CN101435883A - Light beam shaper of monolithic parallel flat plate lens and manufacturing method thereof - Google Patents
Light beam shaper of monolithic parallel flat plate lens and manufacturing method thereof Download PDFInfo
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- CN101435883A CN101435883A CNA2007101774014A CN200710177401A CN101435883A CN 101435883 A CN101435883 A CN 101435883A CN A2007101774014 A CNA2007101774014 A CN A2007101774014A CN 200710177401 A CN200710177401 A CN 200710177401A CN 101435883 A CN101435883 A CN 101435883A
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Abstract
The invention relates to a beam shaper for a single parallel-plate mirror, which is characterized in that the beam shaper comprises a parallel-plate mirror, a first reflecting film, and a second reflecting film, wherein the parallel-plate mirror is rectangular; the first reflecting film is produced on one side of the front face of the parallel-plate mirror to form a beam reflecting region; the second reflecting film is produced on one side of the back face of the parallel-plate mirror perpendicular to the first reflecting film; the parts on the parallel-plate mirror which are provided with reflecting films are beam reflecting regions; and the part on the parallel-plate mirror without the reflecting film is beam transmitting region.
Description
Technical field
The present invention relates to a kind of light beam shaper of monolithic parallel flat plate lens, go for the beam shaping of the linear array semiconductor laser of different size.This reshaper is divided into N cross-talk light beam with the linear beam of linear array semiconductor laser output along its slow-axis direction, again closely arrange along quick shaft direction then, reach and reduce the long-pending and long-pending purpose of increase fast axial light bundle parameter of slow axis beam parameter, the light beam parameters of balanced these two orthogonal directionss is long-pending, has improved the coupling focusing performance of linear array semiconductor laser greatly.
Background technology
Since the eighties in last century, along with the progress of semiconductor material growing technology, individual laser package and Refrigeration Technique, the high power semiconductor lasers of high-power, long-life, high packaging density is ripe gradually.But the beam quality of semiconductor laser is very poor, and luminance brightness is low, has limited the application of this device.Two main application fields of this device comprise at present: one, industrial processes field; Two, as the pumping source of DPL (Diode Pumped Lasers).In two main applications, the luminance brightness that further improves high power semiconductor lasers is the focus of studying both at home and abroad all the time.
The luminance brightness that improves high power semiconductor lasers is mainly by three kinds of ways: one, improve the luminous power output of singulated dies or improve beam quality, thereby the power density of array is increased; Its two, realize high-density packages; They are three years old, it is compound or be called beam shaping to utilize optical instrument that high power semiconductor lasers is carried out light beam, guaranteeing to improve beam quality under the constant prerequisite of Output optical power, or guaranteeing to improve laser output power under the constant prerequisite of beam quality, thereby obtaining the high brightness laser device.Beam shaping not only can reach the purpose that improves the semiconductor laser luminance brightness, it simultaneously also is the basis of optical fiber coupling, thereby the beam shaping technology can greatly be improved the difficulty that the beam quality of semiconductor laser reduces the optical fiber coupling greatly, and further forms high-end product.The semiconductor laser of these high brightness not only can be used for the solid state laser and the fiber laser of pumping high light beam quality, and can directly apply to fields such as military affairs, industrial processes, Aero-Space, biomedicine.
Typical linear array high power semiconductor lasers is a linear array that comprises 20-50 luminous zones, and each cell width is approximately 50-200 μ m.Because the active area xsect of each luminous zone is rectangular, be about 10mm being parallel to junction plane (slow-axis direction) luminous zone width, be about 1 μ m perpendicular to junction plane (quick shaft direction) luminous zone width, and angle of divergence difference on both direction is also very big, on the slow-axis direction, the angle of divergence is about 100, on the quick shaft direction, the angle of divergence is about 400, cause laser instrument to differ greatly at the beam quality of both direction, beam distribution is extremely asymmetric, and the very big aberration of both direction existence, is difficult to focus on small light spot to be applicable to optical fiber output or end-face pump solid laser.
The most frequently used beam shaping technology is exactly an optical fiber binding coupling technique, the complex technique that has living space in addition, wavelength complex technique, polarization complex technique, edge glass stack recombinant technique and micro optical element refraction, reflection or diffraction shaping technology etc.Various semiconductor laser device beam shaping methods roughly can be divided three classes: the first kind is an optical fiber binding coupling technique; Second class comprises space compound technology, wavelength complex technique, polarization complex technique etc., all is guaranteeing to improve laser output power by compound a plurality of laser arrays under the constant prerequisite of beam quality; The 3rd class comprises edge glass stack recombinant technique and micro optical element refraction, reflection or diffraction shaping technology etc., earlier quick shaft direction is collimated, again the LD linear array is divided into the experimental process unit at slow-axis direction, and make the outgoing beam of these subelements rearrange at quick shaft direction, thereby obtain the two-dimentional preferably optical field distribution of symmetry, again slow-axis direction is collimated at last, guaranteeing to have improved beam quality under the constant prerequisite of Output optical power.The output light field that obtains like this have low disperse, the characteristics of high symmetry, high packing ratio (correspondingly light intensity uniformity is also higher), can be focused into minimum round hot spot, be coupled in solid laser rod or the optical fiber and go.About the 3rd class beam shaping technology, with domestic researcher many methods were proposed in the world in nearly ten years, our invention also belongs to this class.
Summary of the invention
The objective of the invention is to, a kind of light beam shaper of monolithic parallel flat plate lens and preparation method thereof is provided, have simple in structure, be easy to realize, regulate flexibly, cheap and be widely used in the light-beam forming unit of the linear array semiconductor laser of different size, after this apparatus for shaping being placed light path accurately regulate, realization is divided into N cross-talk light beam with the linear beam of linear array semiconductor laser output along its slow-axis direction, again closely arrange along quick shaft direction then, reach and reduce the long-pending and long-pending purpose of increase fast axial light bundle parameter of slow axis beam parameter, the light beam parameters of balanced two orthogonal directionss is long-pending, has improved the coupling focusing performance of linear array semiconductor laser greatly.
Technical solution of the present invention is:
The invention provides a kind of light beam shaper of monolithic parallel flat plate lens, it is characterized in that, comprising:
One parallel flat plate lens, this parallel flat plate lens are rectangle;
One first reflectance coating, this first reflectance coating are produced on the side in parallel flat plate lens front; Form the beam reflection district;
One second reflectance coating, this second reflectance coating are produced on differing on the side of 90 degree with the first reflectance coating direction of the parallel flat plate lens back side;
The part that wherein is manufactured with reflectance coating on the parallel flat plate lens is the beam reflection district, and the part of not making reflectance coating is the light beam transmission area.
The height of the light beam transmission area in wherein said parallel flat plate lens front is greater than by the height of shaping light beam.
The reflected light that the size of first reflectance coating in wherein said parallel flat plate lens front can make all be come by reverse side all is reflected.
The invention provides a kind of method for making of light beam shaper of monolithic parallel flat plate lens, it is characterized in that, comprise the steps:
Step 1: get a parallel flat plate lens, this parallel flat plate lens is a rectangle;
Step 2: on a side in the front of parallel flat plate lens, be manufactured with one first reflectance coating;
Step 3: differ in the direction of the parallel flat plate lens back side and first reflectance coating on the face of 90 degree, one side and be manufactured with one second reflectance coating;
The part that wherein is manufactured with reflectance coating on the parallel flat plate lens is the beam reflection district, and the part of not making reflectance coating is the light beam transmission area.
The height of the light beam transmission area in wherein said parallel flat plate lens front is greater than by the height of shaping light beam.
The size of first reflectance coating in wherein said parallel flat plate lens front can make all be come the reflected light of rear end face all to be reflected by reverse side.
Description of drawings
For further specifying concrete technology contents of the present invention, below in conjunction with embodiment and accompanying drawing describes in detail as after, wherein:
Fig. 1 is a structural perspective of the present invention.
Fig. 2 is light beam echo area, parallel flat plate lens of the present invention front and light beam transmission area distribution schematic diagram;
Fig. 3 is parallel flat plate lens reverse side of the present invention beam reflection district and light beam transmission area distribution schematic diagram;
Fig. 4 is the beam shaping process synoptic diagram of the adjacent beamlet oblique incidence of two bundles to parallel flat plate lens;
Fig. 5 overlooks linear array semiconductor laser slow-axis direction beam shaping process synoptic diagram;
Fig. 6 is a side-looking linear array semiconductor laser quick shaft direction beam shaping process synoptic diagram.
Embodiment
See also shown in Figure 1ly, a kind of light beam shaper of monolithic parallel flat plate lens of the present invention is characterized in that, comprising:
One parallel flat plate lens 10, this parallel flat plate lens 10 is a rectangle;
One first reflectance coating 20, this first reflectance coating 20 are produced on the side in parallel flat plate lens 10 fronts; Form the beam reflection district;
One second reflectance coating 30, this second reflectance coating 30 are produced on differing on the side of 90 degree with first reflectance coating, 20 directions of parallel flat plate lens 10 back sides;
The part that wherein is manufactured with reflectance coating on the parallel flat plate lens 10 is the beam reflection district, and the part of not making reflectance coating is the light beam transmission area.
The height of the light beam transmission area in wherein said parallel flat plate lens 10 fronts is greater than by the height of shaping light beam.
The reflected light that the size of first reflectance coating 20 in wherein said parallel flat plate lens 10 fronts can make all be come by reverse side all is reflected.
Please consult shown in Figure 1ly again, the method for making of a kind of light beam shaper of monolithic parallel flat plate lens of the present invention is characterized in that, comprises the steps:
Step 1: get a parallel flat plate lens 10, this parallel flat plate lens 10 is a rectangle;
Step 2: on a side in the front of parallel flat plate lens 10, be manufactured with one first reflectance coating 20;
Step 3: differ in the direction of parallel flat plate lens 10 back sides and first reflectance coating 20 on the face of 90 degree, one side and be manufactured with one second reflectance coating 30;
The part that wherein is manufactured with reflectance coating on the parallel flat plate lens 10 is the beam reflection district, and the part of not making reflectance coating is the light beam transmission area.
The height of the light beam transmission area in wherein said parallel flat plate lens 10 fronts is greater than by the height of shaping light beam.
The size of first reflectance coating 20 in wherein said parallel flat plate lens 10 fronts can make all be come the reflected light of rear end face all to be reflected by reverse side.
The monolithic parallel flat plate lens that adopts pros and cons to make different beam reflection districts and light beam transmission area is respectively realized the beam shaping to the linear array semiconductor laser, be to go out from the light beam transmission area transmission of parallel flat plate lens reverse side from the laser part that the light beam transmission area oblique incidence of parallel flat plate lens front enters parallel flat plate lens, remainder carries out the one or many reflection in the beam reflection district of pros and cons, last light beam transmission area transmission is from the negative gone out, thereby reaches the purpose that the linear laser light beam is cut at slow-axis direction, is rearranged at quick shaft direction.
Fig. 1 is the structural perspective of light beam shaper of monolithic parallel flat plate lens of the present invention, rectangle parallel flat plate lens 10, be produced on first reflectance coating 20 of parallel flat plate lens 10 positive sides, what be produced on parallel flat plate lens 10 back sides differs second reflectance coating 30 on the sides of 90 degree with first reflectance coating, 20 directions, the part that wherein is manufactured with reflectance coating on the parallel flat plate lens 10 is the beam reflection district, and the part of not making reflectance coating is the light beam transmission area.
Fig. 2 and Fig. 3 are respectively the pro and con beam reflection district of parallel flat shaping mirror and the synoptic diagram that the light beam transmission area distributes.We set linear array semiconductor laser slow-axis direction is the x axle, and quick shaft direction is the y axle, and direction of beam propagation is the z direction of principal axis.Place at a certain angle between parallel flat plate lens and the laser instrument, the coordinate system of parallel flat plate lens is made as x ', y ', z ' axle, then the parallel flat plate lens direction of placing can use angle theta x and y ' the angle theta y with the y axle of x ' axle and x axle to represent.
The light beam that the linear array semiconductor laser is sent is considered as a bar shaped light beam that is arranged in by N section light beam at slow-axis direction (x direction of principal axis), then this bar shaped light beam is divided into N cross-talk light beam along slow-axis direction, and make this N section light beam reset along quick shaft direction (y direction of principal axis) again, just reached the purpose of beam shaping.The beam shaping process synoptic diagram that is the adjacent beamlet oblique incidence of two bundles to parallel flat plate lens shown in Figure 4, light beam 1 and the adjacent beamlet of light beam 2 expression x direction of principal axis two bundles, light beam 1 enters from the light beam transmission area refraction in dull and stereotyped mirror front, light beam transmission area from the negative reflects, for reaching the purpose of beam shaping, light beam 2 need move to the position of light beam 1 along the x direction of principal axis, simultaneously along the y direction of principal axis move to light beam 1 directly over or under (being close to light beam 1 arranges along quick shaft direction).Therefore after light beam 2 same light beam transmission area refractions from dull and stereotyped mirror front enter, at least will be through once in the reflection in dull and stereotyped mirror reversal face beam reflection district, once in the reflection of light beam echo area, dull and stereotyped mirror front, also can be through repeatedly reflection between the beam reflection district in dull and stereotyped mirror 10 reverse side and front, finally the light beam transmission area from dull and stereotyped mirror 10 reverse side reflects.What show among the figure is the once dull and stereotyped mirror reversal face reflection of light beam 2 experience, the situation of the positive reflection of dull and stereotyped mirror once.
If the refractive index of parallel flat plate lens 10 is n, thickness is d, and incident angle is θ, and the refraction angle is θ ', according to refraction law following relation is arranged:
nsinθ′＝sinθ (1)
If make light beam 2 enter from dull and stereotyped mirror 10 front light beam transmission area refractions, experience once dull and stereotyped mirror 10 reverse side reflection, once dull and stereotyped mirror 10 positive reflections, then from dull and stereotyped mirror 10 reverse side light beam transmission areas reflect moved to just light beam 1 under (position relation as mentioned above), following relational expression is then arranged:
Δd＝2dtanθ′cosθ (2)
Wherein Δ d is a translation distance.
Fig. 5 and shown in Figure 6 being respectively are overlooked slow-axis direction and side-looking quick shaft direction beam shaping process synoptic diagram, bar shaped light beam with the linear array semiconductor laser among the figure is divided into 5 bundle beamlets along slow-axis direction, use light beam 1 ' one light beam 5 ' to represent respectively, the beam shaping process is and will initially separates along compact arranged light beam 1 ' one light beam 5 ' of slow-axis direction, and closely is arranged as light beam 1 ' one light beam 5 ' from top to bottom along quick shaft direction again.The part that indicates the beam reflection district among Fig. 5 is the part of reflectance coating 20 in the construction drawing 1.
Below we are example with the linear array semiconductor laser that comprises 19 luminous zones, whole beam shaping process is described:
Because the linear array semiconductor laser is about 40 ° in the quick shaft direction angle of divergence, be about 10 ° in the slow-axis direction angle of divergence, light beam is extremely dispersed, therefore at first the linear array semiconductor laser is carried out the fast and slow axis beam collimation, utilize fast and slow axis collimation lens module high precision integrated after, can realize the fast axle angle of divergence less than 0.5 °, the slow axis angle of divergence is less than 5 °.
Determine the light beam transmission area of parallel flat plate lens 10 and the direction that the beam reflection district distributes and parallel flat plate lens is placed according to the structural parameters of linear array semiconductor laser and the requirement of beam shaping then.
The structural parameters of linear array semiconductor laser that comprise 19 luminous zones are as follows: each luminous zone width is 150 μ m, step-length is 500 μ m, through after the fast and slow axis beam collimation, quick shaft direction light beam height is about 500 μ m, and the slow axis beam overall width is about and is 11mm.We select K9 glass as parallel flat plate lens 10, and thickness is elected 2mm as, and refractive index n is 1.51637.
We suppose that the shaping requirement is that bar shaped light beam is divided into 19 bundle beamlets along slow-axis direction, and closely arrange along quick shaft direction again, then need every bundle beamlet along slow-axis direction translation 500 μ m distances (equaling the luminous zone step-length), simultaneously along quick shaft direction translation 500 μ m distances (equaling quick shaft direction light beam height).Have according to formula (1), formula (2):
Δ dx=500 μ m wherein, Δ dy=500 μ m, n=1.51637, d=2mm.Then can draw:
θx＝11.05°
θy＝11.05°
When to be the parallel flat plate lens direction of placing with the angle theta x of x axle and y axle and θ y be 11.05 °, can realize that bar shaped light beam that the linear array semiconductor laser sends is divided into 19 at slow-axis direction and restraints beamlets, and be rearranged along quick shaft direction again.
The utility model monolithic parallel flat plate level crossing beam shaping, only the parallel flat plate lens 10 that is manufactured with reflectance coating 20 and reflectance coating 30 with a slice has just realized that the linear beam that linear array is sent is cut along slow-axis direction, and along the compact arranged again beam shaping purpose of quick shaft direction, simple in structure, novel in design, adjusting flexibly, and is with low cost, improved the focusing coupling performance of linear array semiconductor laser greatly.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that the claim scope is described certainly, but not only limits to the foregoing description.
Claims (6)
1, a kind of light beam shaper of monolithic parallel flat plate lens is characterized in that, comprising:
One parallel flat plate lens, this parallel flat plate lens are rectangle;
One first reflectance coating, this first reflectance coating are produced on the side in parallel flat plate lens front; Form the beam reflection district;
One second reflectance coating, this second reflectance coating are produced on differing on the side of 90 degree with the first reflectance coating direction of the parallel flat plate lens back side;
The part that wherein is manufactured with reflectance coating on the parallel flat plate lens is the beam reflection district, and the part of not making reflectance coating is the light beam transmission area.
2, light beam shaper of monolithic parallel flat plate lens according to claim 1 is characterized in that, the height of the light beam transmission area in wherein said parallel flat plate lens front is greater than by the height of shaping light beam.
3, light beam shaper of monolithic parallel flat plate lens according to claim 1 is characterized in that, the reflected light that the size of first reflectance coating in wherein said parallel flat plate lens front can make all be come by reverse side all is reflected.
4, a kind of method for making of light beam shaper of monolithic parallel flat plate lens is characterized in that, comprises the steps:
Step 1: get a parallel flat plate lens, this parallel flat plate lens is a rectangle;
Step 2: on a side in the front of parallel flat plate lens, be manufactured with one first reflectance coating;
Step 3: differ in the direction of the parallel flat plate lens back side and first reflectance coating on the face of 90 degree, one side and be manufactured with one second reflectance coating;
The part that wherein is manufactured with reflectance coating on the parallel flat plate lens is the beam reflection district, and the part of not making reflectance coating is the light beam transmission area.
5, the method for making of light beam shaper of monolithic parallel flat plate lens according to claim 4 is characterized in that, the height of the light beam transmission area in wherein said parallel flat plate lens front is greater than by the height of shaping light beam.
6, the method for making of light beam shaper of monolithic parallel flat plate lens according to claim 4 is characterized in that, the size of first reflectance coating in wherein said parallel flat plate lens front can make all be come the reflected light of rear end face all to be reflected by reverse side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101774014A CN101435883A (en) | 2007-11-15 | 2007-11-15 | Light beam shaper of monolithic parallel flat plate lens and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101774014A CN101435883A (en) | 2007-11-15 | 2007-11-15 | Light beam shaper of monolithic parallel flat plate lens and manufacturing method thereof |
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| Publication Number | Publication Date |
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| CN101435883A true CN101435883A (en) | 2009-05-20 |
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| CNA2007101774014A Pending CN101435883A (en) | 2007-11-15 | 2007-11-15 | Light beam shaper of monolithic parallel flat plate lens and manufacturing method thereof |
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| CN (1) | CN101435883A (en) |
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Open date: 20090520 |