CN103985622A - Radiation generating apparatus and radiography system including the radiation generating apparatus - Google Patents

Radiation generating apparatus and radiography system including the radiation generating apparatus Download PDF

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Publication number
CN103985622A
CN103985622A CN201410049216.7A CN201410049216A CN103985622A CN 103985622 A CN103985622 A CN 103985622A CN 201410049216 A CN201410049216 A CN 201410049216A CN 103985622 A CN103985622 A CN 103985622A
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CN
China
Prior art keywords
radioactive ray
target
heat transfer
produce equipment
equipment
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Granted
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CN201410049216.7A
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CN103985622B (en
Inventor
内海一成
上田和幸
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Canon Inc
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Canon Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A61B6/40—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment with arrangements for generating radiation specially adapted for radiation diagnosis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H05G1/025—Means for cooling the X-ray tube or the generator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/068—Multi-cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1291—Thermal conductivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H01J35/186—Windows used as targets or X-ray converters

Abstract

The invention discloses a radiation generating apparatus and a radiography system including the radiation generating apparatus. The radiation generating apparatus includes a cathode array including a plurality of electron emitting portions, and an anode array including a plurality of targets and a chained connection unit that connects the targets. The chained connection unit includes a plurality of shielding members and a thermal transfer member, the shielding members being arranged at locations corresponding to the locations of the respective targets, and the thermal transfer member having a thermal conductivity higher than a thermal conductivity of the shielding members. The thermal transfer member has a portion that is continuous in a direction in which the targets are arranged.

Description

Radioactive ray produce equipment and comprise these radioactive ray the radiography system of the equipment that produces
Technical field
The radiographic radioactive ray of non-destructive that the present invention relates to be particularly useful in diagnostic application and the industrial equipment field in area of medical devices produce equipment.
Background technology
The radioactive ray that produce the X ray that is used for medical diagnosis and industrial non-destructive imaging produce equipment and need to have high-durability and maintenance efficiency, to increase its operating rate.Such radioactive ray generation equipment can be used as the portable medical form that can be applicable to the nursing of family expenses medical treatment and nursing or the emergency medical in the situation that of for example disaster or accident and works.
The thermal stability that is used as the target of radiation source is to determine that radioactive ray produce one of principal element of the durability of equipment.
In the radioactive ray generation equipment by produce radioactive ray with electron beam irradiation target, the major part that offers the energy of target due to electron beam is converted into heat, and therefore " the radioactive ray generation efficiency " of target is less than 1%.When the hot dissipation that produces when target is not enough, generation problem: the adhesion of target and its support component is because thermal stress reduces, and the thermal stability of target is limited.
The method of known " radioactive ray generation efficiency " for increasing target is the transmission target using as follows, and this transmission target comprises the film-shaped target layer that contains heavy metal and allows radioactive ray to see through and support the support component of target layer.The open No.2009-545840 of PCT translator of Japanese patent discloses a kind of rotarting anode transmission target, and by this transmission target, " radioactive ray generation efficiency " increases to 1.5 times of efficiency of known rotarting anode reflecting target.
A kind of known be to use diamond as the material of support component of target layer that supports multiple shell target for promoting from the method for target external cooling.U.S. Patent No. 6850598 discloses in the time supporting the support component of the target layer be made up of tungsten and be made up of diamond, and radiating effect can increase and focus size can reduce.Diamond has high radioactive ray transparency and high thermal stability and heat conductivity, is therefore suitable as the material of the support component of transmission target.
Along with the development of the image processing techniques such as tomography for medical diagnosis, the array radioactive ray of launching multiple X-ray beams produce equipment and are developed as a kind of form.Such array radioactive ray generation equipment comprises the radioactive ray generation unit that is arranged to array, and each radioactive ray generation unit is configured to controlled separately.
Japanese Patent Laid-Open No.2007-265981 discloses the structure of array radioactive ray generation equipment, and the shield member wherein with opening is arranged on front side and the rear side of the plate shape target that comprises multiple radioactive ray generation units.Plate shape target and shield member thermo-contact.Due to this structure, according to Japanese Patent Laid-Open No.2007-265981, multiple X-ray beams with the radiation line angle being conditioned are produced the anterior transmitting of equipment towards radioactive ray, and the heat of target can be by the shield member heat release of the front side at target.
Summary of the invention
At the array radioactive ray generation equipment comprising for multiple shield members of respective target, the stability of having observed radioactive ray output reduces.The reduction (being radioactive ray exporting changes) of the stability of viewed radioactive ray output in the central area of array than more remarkable in the neighboring area at array.
As with reference to example, Fig. 7 A to 7C illustrates the schematic structure of anode array 40, wherein in the central area of the array that comprises multiple targets, observes radioactive ray exporting change.Fig. 7 A is the plane graph from the anode array watched of open side of transmitting radioactive ray.Fig. 7 B and 7C are the sectional views of obtaining along imaginary line VIIB-VIIB and VIIC-VIIC respectively of the anode array shown in Fig. 7 A.
In this reference example, three each targets 15 of multiple shell target 15(comprise target layer 13 and support component 14) on arranged direction Dat, arrange with the pitch (pitch) of 1/2 × Lat, thus arrangement length is Lat.Anode array 40 forms by connecting target 15 with chain type linkage unit 41, and this chain type linkage unit 41 comprises shield member 42 and heat transfer component 43.
Each shield member 42 is pieces of the rectangular parallelepiped protrusion part shape be made up of tungsten, and has the column opening at two opposite face openings of this piece.The inwall of the opening in each shield member 42 welding material (not shown) between between in the situation that be connected to the side surface of corresponding target 15.Heat transfer component 43 is made up of the material that having higher than the thermal conductivity of the thermal conductivity of welding material 42.
In this reference example, in chain type linkage unit 41, shield member 42 is arranged between heat transfer component 43, and arranges discontinuously on the arranged direction Dat of anode array 40.In this reference example, the length L tt of each heat transfer component 43 is less than the arrangement length Lat of target 15, and is also less than the array pitch 1/2 × Lat of target 15.Heat transfer component 43 is arranged in anode array 40 discretely.
Carry out result diligent in one's studies as the present inventor, the variation that has been found that the radioactive ray of exporting according to the array radioactive ray generation equipment of this reference example is to be caused by the thermal resistance on the arranged direction Dat of anode array 40 of the anode array 40 that comprises multiple targets 15.
More specifically, the present inventor has been found that shield member 42 is as the heat conducting bottleneck on the arranged direction Dat of anode array 40, and the hot effective heat release that hinders the target 15 at place of array center to produce.
The reduction of radioactive ray output stability causes the output of heterogeneous radiation line in the arranged direction of array, and the restriction that causes the restriction of the anode current to being provided for target and radioactive ray are produced to the level that the output of equipment rises to.Therefore, there is the demand for the reduction of inhibition radioactive ray output stability.
Therefore, the invention provides a kind of radioactive ray reliably and produce equipment, it is the array radioactive ray generation equipment comprising for multiple shield members of respective target, and in this radioactive ray generation equipment, because the radioactive ray exporting change that the heat conducting reduction in the arranged direction of array causes is suppressed.The present invention also provides radiography system.
Radioactive ray generation equipment according to an aspect of the present invention comprises the cathode array of multiple electron emission part and comprises multiple targets and connect the anode array of chain type linkage unit of target, and target is disposed in the position corresponding with the position of respective electronic emission part and when by electron irradiation from the transmitting of respective electronic emission part, produces radioactive ray.Chain type linkage unit comprises multiple shield members and heat transfer component, and shield member is disposed in the position corresponding with the position of respective target, and the thermal conductivity of heat transfer component is higher than the thermal conductivity of shield member.Heat transfer component is extended continuously in the arranged direction of target.
The following description of reading exemplary embodiment with reference to accompanying drawing, it is clear that further feature of the present invention will become.
Brief description of the drawings
Figure 1A is the plane graph that can be applicable to radioactive ray according to an embodiment of the invention and produce the basic example of the anode array of equipment, and Figure 1B and 1C are respectively the IB-IB along the line of Figure 1A and the sectional view that IC-IC obtains.
Fig. 2 A and 2B are respectively sectional view and the plane graphs of radioactive ray generation equipment according to an embodiment of the invention.
Fig. 3 A is the plane graph that can be applicable to radioactive ray according to an embodiment of the invention and produce another example of the anode array of equipment, and Fig. 3 B and 3C are respectively the IIIB-IIIB along the line of Fig. 3 A and the sectional view that IIIC-IIIC obtains.
Fig. 4 A is the plane graph that can be applicable to radioactive ray according to an embodiment of the invention and produce another example of the anode array of equipment, and Fig. 4 B and 4C are respectively the IVB-IVB along the line of Fig. 4 A and the sectional view that IVC-IVC obtains.
Fig. 5 can be applicable to the plane graph of another example of the anode array of radioactive ray generation equipment according to an embodiment of the invention.
Fig. 6 A and 6B are respectively the amplification diagrams of the coupling part between chain type linkage unit and the target in the example shown in Figure 1A to 1C and Fig. 3 A to 3C.
Fig. 7 A is according to the plane graph of the anode array of reference example, observe intensity of radiation and change, and Fig. 7 B and 7C is respectively the VIIB-VIIB along the line of Fig. 7 A and the sectional view that VIIC-VIIC obtains in this reference example in the central area of anode array.
Fig. 8 illustrates and comprises the radiography system of radioactive ray generation equipment according to an embodiment of the invention.
Embodiment
Describe radioactive ray according to an embodiment of the invention now with reference to accompanying drawing and produce equipment and radiography system.Unless otherwise noted, otherwise material of the assembly of describing in embodiment, size, shape, positioned opposite etc. be not intended to limit the scope of the invention.
Radioactive ray produce equipment
First, with reference to Fig. 2 A, 2B and 8, the basic structure of radioactive ray generation equipment is according to an embodiment of the invention described.Fig. 2 A comprises that the radioactive ray of drive circuit 33 produce the schematic sectional view of equipment 20.Fig. 2 B is the plane graph that the radioactive ray shown in Fig. 2 A of watching of the side from being furnished with anode array 10 produce equipment 20.
In the present embodiment, as shown in Figure 2 A, radioactive ray produce equipment 20 and comprise cathode array 12, and it comprises multiple electron emission part 11.Produce equipment 20 according to the radioactive ray of the present embodiment and also comprise anode array 10, it comprises multiple targets 15 and makes the interconnective chain type linkage unit 1 of target 15, and the plurality of target 15 is arranged in the position corresponding with the position of respective electronic emission part 11.
Chain type linkage unit 1 comprises the shield member 2 that is arranged in the position corresponding with the position of target 15, with and thermal conductivity higher than the heat transfer component 3 of the thermal conductivity of shield member 2.Heat transfer component 3 is formed in the upper extension continuously of arranged direction Dat of arranging target 15.To describe after a while chain type linkage unit 1 in detail.
In the present embodiment, as shown in Figure 2 A and 2B, provide the shell 21 as the container of being made by brass (brass).Cathode array 12 is arranged in the interior zone 23 of shell 21, and anode array 10 is connected to the opening 22 in shell 21, thereby target layer 13 is in the face of corresponding electron emission part 11.
In the present embodiment, cathode array 12 and anode array 10 are connected to drive circuit 33 by electric current leading-in terminal 34, and it defines cathode potential and anode potential.Anode array 10 is connected to earth terminal 35 together with shell 21.In other words, producing in equipment 20 according to the radioactive ray of the present embodiment, plus earth.
The type of electron emission part 11 is not limited especially, as long as electron emission part 11 can be controlled by drive circuit 33.The electron source comprising in electron emission part 11 can be cold cathode or hot cathode.Carbon nano-tube (CNT) negative electrode, dipping electron gun etc. can be used as electron source.
Shell 21 is following containers, and this container allows electron emission part 11 and target layer 13 are arranged in its interior zone 23 or are arranged on its inner surface.
In order to ensure enough life-spans of enough mean free paths of electronics and the electron emission characteristic of electron emission part 11, the interior zone 23 of shell 21 is evacuated.In order to realize these objects, the vacuum in the interior zone 23 of shell 21 can be to be more than or equal to 1 × 10 -4pa and be less than or equal to 1 × 10 -8pa.
Therefore, shell 21 can be enough firm in to bear atmospheric pressure.Owing to forming a part for shell 21 according to the anode array 10 of the present embodiment, therefore anode array 10 also can be enough firm in to bear atmospheric pressure.
In the present embodiment, because anode array 10 is connected to shell 21, anode array 10 provides the function that increases equipment intensity due to physical connection, the device driver functionality causing due to electrical connection and because heat conduction connects the heat release promotion functions causing.
Radiography system
With reference to Fig. 8, radioactive ray generation equipment 20 can be comprised in radiography system 30 according to an embodiment of the invention.Radiography system 30 comprises radiation detecting apparatus 32 and system controller 36, this radiation detecting apparatus 32 detects that to produce equipment 20 from radioactive ray that launch and see through the radioactive ray of subject 31, and this system controller 36 produces equipment 20 by radioactive ray and controls associated with one another with radiation detecting apparatus 32.
Anode array
Describe and can be applicable to the example of the anode array 10 of radioactive ray generation equipment according to an embodiment of the invention now with reference to Figure 1A to 1C.Anode array 10 is characteristic assemblies according to an embodiment of the invention.
Figure 1A is the plane graph of the anode array 10 watched of the side from being formed for the opening of launching radioactive ray.Figure 1B and 1C are respectively the IB-IB along the line of the anode array 10 shown in Figure 1A and the sectional view that IC-IC obtains.
Each target 15 of this example is multiple shell target, the support component 14 that it comprises target layer 13 and supports target layer 13.
Each multiple shell target 15 is included in the target layer 13 of a side formation of support component 14.The method that is used to form target layer 13 is not limited especially; For example, can use sputter, vapour deposition, pulsed laser deposition or the gas phase film build method such as chemical vapor deposition (CVD).
Target layer 13 is the films that contain target metal.Can suitably be selected according to the accelerating voltage between needed radioactive ray quality and anode and negative electrode as the metal of target metal, and to select atomicity be 40 or larger metallic element (such as tungsten, molybdenum or tantalum).
Target layer 13 is not limited to those target layers that contain as the target metal of simple metal, and target metal can be by involved with the form of metal alloy, nitride, carbide or oxide.
The material that support component 14 can produce the operating temperature of equipment or the temperature during radioactive ray produce the manufacture of equipment by radiation resistant is made.For example, can use beryllium, graphite or diamond.From the angle of the self damping of thermal stability, heat conductivity and radioactive ray, support component 14 can be formed by diamond.
In the time that each target 15 has sandwich construction as above, the function of the inhibition of the self damping of radioactive ray generation, heat radiation and radioactive ray can be provided individually, and the material of assembly can be optimised.
The material that is used as support component 14 at diamond, from the angle of manufacture process and material cost, it is unpractical forming the anode array that comprises single plate shape support component described in Japanese Patent Laid-Open No.2007-265981.Therefore, in the case of using the material of diamond as the support component 14 of anode array, if Figure 1A is to as shown in 1C, it is real arranging discretely the support component 14 of being made up of diamond and connecting by chain type linkage unit 1 adjacent support member 14 of being made up of diamond.
Therefore, array radioactive ray generation equipment according to an embodiment of the invention is that the radioactive ray that comprise following anode array produce equipment, this anode array comprises multiple multiple shell targets and the chain type linkage unit that is connected multiple shell target, and this chain type linkage unit comprises the shield member corresponding to respective target.
Next, will describe as according to the chain type linkage unit 1 of the characteristic assembly of the anode array 10 of the present embodiment.Chain type linkage unit 1 comprises shield member 2 and heat transfer component 3.
As shown in Figure 1B, Figure 1B is along the sectional view of obtaining by the line IB-IB of central shaft, and target 15 is along this central shaft layout, and the heat transfer component 3 of anode array 10 is divided into discontinuous part by the shield member 2 corresponding to target 15.But as shown in Figure 1A and 1C, heat transfer component 3 has length L tt and is being greater than in the scope of arrangement length Lat of target 15 on the arranged direction Dat of target 15 extends continuously.
The heat transfer mechanism of this structure represents by following equivalent electric circuit, and in this equivalent electric circuit, at the interval with 1/2 × Lat, mutual separated position is via the thermal resistance of support component 14, and three thermal source parallel joins are to the series connection heat transfer path of heat transfer component 3.
In this example, thus there is no to arrange that the shield member with large thermal resistance does not hinder the heat transmission in the arranged direction Dat of target 15 and the direction contrary with this arranged direction Dat.Therefore the heat that, the target 15 of the center of layout is launched is passed to the end of layout effectively.This is the difference between the anode array 40 shown in the anode array 10 of this example and Fig. 7 A to 7C that wherein observes radioactive ray exporting change.
Each shield member 2 can form by being arranged in the rear shield part 2b of the side in the face of corresponding electron emission part 11 of corresponding target layer 13 and the anterior masked segment 2f that is arranged in the side that the side with in the face of electron emission part 11 of target layer 13 is contrary.
About the material of shield member 2, the intensity of the radioactive ray that can be produced by target layer 13 in consideration and quality, suitably select to have hyperbaric material.Well balanced in order to realize between radioactive ray shielding properties and cost, material can comprise tungsten, and (proportion is 19000kg/m 3and thermal conductivity is 115W/m/K under 1200K) as main component.
In the situation that comprises rear shield part 2b at each shield member 2, the target metal comprising in target layer 13 can be used as the material of masked segment 2.The deteriorated impact of the radioactive ray quality that the electronics being reflected by target layer 13 in such a case, causes can reduce.
According to embodiments of the invention, shield member 2 is made up of the material with the proportion higher than the proportion of heat transfer component 3.The heat dispersion that therefore, can provide with heat transfer component 3 provides radioactive ray shielding properties discretely.The size that this contributes to increase the thermal resistance of anode array 10 and reduces anode array 10.
Heat transfer component 3 is made up of the material with the thermal conductivity higher than the thermal conductivity of shield member 2.Well balanced in order to realize between heat conductivity and cost, this material can contain copper, and (proportion is 8460kg/m 3and thermal conductivity is 342W/m/K under 1200K), silver (proportion is 9824kg/m 3and thermal conductivity is 358W/m/K under 1200K) or its alloy as main component.
Fig. 6 A is the amplification diagram of the coupling part between the chain type linkage unit 1 shown in Figure 1A and each support component 14.Fig. 6 A illustrates unshowned welding material 26 in Figure 1A.As shown in Fig. 6 A, the anode array 10 of this example comprises coupling part 25, and it makes the side of heat transfer component 3 and support component 14 couple between in the situation that between them at welding material 26.
In the time that welding material 26 is made up of silver solder, can make the thermal conductivity (about 150 to 200W/m/K) of its thermal conductivity higher than shield member 2.Be different from shield member 2, welding material 26 occupies the very little space in chain type linkage unit 1, thereby even welding material 26 arrange as shown in Figure 6A, the continuity of heat transfer component 3 does not also reduce.
Other example
Describe and can be applicable to other example of the anode array 10 of radioactive ray generation equipment according to an embodiment of the invention with reference to Fig. 3 A to 3C, 4A to 4C, 5,6A and 6B.
In the anode array 10 shown in Fig. 3 A to 3C, the mode in the anode array 10 in mode and Figure 1A to 1C that the support component 14 of each target 15 couples from chain type linkage unit 1 is different.Fig. 6 B is the amplification diagram of the coupling part between the each support component 14 shown in Fig. 3 B and chain type linkage unit 1.Fig. 6 B illustrates unshowned welding material 26 in Fig. 3 A.
As shown in Fig. 6 B, the anode array 10 of this example comprises coupling part 25, and it makes the side of heat transfer component 3 and support component 14 couple between in the situation that between them at welding material 26 and shield member 2.The difference of the coupling part 25 shown in this coupling part 25 and Fig. 6 A is that shield member 2 is between heat transfer component 3 and the side of support component 14.
Fig. 3 B and 3C are respectively the sectional views of obtaining along imaginary line IIIB-IIIB and IIIC-IIIC of the anode array 10 shown in the plane graph of Fig. 3 A.
The heat transfer mechanism of this structure is represented by following equivalent electric circuit, in this equivalent electric circuit, at the interval with 1/2 × Lat, mutual separated position is via the series resistances of shield member 2 and support component 14, and three thermal source parallel joins arrive the series connection heat transfer path of heat transfer component 3.
This heat transfer mechanism and the heat transfer mechanism difference of the anode array 10 shown in Figure 1A to 1C be make thermal source at three position parallel joins to the thermal resistance that shield member 2 is set in the heat transfer path of the heat transfer path of connecting of heat transfer component 3.Therefore, the heat dispersion of the anode array 10 of this example is relatively low.But also in the anode array 10 of this example, as shown in Fig. 3 A and 3C, heat transfer component 3 has length L tt and is being greater than in the scope of arrangement length Lat of target 15 on the arranged direction Dat of target 15 extends continuously.Therefore, this anode array 10 also has property feature according to an embodiment of the invention.
In the anode array 10 shown in Fig. 4 A to 4C, form therein the region of each shield member 2 different from this region in the anode array 10 shown in Figure 1A to 1C.Fig. 4 B and 4C are respectively the sectional views of obtaining along imaginary line IVB-IVB and IVC-IVC of the anode array 10 shown in the plane graph of Fig. 4 A.
The heat transfer mechanism of this structure represents by following equivalent electric circuit, and in this equivalent electric circuit, at the interval with 1/2 × Lat, mutual separated position is via the thermal resistance of support component 14, and three thermal source parallel joins are to the series connection heat transfer path of heat transfer component 3.The anode array 10 of this example has the heat dispersion being equal to the heat dispersion of the anode array 10 shown in Figure 1A to 1C.
Fig. 5 illustrates its array pattern anode array different from the array pattern of the anode array shown in Figure 1A to 1C 10.Anode array 10 shown in Figure 1A to 1C has one dimension arrangement pattern, and the anode array 10 of this example shown in Fig. 5 has two-dimensional arrangement pattern.Also in this example, heat transfer component 3 is at arranged direction Dar(line direction) and Dac(column direction) on there is length L tr and Ltc and be greater than in the scope of arrangement length Lar and Lac and extend continuously.
Therefore, be applied to the arrangement pattern that radioactive ray according to an embodiment of the invention produce the target comprising in the anode array of equipment and be not limited to one dimension arrangement pattern.In addition, about arranged direction, target must or not be arranged along a straight line along the diagonal of matrix, and the present invention can be applicable to have the anode array of other any arrangement pattern.
Example 1
There is Figure 1A manufactured by following process to the anode array 10 of the structure shown in 1C.
That is, first, preparation plate-like support component 14, its thickness is that 1mm, diameter are 6mm, and is made up of diamond.Next, with an organic solvent support component 14 is carried out to degreasing, and by using ozone cineration device to remove remaining organic substance.The thermal conductivity of support component 14 is 1950W/m/K at 25 DEG C.
Next be, the target layer 13 that 8 μ m and diameter are 3.5mm by using argon gas to form thickness as carrier gas on a circular surface of each support component 14.Also on each support component 14, to the region of the periphery of support component 14, form the annular electrode (not shown) of being made by chromium at the periphery from target layer 13.Confirm that chromium electrode extends to the side of support component 14.Produce three multiple shell targets 15 by these processes.
Next three shield members 2 with opening that, preparation forms by machining.Shield member 2 arranged by the pitch with 12mm, and by molten copper is filled in three shield members 2 space around, form integrally molded.Finally, corresponding to the surface of the outer periphery surface of chain type linkage unit by mechanical lapping, thereby its shape is adjusted.Therefore, preparation chain type linkage unit 1, it forms as shown in Figure 1A to 1C, and comprises the heat transfer component 3 being made of copper and the shield member 2 of being made up of tungsten.At 25 DEG C, the thermal conductivity of heat transfer component 3 and shield member 2 is respectively 397W/m/K and 177W/m/K.Each shield member 2 has cylindrical shape, and comprises anterior masked segment 2f and the rear shield part 2b of the wall thickness all with 2mm.
Next, as shown in Figure 1B, be exposed in the region in the opening of shield member 2 in heat transfer component 3, target 15 is by using welding material 26(not shown) be couple to chain type linkage unit 1.Therefore, make the anode array 10 of the layout pitch with 12mm.The thermal conductivity of welding material is 170W/m/K at 25 DEG C.
Fig. 6 A is according to the amplification diagram in region around, the coupling part 25 between each target 15 and chain type linkage unit 1 in the anode array 10 of example 1.As shown in Figure 6A, the gap between support component 14 and heat transfer component 3 (is that 90 to 100 μ m) are filled welding material 26 with heat exchange pattern.
Next, form cathode array 12 by heat of immersion electron gun being fixed to keeper (not shown), it comprises three electron emission part 11 of arranging with the pitch identical with the layout pitch of anode array 10.
Next, the fastening cathode array 12 of fixture (not shown) in the interior zone 23 of the shell 21 of being made by SUS304 by use, and by using silver solder (not shown) that anode array 10 is connected to the opening 22 in shell 21.Next, cathode array 12 and anode array 10 are connected electrically to electric current leading-in terminal 34, and this electric current leading-in terminal 34 is arranged in shell 21 in advance.Anode array 10 and shell 21 are connected electrically to earth terminal 35.
Next, by using blast pipe, vacuum pump and getter (all not shown) that the interior zone of shell 21 23 is vacuumized.The vacuum pressure of shell 21 is 2 × 10 -6pa.
Then, electric current leading-in terminal 34 is connected to drive circuit 33.Therefore, manufacture the radioactive ray that form as shown in Figure 2 A and produce equipment 20.
Next, assessment radioactive ray produce the driving stability of equipment 20.By driving under the following conditions this drive circuit 33 to drive the assessment of stability.That is, be set to+100kV of accelerating voltage, and the density that imposes on the electronic current of target layer 13 is set to 3mA/mm 2.Carry out pulsed drive by repeating the electron irradiation time of 2 seconds and the non-irradiation time of 198 seconds.Cathode array 12 by dot sequency drive, stand pulsed drive with three targets 15 order that makes to arrange on arranged direction Dat.
In the time of the stability of assessment radioactive ray output intensity, measure the electric current that flows to earth terminal 35 from target layer 13, and use negative-feedback circuit (not shown) to carry out control to make the variation of anode current in 1%.
Radioactive ray output intensity is confirmed as the average of the value obtaining on the detection period of 1 second by the use dose radiation meter (pin hole is between between them) that place at 1m place before each target 15 of anode array.Based on assessing stability by the radioactive ray output intensity after 100 hours being carried out to the rate of change that standardization was obtained with original radioactive ray output intensity.
Producing in equipment 20 according to the radioactive ray of example 1, the variation of the radioactive ray output of the target 15 comprising in the anode array 10 shown in Figure 1A to 1C is followed successively by 0.98,0.99 and 0.99 from the target 15 in left side.
Produce equipment 20 according to the radioactive ray that comprise transmission target 15 of example 1, driven for a long time even if radioactive ray produce equipment 20, in the arranged direction of array, also do not occur significant radioactive ray exporting change.Therefore, confirmation can obtain stable radioactive ray output intensity.
According to the anode array 10 of example 1, due to as shown in Figure 1A to 1C, heat transfer component 3 is formed as on arranged direction Dat continuously extends, and shield member 2 and target 15 arrange discretely on arranged direction Dat, and therefore radioactive ray exporting change is suppressed.
Also confirm, drive in the period of stability in assessment, radioactive ray produce equipment 20 and are stably driven, and there is no guiding discharge.
Example 2
Except use the anode array 10 forming as shown in Fig. 4 A to 4C, the radioactive ray of manufacturing example 2 by being similar to the method for the method in example 1 produce equipment 20.
Producing in equipment 20 according to the anode of example 2, the variation of the radioactive ray output of the target 15 comprising in the anode array 10 shown in Fig. 4 A to 4C is followed successively by 0.98,0.99 and 0.99 from the target 15 in left side.
Also, in example 2, be similar to example 1, in the arranged direction of array, do not occur significant radioactive ray exporting change, and it is highly reliable to confirm that radioactive ray produce equipment 20.
Example 3
In example 3, manufacture by using according to the radioactive ray generation equipment 20 of example 1 radiography system 30 forming as illustrated in fig. 8.
Produce equipment 20 because the radiography system of example 3 comprises radioactive ray, produce in equipment 20 at these radioactive ray, the radioactive ray exporting change in the arranged direction of array is suppressed, therefore obtains the radioscopic image with high SN ratio.
Radioactive ray generation equipment comprises anode array according to an embodiment of the invention, and it comprises the multiple shield members for respective target.But, because " reduction of the heat conductivity in the arranged direction of target " that shield member causes is suppressed.Therefore, can provide the wherein radioactive ray of the repressed high reliability of radioactive ray exporting change to produce equipment, and comprise that these radioactive ray produce the radiography system of equipment.
Although described the present invention with reference to exemplary embodiment, should be understood that and the invention is not restricted to disclosed exemplary embodiment.The scope of following claim should be endowed the 26S Proteasome Structure and Function of the widest explanation to comprise all such alter modes and to be equal to.

Claims (20)

1. radioactive ray produce an equipment, comprising:
Cathode array, comprises multiple electron emission part; And
Anode array, comprises multiple targets and connects the chain type linkage unit of target, and target is disposed in the position corresponding with the position of respective electronic emission part and in the time of the electron irradiation of being launched from respective electronic emission part, produces radioactive ray,
Wherein, chain type linkage unit comprises heat transfer component and multiple shield member, and shield member is disposed in the position corresponding with the position of respective target, and the thermal conductivity of heat transfer component is higher than the thermal conductivity of shield member, and
Wherein, heat transfer component has part continuous in the arranged direction of target.
2. radioactive ray according to claim 1 produce equipment, and wherein, shield member has the proportion higher than the proportion of heat transfer component.
3. radioactive ray according to claim 1 produce equipment, and wherein, heat transfer component has the length larger than the arrangement length of target, and are included in continuous part in the direction that limits described arrangement length.
4. radioactive ray according to claim 1 produce equipment, and wherein, each target comprises target layer and support component, and described target layer produces radioactive ray when by the electron irradiation of the electron emission part transmitting from corresponding, and target layer described in described supporting units support, and
Wherein, described heat transfer component is couple to support component by coupling part.
5. radioactive ray according to claim 4 produce equipment, and wherein, each coupling part comprises the side of corresponding support component, a part and the welding material of heat transfer component.
6. radioactive ray according to claim 4 produce equipment, and wherein, support component has the thermal conductivity higher than the thermal conductivity of heat transfer component.
7. radioactive ray according to claim 6 produce equipment, and wherein, support component is made up of diamond.
8. radioactive ray according to claim 1 produce equipment, and wherein, target is transmission target.
9. radioactive ray according to claim 1 produce equipment, and wherein, target is arranged one-dimensionally.
10. radioactive ray according to claim 1 produce equipment, and wherein, shield member comprises tungsten as main component.
11. radioactive ray according to claim 1 produce equipment, and wherein, heat transfer component comprises copper, silver or its alloy as main component.
12. radioactive ray according to claim 11 produce equipment, and wherein, heat transfer component is made of copper, and shield member is made up of tungsten.
13. radioactive ray according to claim 5 produce equipment, and wherein, welding material is silver solder.
14. radioactive ray according to claim 1 produce equipment, and wherein, heat transfer component contacts and surround this shield member with the periphery of each shield member.
15. radioactive ray according to claim 1 produce equipment, wherein, heat transfer component be positioned at the side in the face of electron emission part of target and target with this in the face of the contrary side of a side of electron emission part.
16. radioactive ray according to claim 4 produce equipment, further comprise:
Shell, electron emission part and target layer are arranged in the inner space of described shell or on the inner surface of described shell.
17. radioactive ray according to claim 16 produce equipment, and wherein, anode array is connected to described shell.
18. radioactive ray according to claim 16 produce equipment, and wherein, described anode array is connected to the opening in described shell and forms a part for described shell.
19. radioactive ray according to claim 1 produce equipment, further comprise:
Drive circuit, described drive circuit limits the anode potential and the cathode potential that are respectively used to anode array and cathode array.
20. 1 kinds of radiography systems, comprising:
Produce equipment according to the radioactive ray described in any one in claim 1-19;
Radiation detecting apparatus, described radiation detecting apparatus detects from radioactive ray described radioactive ray generation equipment transmitting and that see through subject; And
Control device, described radioactive ray are produced to equipment with described control device and described radiation detecting apparatus is controlled associated with one another.
CN201410049216.7A 2013-02-13 2014-02-13 Radioactive ray produce equipment and comprise the radiography system that this radioactive ray produce equipment Expired - Fee Related CN103985622B (en)

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US20140226787A1 (en) 2014-08-14
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EP2768009A3 (en) 2017-03-08
JP2014154499A (en) 2014-08-25
EP2768009A2 (en) 2014-08-20
CN103985622B (en) 2016-10-05

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