CN101418464A - Draft tube lifting mechanism - Google Patents
Draft tube lifting mechanism Download PDFInfo
- Publication number
- CN101418464A CN101418464A CNA2007101803888A CN200710180388A CN101418464A CN 101418464 A CN101418464 A CN 101418464A CN A2007101803888 A CNA2007101803888 A CN A2007101803888A CN 200710180388 A CN200710180388 A CN 200710180388A CN 101418464 A CN101418464 A CN 101418464A
- Authority
- CN
- China
- Prior art keywords
- supporting seat
- shaft
- guide shell
- working
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 6
- 230000010355 oscillation Effects 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052710 silicon Inorganic materials 0.000 abstract description 11
- 239000010703 silicon Substances 0.000 abstract description 11
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 229910052732 germanium Inorganic materials 0.000 abstract description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract description 2
- 230000007704 transition Effects 0.000 abstract 3
- 239000003638 chemical reducing agent Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 1
- 239000007858 starting material Substances 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a draft tube lifting mechanism for semiconductor silicon single crystal growth, which comprises a supporting seat 2 welded on a cylinder wall 1 of a working chamber, a speed reducer 3 connected with a driving shaft 9 through a key 4, sealing rings 7 and 8, a flange 6 and the supporting seat 2 realize vacuum sealing, a transition sleeve 10 is in clearance fit with the supporting seat 2 and the driving shaft 9, a working shaft 11 is in shifting fork connection with the driving shaft 9 and is in clearance fit with the transition sleeve 10, an arc-shaped rotating arm 14 is fixed with a supporting seat 13 and is connected with the working shaft 11 through a cylindrical pin 12, and a transition plate is connected with the arc-shaped rotating arm 14 and is connected with a draft tube 15 through a connecting plate 16, a pin 18 and a connecting seat 17; when the device works, the hand wheel 5 is rotated to rotate the speed reducer 3, the arc-shaped rotating arm 14 is driven to rotate and swing through the key 4, the driving shaft 9, the working shaft 11, the cylindrical pin 12 and the support 13, and the guide cylinder 15 is driven to lift through the connecting plate 16, the pin shaft 18 and the connecting seat 17. The application of the invention can improve the single-furnace yield of the growth of the semiconductor silicon single crystal, improve the production efficiency, save energy and reduce consumption. The method is widely applied to equipment for growing semiconductor silicon single crystals and germanium single crystals.
Description
One, technical field
The present invention relates to a kind of guide shell elevating mechanism of semiconductor silicon single crystal growth usefulness.
Two, background technology
Silicon single-crystal is a main raw material of making unicircuit and solar cell, the preparation of silicon single-crystal (growth) is block polycrystalline starting material to be put into crucible in that vacuum work is indoor, by well heater starting material is melted, then, by the seed crystal guiding, grow the ideal monocrystalline; Grow high-quality qualified monocrystalline fast for stable, realize energy-saving and cost-reducingly simultaneously, guide shell has been installed in the single crystal growth thermal system, and guide shell set up the charge amount that has limited in crucible, reduced production efficiency.
Guide shell of the prior art is fixedly mounted on the insulation cover, does not have the lifting moving function, has so just reduced charge amount, directly influences every stove crystalline output.
Three, technology contents
At the problem that above-mentioned prior art exists, the object of the present invention is to provide a kind of simple in structurely, easy to use, the guide shell elevating mechanism of outstanding effect used for silicon single crystal growth to improve single furnace output that silicon single-crystal is produced, is enhanced productivity, and is energy-saving and cost-reducing.
The guide shell elevating mechanism of used for silicon single crystal growth of the present invention, comprise that supporting seat 2 is welded on working spaces's barrel 1, speed reduction unit 3 is connected with drive shaft 9 by key 4, sealing- ring 7,8, flange 6 is realized vacuum-sealing with supporting seat 2, excessive cover 10 and supporting seat 2, running fit between the drive shaft 9, shift fork is connected between working shaft 11 and the drive shaft 9, and with excessive cover 10 running fit, arc pivoted arm 14 is fixed together with bearing 13, be connected with working shaft 11 by straight pin 12, excessively plate and arc pivoted arm 14 connect together, and by web plate 16, bearing pin 18, Connection Block 17 links to each other with guide shell 15;
Innovation part of the present invention is that guide shell 15 is by being installed in the rotational system on working spaces's barrel 1, rely on speed reduction unit 3 rotations to drive arc pivoted arm 14, thereby the arc of realizing guide shell 15 promoting.At when filling with substance, rotation hand wheel 5 rises guide shell 15, the more materials of packing into, treat the starting material fusing after, again guide shell 15 is dropped to the work requirements position, thereby improves single stove charge amount, enhance productivity, energy-saving and cost-reducing.
Four, description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the A-A sectional view of Fig. 1;
Referring to Fig. 1, shown in Figure 2, comprise that supporting seat 2 is welded on operating room's barrel 1, slow down Device 3 is connected with driving shaft 9 by key 4, and sealing ring 7,8, flange 6 are realized with supporting seat 2 Vacuum seal is excessively overlapped 10 and is cooperated working shaft 11 with supporting seat 2, driving shaft 9 gaps Be connected with shift fork between the driving shaft 9, and with excessive cover 10 matched in clearance, arc pivoted arm 14 with Seat 13 is fixed together, and is connected with working shaft 11 by straight pin 12, excessively plate and arc Pivoted arm 14 connects together, and by connecting plate 16, bearing pin 18, Connection Block 17 and guide shell 15 Link to each other;
During work, rotate handwheel 5 and make decelerator 3 rotations, by key 4, driving shaft 9, work Axle 11, straight pin 12, bearing 13 drive arc pivoted arm 14 rotary oscillations, and pass through connecting plate 16, bearing pin 18, Connection Block 17 drive the lifting of guide shell 15.
Five, embodiment
Accompanying drawing 3 is specific embodiments of the invention;
Be described further below in conjunction with the content of accompanying drawing type of the present invention:
Referring to Fig. 1, shown in Figure 3, comprise that supporting seat 2 is welded on working spaces's barrel 1, speed reduction unit 3 is connected with drive shaft 9 by key 4, sealing- ring 7,8, flange 6 are realized vacuum-sealing with supporting seat 2, running fit between excessive cover 10 and supporting seat 2, the drive shaft 9, shift fork is connected between working shaft 11 and the drive shaft 9, and with excessive cover 10 running fit, arc pivoted arm 14 is fixed together with bearing 13, be connected with working shaft 11 by straight pin 12, excessively plate and arc pivoted arm 14 connect together, and link to each other with guide shell 15 by web plate 16, bearing pin 18, Connection Block 17;
During work, rotate handwheel 5 and make speed reduction unit 3 rotations, drive arc pivoted arm 14 rotary oscillations, and drive the lifting of guide shell 15 by web plate 16, bearing pin 18, Connection Block 17 by key 4, drive shaft 9, working shaft 11, straight pin 12, bearing 13.
Tram when guide shell 15 is growing crystal in the A position, when filling with substance, guide shell 15 is promoted to the B position, starting material are filled to B position charge amount, after treating starting material fusings, again guide shell 15 is dropped to the A position, adorned starting material more in the time of so just can lifting than guide shell 15, increase the charge amount of single stove, improved production efficiency.
That the present invention has is simple in structure, easy to manufacture, easy to use, effect obviously, working stability The characteristics such as reliable can improve single furnace output of semiconductor silicon single crystal growth, improve and produce effect Rate, energy-saving and cost-reducing. Be widely used in semiconductor silicon single crystal growth and the germanium single crystal growth equipment.
Claims (2)
1, a kind of guide shell lifting mechanism for artificial crystal growth, comprise that supporting seat 2 is welded on working spaces's barrel 1, speed reduction unit 3 is connected with drive shaft 9 by key 4, sealing-ring 7,8, flange 6 is realized vacuum-sealing with supporting seat 2, excessive cover 10 and supporting seat 2, running fit between the drive shaft 9, shift fork is connected between working shaft 11 and the drive shaft 9, and with excessive cover 10 running fit, arc pivoted arm 14 is fixed together with bearing 13, be connected with working shaft 11 by straight pin 12, excessively plate and arc pivoted arm 14 connect together, and by web plate 16, bearing pin 18, Connection Block 17 links to each other with guide shell 15; Rotate handwheel 5 and make speed reduction unit 3 rotations, drive arc pivoted arm 14 rotary oscillations, and drive the lifting of guide shell 15 by web plate 16, bearing pin 18, Connection Block 17 by key 4, drive shaft 9, working shaft 11, straight pin 12, bearing 13.
2, guide shell lifting mechanism for artificial crystal growth according to claim 1, the lifting that it is characterized in that guide shell 15 are to finish by the rotation of pivoted arm 14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101803888A CN101418464A (en) | 2007-10-24 | 2007-10-24 | Draft tube lifting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101803888A CN101418464A (en) | 2007-10-24 | 2007-10-24 | Draft tube lifting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101418464A true CN101418464A (en) | 2009-04-29 |
Family
ID=40629459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101803888A Pending CN101418464A (en) | 2007-10-24 | 2007-10-24 | Draft tube lifting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101418464A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102146584A (en) * | 2011-04-20 | 2011-08-10 | 宁夏日晶新能源装备股份有限公司 | Heat shield lifting device of single crystal furnace |
| CN103708336A (en) * | 2014-01-08 | 2014-04-09 | 常州顺风光电材料有限公司 | Hoisting device of single crystal furnace guide cylinder |
| CN108298454A (en) * | 2017-12-28 | 2018-07-20 | 宜春万申制药机械有限公司 | A kind of fluid bed guide shell lifting gear |
-
2007
- 2007-10-24 CN CNA2007101803888A patent/CN101418464A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102146584A (en) * | 2011-04-20 | 2011-08-10 | 宁夏日晶新能源装备股份有限公司 | Heat shield lifting device of single crystal furnace |
| CN102146584B (en) * | 2011-04-20 | 2012-08-22 | 宁夏日晶新能源装备股份有限公司 | Heat shield lifting device of single crystal furnace |
| CN103708336A (en) * | 2014-01-08 | 2014-04-09 | 常州顺风光电材料有限公司 | Hoisting device of single crystal furnace guide cylinder |
| CN103708336B (en) * | 2014-01-08 | 2015-12-09 | 常州顺风光电材料有限公司 | The hanging apparatus of single-crystal furnace guide shell |
| CN108298454A (en) * | 2017-12-28 | 2018-07-20 | 宜春万申制药机械有限公司 | A kind of fluid bed guide shell lifting gear |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102312285B (en) | External continuous feeding mechanism for monocrystal furnace | |
| CN101070608B (en) | Rotary multi-crucible lowering method crystal growth system | |
| CN108823635B (en) | Preparation method of solar grade silicon and microwave smelting furnace thereof | |
| CN102443845B (en) | Equipment for continuously producing single crystal | |
| CN102345157A (en) | Continuous re-feeding production method of solar-grade Czochralski silicon | |
| CN101418464A (en) | Draft tube lifting mechanism | |
| CN210177003U (en) | Crucible driving device for single crystal furnace | |
| CN210711818U (en) | Device for reducing GaAs crystal twin crystal based on VGF method | |
| CN102011176A (en) | Silicon single crystal growth furnace with gas cold traps | |
| CN200992594Y (en) | Linear rail type crucible lifting device | |
| CN103147118B (en) | A kind of method utilizing vertical pulling and zone melting process to prepare solar energy level silicon single crystal | |
| CN201924100U (en) | Silicon single crystal growth furnace with gas cold trap | |
| CN110528074A (en) | A kind of monocrystalline silicon refines production technology and its purifier | |
| CN200992592Y (en) | Crystal growing system by multi-crucible falling method | |
| CN202450184U (en) | Device for continuous production of single crystals | |
| CN206988370U (en) | Photovoltaic generation double output type rotary reducer | |
| CN100562610C (en) | guide cylinder lifting mechanism for artificial crystal growth | |
| CN212155861U (en) | Large-scale rotating plate type isolating valve mechanism of single crystal furnace | |
| CN106676622A (en) | Upper shaft lifting device for artificial crystal furnace | |
| CN206902281U (en) | A kind of single crystal growing furnace | |
| CN201321511Y (en) | New type crystal growing furnace | |
| CN102424371B (en) | Apparatus and method used for synthesizing zinc germanium diphosphide polycrystalline | |
| CN200978306Y (en) | Rotatable multi-crucible supporting device in crystal growth system | |
| CN203639604U (en) | Flexible shaft lifting type single crystal furnace | |
| CN201449133U (en) | Rotary calcinatory for preparing silicon tetrafluoride |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090429 |