CN101501342A - 用于半导体工艺的泵装置 - Google Patents

用于半导体工艺的泵装置 Download PDF

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Publication number
CN101501342A
CN101501342A CNA2006800372629A CN200680037262A CN101501342A CN 101501342 A CN101501342 A CN 101501342A CN A2006800372629 A CNA2006800372629 A CN A2006800372629A CN 200680037262 A CN200680037262 A CN 200680037262A CN 101501342 A CN101501342 A CN 101501342A
Authority
CN
China
Prior art keywords
single pump
pump
stage
described single
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006800372629A
Other languages
English (en)
Chinese (zh)
Inventor
G·亨特利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
Edwards Vacuum LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Vacuum LLC filed Critical Edwards Vacuum LLC
Publication of CN101501342A publication Critical patent/CN101501342A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Drying Of Semiconductors (AREA)
CNA2006800372629A 2005-10-06 2006-09-28 用于半导体工艺的泵装置 Pending CN101501342A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/244,744 2005-10-06
US11/244,744 US20070081893A1 (en) 2005-10-06 2005-10-06 Pump apparatus for semiconductor processing

Publications (1)

Publication Number Publication Date
CN101501342A true CN101501342A (zh) 2009-08-05

Family

ID=37911212

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006800372629A Pending CN101501342A (zh) 2005-10-06 2006-09-28 用于半导体工艺的泵装置

Country Status (7)

Country Link
US (1) US20070081893A1 (fr)
EP (1) EP1934482A2 (fr)
JP (1) JP2009513861A (fr)
KR (1) KR20080056192A (fr)
CN (1) CN101501342A (fr)
TW (1) TW200721245A (fr)
WO (1) WO2007044260A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106062374A (zh) * 2014-03-03 2016-10-26 诺沃皮尼奥内股份有限公司 用于运行带有侧流的背靠背的压缩机的方法和系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
US11199267B2 (en) 2019-08-16 2021-12-14 Applied Materials, Inc. Symmetric flow valve for higher flow conductance

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219493A (ja) * 1990-08-10 1992-08-10 Ebara Corp ターボ分子ポンプ
EP1005027B1 (fr) * 1995-10-09 2001-05-23 Matsushita Electric Industrial Co., Ltd. Enregistreur optique
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9708397D0 (en) * 1997-04-25 1997-06-18 Boc Group Plc Improvements in vacuum pumps
GB9719634D0 (en) * 1997-09-15 1997-11-19 Boc Group Plc Improvements in vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE69928172T2 (de) * 1998-06-17 2006-07-13 The Boc Group Plc, Windlesham Vacuumpumpe
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
US6129534A (en) * 1999-06-16 2000-10-10 The Boc Group Plc Vacuum pumps
GB9930556D0 (en) * 1999-12-23 2000-02-16 Boc Group Plc Improvements in vacuum pumps
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP2003021093A (ja) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106062374A (zh) * 2014-03-03 2016-10-26 诺沃皮尼奥内股份有限公司 用于运行带有侧流的背靠背的压缩机的方法和系统
CN106062374B (zh) * 2014-03-03 2019-09-10 诺沃皮尼奥内股份有限公司 用于运行带有侧流的背靠背的压缩机的方法和系统
US10473109B2 (en) 2014-03-03 2019-11-12 Nuovo Pignone Srl Method and system for operating a back-to-back compressor with a side stream

Also Published As

Publication number Publication date
TW200721245A (en) 2007-06-01
EP1934482A2 (fr) 2008-06-25
US20070081893A1 (en) 2007-04-12
KR20080056192A (ko) 2008-06-20
WO2007044260A3 (fr) 2009-04-30
JP2009513861A (ja) 2009-04-02
WO2007044260A2 (fr) 2007-04-19

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20090805