WO2007146233A3 - Silicon modulator offset tuning arrangement - Google Patents

Silicon modulator offset tuning arrangement Download PDF

Info

Publication number
WO2007146233A3
WO2007146233A3 PCT/US2007/013692 US2007013692W WO2007146233A3 WO 2007146233 A3 WO2007146233 A3 WO 2007146233A3 US 2007013692 W US2007013692 W US 2007013692W WO 2007146233 A3 WO2007146233 A3 WO 2007146233A3
Authority
WO
WIPO (PCT)
Prior art keywords
silicon
waveguiding
refractive index
structures
optical modulator
Prior art date
Application number
PCT/US2007/013692
Other languages
French (fr)
Other versions
WO2007146233A2 (en
Inventor
Robert Keith Montgomery
Margaret Ghiron
Prakash Gothoskar
Paulius Mindaugas Mosinskis
Vipulkumar Patel
Kalpendu Shastri
Mark Webster
Original Assignee
Sioptical Inc
Robert Keith Montgomery
Margaret Ghiron
Prakash Gothoskar
Paulius Mindaugas Mosinskis
Vipulkumar Patel
Kalpendu Shastri
Mark Webster
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sioptical Inc, Robert Keith Montgomery, Margaret Ghiron, Prakash Gothoskar, Paulius Mindaugas Mosinskis, Vipulkumar Patel, Kalpendu Shastri, Mark Webster filed Critical Sioptical Inc
Priority to KR1020097000468A priority Critical patent/KR101456307B1/en
Priority to CN2007800222787A priority patent/CN101467083B/en
Priority to JP2009515440A priority patent/JP5290164B2/en
Priority to EP07809457.0A priority patent/EP2027497B1/en
Publication of WO2007146233A2 publication Critical patent/WO2007146233A2/en
Publication of WO2007146233A3 publication Critical patent/WO2007146233A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/126—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode push-pull

Abstract

A silicon-based optical modulator structure (20) includes one or more separate localized heating elements (22/24) for changing the refractive index of an associated portion of the structure and thereby providing corrective adjustments to address unwanted variations i device performance Heating is provided by thermo-optic devices such as, for example, silicon- based resistors, silicide resistors, forward-biased PN junctions, and the like, where any of these structures may easily be incorporated with a silicon-based optical modulator The application of a DC voltage to any of these structures will generate heat, which then transfers into the waveguiding are The increase in local temperature of the waveguiding area will, in turn, increase the refractive index of the waveguiding in the area Control of the applied DC voltage results in controlling the refractive index
PCT/US2007/013692 2006-06-15 2007-06-11 Silicon modulator offset tuning arrangement WO2007146233A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020097000468A KR101456307B1 (en) 2006-06-15 2007-06-11 Silicon modulator offset tuning arrangement
CN2007800222787A CN101467083B (en) 2006-06-15 2007-06-11 Silicon modulator offset tuning arrangement
JP2009515440A JP5290164B2 (en) 2006-06-15 2007-06-11 Silicon modulator offset adjustment arrangement
EP07809457.0A EP2027497B1 (en) 2006-06-15 2007-06-11 Silicon modulator offset tuning arrangement

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US81391306P 2006-06-15 2006-06-15
US60/813,913 2006-06-15
US92838607P 2007-05-09 2007-05-09
US60/928,386 2007-05-09
US11/810,591 US7447395B2 (en) 2006-06-15 2007-06-06 Silicon modulator offset tuning arrangement
US11/810,591 2007-06-06

Publications (2)

Publication Number Publication Date
WO2007146233A2 WO2007146233A2 (en) 2007-12-21
WO2007146233A3 true WO2007146233A3 (en) 2008-08-07

Family

ID=38832457

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/013692 WO2007146233A2 (en) 2006-06-15 2007-06-11 Silicon modulator offset tuning arrangement

Country Status (6)

Country Link
US (1) US7447395B2 (en)
EP (1) EP2027497B1 (en)
JP (1) JP5290164B2 (en)
KR (1) KR101456307B1 (en)
CN (1) CN101467083B (en)
WO (1) WO2007146233A2 (en)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7697793B2 (en) * 2006-06-15 2010-04-13 Lightwire, Inc. Silicon modulator offset tuning arrangement
US7865053B2 (en) * 2006-12-29 2011-01-04 Alcatel-Lucent Usa Inc. Multi-semiconductor slab electro-optic modulator and process for using the same
US8098968B2 (en) * 2007-09-04 2012-01-17 International Business Machines Corporation Silicide thermal heaters for silicon-on-insulator nanophotonic devices
US8179935B2 (en) * 2008-04-01 2012-05-15 Hewlett-Packard Development Company, L.P. Tunable optical resonator
US7715663B2 (en) * 2008-08-29 2010-05-11 Bae Systems Information And Electronic Systems Integration Inc. Integrated optical latch
US7693354B2 (en) * 2008-08-29 2010-04-06 Bae Systems Information And Electronic Systems Integration Inc. Salicide structures for heat-influenced semiconductor applications
US8148265B2 (en) * 2008-08-29 2012-04-03 Bae Systems Information And Electronic Systems Integration Inc. Two-step hardmask fabrication methodology for silicon waveguides
WO2010064417A1 (en) * 2008-12-02 2010-06-10 日本電信電話株式会社 Light modulator
US7847353B2 (en) * 2008-12-05 2010-12-07 Bae Systems Information And Electronic Systems Integration Inc. Multi-thickness semiconductor with fully depleted devices and photonic integration
US8520984B2 (en) * 2009-06-12 2013-08-27 Cisco Technology, Inc. Silicon-based optical modulator with improved efficiency and chirp control
US8836100B2 (en) 2009-12-01 2014-09-16 Cisco Technology, Inc. Slotted configuration for optimized placement of micro-components using adhesive bonding
KR101284177B1 (en) * 2009-12-09 2013-07-10 한국전자통신연구원 Electro-Optic Device
SG173939A1 (en) * 2010-03-01 2011-09-29 Nec Corp Silicon-based electro-optic device
US9122085B2 (en) * 2010-10-07 2015-09-01 Alcatel Lucent Thermally controlled semiconductor optical waveguide
US8358897B1 (en) * 2010-12-10 2013-01-22 Aurrion, Llc High index bonding layer for hybrid photonic devices
US9039907B2 (en) * 2011-07-20 2015-05-26 Imec Methods for improving integrated photonic device uniformity
KR20150006419A (en) * 2012-04-30 2015-01-16 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. Hybrid mos optical modulator
WO2015016466A1 (en) * 2013-07-30 2015-02-05 전자부품연구원 Real-time feedback system controlling central wavelength of silicon ring modulator
US9395563B2 (en) * 2013-08-01 2016-07-19 Samsung Electronics Co., Ltd. Electro-optic modulator and optic transmission modulator including the same
US9291776B2 (en) * 2013-11-27 2016-03-22 Huawei Technologies Co., Ltd. Apparatus and method for differential thermal optical switch control
JP2015191068A (en) 2014-03-27 2015-11-02 日本電気株式会社 Output monitoring method and output monitoring device for optical modulator
JP6413296B2 (en) * 2014-03-27 2018-10-31 日本電気株式会社 Optical modulation element and optical modulator
US10366883B2 (en) 2014-07-30 2019-07-30 Hewlett Packard Enterprise Development Lp Hybrid multilayer device
US9513437B2 (en) * 2014-11-05 2016-12-06 Coriant Advanced Technology, LLC Photonic integrated circuit incorporating a bandgap temperature sensor
EP3215883A4 (en) * 2014-11-05 2018-07-11 Elenion Technologies, LLC Photonic integrated circuit incorporating a bandgap temperature sensor
US10088697B2 (en) * 2015-03-12 2018-10-02 International Business Machines Corporation Dual-use electro-optic and thermo-optic modulator
US10658177B2 (en) 2015-09-03 2020-05-19 Hewlett Packard Enterprise Development Lp Defect-free heterogeneous substrates
FR3047811B1 (en) * 2016-02-12 2018-03-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives MODULATOR OF PROPAGATION LOSSES AND OF THE PROPAGATION INDEX OF A GUIDE OPTICAL SIGNAL
US11088244B2 (en) 2016-03-30 2021-08-10 Hewlett Packard Enterprise Development Lp Devices having substrates with selective airgap regions
US10135542B2 (en) * 2016-12-15 2018-11-20 Rockley Photonics Limited Optical modulators
CN106773144B (en) * 2016-12-20 2020-04-14 武汉光迅科技股份有限公司 Voltage processing method and device for automatic bias control of silicon optical modulator
US10353267B2 (en) * 2016-12-30 2019-07-16 Huawei Technologies Co., Ltd. Carrier-effect based optical switch
US10381801B1 (en) 2018-04-26 2019-08-13 Hewlett Packard Enterprise Development Lp Device including structure over airgap
CN111142270B (en) * 2018-11-05 2022-10-11 青岛海信激光显示股份有限公司 Laser speckle eliminating device and laser display equipment thereof
FR3088449A1 (en) * 2018-11-12 2020-05-15 Commissariat A L'energie Atomique Et Aux Energies Alternatives OPTOELECTRONIC SWITCH WITH MACH-ZEHNDER INTERFEROMETER
WO2020214184A1 (en) * 2019-04-19 2020-10-22 Source Photonics, Inc. Multi-layer p-n junction based phase shifter and methods of manufacturing and using the same
US11378825B2 (en) * 2019-09-17 2022-07-05 Lumentum Operations Llc Electrical-optical modulator
US11175451B2 (en) * 2019-09-26 2021-11-16 Intel Corporation Mechanisms for refractive index tuning semiconductor photonic devices
CZ308572B6 (en) * 2019-10-11 2020-12-09 Ăšstav fotoniky a elektroniky AV ÄŚR, v.v.i. Thermo-optical spatial light modulator
US11513375B2 (en) 2019-12-16 2022-11-29 Cisco Technology, Inc. Silicon thermal-optic phase shifter with improved optical performance
CN114035348B (en) * 2021-12-16 2023-10-03 武汉光谷信息光电子创新中心有限公司 Micro-ring modulator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6393185B1 (en) * 1999-11-03 2002-05-21 Sparkolor Corporation Differential waveguide pair
US6600848B2 (en) * 2000-08-02 2003-07-29 Corning Incorporated Integrated thermo-optical silica switch
US20050175281A1 (en) * 2004-02-09 2005-08-11 Fuji Xerox Co., Ltd. Optical modulator and optical modulator array

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US716821A (en) * 1901-05-14 1902-12-23 James A Ekin Criswell Machine for making matches.
US4359773A (en) * 1980-07-07 1982-11-16 Bell Telephone Laboratories, Incorporated Semiconductor lasers with selective driving circuit
US5027362A (en) * 1988-12-29 1991-06-25 At&T Bell Laboratories Laser control method and circuitry
US5025456A (en) * 1989-02-02 1991-06-18 At&T Bell Laboratories Burst mode digital data receiver
US5191462A (en) * 1990-05-11 1993-03-02 At&T Bell Laboratories Fiber optic transmission distortion compensation
CA2106439A1 (en) * 1992-11-13 1994-05-14 Yusuke Ota Burst mode digital data receiver
US5539730A (en) * 1994-01-11 1996-07-23 Ericsson Ge Mobile Communications Inc. TDMA/FDMA/CDMA hybrid radio access methods
GB2332284B (en) * 1998-05-01 1999-11-03 Bookham Technology Ltd Branched optical waveguide,and its method of use
GB2339919B (en) * 1998-07-17 2002-12-11 Bookham Technology Ltd Thermo-optic semiconductor device
US6181456B1 (en) 1999-04-01 2001-01-30 Uniphase Telecommunications Products, Inc. Method and apparatus for stable control of electrooptic devices
US6646747B2 (en) * 2001-05-17 2003-11-11 Sioptical, Inc. Interferometer apparatus and associated method
US6654511B2 (en) * 2001-05-17 2003-11-25 Sioptical, Inc. Optical modulator apparatus and associated method
US20030087121A1 (en) * 2001-06-18 2003-05-08 Lawrence Domash Index tunable thin film interference coatings
WO2003023474A1 (en) * 2001-09-10 2003-03-20 California Institute Of Technology Tunable resonant cavity based on the field effect in semiconductors
JP3755588B2 (en) * 2001-10-03 2006-03-15 日本電気株式会社 Light control device
GB0129248D0 (en) * 2001-12-06 2002-01-23 Ecole Polytech An optical modulator
US6753992B2 (en) * 2002-06-14 2004-06-22 Pacific Wave Industries, Inc. Method for suppressing distortion in mach-zehnder optical modulators with a chirped or variable operating wavelength
US6912079B2 (en) * 2003-02-14 2005-06-28 Intel Corporation Method and apparatus for phase shifting an optical beam in an optical device
US6845198B2 (en) * 2003-03-25 2005-01-18 Sioptical, Inc. High-speed silicon-based electro-optic modulator
US6954558B2 (en) * 2003-06-24 2005-10-11 Intel Corporation Method and apparatus for phase shifting an optical beam in an optical device
US7136544B1 (en) * 2003-08-15 2006-11-14 Luxtera, Inc. PN diode optical modulators fabricated in strip loaded waveguides
KR100606100B1 (en) * 2004-01-15 2006-07-28 삼성전자주식회사 Optical modulator with automatic bias controller and method for bias controlling using the same
KR101115735B1 (en) * 2004-02-26 2012-03-06 시옵티컬 인코포레이티드 Active manipulation of light in a silicon-on-insulator SOI structure
US7035487B2 (en) * 2004-06-21 2006-04-25 Intel Corporation Phase shifting optical device with dopant barrier

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6393185B1 (en) * 1999-11-03 2002-05-21 Sparkolor Corporation Differential waveguide pair
US6600848B2 (en) * 2000-08-02 2003-07-29 Corning Incorporated Integrated thermo-optical silica switch
US20050175281A1 (en) * 2004-02-09 2005-08-11 Fuji Xerox Co., Ltd. Optical modulator and optical modulator array

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2027497A4 *

Also Published As

Publication number Publication date
CN101467083B (en) 2012-10-10
CN101467083A (en) 2009-06-24
KR20090032071A (en) 2009-03-31
JP2009540385A (en) 2009-11-19
KR101456307B1 (en) 2014-11-03
EP2027497A2 (en) 2009-02-25
US7447395B2 (en) 2008-11-04
JP5290164B2 (en) 2013-09-18
US20070292075A1 (en) 2007-12-20
EP2027497A4 (en) 2011-03-09
WO2007146233A2 (en) 2007-12-21
EP2027497B1 (en) 2016-11-02

Similar Documents

Publication Publication Date Title
WO2007146233A3 (en) Silicon modulator offset tuning arrangement
WO2010117702A3 (en) Thermal tuning of an optical device
WO2009045662A3 (en) Thermoelectric devices and applications for the same
WO2006001827A3 (en) Thermoelectric devices and applications for the same
TW200801621A (en) Variable light controlling device and variable light controlling method
WO2010052683A3 (en) Mems resonator
JP2009258527A5 (en)
NZ580373A (en) Thermal cylcer system with temperature control element and a controller to control a thermostate's temperature based on a sample in a sample chamber
GB2438383B (en) Improvements in substrates
WO2005070171A3 (en) Active thermal control system for testing
JP2009540385A5 (en)
DE602005004205D1 (en) crystal oscillator
WO2010117701A3 (en) Optical device with large thermal impedance
WO2005081865A3 (en) Power optimization for operation of optoelectronic device with thermoelectric cooler
TW200737210A (en) Electrical fuses comprising thin film transistors (TFTS), and methods for programming same
WO2008090685A1 (en) Light control element
WO2014160453A3 (en) Device architecture and method for temperature compensation of vertical field effect devices
WO2009115721A3 (en) Composition comprising photochromic dyes in an ionic solvent
TW200502637A (en) Liquid crystal display device having form birefringent compensator
US9448428B2 (en) System for stabilizing the temperature sensitivity in photonic circuits comprising thermoelastic optical circuit claddings
EP1118902A4 (en) Liquid crystal display device
AU2003287690A1 (en) Temperature and jitter compensation controller circuit and method for fiber optics device
WO2009011384A1 (en) Optical element, optical system, optical device and imaging method
WO2014072424A3 (en) Electrowetting display device
WO2018031410A3 (en) Heterocyclic liquid crystal composition, reverse-mode polymer dispersed liquid crystal element, and associated selectively dimmable device

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200780022278.7

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07809457

Country of ref document: EP

Kind code of ref document: A2

REEP Request for entry into the european phase

Ref document number: 2007809457

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2007809457

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2009515440

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 10703/DELNP/2008

Country of ref document: IN

WWE Wipo information: entry into national phase

Ref document number: 1020097000468

Country of ref document: KR

NENP Non-entry into the national phase

Ref country code: RU