CN101377255B - 真空开/关阀 - Google Patents

真空开/关阀 Download PDF

Info

Publication number
CN101377255B
CN101377255B CN2008102149212A CN200810214921A CN101377255B CN 101377255 B CN101377255 B CN 101377255B CN 2008102149212 A CN2008102149212 A CN 2008102149212A CN 200810214921 A CN200810214921 A CN 200810214921A CN 101377255 B CN101377255 B CN 101377255B
Authority
CN
China
Prior art keywords
piston
ripple sealing
valve
vacuum
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2008102149212A
Other languages
English (en)
Chinese (zh)
Other versions
CN101377255A (zh
Inventor
渡边雅之
宫原诚
梅泽俊祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Publication of CN101377255A publication Critical patent/CN101377255A/zh
Application granted granted Critical
Publication of CN101377255B publication Critical patent/CN101377255B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Diaphragms And Bellows (AREA)
CN2008102149212A 2007-08-29 2008-08-29 真空开/关阀 Active CN101377255B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007222096 2007-08-29
JP2007222096 2007-08-29
JP2007-222096 2007-08-29
JP2008-126832 2008-05-14
JP2008126832A JP2009074681A (ja) 2007-08-29 2008-05-14 真空開閉弁
JP2008126832 2008-05-14

Publications (2)

Publication Number Publication Date
CN101377255A CN101377255A (zh) 2009-03-04
CN101377255B true CN101377255B (zh) 2010-06-23

Family

ID=40420929

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008102149212A Active CN101377255B (zh) 2007-08-29 2008-08-29 真空开/关阀

Country Status (3)

Country Link
JP (1) JP2009074681A (ja)
KR (1) KR100987466B1 (ja)
CN (1) CN101377255B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4828642B1 (ja) * 2010-05-17 2011-11-30 シーケーディ株式会社 真空制御バルブ及び真空制御システム
EP2781813A1 (de) * 2013-03-21 2014-09-24 VAT Holding AG Vakuumventil
CN103216671B (zh) * 2013-04-28 2014-12-17 夏育红 一种用于直动式阀门的密封阀胶套
JP6488091B2 (ja) * 2014-09-25 2019-03-20 水ｉｎｇ株式会社 ダイヤフラム弁、軸封装置、および弁体保持部
KR102380749B1 (ko) * 2020-09-22 2022-04-05 주식회사 엠에스티 차단막 보호용 보호커버를 구비한 진공밸브
KR102380748B1 (ko) * 2020-09-22 2022-04-05 주식회사 엠에스티 원관형 굴곡 차단막을 구비한 진공밸브

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591903B2 (ja) 1979-09-26 1984-01-14 東洋電装株式会社 ロ−リングダイヤフラム
JP3333023B2 (ja) * 1993-11-29 2002-10-07 積水化学工業株式会社 真空弁
JPH10132077A (ja) 1996-11-01 1998-05-22 Nok Corp ダイアフラム
JP3777311B2 (ja) 2001-07-26 2006-05-24 シーケーディ株式会社 真空圧力制御弁

Also Published As

Publication number Publication date
CN101377255A (zh) 2009-03-04
KR20090023146A (ko) 2009-03-04
KR100987466B1 (ko) 2010-10-13
JP2009074681A (ja) 2009-04-09

Similar Documents

Publication Publication Date Title
CN101377255B (zh) 真空开/关阀
US4783108A (en) Catching head of apparatus for handling parts such as cylinder blocks and the like
JP5421464B2 (ja) 空気注入装置、システム及びその利用方法
CN103477092A (zh) 带有滚动活塞密封件的压缩机和/或膨胀机装置
JPWO2006046478A1 (ja) 管ライニング材の反転方法及び装置、並びに反転装置を用いた管路更生工法
SK15822001A3 (sk) Zariadenie zahŕňajúce kombináciu komory a piesta
CN108608419B (zh) 闭合腔体、软体肌肉、软体机器人驱动系统和机器人系统
CN101223379A (zh) 空气弹簧装置和制造方法
US6401744B1 (en) Valve actuator
CN1119542C (zh) 开启针
KR101573120B1 (ko) 배관 내부 검사용 이동로봇
US20040177485A1 (en) Boot-slider
AU2009251005A1 (en) A combination of a chamber and a piston, a pump, a shock absorber, a transducer, a motor and a power unit incorporating the combination
CN112032326B (zh) 分块式活塞阀芯结构及其组件、阀门和方法
US20060171828A1 (en) Fluid transfer pump
US20090057600A1 (en) Vacuum opening/closing valve
US5893567A (en) Sealing system for sealing an opening
CN105697186A (zh) 一种发动机机油尺孔密封装置
CN205444357U (zh) 一种带气囊的气压式管道疏通器
US6863277B2 (en) Piston ring for the piston of a vibration damper
JP7343897B2 (ja) ポンプユニット及びポンプ
CN206801810U (zh) 便携式轮胎充气泵
RU2766660C2 (ru) Устройство для смещения подвижной трубки в направлении уплотнения
CN208764523U (zh) 一种大挠度伸缩闸阀
JPS6357625B2 (ja)

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant