JP2009531736A - 微小共振器への結合光 - Google Patents
微小共振器への結合光 Download PDFInfo
- Publication number
- JP2009531736A JP2009531736A JP2009502803A JP2009502803A JP2009531736A JP 2009531736 A JP2009531736 A JP 2009531736A JP 2009502803 A JP2009502803 A JP 2009502803A JP 2009502803 A JP2009502803 A JP 2009502803A JP 2009531736 A JP2009531736 A JP 2009531736A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- microresonator
- core
- metal
- resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 230000003287 optical effect Effects 0.000 claims abstract description 57
- 238000001465 metallisation Methods 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims description 164
- 239000002184 metal Substances 0.000 claims description 164
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 15
- 229910052737 gold Inorganic materials 0.000 claims description 15
- 239000010931 gold Substances 0.000 claims description 15
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- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
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- 239000010703 silicon Substances 0.000 claims description 8
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
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- 229910052738 indium Inorganic materials 0.000 claims description 4
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- 229910052741 iridium Inorganic materials 0.000 claims description 4
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 239000011133 lead Substances 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
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- 229910052762 osmium Inorganic materials 0.000 claims description 4
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052702 rhenium Inorganic materials 0.000 claims description 4
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 claims description 4
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
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- 229910052758 niobium Inorganic materials 0.000 claims description 3
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 229910052712 strontium Inorganic materials 0.000 claims description 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 239000011162 core material Substances 0.000 description 69
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- NRZZLYODXDSLEK-UHFFFAOYSA-N (6-ethoxy-6-oxohexyl) 3,5-diacetamido-2,4,6-triiodobenzoate Chemical compound CCOC(=O)CCCCCOC(=O)C1=C(I)C(NC(C)=O)=C(I)C(NC(C)=O)=C1I NRZZLYODXDSLEK-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 238000002839 fiber optic waveguide Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
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- WFPQISQTIVPXNY-UHFFFAOYSA-N niobium strontium Chemical compound [Sr][Nb] WFPQISQTIVPXNY-UHFFFAOYSA-N 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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- 239000010936 titanium Substances 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N21/7746—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the waveguide coupled to a cavity resonator
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
- G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
- G02B6/29341—Loop resonators operating in a whispering gallery mode evanescently coupled to a light guide, e.g. sphere or disk or cylinder
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Nanotechnology (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Multicomponent Fibers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/277,769 US7389025B2 (en) | 2006-03-29 | 2006-03-29 | Coupling light into microresonators |
| PCT/US2007/004999 WO2007126512A1 (en) | 2006-03-29 | 2007-02-27 | Coupling light into microresonators |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009531736A true JP2009531736A (ja) | 2009-09-03 |
| JP2009531736A5 JP2009531736A5 (enExample) | 2010-04-15 |
Family
ID=38655820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009502803A Withdrawn JP2009531736A (ja) | 2006-03-29 | 2007-02-27 | 微小共振器への結合光 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7389025B2 (enExample) |
| EP (1) | EP2002516B1 (enExample) |
| JP (1) | JP2009531736A (enExample) |
| CN (1) | CN101416362B (enExample) |
| AT (1) | ATE487153T1 (enExample) |
| DE (1) | DE602007010262D1 (enExample) |
| WO (1) | WO2007126512A1 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015076721A (ja) * | 2013-10-09 | 2015-04-20 | 日本電信電話株式会社 | メカニカルリング共振器 |
| JP2015082796A (ja) * | 2013-10-24 | 2015-04-27 | 日本電信電話株式会社 | 機械分岐挿入装置 |
| JP2019144547A (ja) * | 2018-02-20 | 2019-08-29 | ハネウェル・インターナショナル・インコーポレーテッドＨｏｎｅｙｗｅｌｌ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｉｎｃ． | クロストークを低減する光導波路間の金属製目隠し |
| WO2025163879A1 (ja) * | 2024-02-02 | 2025-08-07 | Ｎｔｔ株式会社 | 光デバイス |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7702202B2 (en) * | 2006-12-01 | 2010-04-20 | 3M Innovative Properties Company | Optical microresonator |
| US7903240B2 (en) * | 2006-12-01 | 2011-03-08 | 3M Innovative Properties Company | Optical sensing device |
| US8124927B2 (en) * | 2007-05-29 | 2012-02-28 | California Institute Of Technology | Detecting light in whispering-gallery-mode resonators |
| JP2009258181A (ja) * | 2008-04-11 | 2009-11-05 | Nippon Telegr & Teleph Corp <Ntt> | 光量子状態制御素子 |
| JP2010145399A (ja) * | 2008-12-16 | 2010-07-01 | Rohm Co Ltd | ショートレンジ表面プラズモンポラリトンと一般誘電体導波路との混合結合構造、ロングレンジ表面プラズモンポラリトンと誘電体導波路との結合構造、およびその応用 |
| US8766476B2 (en) * | 2009-10-02 | 2014-07-01 | Ramin Rostami | Apparatus and method for communicating data and power with electronic devices |
| US8515227B2 (en) * | 2009-03-13 | 2013-08-20 | Ofs Fitel, Llc | Microbubble optical resonator |
| US8231833B2 (en) * | 2009-03-24 | 2012-07-31 | Lockheed Martin Corporation | Direct optical interrogation of agents in micro-fluidic channels utilizing whispering gallery resonator approach |
| US8394329B2 (en) * | 2009-07-07 | 2013-03-12 | Raytheon Company | Optical device for detection of agent |
| US8928883B1 (en) * | 2009-07-07 | 2015-01-06 | Raytheon Company | Optical device for detection of an agent |
| US8428401B2 (en) * | 2009-12-16 | 2013-04-23 | Telefonaktiebolaget L M Ericsson (Publ) | On-chip optical waveguide |
| US9057829B2 (en) | 2010-05-14 | 2015-06-16 | Cornell University | Tunable optical apparatus, method, and applications |
| EP2400291A1 (en) | 2010-06-17 | 2011-12-28 | Optisense B.V. | Integrated optical waveguide evanescent field sensor and longitudinal section of a substrate for use in such a sensor |
| US20120056363A1 (en) | 2010-09-03 | 2012-03-08 | Greg Alan Ritter | Leaf spring |
| US8860935B2 (en) * | 2010-09-17 | 2014-10-14 | Ofs Fitel, Llc | High Q-factor conical optical microresonator and utilization in the location characterization of optical fibers |
| US8582104B2 (en) | 2011-06-30 | 2013-11-12 | Raytheon Company | Optical device for detection of an agent |
| WO2013006773A2 (en) | 2011-07-06 | 2013-01-10 | Cornell University | Optomechanical oscillator network, control and synchronization methods, and applications |
| KR20130109470A (ko) * | 2012-03-27 | 2013-10-08 | 삼성전자주식회사 | 광학 바이오센서 |
| CN103134636B (zh) * | 2013-01-22 | 2016-05-18 | 中国计量学院 | 光纤谐振子真空传感器 |
| US9046650B2 (en) | 2013-03-12 | 2015-06-02 | The Massachusetts Institute Of Technology | Methods and apparatus for mid-infrared sensing |
| WO2014143204A1 (en) * | 2013-03-12 | 2014-09-18 | Massachusetts Institute Of Technology | Methods and apparatus for mid-infrared sensing |
| US9618693B2 (en) * | 2014-06-13 | 2017-04-11 | Infineon Technologies Ag | Liquid sensing systems and methods using a ring resonator sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2015076721A (ja) * | 2013-10-09 | 2015-04-20 | 日本電信電話株式会社 | メカニカルリング共振器 |
| JP2015082796A (ja) * | 2013-10-24 | 2015-04-27 | 日本電信電話株式会社 | 機械分岐挿入装置 |
| JP2019144547A (ja) * | 2018-02-20 | 2019-08-29 | ハネウェル・インターナショナル・インコーポレーテッドＨｏｎｅｙｗｅｌｌ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｉｎｃ． | クロストークを低減する光導波路間の金属製目隠し |
| WO2025163879A1 (ja) * | 2024-02-02 | 2025-08-07 | Ｎｔｔ株式会社 | 光デバイス |
Also Published As
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| EP2002516A1 (en) | 2008-12-17 |
| DE602007010262D1 (de) | 2010-12-16 |
| EP2002516A4 (en) | 2009-12-02 |
| ATE487153T1 (de) | 2010-11-15 |
| CN101416362B (zh) | 2010-11-03 |
| WO2007126512A1 (en) | 2007-11-08 |
| EP2002516B1 (en) | 2010-11-03 |
| CN101416362A (zh) | 2009-04-22 |
| US7389025B2 (en) | 2008-06-17 |
| US20080008418A1 (en) | 2008-01-10 |
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