CN101377255B - 真空开/关阀 - Google Patents

真空开/关阀 Download PDF

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Publication number
CN101377255B
CN101377255B CN2008102149212A CN200810214921A CN101377255B CN 101377255 B CN101377255 B CN 101377255B CN 2008102149212 A CN2008102149212 A CN 2008102149212A CN 200810214921 A CN200810214921 A CN 200810214921A CN 101377255 B CN101377255 B CN 101377255B
Authority
CN
China
Prior art keywords
piston
ripple sealing
valve
vacuum
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2008102149212A
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English (en)
Chinese (zh)
Other versions
CN101377255A (zh
Inventor
渡边雅之
宫原诚
梅泽俊祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Publication of CN101377255A publication Critical patent/CN101377255A/zh
Application granted granted Critical
Publication of CN101377255B publication Critical patent/CN101377255B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Diaphragms And Bellows (AREA)
CN2008102149212A 2007-08-29 2008-08-29 真空开/关阀 Active CN101377255B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007222096 2007-08-29
JP2007222096 2007-08-29
JP2007-222096 2007-08-29
JP2008-126832 2008-05-14
JP2008126832A JP2009074681A (ja) 2007-08-29 2008-05-14 真空開閉弁
JP2008126832 2008-05-14

Publications (2)

Publication Number Publication Date
CN101377255A CN101377255A (zh) 2009-03-04
CN101377255B true CN101377255B (zh) 2010-06-23

Family

ID=40420929

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008102149212A Active CN101377255B (zh) 2007-08-29 2008-08-29 真空开/关阀

Country Status (3)

Country Link
JP (1) JP2009074681A (ja)
KR (1) KR100987466B1 (ja)
CN (1) CN101377255B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4828642B1 (ja) * 2010-05-17 2011-11-30 シーケーディ株式会社 真空制御バルブ及び真空制御システム
EP2781813A1 (de) * 2013-03-21 2014-09-24 VAT Holding AG Vakuumventil
CN103216671B (zh) * 2013-04-28 2014-12-17 夏育红 一种用于直动式阀门的密封阀胶套
JP6488091B2 (ja) * 2014-09-25 2019-03-20 水ing株式会社 ダイヤフラム弁、軸封装置、および弁体保持部
KR102380749B1 (ko) * 2020-09-22 2022-04-05 주식회사 엠에스티 차단막 보호용 보호커버를 구비한 진공밸브
KR102380748B1 (ko) * 2020-09-22 2022-04-05 주식회사 엠에스티 원관형 굴곡 차단막을 구비한 진공밸브

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591903B2 (ja) 1979-09-26 1984-01-14 東洋電装株式会社 ロ−リングダイヤフラム
JP3333023B2 (ja) * 1993-11-29 2002-10-07 積水化学工業株式会社 真空弁
JPH10132077A (ja) 1996-11-01 1998-05-22 Nok Corp ダイアフラム
JP3777311B2 (ja) 2001-07-26 2006-05-24 シーケーディ株式会社 真空圧力制御弁

Also Published As

Publication number Publication date
CN101377255A (zh) 2009-03-04
KR20090023146A (ko) 2009-03-04
KR100987466B1 (ko) 2010-10-13
JP2009074681A (ja) 2009-04-09

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