 102a, as shown in Figure 13.In addition, Japanese kokai publication hei 01-204649 discloses by arranging that on two surfaces of a rotary target different target materials generates the method and the application process thereof of the X ray with different radiation qualities.

In the representative rotary target type x-ray source as single focus X-ray source, because in the restriction of aspects such as the shape of electron source, target structure, the limited amount of the type of the radiation quality that can obtain from a pipe is about two.In addition, because the quantity of the focus of x-ray source also is limited as about two, therefore is difficult to according to the body part of subject and Adjusting Shape radiation quality thereof and dosage condition and is difficult to obtain high-quality radioscopic image.

Summary of the invention

Consider that the problems referred to above have made the present invention.Exemplary embodiments of the present invention provides by the radiation quality in the increase selection x-ray source and the degree of freedom of irradiation position, thereby can have the X ray generation equipment and the X ray picture pick-up device of the radioscopic image of high-contrast at high speed with the acquisition of low dosage ground.

According to an aspect of the present invention, provide a kind of multi x-ray to generate equipment, comprise: multiple electron source, it comprises a plurality of electron sources of two-dimensional arrangement, and exports electronics from the electron source that is driven by described a plurality of electron source optionally is provided according to the drive signal that is provided; And target unit, it comprises a plurality of targets with the mode two-dimensional arrangement relative with described a plurality of electron sources, irradiation according to the electronics of exporting from described multiple electron source generates X ray, and export X ray with different radiation qualities according to the generation position of X ray, wherein, the selectivity by electron source in the described multiple electron source drives generation position and the radiation quality of controlling from the X ray of described target unit.

In addition, according to a further aspect in the invention, provide a kind of X ray picture pick-up device, having comprised: described multi x-ray generates equipment; Two-dimensional x-ray detector, it generates and the corresponding signal of telecommunication of dosage of exporting and arrived the X ray of detection faces from described multi x-ray generation equipment; And driver part, be used for generating drive signal according to drive condition, and by providing described drive signal to drive each electron source to described multiple electron source.

According to below with reference to the explanation of accompanying drawing to exemplary embodiments, it is clear that further feature of the present invention will become.

Description of drawings

Fig. 1 illustrates the figure of example that generates the structure of equipment according to the multi x-ray of first embodiment;

Fig. 2 is the plane graph of device substrate;

Fig. 3 A is the figure that illustrates as the example of the structure of the Spindt type element of the example of electronic emission element;

Fig. 3 B is the figure that illustrates as the example of the structure of the carbon nano tube type element of the example of electronic emission element;

Fig. 3 C is the figure that illustrates as the example of the structure of the surface conductive type element of the example of electronic emission element;

Fig. 4 is the figure that the voltage-current characteristic of polyelectron radiated element is shown;

Fig. 5 A is the plane graph of example that the structure of the transmission target that uses many targets is shown;

Fig. 5 B is the sectional view of example that the structure of the transmission target that uses many targets is shown;

Fig. 6 is the figure that the example of the X ray spectrum in many targets scheme is shown;

Fig. 7 A is the plane graph of example that the structure of the transmission target that uses multi-filter is shown;

Fig. 7 B is the sectional view of example that the structure of the transmission target that uses multi-filter is shown;

Fig. 8 is the figure that illustrates by the example of the X ray spectrum that transmission target obtained that uses multi-filter;

Fig. 9 is the figure that illustrates according to the example of the structure of the transmission target of the 3rd embodiment;

Figure 10 is the figure that illustrates according to the example of the structure of the X ray picture pick-up device of the 3rd embodiment;

Figure 11 is the figure that is used to explain according to the illumination unit of the X ray picture pick-up device of the 3rd embodiment;

Figure 12 is the figure that illustrates according to the integrally-built example of the multi x-ray picture pick-up device of the 4th embodiment;

Figure 13 illustrates the figure that the X ray that can generate the X ray with different radiation qualities generates the conventional example of equipment; And

Figure 14 is the flow chart that is used for explaining that radiography that the control unit by the 4th embodiment carries out is handled.

Embodiment

With reference to the accompanying drawings, preferred embodiments of the present invention will be described below.

First embodiment

Fig. 1 illustrates the figure of example that generates the structure of equipment 10 as the multi x-ray in multi x-ray source.With reference to figure 1, vacuum chamber 11 comprises as the multi electron beam generation unit 12 of multiple electron source with as the transmission target 13 in multi x-ray source.Multi electron beam generation unit 12 comprises device substrate 14 and is arranged with the element arrays 16 of a plurality of electronic emission elements 15.Electronic emission element 15 is as electron source.The driving of driver element 17 control electronic emission elements 15.Be provided with the lens electrode 19 and the anode electrode (anode electrode) 20 that are fixed to insulator 18, to control the electron beam e that launches from electronic emission element 15.Via high

pressure introducing portion

21 and 22 high pressure is applied to lens electrode 19 and anode electrode 20.

The transmission target 13 of the electron beam e bump that is generated is arranged according to electron beam e is discrete.The vacuum chamber X ray barricade of being made by heavy metal 47 is set on transmission target 13.Vacuum chamber X ray barricade 47 has X ray lead division 24.The wall portion 25 of the vacuum chamber 11 relative with X ray lead division 24 is provided with the X ray extraction window 27 that comprises X ray transmission film 26.

The lens effect of the electron beam e receiver lens electrode of launching from electronic emission element 15 19, and be accelerated to final current potential by transmission target 13 parts of anode electrode 20.The X-ray beam x that is generated by transmission target 13 passes through X ray lead division 24, and is led to atmosphere via X ray extraction window 27.

As shown in FIG. 2, electronic emission element 15 is arranged on the element arrays 16 two-dimensionally.Along with the latest developments of nanometer technology, can form fine structure in the precalculated position by device technology with nanometer (nm) size.Make electronic emission element 15 by nanometer technology.The electron emission amount of controlling electronic emission element 15 individually by drive signal S1 and S2 (back will illustrate) via driver element 17.That is, come the electron emission amount of the electronic emission element 15 on the control element array 16 individually as matrix signal (matrix signal), make and to carry out ON/OFF control to each X-ray beam by using drive signal S1 and S2.

Fig. 3 A～3C is the figure that some examples of the component structure that can be used as electronic emission element 15 are shown.Fig. 3 A is that to illustrate with Spindt type electron source be the figure of structure of the electronic emission element with taper pin 15 of representative.Insulator 32 and extraction electrode 33 are arranged on the device substrate of being made by Si 31.By using device fabrication in the groove of the center of electrode μ m size, to form each taper reflector 34 of making and having the tip diameter of tens nanometers by metal or semi-conducting material.

Fig. 3 B is the figure that the structure of carbon nano tube type electronic emission element 15 is shown.As the material of reflector 35, used the carbon nano-tube of fine structure with tens nanometers.Reflector 35 is formed on the center of the extraction electrode 36 on the device substrate 31.

When the extraction electrode 36 to the extraction electrode 33 of Spindt type element and carbon nano tube type element applies tens during to the voltage of several hectovolts,

reflector

34 and 35 tip are applied with high electric field, thereby by an emission phenomenon divergent bundle e.

Fig. 3 C is the figure that the structure of surface conductive type electronic emission element 15 is shown.Gap location in the membrane electrode 37 on being formed on glass elements substrate 39 forms the fine structure with nano particle as reflector 38.When the voltage that applies tens volts between the electrode of surface conductive type element, the fine gap that is formed by the minuteness particle between the electrode is applied with high electric field.This has just generated conduction electron.Simultaneously, divergent bundle e in a vacuum, and can be with low relatively voltage control electronics emission.

Fig. 4 illustrates when using as above with reference in the described Spindt type of figure 3A～3C element, carbon nano tube type element and the surface conductive type element some, the figure of the difference between their voltage-current characteristic.In order all to obtain the constant emission electric current, apply by utilizing correction voltage Δ V to proofread and correct voltage that average drive voltage Vo obtained as driving voltage to electronic emission element 15 from a plurality of electronic emission elements.This can proofread and correct from the variation in the emission current of electronic emission element 15.

Notice that the structure of electronic emission element is not limited to said structure.For example, electron source as the generation multi x-ray bundle except that above-mentioned electronic emission element, can use MIM (Metal Insulator Metal, metal-insulator-metal type) type element and MIS (Metal Insulator Semiconductor, metal-insulator semiconductor) type element.In addition, can use the cold-cathode electron source of any types of making as semiconductor PN electron source, schottky junction (Schottkyjunction) type electron source with by carbon nano-fiber such as carbon-base film electron source as the electron source that is used to generate the multi x-ray bundle.

Use above-mentioned cold cathode electronic emission element to generate equipment, come emitting electrons by at room temperature applying voltage, and need not heated cathode to electronic emission element as the X ray of electron source.Therefore, this equipment need not to generate the stand-by period of X ray.In addition, owing to do not need the electric power of heated cathode, so even can make the x-ray source of low-power consumption by using the multi x-ray source.Owing to can come by the high-speed driving operation of using driving voltage the electric current from these electronic emission elements is carried out ON/OFF control, therefore can make many array types x-ray source that can optionally drive electronic emission element and carry out the high-speed response operation.

Transmission target 13 in the present embodiment comprises according to a plurality of targets that generate X ray from the irradiation as the electronics of multi electron beam generation unit 12 output of multiple electron source, and as the target unit of exporting the X ray with different radiation qualities according to the generation position of X ray.Fig. 5 A and 5B are used for the specific explanations multi x-ray to generate the figure of structure in multi x-ray source (target unit) that equipment 10 allows to select the radiation quality of the X ray that will generate.

Fig. 5 A and 5B are the figure that is used to explain according to the structure of the transmission target 13 of first embodiment, and the example of many targets is shown.As shown in Fig. 5 A, the transmission target 13 of having used many targets has a plurality of targets that are arranged in the position relative with electronic emission element 15 among Fig. 1.These targets bases are used for target A41 and target B42 is made from a variety of materials.Fig. 5 B is the sectional view at the transmission target 13 shown in Fig. 5 A.Target A41 on the substrate 45 and target B42 are clamped between X ray/reflection electronic bundle barricade 46 and the vacuum chamber X ray barricade 47.In the mode that closely contacts mutually transmission target 13 is clamped between X ray/reflection electronic bundle barricade 46 and the vacuum chamber X ray barricade 47, heat that target produced effectively can leave.

According to said structure, specify from the position that a plurality of electronic emission elements 15 are launched electron beam e, can be according to the dissimilar X ray of drawing of target.That is, transmission target 13 is exported the X ray with different radiation qualities according to the generation position of X ray.Therefore the multi x-ray of present embodiment generates equipment 10 can generate the X ray with various energy responses in an X-ray tube.Fig. 6 is the figure that the form of dosage characteristic is illustrated the X ray spectrum that is generated by the multi x-ray generation method of using the many targets in the present embodiment with energy.Fig. 6 illustrates from the X ray spectrum of target A 41 and target B 42 generations.Because the difference of the atomic number between the target material causes characteristic X-ray A different with characteristic X-ray B aspect energy, therefore, even under the identical situation of the accelerating voltage (ceiling capacity Eo) of electron beam, also can obtain to have the radiation quality of the X ray of different effective energies.Can be from combination as selection target material the typical combination of metallic elements such as Cu, Mo, Rh, Pd, Sn, Ta, W, Pt and Au.Obviously, also can use the combination of other element or alloy.

Compare with the method for using the traditional X-ray ray tube, owing to above-mentioned multi x-ray according to first embodiment generates equipment selective radiation matter easily, so it can easily obtain high-quality radioscopic image.

Second embodiment

In first embodiment, realize exporting the transmission target 13 of X ray by many targets with different radiation qualities according to the generation position of X ray.The second embodiment illustration realize the situation of this kind transmission target in this multi-filter, being furnished with a plurality of filters that have different X ray absorption characteristics with respect to X ray by multi-filter.

Fig. 7 A and 7B are the example of structure that illustrates according to the transmission target 13 of second embodiment, and the example of use multi-filter as the X ray baffle is shown.As shown in Fig. 7 A, in transmission target 13, filter is arranged in the target position place relative with electronic emission element 15 independently.Filter A 43 and filter B 44 are made from a variety of materials.Fig. 7 B is the sectional view of transmission target 13.The multi-filter that comprises filter A 43 and filter B 44 be arranged in substrate 45, with target substrate 48 facing surfaces of being shone by electron beam on, and multi-filter directly is clamped between vacuum chamber X ray barricade 47 and the substrate 45.This structure can be launched the position of electron beam e and draw X ray from different filter location from electronic emission element 15 by specifying.Therefore, can obtain different X ray spectrum by making by

filter A

43 and 44, one X-ray tubes of filter B based on X ray absorption characteristic difference from the X ray that target generated of same kind.

Fig. 8 illustrates by the X ray spectrum that uses this multi-filter to obtain, and more specifically, the spectrum of the X ray that comes by filter A and filter B transmission is shown.Fig. 8 illustrates the situation of cutting the spectrum on the low-yield side by filter A and filter B.As shown in FIG. 8, can obtain the effective energy of different effective energies as the next X ray of transmission.If Mo and Cu are set to the typical combination of the material of filter A and filter B, then filter A cutting is near the dosage on the more low-yield side of characteristic X-ray.On the contrary, filter B is omitted away from the position cutting dosage of characteristic X-ray.Owing to can freely select the material of these filters and their thickness according to the spectrum of expectation, therefore by using this multi-filter can freely form X ray spectrum with different effective energies.

The material of above-mentioned many targets and multi-filter and their combination can freely be set, and preferably make up these materials according to the radiography condition.In addition, with many targets among first embodiment and the combination of the multi-filter among second embodiment, can generate X ray with more diversified X ray spectrum.

Compare with the method for using traditional X-ray tube, above-mentioned multi x-ray according to second embodiment generates the X ray (X ray with different radiation qualities) that equipment can easily select to have different effective energies, and therefore can easily obtain high-quality radioscopic image.

The 3rd embodiment

Then, explanation had the application of the x-ray source of many radiation qualities characteristic with reference to figure 9～11.Fig. 9 is the figure that illustrates according to the transmission target 13 of the 3rd embodiment.This embodiment illustration the multi-filter by many targets that will in first embodiment, illustrate and explanation in a second embodiment make up the situation that forms transmission target 13.

By with the illuminate condition of many targets and multi-filter combination, and obtain the transmission target 13 of the 3rd embodiment with the coupling subject.In this case, filter is pressed the descending (descending of effective energy) of the radiation quality of X ray, promptly presses the sequence arrangement of (3), (2) and (1).In each group of target group A, B and C, target is pressed the descending (from c to a) of radiation quality and is upwards arranged in turn.That is, in the transmission target 13 shown in Figure 9, periodically arrange a plurality of dissimilar targets.Note, can periodically arrange filter with different qualities.For example, as shown in FIG. 9, target group (1), (2) and (3) are by descending being disposed in order with (3) → (2) → (1) of radiation quality.Different filters can be by descending being disposed in order with c → b → a of radiation quality.Arrange the part that periodically generates different X ray in the target group by this way, can when the radiation quality that switches according to the x-ray bombardment condition from the X ray of each x-ray source, utilize the x-ray bombardment subject.

Multi x-ray with said structure can be generated the X ray picture pick-up device that equipment 10 is applied to picture mammography (mammography) shown in Figure 10.In this X ray picture pick-up device, the compression paddle (compression paddle) 56 that the multi x-ray with transmission target shown in Figure 9 13 generates equipment 10, two-dimensional x-ray transducer 54 and compressing subject 55 is installed on base for supporting 57.Two-dimensional x-ray transducer 54 is the two-dimensional x-ray detectors that generate the signal of telecommunication according to the dosage that arrives the X ray of detection faces via subject 55.The X ray transmissivity of subject 55 increases in Figure 10 from right to left.Therefore, if arrange filter ((3) → (1)), then can utilize the best X-radiation whole irradiation area of verifying to carry out radiography to reduce the effective energy of X ray in the direction.Utilizing the best X-radiation whole irradiation area of verifying to carry out radiography by this way, is being effective aspect the radioscopic image that reduces exposure dose and acquisition high-contrast.

Figure 11 is the figure that the X ray picture pick-up device Figure 10 is shown from other angle, and the state that passes through to be used to carry out from the X ray of the different angles of target group B and C tomographic (tomography) of the advantage of using multi x-ray to generate equipment is shown more specifically.In this case, for target group B and C, owing to utilize X ray to shine subject obliquely, therefore preferably use and be the different X-radiation matter of the selected radiation quality of target group A according to illuminate condition.Multi x-ray generation equipment according to present embodiment can easily be realized this x-ray bombardment.

The 4th embodiment

Figure 12 illustrates to comprise that the multi x-ray with many radiation qualities function generates the figure of example of structure of the multi x-ray picture pick-up device of equipment 10.In this picture pick-up device, multi x-ray shown in Figure 1 generates equipment 10 arranged in front the transmission-type X ray detecting unit 72 that comprises X ray ionization meter unit 71.This equipment also comprises two-dimensional x-ray detector 73, and two-dimensional x-ray detector 73 generates 10 outputs and the corresponding signal of telecommunication of dosage arrive the X ray of detection faces via the subject (not shown) with the equipment that generates from multi x-ray.Each X ray extraction window 27 is provided with X ray ionization meter unit 71.Transmission-type X ray detecting unit 72 and two-dimensional x-ray detector 73 are connected to control unit 76 via x-ray detection

signal processing unit

74 and 75 respectively.The output of control unit 76 is connected to driver element 17 via electronic emission element drive circuit 77.The output of control unit 76 also is connected to the high

pressure introducing portion

21 and 22 of lens electrode 19 and anode electrode 20 respectively via high

voltage control unit

78 and 79.

To lead to atmosphere as multi x-ray bundle x from the X-ray beam x that transmission target 13 generates via the X ray extraction window 27 that is arranged in the wall portion 25.Then, X-ray beam x is transmitted to X ray ionization meter unit 71.X-ray beam x transmission utilizes this X-ray beam x irradiation subject then by the X ray ionization meter unit 71 of transmission-type X ray detecting unit 72.The two-dimensional x-ray detector 73 X-ray beam xs of detection by the subject transmission are to obtain the image of subject.

In order to reduce x-ray dose and to obtain the image of high-contrast, the radiation quality of X ray and dosage optimization are necessary based on subject information.Control unit 76 keeps the activation bit of multi electron beam generation units 12, and this activation bit is used for to obtain best contrast with low dosage based on the thickness of the body part of the voltage-current characteristic data of electronic emission element 15 as shown in Figure 4 and subject.Control unit 76 is by referenced drive information when receiving as the user the information such as thickness of the appointment of body part and body part from the input unit (not shown), determines the drive condition (necessity of driving, the voltage that will apply etc.) of each electronic emission element 15 of multi electron beam generation unit 12.Then, control unit 76 is according to determined drive condition control electronic emission element drive circuit 77.Under the control of control unit 76, electronic emission element drive circuit 77 generates drive signal S1 and S2 and they is offered driver element 17.In addition, control unit 76 is measured the intensity of the actual X ray that generates by using X ray ionization meter unit 71 and x-ray detection signal processing unit 74, and proofreaies and correct the driving voltage of each electronic emission element.This makes and can utilize the radioscopic image that each body part of taking subject is set that mates best X shooting illuminate condition.

Control unit 76 is proofreaied and correct each signal from two-dimensional x-ray detector 73 based on the intensity as the X ray of the measurement result that is obtained by X ray ionization meter unit 71.That is, control unit 76 is based on the measurement result that is obtained by X ray ionization meter unit 71, by handling and form radioscopic image carrying out numerical value with the corresponding signal of telecommunication of the dosage of the X ray with different radiation qualities.When utilizing different radiation qualities that homogeneous (homogeneous) subject is carried out radiography, because the X ray of irradiation subject has different effective energies, therefore observing the radioscopic image that is obtained is the image with different contrasts.Owing to this reason, this equipment is handled the contrast range with correction (compression/amplification) image that each was obtained, thereby even also can obtain to have the image of same contrast under the situation of different radiation qualities.This makes can eliminate the influence of the difference of X-radiation matter to radioscopic image.If equipment does not have transmission-type X ray detecting unit 72, then control unit 76 can be proofreaied and correct each signal from two-dimensional x-ray detector 73 based on by the voltage of the driving condition of each electronic emission element of control unit 76 self appointment, each electronic emission element type to current characteristics and target and filter.That is, control unit 76 is based on the drive condition of each electron source in the multiple electron source, by handling and form radioscopic image carrying out numerical value with the corresponding signal of telecommunication of a plurality of x-ray doses with different radiation qualities.

Figure 14 is the flow chart that is used to explain the sequence of the radiography processing of being undertaken by control unit 76.At step S1401, control unit 76 receives by the body part of user via the appointment of operating unit (not shown).At step S1402, control unit 76 is provided with the drive condition (drive pattern) of multi electron beam generation unit 12 by the activation bit of reference multi electron beam generation unit 12.Body part and drive condition (pattern information) are registered in the activation bit table 1400 in pairs.Specify body part can obtain the corresponding driving condition.A plurality of electronic emission elements that drive condition comprises multi electron beam generation unit 12 ON/OFF information, voltage (electric current) that will apply and being used for is separately determined the target/filter information etc. of the radiation quality of X ray.

At step S1403, control unit 76 control electronic emission element drive circuits 77 are to drive multi electron beam generation unit 12 under the drive condition that obtains in step S1402.At step S1404, control unit 76 is operated according to above-mentioned driving, obtains the X ray intensity distributions as the measurement result that is obtained by X ray ionization meter unit 71.At step S1405, control unit 76 is operated according to above-mentioned driving, obtains x-ray detection signal as the testing result that is obtained by two-dimensional x-ray detector 73 from x-ray detection signal processing unit 75.At step S1406, control unit 76 is proofreaied and correct x-ray detection signal by using the X ray intensity distributions, and by using the x-ray detection signal after proofreading and correct to generate the radioscopic image data.At step S1407, control unit 76 is proofreaied and correct the drive condition in the activation bit table 1400 as required based on the X ray intensity distributions.If for example, between the needed X ray intensity distributions of the body part of X ray intensity distributions of measuring and appointment, there are differences, then drive condition is proofreaied and correct to eliminate this difference.

As mentioned above, use generates the X ray picture pick-up device of equipment 10 according to the drive condition of the condition setting electronic emission element drive circuit 77 of subject and body part thereof and the element area that will drive according to the multi x-ray of the 4th embodiment, thereby generates best X ray spectrum.That is, can provide a kind of like this X ray picture pick-up device that comprises radiation quality changeable type X-ray plane source, this radiation quality changeable type X-ray plane source can be specified the drive condition of electronic emission element according to the condition of subject and body part thereof.

As above described, according to the 3rd embodiment and the 4th embodiment, can select to have the X ray of best radiation quality and utilize this x-ray bombardment subject according to X ray acceptance condition and irradiating angle at each shape information and the body part information of subject.This makes can provide the X ray picture pick-up device that can form the radioscopic image of high-contrast with low dosage.

According to the present invention, the degree of freedom in the time of can being increased in the radiation quality selected in the x-ray source and irradiation position.

Although the present invention has been described with reference to exemplary embodiments, should be appreciated that, the invention is not restricted to disclosed exemplary embodiments.The scope of appended claims meets the wideest explanation, to comprise all this class modification and equivalent structure and functions.

Claims

1. a multi x-ray generates equipment, comprising:

Multiple electron source, it comprises a plurality of electron sources of two-dimensional arrangement, and exports electronics from the electron source that is driven by described a plurality of electron source optionally is provided according to the drive signal that is provided; And

The target unit, it comprises a plurality of targets with the mode two-dimensional arrangement relative with described a plurality of electron sources, generates X ray according to irradiation, and exports X ray with different radiation qualities according to the generation position of X ray from the electronics of described multiple electron source output,

Wherein, the selectivity by electron source in the described multiple electron source drives generation position and the radiation quality of controlling from the X ray of described target unit.

2. multi x-ray according to claim 1 generates equipment, it is characterized in that described a plurality of targets comprise at least two kinds of targets of being made by different materials.

3. multi x-ray according to claim 2 generates equipment, it is characterized in that, periodically is furnished with the target of being made by different materials in described target unit.

4. multi x-ray according to claim 1 generates equipment, it is characterized in that described target unit comprises and the corresponding a plurality of filters of described a plurality of targets, and described a plurality of filter comprises at least two kinds of filters that have different qualities with respect to X ray.

5. multi x-ray according to claim 4 generates equipment, it is characterized in that, described a plurality of filters comprise the filter that has different qualities and periodically arrange.

6. generate equipment according to each described multi x-ray in the claim 1 to 5, it is characterized in that described a plurality of electron sources include cold cathode.

7. X ray picture pick-up device comprises:

Generate equipment according to each described multi x-ray in the claim 1 to 5;

Two-dimensional x-ray detector, it generates and the corresponding signal of telecommunication of dosage of exporting and arrived the X ray of detection faces from described multi x-ray generation equipment; And

Driver part is used for generating drive signal according to drive condition, and by providing described drive signal to drive each electron source to described multiple electron source.

8. X ray picture pick-up device according to claim 7 is characterized in that, also comprises parts are set, and described the drive condition that parts are used for being provided with based on the information that will carry out radiographic X body part described each electron source of multiple electron source is set,

Wherein, described driver part is according to each electron source that is driven by the described drive condition that the parts setting is set in the described multiple electron source.

9. X ray picture pick-up device according to claim 8 is characterized in that, also comprises measurement component, and described measurement component is used for generating the intensity of measuring between equipment and the subject from the X ray of described multi x-ray generation equipment output at described multi x-ray,

Wherein, described driver part is based on the measurement result that is obtained by described measurement component, proofreaies and correct and will carry out the corresponding drive condition of radiographic X described body part.

10. X ray picture pick-up device according to claim 7 is characterized in that, also comprises the generation parts, and described generation parts are used for from generating radioscopic image by the signal of telecommunication that described two-dimensional x-ray detector generated.

11. X ray picture pick-up device according to claim 10 is characterized in that, also comprises measurement component, described measurement component is used for generating the intensity of measuring between equipment and the subject from the X ray of described multi x-ray generation equipment output at described multi x-ray,

Wherein, described generation parts form radioscopic image by pair carrying out the numerical value processing with the corresponding signal of telecommunication of the dosage of the X ray with different radiation qualities based on the measurement result that is obtained by described measurement component.

12. X ray picture pick-up device according to claim 10, it is characterized in that, described generation parts are handled by pair carrying out numerical value with the corresponding signal of telecommunication of the dosage of the X ray with different radiation qualities based on the drive condition of each electron source in the described multiple electron source, form radioscopic image.