CN101490622B - 抗反射涂料组合物 - Google Patents

抗反射涂料组合物 Download PDF

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Publication number
CN101490622B
CN101490622B CN2007800259692A CN200780025969A CN101490622B CN 101490622 B CN101490622 B CN 101490622B CN 2007800259692 A CN2007800259692 A CN 2007800259692A CN 200780025969 A CN200780025969 A CN 200780025969A CN 101490622 B CN101490622 B CN 101490622B
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CN
China
Prior art keywords
optional substituted
acid
antireflective coating
coating compositions
polymkeric substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007800259692A
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English (en)
Chinese (zh)
Other versions
CN101490622A (zh
Inventor
J·E·奥伯兰德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMD Performance Materials Corp
Original Assignee
AZ Electronic Materials USA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AZ Electronic Materials USA Corp filed Critical AZ Electronic Materials USA Corp
Publication of CN101490622A publication Critical patent/CN101490622A/zh
Application granted granted Critical
Publication of CN101490622B publication Critical patent/CN101490622B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Paints Or Removers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
CN2007800259692A 2006-07-12 2007-07-11 抗反射涂料组合物 Expired - Fee Related CN101490622B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/456,868 2006-07-12
US11/456,868 US7754414B2 (en) 2006-07-12 2006-07-12 Antireflective coating compositions
PCT/IB2007/002067 WO2008010079A1 (en) 2006-07-12 2007-07-11 Antireflective coating compositions

Publications (2)

Publication Number Publication Date
CN101490622A CN101490622A (zh) 2009-07-22
CN101490622B true CN101490622B (zh) 2012-09-05

Family

ID=38649922

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800259692A Expired - Fee Related CN101490622B (zh) 2006-07-12 2007-07-11 抗反射涂料组合物

Country Status (8)

Country Link
US (1) US7754414B2 (enExample)
EP (1) EP2044486A1 (enExample)
JP (1) JP5250779B2 (enExample)
KR (1) KR20090032045A (enExample)
CN (1) CN101490622B (enExample)
MY (1) MY145010A (enExample)
TW (1) TW200809416A (enExample)
WO (1) WO2008010079A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8518926B2 (en) * 2006-04-10 2013-08-27 Knopp Neurosciences, Inc. Compositions and methods of using (R)-pramipexole
CN101802711B (zh) * 2007-07-30 2014-12-03 布鲁尔科技公司 用于光刻法的可非共价交联的材料
US8906590B2 (en) * 2011-03-30 2014-12-09 Az Electronic Materials Usa Corp. Antireflective coating composition and process thereof
US8623589B2 (en) * 2011-06-06 2014-01-07 Az Electronic Materials Usa Corp. Bottom antireflective coating compositions and processes thereof
US8906592B2 (en) 2012-08-01 2014-12-09 Az Electronic Materials (Luxembourg) S.A.R.L. Antireflective coating composition and process thereof
US9152051B2 (en) 2013-06-13 2015-10-06 Az Electronics Materials (Luxembourg) S.A.R.L. Antireflective coating composition and process thereof
CN105646293A (zh) * 2015-12-19 2016-06-08 浙江新化化工股份有限公司 一种烷基苯磺酸有机胺盐的制备方法
US11448964B2 (en) * 2016-05-23 2022-09-20 Rohm And Haas Electronic Materials Korea Ltd. Coating compositions for use with an overcoated photoresist
CN112680052B (zh) * 2020-12-23 2022-06-28 上海飞凯材料科技股份有限公司 一种抗反射涂料组合物及其应用
CN115403976B (zh) * 2022-08-19 2023-04-18 嘉庚创新实验室 一种抗反射涂层组合物

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1330779A (zh) * 1998-11-18 2002-01-09 克拉里安特国际有限公司 用于深紫外线光刻胶的防反射组合物

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5886102A (en) 1996-06-11 1999-03-23 Shipley Company, L.L.C. Antireflective coating compositions
TW576859B (en) * 2001-05-11 2004-02-21 Shipley Co Llc Antireflective coating compositions
JP3771206B2 (ja) 2002-09-25 2006-04-26 松下電器産業株式会社 水溶性材料及びパターン形成方法
US6876017B2 (en) * 2003-02-08 2005-04-05 Intel Corporation Polymer sacrificial light absorbing structure and method
US7030201B2 (en) 2003-11-26 2006-04-18 Az Electronic Materials Usa Corp. Bottom antireflective coatings
KR20070029157A (ko) * 2004-03-12 2007-03-13 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. 리소그래피 적용을 위한 열경화된 언더코트
US20050214674A1 (en) * 2004-03-25 2005-09-29 Yu Sui Positive-working photoimageable bottom antireflective coating
US7691556B2 (en) * 2004-09-15 2010-04-06 Az Electronic Materials Usa Corp. Antireflective compositions for photoresists
JP4597655B2 (ja) 2004-12-20 2010-12-15 東京応化工業株式会社 レジストパターン形成方法
US7553905B2 (en) * 2005-10-31 2009-06-30 Az Electronic Materials Usa Corp. Anti-reflective coatings
JP4548616B2 (ja) * 2006-05-15 2010-09-22 信越化学工業株式会社 熱酸発生剤及びこれを含むレジスト下層膜材料、並びにこのレジスト下層膜材料を用いたパターン形成方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1330779A (zh) * 1998-11-18 2002-01-09 克拉里安特国际有限公司 用于深紫外线光刻胶的防反射组合物

Also Published As

Publication number Publication date
JP2009543149A (ja) 2009-12-03
KR20090032045A (ko) 2009-03-31
EP2044486A1 (en) 2009-04-08
CN101490622A (zh) 2009-07-22
MY145010A (en) 2011-12-15
US7754414B2 (en) 2010-07-13
WO2008010079A1 (en) 2008-01-24
JP5250779B2 (ja) 2013-07-31
US20080014529A1 (en) 2008-01-17
TW200809416A (en) 2008-02-16

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Granted publication date: 20120905

Termination date: 20130711