CN101405829B - 抑制非期望离子的用于示踪气体检漏的质谱仪 - Google Patents

抑制非期望离子的用于示踪气体检漏的质谱仪 Download PDF

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Publication number
CN101405829B
CN101405829B CN2007800100224A CN200780010022A CN101405829B CN 101405829 B CN101405829 B CN 101405829B CN 2007800100224 A CN2007800100224 A CN 2007800100224A CN 200780010022 A CN200780010022 A CN 200780010022A CN 101405829 B CN101405829 B CN 101405829B
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China
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ion
mass spectrometer
helium
filament
source
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English (en)
Chinese (zh)
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CN101405829A (zh
Inventor
J·D·杰斯特
J·迪普
P·威廉姆斯
C·W·帕金斯
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Varian Inc
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Varian Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN2007800100224A 2006-02-15 2007-02-08 抑制非期望离子的用于示踪气体检漏的质谱仪 Expired - Fee Related CN101405829B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/354,410 2006-02-15
US11/354,410 US7459677B2 (en) 2006-02-15 2006-02-15 Mass spectrometer for trace gas leak detection with suppression of undesired ions
PCT/US2007/003379 WO2007097919A2 (en) 2006-02-15 2007-02-08 Mass spectrometer for trace gas leak detection with suppression of undesired ions

Publications (2)

Publication Number Publication Date
CN101405829A CN101405829A (zh) 2009-04-08
CN101405829B true CN101405829B (zh) 2010-06-02

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CN2007800100224A Expired - Fee Related CN101405829B (zh) 2006-02-15 2007-02-08 抑制非期望离子的用于示踪气体检漏的质谱仪

Country Status (6)

Country Link
US (1) US7459677B2 (https=)
EP (1) EP1994545B1 (https=)
JP (1) JP2009527097A (https=)
CN (1) CN101405829B (https=)
MX (1) MX2008010498A (https=)
WO (1) WO2007097919A2 (https=)

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US7855361B2 (en) * 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions
US8555704B2 (en) * 2008-10-20 2013-10-15 Agilent Technologies, Inc. Calibration systems and methods for tracer gas leak detection
FR2943173B1 (fr) * 2009-03-11 2016-03-18 Alcatel Lucent Cellule d'ionisation pour spectrometre de masse et detecteur de fuites correspondant
US8756978B2 (en) * 2010-04-09 2014-06-24 Inficon Gmbh Leak detector with optical tracer gas detection
RU2517985C2 (ru) * 2010-04-19 2014-06-10 ООО "Политест" Узел регистрации ионного тока в масс-спектрометрическом течеискателе
CN101866811B (zh) * 2010-05-28 2011-09-28 中国航天科技集团公司第五研究院第五一〇研究所 一种小型磁偏转质谱计离子源
US8692186B2 (en) * 2010-08-10 2014-04-08 Wilco Ag Method and apparatus for leak testing containers
CN103123290B (zh) * 2012-12-28 2016-06-15 浙江跃岭股份有限公司 一种检测轮毂气密性的设备及其应用方法
WO2014164198A1 (en) * 2013-03-11 2014-10-09 David Rafferty Automatic gain control with defocusing lens
US8969794B2 (en) 2013-03-15 2015-03-03 1St Detect Corporation Mass dependent automatic gain control for mass spectrometer
CN108109898B (zh) * 2017-12-20 2020-02-21 南京华东电子真空材料有限公司 一种选择性抽气的溅射离子泵
GB2569800B (en) 2017-12-22 2022-09-07 Thermo Fisher Scient Bremen Gmbh Method and device for crosstalk compensation
JP2023109360A (ja) * 2022-01-27 2023-08-08 島津産機システムズ株式会社 水素リークディテクタ

Citations (3)

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US5600136A (en) * 1995-06-07 1997-02-04 Varian Associates, Inc. Single potential ion source
CN1146553A (zh) * 1995-02-09 1997-04-02 莱波尔德股份公司 气体检漏器
CN2549462Y (zh) * 2002-07-08 2003-05-07 郭跃辉 一种宽量程氦质谱检漏仪

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US3355587A (en) * 1951-01-28 1967-11-28 Jenckel Ludolf Gas analysis apparatus comprising plural ionization chambers with different ionizing electron beam energy levels in the chambers
US3247373A (en) * 1962-12-18 1966-04-19 Gca Corp Mass spectrometer leak detector with means for controlling the ion source output
GB1082819A (en) 1963-12-20 1967-09-13 Nat Res Corp Improved mass spectrometer
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3591827A (en) 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3581195A (en) * 1968-06-10 1971-05-25 Varian Associates Detection of vacuum leaks by gas ionization method and apparatus providing decreased vacuum recovery time
US3690151A (en) 1968-07-25 1972-09-12 Norton Co Leak detector
US4499752A (en) 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4735084A (en) 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
FR2604522B1 (fr) 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes
US5340983A (en) * 1992-05-18 1994-08-23 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Method and apparatus for mass analysis using slow monochromatic electrons
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
DE4326265A1 (de) 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5451781A (en) * 1994-10-28 1995-09-19 Regents Of The University Of California Mini ion trap mass spectrometer
US5506412A (en) 1994-12-16 1996-04-09 Buttrill, Jr.; Sidney E. Means for reducing the contamination of mass spectrometer leak detection ion sources
FR2734633B1 (fr) 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
DE69617417T2 (de) * 1996-08-30 2002-08-08 Varian, Inc. Einfach-Potential Ionenquelle
FR2761776B1 (fr) 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6781117B1 (en) * 2002-05-30 2004-08-24 Ross C Willoughby Efficient direct current collision and reaction cell
US7060987B2 (en) * 2003-03-03 2006-06-13 Brigham Young University Electron ionization source for othogonal acceleration time-of-flight mass spectrometry

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
CN1146553A (zh) * 1995-02-09 1997-04-02 莱波尔德股份公司 气体检漏器
US5600136A (en) * 1995-06-07 1997-02-04 Varian Associates, Inc. Single potential ion source
CN2549462Y (zh) * 2002-07-08 2003-05-07 郭跃辉 一种宽量程氦质谱检漏仪

Also Published As

Publication number Publication date
EP1994545A2 (en) 2008-11-26
WO2007097919A3 (en) 2008-07-24
EP1994545B1 (en) 2014-04-16
HK1131255A1 (en) 2010-01-15
JP2009527097A (ja) 2009-07-23
MX2008010498A (es) 2008-10-17
US7459677B2 (en) 2008-12-02
US20070187586A1 (en) 2007-08-16
WO2007097919A2 (en) 2007-08-30
CN101405829A (zh) 2009-04-08

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