CN101500749A - End face grinding apparatus, and method of grinding end face, for glass substrate - Google Patents
End face grinding apparatus, and method of grinding end face, for glass substrate Download PDFInfo
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- CN101500749A CN101500749A CNA2007800302599A CN200780030259A CN101500749A CN 101500749 A CN101500749 A CN 101500749A CN A2007800302599 A CNA2007800302599 A CN A2007800302599A CN 200780030259 A CN200780030259 A CN 200780030259A CN 101500749 A CN101500749 A CN 101500749A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Surface Treatment Of Glass (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
End face grinding apparatus (1) for glass substrate including grindstone (4) for grinding an end face of glass substrate (3) by making relative movement to the glass substrate (3) and including grinding fluid supply means (6) for feeding grinding fluid (7) to an area surrounding a grind location of the glass substrate (3), wherein there is disposed water spouting means (8) for forming water curtain (9) adapted to block the flow along the surface of the glass substrate (3) of any cut dust contained in the grinding fluid (7) scattered in the grinding of the end face of the glass substrate (3) by the grindstone (4).
Description
Technical field
The present invention relates to the face grinding device and the end face grinding method thereof of glass substrate, in detail, relate to the technique improvement that the end face of glass substrate is carried out grinding when grinding fluid is supplied with in the grinding part of glass substrate.
Background technology
As everyone knows, during the making of the glass substrate of using at various image displays such as LCD, plasma display, electroluminescent display, field-emitter displays, adopt the method for producing many glass substrates by a roughing glass sheet.And present situation thereupon is that the roughing glass sheet of being made by glassworks advances to maximizing just gradually.
These roughing glass sheets with after rectangular-shaped and the prescribed level cut-out, cut off glass substrate end face to it and carry out grinding processing etc. in the final stage of manufacturing process, thus, obtain final products.
As the method for the end face of this glass substrate of grinding,, carry out grinding thus usually so that the end face state of contact of revolving wheel and glass substrate makes this revolving wheel relatively move with respect to glass substrate.At this moment, overheated and reduce friction for the grinding part that prevents glass substrate, supply with grinding fluid to the grinding part of glass substrate periphery usually.But, the grinding fluid of supplying with to the grinding part of glass substrate periphery disperses on the surface of glass substrate owing to the direction of the supply of grinding fluid or the direction of rotation of revolving wheel etc., thereby occurs in glass baseplate surface is polluted in the smear metal that comprises in the grinding fluid that disperses attached to the surface of glass substrate situation easily.Therefore, in the face grinding device of this glass substrate, currently take following various countermeasure.
For example, in following patent documentation 1, disclose following method: the cover (dust cover) of lower opening is covered the surface of glass substrate and connects airtight its open sides end, and make this cover vacuum suction in the surface of glass substrate, the end face to glass substrate under this state carries out grinding.In addition, in the document, as other structures, following method is disclosed: with from glass baseplate surface away from state cover glass substrate surface and dispose cover (sealing plate), make to be supplied in the inner water of cover and to flow out laterally from the cover and the gap of glass substrate.In addition, in following patent documentation 2, disclose identical structure, proposed by making the end face of the current direction glass substrate that flows out from the gap of cover (baffle plate) and glass substrate, and the water that will flow out has been used as the method for grinding fluid.
But, in above-mentioned patent documentation 1 and patent documentation 2 in the disclosed method, for preventing to dispose cover in the surface attachment smear metal of glass substrate, therefore, the mechanism that need guarantee to dispose the space of cover separately and keep covering etc., therefore, cause the unreasonable maximization of device and complicated in bring the surging of cost thereupon.And, in recent years, as the liquid crystal display glass substrate representative, in various glass substrates, advance and maximize, therefore be necessary to make the cover of cover glass substrate surface more to maximize, thereby make the problems referred to above manifest more significantly.Thereby this method is also impracticable.
Therefore, proposed under the situation of not using above-mentioned cover, to prevent the countermeasure that the glass baseplate surface that causes because of smear metal pollutes.
For example, following method is disclosed in following patent documentation 3: than the grinding part of the glass substrate of the cross grinding that the carries out glass substrate conveyance direction downstream side by glass substrate, have the interval in vain and the inboard of generation along glass baseplate surface from the glass substrate (operating) water nozzle and the air nozzle that generates to equidirectional flow air stream of flowing water flow laterally are set along throughput direction, thus, after the smear metal of current cleaning, this rinse water is discharged to the glass substrate outside with air stream attached to the glass substrate end.In addition, following method being disclosed also: disposes air nozzle separately, generate along the surface of glass substrate from the interior side direction grinding part flow air stream of glass substrate.
In addition, following patent documentation 4 is about the topping machanism of glass substrate, the cascade that forms by in the position away from the cutting portion that carries out the glass substrate cutting is disclosed, thereby form along the surface of glass substrate in end side (cutting portion side) flowing water flow of glass substrate, by these current make with glass baseplate surface roughly orthogonally the cutting water of ejection discharge to the outside, end of glass substrate, thereby prevent the smear metal that in cutting water, comprises surface attachment at glass substrate.
[patent documentation 1] Japanese kokai publication hei 10-6195 communique;
[patent documentation 2] Japanese kokai publication hei 10-58293 communique;
[patent documentation 3] TOHKEMY 2006-26766 communique;
[patent documentation 4] Japanese kokai publication hei 11-267940 communique.
But, undertaken by grinding mechanisms such as revolving wheels when the cross grinding of glass substrate, the situation that the smear metal that comprises in the grinding fluid that disperses is dispersed at a high speed along the surface of glass substrate is more, in this case, smear metal contacts the surface of glass substrate strongly, produces a large amount of small cuts on the surface of glass substrate.And, though can remove by cleaning glass substrate attached to the smear metal of glass baseplate surface itself afterwards,, because of smear metal when glass baseplate surface produces cut, remove this cut and come down to impossible.Particularly, as the glass substrate representative that LCD is used, require in the glass substrate of surperficial high smoothness, this cut becomes critical defect easily, not only causes value of the product to reduce, and also can and then cause situation about treating as substandard product.
Thereby, to carry out under the situation of grinding at end face glass substrate, the situation that how to suppress to produce on the surface of glass substrate because of smear metal cut is particularly important, but does not also take any countermeasure based on this viewpoint now.That is, any purpose of above-mentioned patent documentation 3,4 all is to prevent the pollution of the glass baseplate surface that causes because of smear metal, to producing the situation of cut without any consideration because of this smear metal at glass baseplate surface.Be described in detail, be that above-mentioned patent documentation 3 disclosed methods are, in the conveyance direction downstream side of leaning on glass substrate than the grinding part of glass substrate, to discharge to the end of glass substrate foreign side attached to the smear metal of glass baseplate surface by forming along the current and the air stream of glass baseplate surface, therefore, when the smear metal that comprises the grinding fluid that disperses from the grinding part of glass substrate under situation when glass baseplate surface strongly flows attached to the surface of glass substrate, the smear metal of adhering to might produce cut on the surface of glass substrate in the stage of being discharged by current and air stream.In addition, as disclosed in the document, even form air stream separately towards the grinding part of glass substrate, also be difficult to smear metal that reliable blocking comprises along the flowing of glass substrate in grinding fluid, the possibility that produces cut because of smear metal on the surface of glass substrate is still arranged.
In addition, in above-mentioned patent documentation 4 disclosed methods, since make by cascade form along the current on the surface of glass substrate with respect to glass baseplate surface roughly orthogonally the cutting water of ejection contact, therefore, the possibility that exists cutting water to flow while quickening in surface direction along glass substrate.And under the situation that the above-mentioned state of affairs takes place, the smear metal that comprises in cutting water contacts on one side strongly with the mantle friction of glass substrate on one side, thereby the possibility that produces cut on the surface of glass substrate is arranged.
Summary of the invention
Technical task of the present invention is, reliably suppresses the following state of affairs: during grinding, the smear metal that comprises in the grinding fluid that disperses produces cut on the surface of glass substrate.
Be a kind of face grinding device of glass substrate for solving the present invention's first device that above-mentioned problem proposes, it possesses: grinding mechanism, the end face of its grinding glass substrate when relatively moving with respect to glass substrate; The grinding fluid feed mechanism, it supplies with grinding fluid to the grinding part of glass substrate periphery, the face grinding device of described glass substrate is characterised in that, possesses water ejection mechanism, this water ejection mechanism is ejection water when by described grinding mechanism the end face of glass substrate being carried out grinding, thereby blocking is included in smear metal the flowing along glass baseplate surface in the grinding fluid that disperses.
According to said apparatus, the smear metal that comprises in the grinding fluid that disperses when grinding is flowed by the water blocking from the ejection of water ejection mechanism along glass baseplate surface.That is, smear metal contacts afterwards step-down at it with the water that sprays from water ejection mechanism along the translational speed of glass baseplate surface.Thereby even the smear metal that comprises in grinding fluid arrives the surface of glass substrate, because this smear metal does not contact with glass substrate strongly, therefore, the surface that can reliably be suppressed at glass substrate produces the state of affairs of cut.In addition, the grinding fluid that comprises the smear metal of dispersing is diluted by contacting with the water that sprays from water ejection mechanism, its result, and liquid fully is present between the surface of smear metal and glass substrate, therefore, can reduce the probability itself that smear metal contacts with the surface of glass substrate.
In addition, be a kind of face grinding device of glass substrate for solving the present invention's second device that above-mentioned problem proposes, it possesses: grinding mechanism, the end face of its grinding glass substrate when relatively moving with respect to glass substrate; The grinding fluid feed mechanism, it supplies with grinding fluid to the grinding part of glass substrate periphery, the face grinding device of described glass substrate is characterised in that, possesses water ejection mechanism, this water ejection mechanism is when carrying out grinding by described grinding mechanism to the end face of glass substrate, to comprising the grinding fluid ejection water that disperses under the state of smear metal, the translational speed reduction that the smear metal after contact with the water of this ejection is moved along glass baseplate surface.
According to said apparatus, after the water of the smear metal that comprises in the grinding fluid that disperses when grinding and water ejection mechanism ejection contact, along the translational speed reduction of this glass baseplate surface.Thereby even smear metal arrives the surface of glass substrate, this smear metal can not contact with the surface of glass substrate strongly yet, and therefore, the surface that can reliably be suppressed at glass substrate produces the state of affairs that scratches.In addition, the grinding fluid that comprises the smear metal of dispersing is diluted by contacting with the water that sprays from water ejection mechanism, its result, and liquid fully is present between the surface of smear metal and glass substrate, therefore, can reduce the probability itself that smear metal contacts with the surface of glass substrate.
In said apparatus, described water ejection mechanism preferably constitutes and makes water be the end ejection of the state of inclination from the interior side direction glass substrate of glass substrate.
Thus, can spray the smear metal (grinding fluid that comprises smear metal) that the water of mechanism ejection reduces translational speed by water and discharge smoothly, the surface of glass substrate is maintained in the clean condition to the outside, end of glass substrate.
In said apparatus, preferably spray the water formation cascade of mechanism's ejection from described water.
Thus, the smear metal that comprises in the grinding fluid that disperses reliably contacts with water (cascade) from the ejection of water ejection mechanism, therefore, can suppress the scuffing of the glass baseplate surface that causes because of smear metal more reliably.
In said apparatus, preferred described grinding mechanism is made of the revolving wheel that with the axle with the surperficial quadrature of glass substrate is the center rotation, and its direction of rotation is a direction opposite with respect to the moving direction of described revolving wheel with glass substrate in the grinding part of glass substrate.
Thus, even under the extremely thin situation of the thickness of slab of the glass substrate of wanting grinding, also can carry out grindings such as chamfering smoothly and reliably at its end face.Particularly, for example be set at the circular-arc recess in cross section, then can enough single revolving wheels carry out the R chamfering of the end face of glass substrate by grinding face with revolving wheel.
At this moment, preferred described grinding fluid feed mechanism constitutes the grinding part periphery ejection grinding fluid of finishing the field side glass substrate from the grinding of glass substrate, and described water ejection mechanism constitutes the not grinding area emphasis ejection water to glass substrate.
Because grinding fluid has the function that prevents that glass substrate is overheated and reduce friction, therefore preferably reliably supply with to the grinding part of glass substrate, as mentioned above, by finish the grinding part periphery ejection grinding fluid of field side glass substrate from the grinding of glass substrate, can reliably supply with grinding fluid (especially the grinding face with revolving wheel is set under the situation of the circular-arc recess in cross section) under the situation that has disposed revolving wheel to the grinding part of glass substrate.At this moment, the grinding fluid of supply disperses to the not grinding area side of glass substrate strongly because of the direction of rotation of revolving wheel (in the grinding part of glass substrate direction) opposite with respect to the moving direction of revolving wheel with glass substrate.Therefore, by from water ejection mechanism to this grinding area emphasis ejection water not, can reliably suppress to scratch because of the smear metal that comprises in the grinding fluid produces glass baseplate surface.
For solving the present invention's first method that above-mentioned problem proposes is a kind of end face grinding method of glass substrate, it supplies with grinding fluid to the grinding part of glass substrate periphery on one side, on one side grinding mechanism is relatively moved with respect to glass substrate and the end face of glass substrate is carried out grinding, it is characterized in that, ejection water when the end face of glass substrate being carried out grinding by described grinding mechanism, thus blocking is included in smear metal the flowing along glass baseplate surface in the grinding fluid that disperses.
According to said method, can access and the identical action effect of the present invention's first device.
In addition, for solving the present invention's second method that above-mentioned problem proposes is a kind of end face grinding method of glass substrate, it supplies with grinding fluid to the grinding part of glass substrate periphery on one side, on one side grinding mechanism is relatively moved with respect to glass substrate and the end face of glass substrate is carried out grinding, it is characterized in that, when the end face of glass substrate being carried out grinding by described grinding mechanism, to comprising the grinding fluid ejection water that disperses under the state of smear metal, the translational speed reduction that the smear metal after contact with the water of this ejection is moved along glass baseplate surface.
According to said method, can access and the identical action effect of the present invention's second device.
According to the above the present invention, utilization is from the water of water ejection mechanism ejection, the smear metal that comprises in the grinding fluid that disperses when reducing grinding is along the translational speed on the surface of glass substrate, therefore even under smear metal and the situation that glass baseplate surface contact, also can reliably be suppressed at the state of affairs of glass baseplate surface generation scuffing.
Description of drawings
Fig. 1 is the integrally-built approximate vertical view of face grinding device of the glass substrate of expression embodiments of the present invention.
Fig. 2 is the approximate three-dimensional map of the major part of the described face grinding device of expression.
Fig. 3 is the approximate three-dimensional map of the variation of the described face grinding device of expression.
Among the figure: 1-face grinding device, 3-glass substrate, 4-revolving wheel, 5-grinding part, 6-grinding fluid feed mechanism, 7-grinding fluid, 8-water ejection mechanism, 9-cascade.
The specific embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
At first, based on approximate vertical view shown in Figure 1, the overall structure of the face grinding device of the glass substrate of an embodiment of the present invention is described.In addition, in the present embodiment, glass substrate is the glass substrate that LCD is used.
As shown in the drawing, in this face grinding device 1, utilize upstream side conveying mechanism 2A that glass substrate 3 is carried with flat-hand position along continuous straight runs (right of this figure), and, utilize the rotating mechanism 2X with this downstream adjacency that glass substrate 3 is horizontally rotated 90 °, and then utilize and the downstream conveying mechanism 2B of its downstream adjacency glass substrate 3 after will horizontally rotating is carried to same direction.In addition, because upstream side conveying mechanism 2A and downstream conveying mechanism 2B possess same structure in fact, therefore in the following description, 2A is specifically described at the upstream side conveying mechanism, omits specifying at downstream conveying mechanism 2B.
Upstream side conveying mechanism 2A constitutes and glass substrate 3 can be carried under the state by location such as for example vacuum suction.And then (with two sides of the direction of throughput direction quadrature) disposes a pair of revolving wheel 4 as grinding mechanism in the left and right sides side of the glass substrate of carrying with the state that is positioned on this upstream side conveying mechanism 2A 3.And, supply with grinding fluid (for example pure water) 7 from 6 pairs of peripheries of grinding fluid feed mechanism by the grinding part 5 of the glass substrate 3 of each revolving wheel 4 grinding.
Specifically, it is that the center rotates that above-mentioned revolving wheel 4 constitutes with the axle with respect to the surperficial quadrature of glass substrate 3, and its direction of rotation is direction opposite with the throughput direction of glass substrate 3 in the grinding part 5 of glass substrate 3 (from the downstream of throughput direction upstream the direction of side).In addition, though not shown, the outer peripheral face of revolving wheel 4 (grinding face) constitutes in the present embodiment: be the roughly circular-arc recess in cross section, the end face of glass substrate 3 is carried out the R chamfering one time.
In addition, above-mentioned grinding fluid feed mechanism 6 constitute from than the revolving wheel 4 of the throughput direction of glass substrate 3 by the grinding face of downstream (area side is finished in the grinding of glass substrate 3) to the revolving wheel 4 in the dead ahead that contact with the grinding part 5 of glass substrate 3, spray grinding fluid 7 with the surperficial almost parallel ground of glass substrate.Thus, can supply with grinding fluid 7 smoothly to the grinding part 5 of glass substrate 3, thereby can stablize the cross grinding that carries out glass substrate.
On the other hand, as mentioned above the grinding fluid of supplying with to the periphery of the grinding part 5 of glass substrate 37 with the state that comprises smear metal from the periphery of the grinding part 5 of glass substrate 3 to its inboard central portion, roughly disperse strongly along the surface of glass substrate 3.Therefore, as shown in Figures 1 and 2, dispose water ejection mechanism 8 respectively at the both ends of glass substrate 3, by from this water ejection mechanism 8 to the end of glass substrate 3 ejection water, and between the end of the front end of water ejection mechanism 8 and glass substrate 3, form cascade 9.Specifically, this cascade 9 along with grinding fluid 7 in the direction that flows along the surface of glass substrate 3 of the smear metal that the comprises direction of intersecting (in the illustrative example, direction with the end limit almost parallel of glass substrate 3) form, the smear metal that comprises in the grinding fluid 7 that disperses with blocking is flowed along the surface of glass substrate 3.Thus, the smear metal that comprises from the grinding fluid 7 that grinding part 5 peripheries disperse is interdicted by cascade 9 along the flowing of surface of glass substrate 3.That is, smear metal is along translational speed step-down after smear metal (grinding fluid 7 that comprises smear metal) contacts with cascade 9 on the surface of glass substrate 3.Thereby even the smear metal that comprises in the grinding fluid 7 arrives the surface of glass substrate 3, this smear metal can not contact with the surface of glass substrate 3 strongly yet, and therefore, the surface that can reliably be suppressed at glass substrate 3 produces the state of affairs of cut.In addition, the grinding fluid 7 that comprises the smear metal of dispersing contacts and dilutedization by contact (from the water of water ejection mechanism 8 ejections) with cascade 9, its result, and liquid fully is present between the surface of smear metal and glass substrate 3, therefore, can reduce the probability itself that smear metal contacts with the surface of glass substrate 3.In addition, the water yield from the water of water ejection mechanism 8 ejections for example is set at 4~6 liters/minute.
And then in the present embodiment, cascade 9 forms from the inside front of glass substrate 3 and sprays water towards the end of glass substrate 3 to oblique below.Thereby, can suitably the grinding fluid 7 that comprises smear metal be discharged to the outside, end of glass substrate 3, can keep the state of the cleaning surfaces of glass substrate 3, described smear metal has been reduced along the translational speed on glass substrate 3 surfaces by cascade 9.More specifically, form cascade 9, thereby can reliably prevent significant surface generation cut, and can keep the state of this significant surface cleaning in the central portion formation of liquid crystal display glass substrate by end towards glass substrate 3.
In addition, in this embodiment, cascade 9 forms than the mode of zone (zone is finished in the grinding of the glass substrate 3) length in the downstream of rotation emery wheel 4 and the almost parallel ground, end of glass substrate 3 with the zone (the not grinding area of glass substrate 3) of the upstream side of revolving wheel 4.Its reason is, grinding fluid 7 is because of be that the described revolving wheel 4 that the center is rotated disperses at the regional of upstream side of glass substrate with the axle with the surperficial quadrature of glass substrate 3 morely, therefore to emphasis ground, this zone (not grinding area) supply water.
In addition, the present invention also can carry out various distortion shown below.
For example, in the above-described embodiment, illustrated in the upper surface side of glass substrate 3 configuration water ejection mechanism 8, still, also can be as required in the lower face side configuration water ejection mechanism of glass substrate 3.
In addition, in the above-described embodiment, illustrated with the almost parallel ground, end of glass substrate 3 to form cascade 9, still, for example, as shown in Figure 3, also can form cascade 9a is intersected with the line parallel with the end limit of glass substrate 3.Thus, the end that cascade 9a forms with respect to glass substrate 3 has width to a certain degree and sprays water at its width, therefore, can suppress the shake of glass substrate 3 on transport path, can carry glass substrate 3 with stable posture.
In addition, in the above-described embodiment, illustrated while the end face of carrying glass substrate 3 usefulness fixed configurations at grinding mechanism (revolving wheel 4) the grinding glass substrate 3 of the side of its transport path, but, for example also can be to have fixed the state of glass substrate, grinding mechanism is moved along the end of wanting grinding of glass substrate, glass substrate and grinding mechanism both sides are relatively moved.As mentioned above, under the situation of mobile grinding mechanism, preferably constitute grinding fluid feed mechanism and water feed mechanism both sides are moved with grinding mechanism.And then, also can make revolving wheel along want grinding glass substrate a plurality of adjacency in end and constitute grinding mechanism.At this moment, preferably dispose grinding fluid feed mechanism and water feed mechanism respectively in the position corresponding with each revolving wheel.
And then, in the above-described embodiment, is that example is illustrated with the grinding liquid crystal with the situation of the end face of glass substrate for display, but, the face grinding device of glass substrate of the present invention and method thereof are except the glass substrate that LCD is used, also can preferably be used in the cross grinding of the glass substrate of the high smoothness of surface requirements, as plasma display, electroluminescent display, the glass substrate that various image displays such as field-emitter display are used and as being used to form the base material of various electronics Presentation Function elements and film and the cross grinding of the glass substrate that uses.
Claims (8)
1. the face grinding device of a glass substrate, it possesses: grinding mechanism, the end face of its grinding glass substrate when relatively moving with respect to glass substrate; The grinding fluid feed mechanism, it supplies with grinding fluid to the grinding part of glass substrate periphery,
The face grinding device of described glass substrate is characterised in that,
Possess water ejection mechanism, this water ejection mechanism is ejection water when by described grinding mechanism the end face of glass substrate being carried out grinding, thereby blocking is included in smear metal the flowing along glass baseplate surface in the grinding fluid that disperses.
2. the face grinding device of a glass substrate, it possesses: grinding mechanism, the end face of its grinding glass substrate when relatively moving with respect to glass substrate; The grinding fluid feed mechanism, it supplies with grinding fluid to the grinding part of glass substrate periphery,
The face grinding device of described glass substrate is characterised in that,
Possesses water ejection mechanism, this water ejection mechanism is when carrying out grinding by described grinding mechanism to the end face of glass substrate, to comprising the grinding fluid ejection water that disperses under the state of smear metal, the translational speed reduction that the smear metal after contact with the water of this ejection is moved along glass baseplate surface.
3. the face grinding device of glass substrate according to claim 1 and 2 is characterized in that,
Described water ejection mechanism constitutes and makes water be the end ejection of the state of inclination from the interior side direction glass substrate of glass substrate.
4. according to the face grinding device of each described glass substrate in the claim 1~3, it is characterized in that,
The water that sprays mechanism's ejection from described water forms cascade.
5. according to the face grinding device of each described glass substrate in the claim 1~4, it is characterized in that,
Described grinding mechanism is made of the revolving wheel that with the axle with the surperficial quadrature of glass substrate is the center rotation, and its direction of rotation is a direction opposite with respect to the moving direction of described revolving wheel with glass substrate in the grinding part of glass substrate.
6. the face grinding device of glass substrate according to claim 5 is characterized in that,
Described grinding fluid feed mechanism constitutes the grinding part periphery ejection grinding fluid of finishing the field side glass substrate from the grinding of glass substrate, and described water ejection mechanism constitutes the not grinding area emphasis ejection water to glass substrate.
7. the end face grinding method of a glass substrate, it supplies with grinding fluid to the grinding part of glass substrate periphery on one side, the end face Yi Bian grinding mechanism is relatively moved with respect to glass substrate to glass substrate carries out grinding, it is characterized in that,
Ejection water when the end face of glass substrate being carried out grinding by described grinding mechanism, thus blocking is included in smear metal the flowing along glass baseplate surface in the grinding fluid that disperses.
8. the end face grinding method of a glass substrate, it supplies with grinding fluid to the grinding part of glass substrate periphery on one side, the end face Yi Bian grinding mechanism is relatively moved with respect to glass substrate to glass substrate carries out grinding, it is characterized in that,
When the end face of glass substrate being carried out grinding by described grinding mechanism, to comprising the grinding fluid ejection water that disperses under the state of smear metal, the translational speed reduction that the smear metal after contact with the water of this ejection is moved along glass baseplate surface.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP273286/2006 | 2006-10-04 | ||
JP2006273286A JP2008087135A (en) | 2006-10-04 | 2006-10-04 | End surface grinding device of glass substrate and end surface grinding method |
PCT/JP2007/067491 WO2008041449A1 (en) | 2006-10-04 | 2007-09-07 | End face grinding apparatus, and method of grinding end face, for glass substrate |
Publications (2)
Publication Number | Publication Date |
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CN101500749A true CN101500749A (en) | 2009-08-05 |
CN101500749B CN101500749B (en) | 2013-03-13 |
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Family Applications (1)
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CN200780030259.9A Active CN101500749B (en) | 2006-10-04 | 2007-09-07 | End face grinding apparatus, and method of grinding end face, for glass substrate |
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JP (1) | JP2008087135A (en) |
KR (1) | KR20090075629A (en) |
CN (1) | CN101500749B (en) |
TW (1) | TWI473684B (en) |
WO (1) | WO2008041449A1 (en) |
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CN102672569A (en) * | 2011-03-07 | 2012-09-19 | 吴江市中信科技有限公司 | Polishing machine |
CN102873609A (en) * | 2012-10-09 | 2013-01-16 | 深圳市华星光电技术有限公司 | Dust preventing method of glass substrate edger |
CN103813995A (en) * | 2011-09-22 | 2014-05-21 | 电气化学工业株式会社 | Method for processing hard-substrate laminate, and method for manufacturing plate-shaped product |
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Also Published As
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JP2008087135A (en) | 2008-04-17 |
WO2008041449A1 (en) | 2008-04-10 |
TWI473684B (en) | 2015-02-21 |
CN101500749B (en) | 2013-03-13 |
KR20090075629A (en) | 2009-07-08 |
TW200817134A (en) | 2008-04-16 |
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