CN101408522A - 具有超支化结构的高分子电阻型湿敏元件及其制作方法 - Google Patents
具有超支化结构的高分子电阻型湿敏元件及其制作方法 Download PDFInfo
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- CN101408522A CN101408522A CNA2008101621210A CN200810162121A CN101408522A CN 101408522 A CN101408522 A CN 101408522A CN A2008101621210 A CNA2008101621210 A CN A2008101621210A CN 200810162121 A CN200810162121 A CN 200810162121A CN 101408522 A CN101408522 A CN 101408522A
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- electric resistance
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- 238000004519 manufacturing process Methods 0.000 title abstract description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000010931 gold Substances 0.000 claims abstract description 24
- 229910052737 gold Inorganic materials 0.000 claims abstract description 24
- 239000000919 ceramic Substances 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 150000003242 quaternary ammonium salts Chemical class 0.000 claims abstract 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 50
- 229910052786 argon Inorganic materials 0.000 claims description 25
- 238000006243 chemical reaction Methods 0.000 claims description 25
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 20
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 15
- 238000006392 deoxygenation reaction Methods 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 15
- 239000000243 solution Substances 0.000 claims description 15
- 238000003756 stirring Methods 0.000 claims description 15
- 238000010792 warming Methods 0.000 claims description 15
- 239000011159 matrix material Substances 0.000 claims description 14
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 10
- 239000002244 precipitate Substances 0.000 claims description 10
- 239000002243 precursor Substances 0.000 claims description 10
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 claims description 10
- 238000001291 vacuum drying Methods 0.000 claims description 10
- 238000003828 vacuum filtration Methods 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 claims description 5
- -1 3-dimethylamino-1-propyl Chemical group 0.000 claims description 5
- 230000031709 bromination Effects 0.000 claims description 5
- 238000005893 bromination reaction Methods 0.000 claims description 5
- 238000010790 dilution Methods 0.000 claims description 5
- 239000012895 dilution Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- RINCXYDBBGOEEQ-UHFFFAOYSA-N succinic anhydride Chemical class O=C1CCC(=O)O1 RINCXYDBBGOEEQ-UHFFFAOYSA-N 0.000 claims description 5
- 238000005406 washing Methods 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 3
- 229920002521 macromolecule Polymers 0.000 abstract description 13
- 230000004044 response Effects 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000011084 recovery Methods 0.000 abstract description 2
- 238000003860 storage Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract 2
- 230000007613 environmental effect Effects 0.000 abstract 1
- 230000002349 favourable effect Effects 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 abstract 1
- 125000003277 amino group Chemical group 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000007791 dehumidification Methods 0.000 description 2
- 125000003010 ionic group Chemical group 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012271 agricultural production Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000005518 polymer electrolyte Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2008101621210A CN101408522B (zh) | 2008-11-24 | 2008-11-24 | 具有超支化结构的高分子电阻型湿敏元件的制作方法 |
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CN2008101621210A CN101408522B (zh) | 2008-11-24 | 2008-11-24 | 具有超支化结构的高分子电阻型湿敏元件的制作方法 |
Publications (2)
Publication Number | Publication Date |
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CN101408522A true CN101408522A (zh) | 2009-04-15 |
CN101408522B CN101408522B (zh) | 2011-12-21 |
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CN2008101621210A Expired - Fee Related CN101408522B (zh) | 2008-11-24 | 2008-11-24 | 具有超支化结构的高分子电阻型湿敏元件的制作方法 |
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CN (1) | CN101408522B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110346422A (zh) * | 2019-08-22 | 2019-10-18 | 电子科技大学 | 一种基于凹凸棒的湿度传感器及其制备方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3967886B2 (ja) * | 2000-03-31 | 2007-08-29 | Tdk株式会社 | 湿度センサ素子およびその製造方法 |
CN2606353Y (zh) * | 2002-12-19 | 2004-03-10 | 李扬 | 有机高分子-无机纳米复合电阻型薄膜湿敏元件 |
CN2779396Y (zh) * | 2004-12-29 | 2006-05-10 | 浙江大学 | 具有互穿网络结构的高分子电阻型薄膜湿敏元件 |
CN201016949Y (zh) * | 2006-09-29 | 2008-02-06 | 浙江大学 | 高耐水特性的高分子电阻型薄膜湿敏元件 |
CN201096743Y (zh) * | 2007-06-27 | 2008-08-06 | 浙江大学 | 聚电解质/本征导电聚合物复合电阻型薄膜湿敏元件 |
CN201096744Y (zh) * | 2007-06-27 | 2008-08-06 | 浙江大学 | 一种聚合物接枝碳黑复合电阻型薄膜湿敏元件 |
CN100523799C (zh) * | 2007-06-27 | 2009-08-05 | 浙江大学 | 聚电解质/本征导电聚合物复合湿敏元件及其制作方法 |
CN201340405Y (zh) * | 2008-11-24 | 2009-11-04 | 浙江大学 | 具有超支化结构的高分子电阻型湿敏元件 |
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- 2008-11-24 CN CN2008101621210A patent/CN101408522B/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110346422A (zh) * | 2019-08-22 | 2019-10-18 | 电子科技大学 | 一种基于凹凸棒的湿度传感器及其制备方法 |
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Publication number | Publication date |
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CN101408522B (zh) | 2011-12-21 |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20090415 Assignee: ZHEJIANG WODELL TECHNOLOGY CO., LTD. Assignor: Zhejiang University Contract record no.: 2012330000589 Denomination of invention: Manufacturing method of high molecule electric resistance type humidity sensitive element with super-branched structure Granted publication date: 20111221 License type: Exclusive License Record date: 20121228 |
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Granted publication date: 20111221 Termination date: 20171124 |