CN101488470B - 用于处理平面盘状物的装置及方法 - Google Patents
用于处理平面盘状物的装置及方法 Download PDFInfo
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CN2009100797037A CN101488470B (zh) | 2009-03-06 | 2009-03-06 | 用于处理平面盘状物的装置及方法 |
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CN2009100797037A CN101488470B (zh) | 2009-03-06 | 2009-03-06 | 用于处理平面盘状物的装置及方法 |
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CN101488470A CN101488470A (zh) | 2009-07-22 |
CN101488470B true CN101488470B (zh) | 2012-03-07 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6250973B2 (ja) * | 2013-08-08 | 2017-12-20 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
CN107093567B (zh) * | 2016-02-18 | 2019-08-06 | 顶程国际股份有限公司 | 环状液体收集装置 |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180319 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |