CN101467083B - 硅调制器偏移调谐装置 - Google Patents

硅调制器偏移调谐装置 Download PDF

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Publication number
CN101467083B
CN101467083B CN2007800222787A CN200780022278A CN101467083B CN 101467083 B CN101467083 B CN 101467083B CN 2007800222787 A CN2007800222787 A CN 2007800222787A CN 200780022278 A CN200780022278 A CN 200780022278A CN 101467083 B CN101467083 B CN 101467083B
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CN
China
Prior art keywords
silicon
modulation device
optical
waveguide
thermo
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CN2007800222787A
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English (en)
Chinese (zh)
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CN101467083A (zh
Inventor
罗伯特·凯斯·蒙特哥莫里
马格利特·吉龙
普拉卡什·约托斯卡
泡利尔斯·明道加斯·莫欣斯基斯
威普库马·帕特尔
卡尔潘都·夏斯特里
马克·韦伯斯特
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Cisco Technology Inc
Lightwire LLC
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SiOptical Inc
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Publication of CN101467083A publication Critical patent/CN101467083A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/126—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode push-pull

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
CN2007800222787A 2006-06-15 2007-06-11 硅调制器偏移调谐装置 Active CN101467083B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US81391306P 2006-06-15 2006-06-15
US60/813,913 2006-06-15
US92838607P 2007-05-09 2007-05-09
US60/928,386 2007-05-09
US11/810,591 US7447395B2 (en) 2006-06-15 2007-06-06 Silicon modulator offset tuning arrangement
US11/810,591 2007-06-06
PCT/US2007/013692 WO2007146233A2 (en) 2006-06-15 2007-06-11 Silicon modulator offset tuning arrangement

Publications (2)

Publication Number Publication Date
CN101467083A CN101467083A (zh) 2009-06-24
CN101467083B true CN101467083B (zh) 2012-10-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800222787A Active CN101467083B (zh) 2006-06-15 2007-06-11 硅调制器偏移调谐装置

Country Status (6)

Country Link
US (1) US7447395B2 (enExample)
EP (1) EP2027497B1 (enExample)
JP (1) JP5290164B2 (enExample)
KR (1) KR101456307B1 (enExample)
CN (1) CN101467083B (enExample)
WO (1) WO2007146233A2 (enExample)

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US8520984B2 (en) * 2009-06-12 2013-08-27 Cisco Technology, Inc. Silicon-based optical modulator with improved efficiency and chirp control
US8836100B2 (en) 2009-12-01 2014-09-16 Cisco Technology, Inc. Slotted configuration for optimized placement of micro-components using adhesive bonding
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WO2015016466A1 (ko) * 2013-07-30 2015-02-05 전자부품연구원 실리콘 링 변조기의 중심 파장을 제어하는 실시간 피드백 시스템
US9395563B2 (en) * 2013-08-01 2016-07-19 Samsung Electronics Co., Ltd. Electro-optic modulator and optic transmission modulator including the same
US9291776B2 (en) * 2013-11-27 2016-03-22 Huawei Technologies Co., Ltd. Apparatus and method for differential thermal optical switch control
JP6413296B2 (ja) * 2014-03-27 2018-10-31 日本電気株式会社 光変調用素子および光変調器
JP2015191068A (ja) 2014-03-27 2015-11-02 日本電気株式会社 光変調器の出力モニター方法および出力モニター装置
US10366883B2 (en) 2014-07-30 2019-07-30 Hewlett Packard Enterprise Development Lp Hybrid multilayer device
EP3215883A4 (en) * 2014-11-05 2018-07-11 Elenion Technologies, LLC Photonic integrated circuit incorporating a bandgap temperature sensor
US9513437B2 (en) * 2014-11-05 2016-12-06 Coriant Advanced Technology, LLC Photonic integrated circuit incorporating a bandgap temperature sensor
US10088697B2 (en) * 2015-03-12 2018-10-02 International Business Machines Corporation Dual-use electro-optic and thermo-optic modulator
US10658177B2 (en) 2015-09-03 2020-05-19 Hewlett Packard Enterprise Development Lp Defect-free heterogeneous substrates
FR3047811B1 (fr) * 2016-02-12 2018-03-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Modulateur des pertes de propagation et de l'indice de propagation d'un signal optique guide
US11088244B2 (en) 2016-03-30 2021-08-10 Hewlett Packard Enterprise Development Lp Devices having substrates with selective airgap regions
US10135542B2 (en) * 2016-12-15 2018-11-20 Rockley Photonics Limited Optical modulators
CN106773144B (zh) * 2016-12-20 2020-04-14 武汉光迅科技股份有限公司 一种用于硅光调制器自动偏压控制的电压处理方法及其装置
US10353267B2 (en) * 2016-12-30 2019-07-16 Huawei Technologies Co., Ltd. Carrier-effect based optical switch
US10381801B1 (en) 2018-04-26 2019-08-13 Hewlett Packard Enterprise Development Lp Device including structure over airgap
CN111142270B (zh) * 2018-11-05 2022-10-11 青岛海信激光显示股份有限公司 一种激光散斑消除装置及其激光显示设备
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US11175451B2 (en) * 2019-09-26 2021-11-16 Intel Corporation Mechanisms for refractive index tuning semiconductor photonic devices
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CN114371560B (zh) * 2020-10-15 2025-04-25 联合微电子中心有限责任公司 双向可调的热光移相器及其网络结构
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US12013568B2 (en) * 2022-03-15 2024-06-18 Hewlett Packard Enterprise Development Lp Hybrid metal oxide semiconductor capacitor with enhanced phase tuning
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Also Published As

Publication number Publication date
JP2009540385A (ja) 2009-11-19
JP5290164B2 (ja) 2013-09-18
EP2027497A4 (en) 2011-03-09
CN101467083A (zh) 2009-06-24
WO2007146233A2 (en) 2007-12-21
WO2007146233A3 (en) 2008-08-07
US7447395B2 (en) 2008-11-04
KR20090032071A (ko) 2009-03-31
KR101456307B1 (ko) 2014-11-03
US20070292075A1 (en) 2007-12-20
EP2027497A2 (en) 2009-02-25
EP2027497B1 (en) 2016-11-02

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