CN101432627B - 电容式传感器 - Google Patents
电容式传感器 Download PDFInfo
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- CN101432627B CN101432627B CN2007800154915A CN200780015491A CN101432627B CN 101432627 B CN101432627 B CN 101432627B CN 2007800154915 A CN2007800154915 A CN 2007800154915A CN 200780015491 A CN200780015491 A CN 200780015491A CN 101432627 B CN101432627 B CN 101432627B
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Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP126437/2006 | 2006-04-28 | ||
JP2006126437A JP4600344B2 (ja) | 2006-04-28 | 2006-04-28 | 静電容量式センサ |
JP2006126873A JP4605087B2 (ja) | 2006-04-28 | 2006-04-28 | 静電容量式センサ |
JP126873/2006 | 2006-04-28 | ||
PCT/JP2007/058960 WO2007125961A1 (ja) | 2006-04-28 | 2007-04-25 | 静電容量式センサ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012101627849A Division CN102654409A (zh) | 2006-04-28 | 2007-04-25 | 电容式传感器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101432627A CN101432627A (zh) | 2009-05-13 |
CN101432627B true CN101432627B (zh) | 2012-08-22 |
Family
ID=38768019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800154915A Active CN101432627B (zh) | 2006-04-28 | 2007-04-25 | 电容式传感器 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4605087B2 (ja) |
CN (1) | CN101432627B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008001442A1 (de) * | 2008-04-29 | 2009-11-05 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements |
US8020443B2 (en) * | 2008-10-30 | 2011-09-20 | Freescale Semiconductor, Inc. | Transducer with decoupled sensing in mutually orthogonal directions |
JP2010286471A (ja) * | 2009-05-15 | 2010-12-24 | Seiko Epson Corp | Memsセンサー、電子機器 |
CN102667497B (zh) | 2009-11-24 | 2014-06-18 | 松下电器产业株式会社 | 加速度传感器 |
JP5880877B2 (ja) * | 2012-05-15 | 2016-03-09 | 株式会社デンソー | センサ装置 |
JP6002481B2 (ja) * | 2012-07-06 | 2016-10-05 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
JP6155832B2 (ja) | 2013-05-16 | 2017-07-05 | セイコーエプソン株式会社 | センサー素子、電子機器、および移動体 |
CN104458828A (zh) * | 2014-12-22 | 2015-03-25 | 中国科学院重庆绿色智能技术研究院 | 丙酮气敏半导体传感器 |
JP6611467B2 (ja) * | 2015-05-19 | 2019-11-27 | キヤノン株式会社 | 変位検出装置、レンズ鏡筒、および、撮像装置 |
JP2018077201A (ja) | 2016-11-11 | 2018-05-17 | ソニーセミコンダクタソリューションズ株式会社 | センサ素子、慣性センサ及び電子機器 |
CN111825053B (zh) * | 2020-07-03 | 2023-11-10 | 瑞声科技(南京)有限公司 | 电容系统及其制备方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5220835A (en) * | 1991-09-12 | 1993-06-22 | Ford Motor Company | Torsion beam accelerometer |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
JPH08178952A (ja) * | 1994-12-20 | 1996-07-12 | Zexel Corp | 加速度センサ |
US5587518A (en) * | 1994-12-23 | 1996-12-24 | Ford Motor Company | Accelerometer with a combined self-test and ground electrode |
US6073484A (en) * | 1995-07-20 | 2000-06-13 | Cornell Research Foundation, Inc. | Microfabricated torsional cantilevers for sensitive force detection |
DE19541388A1 (de) * | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
US5900550A (en) * | 1997-06-16 | 1999-05-04 | Ford Motor Company | Capacitive acceleration sensor |
DE19750350C1 (de) * | 1997-11-13 | 1999-08-05 | Univ Dresden Tech | Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik |
US6000287A (en) * | 1998-08-28 | 1999-12-14 | Ford Motor Company | Capacitor center of area sensitivity in angular motion micro-electromechanical systems |
JP2003014778A (ja) * | 2001-04-26 | 2003-01-15 | Samsung Electronics Co Ltd | 垂直変位測定及び駆動構造体とその製造方法 |
US6845670B1 (en) * | 2003-07-08 | 2005-01-25 | Freescale Semiconductor, Inc. | Single proof mass, 3 axis MEMS transducer |
US7146856B2 (en) * | 2004-06-07 | 2006-12-12 | Honeywell International, Inc. | Dynamically balanced capacitive pick-off accelerometer |
-
2006
- 2006-04-28 JP JP2006126873A patent/JP4605087B2/ja active Active
-
2007
- 2007-04-25 CN CN2007800154915A patent/CN101432627B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5220835A (en) * | 1991-09-12 | 1993-06-22 | Ford Motor Company | Torsion beam accelerometer |
Non-Patent Citations (1)
Title |
---|
JP昭58-10661A 1983.01.21 |
Also Published As
Publication number | Publication date |
---|---|
JP2007298410A (ja) | 2007-11-15 |
JP4605087B2 (ja) | 2011-01-05 |
CN101432627A (zh) | 2009-05-13 |
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Owner name: MATSUSHITA ELECTRIC INDUSTRIAL CO, LTD. Free format text: FORMER OWNER: MATSUSHITA ELECTRIC WORKS LTD. Effective date: 20120223 |
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Effective date of registration: 20120223 Address after: Osaka Japan Applicant after: Matsushita Electric Industrial Co., Ltd. Address before: Japan Osaka Applicant before: Matsushita Electric Works, Ltd. |
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