TW200721245A - Pump apparatus for semiconductor processing - Google Patents
Pump apparatus for semiconductor processingInfo
- Publication number
- TW200721245A TW200721245A TW095137044A TW95137044A TW200721245A TW 200721245 A TW200721245 A TW 200721245A TW 095137044 A TW095137044 A TW 095137044A TW 95137044 A TW95137044 A TW 95137044A TW 200721245 A TW200721245 A TW 200721245A
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor processing
- pump apparatus
- pump
- pressure
- transition
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000126 substance Substances 0.000 abstract 1
- 230000007704 transition Effects 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C19/00—Sealing arrangements in rotary-piston machines or engines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/04—Shafts or bearings, or assemblies thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Abstract
The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/244,744 US20070081893A1 (en) | 2005-10-06 | 2005-10-06 | Pump apparatus for semiconductor processing |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200721245A true TW200721245A (en) | 2007-06-01 |
Family
ID=37911212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095137044A TW200721245A (en) | 2005-10-06 | 2006-10-05 | Pump apparatus for semiconductor processing |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070081893A1 (en) |
EP (1) | EP1934482A2 (en) |
JP (1) | JP2009513861A (en) |
KR (1) | KR20080056192A (en) |
CN (1) | CN101501342A (en) |
TW (1) | TW200721245A (en) |
WO (1) | WO2007044260A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2498816A (en) * | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
DE102012003680A1 (en) * | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | vacuum pump |
RU2667563C2 (en) * | 2014-03-03 | 2018-09-21 | Нуово Пиньоне СРЛ | Method and system for operating back-to-back compressor with side stream |
US11199267B2 (en) | 2019-08-16 | 2021-12-14 | Applied Materials, Inc. | Symmetric flow valve for higher flow conductance |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04219493A (en) * | 1990-08-10 | 1992-08-10 | Ebara Corp | Turbo-molecular pump |
DE69613010T2 (en) * | 1995-10-09 | 2001-11-15 | Matsushita Electric Ind Co Ltd | Optical recording device |
GB9525337D0 (en) * | 1995-12-12 | 1996-02-14 | Boc Group Plc | Improvements in vacuum pumps |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
GB9708397D0 (en) * | 1997-04-25 | 1997-06-18 | Boc Group Plc | Improvements in vacuum pumps |
GB9719634D0 (en) * | 1997-09-15 | 1997-11-19 | Boc Group Plc | Improvements in vacuum pumps |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
EP0965756B1 (en) * | 1998-06-17 | 2006-02-08 | The BOC Group plc | Screw pump |
JP3961155B2 (en) * | 1999-05-28 | 2007-08-22 | Bocエドワーズ株式会社 | Vacuum pump |
US6129534A (en) * | 1999-06-16 | 2000-10-10 | The Boc Group Plc | Vacuum pumps |
GB9930556D0 (en) * | 1999-12-23 | 2000-02-16 | Boc Group Plc | Improvements in vacuum pumps |
GB0004404D0 (en) * | 2000-02-24 | 2000-04-12 | Boc Group Plc | Improvements in vacuum pumps |
JP2002327698A (en) * | 2001-04-27 | 2002-11-15 | Boc Edwards Technologies Ltd | Vacuum pump |
JP2003021093A (en) * | 2001-07-05 | 2003-01-24 | Boc Edwards Technologies Ltd | Vacuum pump |
-
2005
- 2005-10-06 US US11/244,744 patent/US20070081893A1/en not_active Abandoned
-
2006
- 2006-09-28 KR KR1020087008282A patent/KR20080056192A/en not_active Application Discontinuation
- 2006-09-28 CN CNA2006800372629A patent/CN101501342A/en active Pending
- 2006-09-28 EP EP06815874A patent/EP1934482A2/en not_active Withdrawn
- 2006-09-28 WO PCT/US2006/038197 patent/WO2007044260A2/en active Application Filing
- 2006-09-28 JP JP2008534575A patent/JP2009513861A/en not_active Withdrawn
- 2006-10-05 TW TW095137044A patent/TW200721245A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN101501342A (en) | 2009-08-05 |
EP1934482A2 (en) | 2008-06-25 |
WO2007044260A2 (en) | 2007-04-19 |
US20070081893A1 (en) | 2007-04-12 |
WO2007044260A3 (en) | 2009-04-30 |
KR20080056192A (en) | 2008-06-20 |
JP2009513861A (en) | 2009-04-02 |
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