CN101416362B - 将光耦合进微谐振器 - Google Patents

将光耦合进微谐振器 Download PDF

Info

Publication number
CN101416362B
CN101416362B CN200780011988XA CN200780011988A CN101416362B CN 101416362 B CN101416362 B CN 101416362B CN 200780011988X A CN200780011988X A CN 200780011988XA CN 200780011988 A CN200780011988 A CN 200780011988A CN 101416362 B CN101416362 B CN 101416362B
Authority
CN
China
Prior art keywords
waveguide
metal
microresonator
core
cladding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200780011988XA
Other languages
English (en)
Chinese (zh)
Other versions
CN101416362A (zh
Inventor
特里·L·史密斯
巴里·J·科赫
迈克尔·A·哈斯
张俊颖
罗伯特·W·威尔逊
范旭东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN101416362A publication Critical patent/CN101416362A/zh
Application granted granted Critical
Publication of CN101416362B publication Critical patent/CN101416362B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G01N21/7746—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the waveguide coupled to a cavity resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338—Loop resonators
    • G02B6/29341—Loop resonators operating in a whispering gallery mode evanescently coupled to a light guide, e.g. sphere or disk or cylinder

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Nanotechnology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Multicomponent Fibers (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
CN200780011988XA 2006-03-29 2007-02-27 将光耦合进微谐振器 Expired - Fee Related CN101416362B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/277,769 2006-03-29
US11/277,769 US7389025B2 (en) 2006-03-29 2006-03-29 Coupling light into microresonators
PCT/US2007/004999 WO2007126512A1 (en) 2006-03-29 2007-02-27 Coupling light into microresonators

Publications (2)

Publication Number Publication Date
CN101416362A CN101416362A (zh) 2009-04-22
CN101416362B true CN101416362B (zh) 2010-11-03

Family

ID=38655820

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200780011988XA Expired - Fee Related CN101416362B (zh) 2006-03-29 2007-02-27 将光耦合进微谐振器

Country Status (7)

Country Link
US (1) US7389025B2 (enExample)
EP (1) EP2002516B1 (enExample)
JP (1) JP2009531736A (enExample)
CN (1) CN101416362B (enExample)
AT (1) ATE487153T1 (enExample)
DE (1) DE602007010262D1 (enExample)
WO (1) WO2007126512A1 (enExample)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7702202B2 (en) * 2006-12-01 2010-04-20 3M Innovative Properties Company Optical microresonator
US7903240B2 (en) * 2006-12-01 2011-03-08 3M Innovative Properties Company Optical sensing device
US8124927B2 (en) * 2007-05-29 2012-02-28 California Institute Of Technology Detecting light in whispering-gallery-mode resonators
JP2009258181A (ja) * 2008-04-11 2009-11-05 Nippon Telegr & Teleph Corp <Ntt> 光量子状態制御素子
JP2010145399A (ja) * 2008-12-16 2010-07-01 Rohm Co Ltd ショートレンジ表面プラズモンポラリトンと一般誘電体導波路との混合結合構造、ロングレンジ表面プラズモンポラリトンと誘電体導波路との結合構造、およびその応用
US8766476B2 (en) * 2009-10-02 2014-07-01 Ramin Rostami Apparatus and method for communicating data and power with electronic devices
US8515227B2 (en) * 2009-03-13 2013-08-20 Ofs Fitel, Llc Microbubble optical resonator
US8231833B2 (en) * 2009-03-24 2012-07-31 Lockheed Martin Corporation Direct optical interrogation of agents in micro-fluidic channels utilizing whispering gallery resonator approach
US8394329B2 (en) * 2009-07-07 2013-03-12 Raytheon Company Optical device for detection of agent
US8928883B1 (en) * 2009-07-07 2015-01-06 Raytheon Company Optical device for detection of an agent
US8428401B2 (en) * 2009-12-16 2013-04-23 Telefonaktiebolaget L M Ericsson (Publ) On-chip optical waveguide
US9057829B2 (en) 2010-05-14 2015-06-16 Cornell University Tunable optical apparatus, method, and applications
EP2400291A1 (en) 2010-06-17 2011-12-28 Optisense B.V. Integrated optical waveguide evanescent field sensor and longitudinal section of a substrate for use in such a sensor
US20120056363A1 (en) 2010-09-03 2012-03-08 Greg Alan Ritter Leaf spring
US8860935B2 (en) * 2010-09-17 2014-10-14 Ofs Fitel, Llc High Q-factor conical optical microresonator and utilization in the location characterization of optical fibers
US8582104B2 (en) 2011-06-30 2013-11-12 Raytheon Company Optical device for detection of an agent
WO2013006773A2 (en) 2011-07-06 2013-01-10 Cornell University Optomechanical oscillator network, control and synchronization methods, and applications
KR20130109470A (ko) * 2012-03-27 2013-10-08 삼성전자주식회사 광학 바이오센서
CN103134636B (zh) * 2013-01-22 2016-05-18 中国计量学院 光纤谐振子真空传感器
US9046650B2 (en) 2013-03-12 2015-06-02 The Massachusetts Institute Of Technology Methods and apparatus for mid-infrared sensing
WO2014143204A1 (en) * 2013-03-12 2014-09-18 Massachusetts Institute Of Technology Methods and apparatus for mid-infrared sensing
JP6121303B2 (ja) * 2013-10-09 2017-04-26 日本電信電話株式会社 メカニカルリング共振器
JP6121307B2 (ja) * 2013-10-24 2017-04-26 日本電信電話株式会社 機械分岐挿入装置
US9618693B2 (en) * 2014-06-13 2017-04-11 Infineon Technologies Ag Liquid sensing systems and methods using a ring resonator sensor
CN112903639B (zh) 2014-08-08 2022-09-13 宽腾矽公司 用于对分子进行探测、检测和分析的带外部光源的集成装置
DE102014012981A1 (de) * 2014-09-02 2016-03-03 Karlsruher Institut für Technologie Vollpolymere Mikroresonatoren
DE102015007206A1 (de) * 2015-06-02 2016-12-08 Bartec Benke Gmbh Optischer Sensor
KR102246017B1 (ko) * 2017-04-11 2021-04-30 한국전자통신연구원 편광 조절기
PL72419Y1 (pl) * 2017-12-07 2022-02-28 Kowalik Leszek Ads Spolka Cywilna Kieszonka na baterie
US10928589B2 (en) * 2018-02-20 2021-02-23 Honeywell International Inc. Metallic blinder between optical waveguides to reduce cross talk
CN108683078B (zh) * 2018-06-21 2023-06-09 中国科学院福建物质结构研究所 一种波长可调谐的半导体激光器
CN109031520A (zh) * 2018-08-03 2018-12-18 广州米德红外科技有限公司 一种高稳定性的硫系微球片上耦合装置
WO2020190917A1 (en) 2019-03-21 2020-09-24 Emanuel Melman Automatic shutdown device for battery-powered electronics
US10830954B1 (en) 2019-06-04 2020-11-10 Gm Cruise Holdings Llc Systems and methods for efficient coupling between integrated photonic waveguides and electro-optic resonator
CN111458797A (zh) * 2020-04-27 2020-07-28 汕头大学 一种微管回音壁模式耦合装置及其制作方法
WO2022012927A1 (en) * 2020-07-16 2022-01-20 Asml Holding N.V. Spectrometric metrology systems based on multimode interference and lithographic apparatus
CN112180514B (zh) * 2020-10-09 2023-08-01 温州大学 一种光纤表面波导模谐振产生装置及其调控方法
CN113281301B (zh) * 2021-05-13 2022-10-04 桂林电子科技大学 一种圆环-矩形谐振腔结构的折射率、温度传感器
CN118339490A (zh) * 2021-11-30 2024-07-12 日亚化学工业株式会社 光电路、使用该光电路的光传感器和移动体
CN116400457B (zh) * 2023-03-24 2024-02-06 深圳技术大学 一种基于金红石二氧化钛微环型谐振腔的偏分复用器
WO2025163879A1 (ja) * 2024-02-02 2025-08-07 Ｎｔｔ株式会社 光デバイス
CN118604952B (zh) * 2024-06-12 2025-05-13 西湖大学光电研究院 微环谐振腔和光学设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1257614A (zh) * 1997-05-20 2000-06-21 西北大学 半导体微型谐振装置
WO2001085341A1 (en) * 2000-05-12 2001-11-15 Pyrosequencing Ab Microfluidic devices
US6411752B1 (en) * 1999-02-22 2002-06-25 Massachusetts Institute Of Technology Vertically coupled optical resonator devices over a cross-grid waveguide architecture
US20040100675A1 (en) * 2002-11-22 2004-05-27 Matsko Andrey B. Active mode-locked lasers and other photonic devices using electro-optic whispering gallery mode resonators
US20050077513A1 (en) * 2003-10-14 2005-04-14 Xudong Fan Hybrid sphere-waveguide resonators

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3833284A (en) * 1973-08-27 1974-09-03 Bell Telephone Labor Inc Coupling arrangements for dielectric and metal-clad optical waveguides
US4715672A (en) * 1986-01-06 1987-12-29 American Telephone And Telegraph Company Optical waveguide utilizing an antiresonant layered structure
US5077822A (en) * 1989-09-22 1991-12-31 Siemens Aktiengesellschaft Optical film or strip waveguide having a dielectric waveguiding layer
US5653864A (en) 1994-06-30 1997-08-05 Nok Corporation Protein biosensor and method for protein measurement with the same
US6101300A (en) * 1997-06-09 2000-08-08 Massachusetts Institute Of Technology High efficiency channel drop filter with absorption induced on/off switching and modulation
US6389197B1 (en) * 1999-02-10 2002-05-14 California Institute Of Technology Coupling system to a microsphere cavity
US7266271B2 (en) * 1999-10-06 2007-09-04 Nomadics, Inc. System, probe and methods for colorimetric testing
US6781696B1 (en) * 1999-10-06 2004-08-24 The Board Of Regents For Oklahoma State University Apparatus and method for a microsphere whispering-gallery mode evanescent-wave sensor
AU4503201A (en) 1999-10-14 2001-06-12 University Of Utah Research Foundation Resonant optical cavities for high-sensitivity, high-throughput biological sensors and methods
US6583399B1 (en) * 1999-11-22 2003-06-24 California Institute Of Technology Optical resonator microsphere sensor with altering Q-factor
AU2001245287A1 (en) * 2000-02-17 2001-09-12 Aleph Lightgale Corporation Fiber-ring optical resonators
US6741628B2 (en) 2000-03-09 2004-05-25 California Institute Of Technology Micro-cavity laser
US6795481B2 (en) * 2000-03-22 2004-09-21 California Institute Of Technology Non-spherical whispering-gallery-mode microcavity
US6507684B2 (en) * 2000-06-28 2003-01-14 The Charles Stark Draper Laboratory, Inc. Optical microcavity resonator system
AU2001281192A1 (en) * 2000-08-08 2002-02-18 California Institute Of Technology Optical sensing based on whispering-gallery-mode microcavity
AU2001285043A1 (en) 2000-08-18 2002-03-04 Cquint Communications Corporation Fiber-optic waveguides for transverse optical coupling
AU2001288517A1 (en) * 2000-08-29 2002-03-13 The Charles Stark Draper Laboratory, Inc. Microcavity-based optical channel router
US6751368B2 (en) * 2000-09-22 2004-06-15 Massachusetts Institute Of Technology Methods of altering the resonance of waveguide micro-resonators
AU2002225765A1 (en) * 2000-11-28 2002-06-11 Rosemount, Inc. Arrangement for measuring physical parameters with an optical sensor
US6777244B2 (en) * 2000-12-06 2004-08-17 Hrl Laboratories, Llc Compact sensor using microcavity structures
US6839491B2 (en) * 2000-12-21 2005-01-04 Xponent Photonics Inc Multi-layer dispersion-engineered waveguides and resonators
US7226733B2 (en) * 2001-02-21 2007-06-05 University Of Rochester Microcavity biosensor and uses thereof
US6668111B2 (en) * 2001-06-28 2003-12-23 The Charles Stark Draper Laboratory Optical microcavity resonator sensor
WO2003062372A2 (en) * 2001-10-02 2003-07-31 The Regents Of The University Of California Nanoparticle assembled hollow spheres
US20040023396A1 (en) * 2001-11-14 2004-02-05 Boyd Robert W. Ring or disk resonator photonic biosensor and its use
JP2003287636A (ja) * 2002-03-28 2003-10-10 Nec Corp 光機能デバイスおよびその製造方法
GB2387130A (en) 2002-04-04 2003-10-08 Fluid Technologies Plc Hollow fibre filter membrane unit with microorganism detector, and associated usage
US20040137478A1 (en) 2002-10-22 2004-07-15 Stephen Arnold Enhancing the sensitivity of a microsphere sensor
US7095010B2 (en) * 2002-12-04 2006-08-22 California Institute Of Technology Silicon on insulator resonator sensors and modulators and method of operating the same
US20040196465A1 (en) * 2002-12-12 2004-10-07 Stephen Arnold Using a change in one or more properties of light in one or more microspheres for sensing chemicals such as explosives and poison gases
US7043115B2 (en) * 2002-12-18 2006-05-09 Rosemount, Inc. Tunable optical filter
US7145660B2 (en) * 2003-08-13 2006-12-05 Lambda Crossing, Ltd. Micro-resonator based optical sensor
US7259855B2 (en) * 2003-10-14 2007-08-21 3M Innovative Properties Company Porous microsphere resonators
JP2005148468A (ja) * 2003-11-17 2005-06-09 Sony Corp 光導波路、光源モジュール及び光情報処理装置
US7151738B2 (en) * 2003-11-20 2006-12-19 Seagate Technology Llc Apparatus and method for coupling light to a thin film optical waveguide
US7058272B2 (en) * 2003-12-29 2006-06-06 Eastman Kodak Company Wave-guided optical indicator
US7271379B2 (en) * 2004-05-27 2007-09-18 3M Innovative Properties Company Dielectric microcavity fluorosensors excited with a broadband light source
US7352933B2 (en) * 2004-05-27 2008-04-01 3M Innovative Properties Company Dielectric microcavity sensors

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1257614A (zh) * 1997-05-20 2000-06-21 西北大学 半导体微型谐振装置
US6411752B1 (en) * 1999-02-22 2002-06-25 Massachusetts Institute Of Technology Vertically coupled optical resonator devices over a cross-grid waveguide architecture
WO2001085341A1 (en) * 2000-05-12 2001-11-15 Pyrosequencing Ab Microfluidic devices
US20040100675A1 (en) * 2002-11-22 2004-05-27 Matsko Andrey B. Active mode-locked lasers and other photonic devices using electro-optic whispering gallery mode resonators
US20050077513A1 (en) * 2003-10-14 2005-04-14 Xudong Fan Hybrid sphere-waveguide resonators

Also Published As

Publication number Publication date
EP2002516A1 (en) 2008-12-17
DE602007010262D1 (de) 2010-12-16
EP2002516A4 (en) 2009-12-02
ATE487153T1 (de) 2010-11-15
WO2007126512A1 (en) 2007-11-08
EP2002516B1 (en) 2010-11-03
CN101416362A (zh) 2009-04-22
US7389025B2 (en) 2008-06-17
JP2009531736A (ja) 2009-09-03
US20080008418A1 (en) 2008-01-10

Similar Documents

Publication Publication Date Title
CN101416362B (zh) 将光耦合进微谐振器
WO2007117985A2 (en) Method of coupling light into microresonators
US7512298B2 (en) Optical sensing methods
US7903240B2 (en) Optical sensing device
US7933022B2 (en) Integrated optical disk resonator
US7622705B2 (en) Dielectric microcavity fluorosensors excited with a broadband light source
US7903906B2 (en) Optical sensing devices and methods
CN101694463B (zh) 半导体激光内腔光微流生物传感器
US20070269901A1 (en) Biological and chemical microcavity resonant sensors and methods of detecting molecules
CN100570338C (zh) 介电微腔传感器
Lv et al. High-sensitive refractive index sensing enabled by topological charge evolution
Baets et al. Spectroscopy-on-chip applications of silicon photonics
CN1611927A (zh) 用于生物和化学试剂的超高灵敏度光学检测的方法和装置
Yang et al. Nanoslotted microring resonator for high figure of merit refractive index sensing
JP4728989B2 (ja) ラマン散乱光増強デバイス
Butt et al. Resonant cavity structure based on Silicon Nitride platform for refractive index sensing applications
Butt et al. Design and implementation of silicon nitride resonant cavities for refractive index detection
Kundal et al. Silicon subwavelength grating micro ring resonator refractive index biosensor
Yin et al. Low-loss integrated optical sensors based on hollow-core ARROW waveguide
Pandraud et al. PECVD SiC-SiO 2-SiC horizontal slot waveguides for sensing photonics devices
Blair et al. Biosensing with optical microcavities

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101103

Termination date: 20170227