CN101377255B - 真空开/关阀 - Google Patents
真空开/关阀 Download PDFInfo
- Publication number
- CN101377255B CN101377255B CN2008102149212A CN200810214921A CN101377255B CN 101377255 B CN101377255 B CN 101377255B CN 2008102149212 A CN2008102149212 A CN 2008102149212A CN 200810214921 A CN200810214921 A CN 200810214921A CN 101377255 B CN101377255 B CN 101377255B
- Authority
- CN
- China
- Prior art keywords
- piston
- ripple sealing
- valve
- vacuum
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Details Of Valves (AREA)
- Fluid-Driven Valves (AREA)
- Diaphragms And Bellows (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007222096 | 2007-08-29 | ||
JP2007222096 | 2007-08-29 | ||
JP2007-222096 | 2007-08-29 | ||
JP2008-126832 | 2008-05-14 | ||
JP2008126832A JP2009074681A (ja) | 2007-08-29 | 2008-05-14 | 真空開閉弁 |
JP2008126832 | 2008-05-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101377255A CN101377255A (zh) | 2009-03-04 |
CN101377255B true CN101377255B (zh) | 2010-06-23 |
Family
ID=40420929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008102149212A Active CN101377255B (zh) | 2007-08-29 | 2008-08-29 | 真空开/关阀 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2009074681A (ja) |
KR (1) | KR100987466B1 (ja) |
CN (1) | CN101377255B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4828642B1 (ja) * | 2010-05-17 | 2011-11-30 | シーケーディ株式会社 | 真空制御バルブ及び真空制御システム |
EP2781813A1 (de) * | 2013-03-21 | 2014-09-24 | VAT Holding AG | Vakuumventil |
CN103216671B (zh) * | 2013-04-28 | 2014-12-17 | 夏育红 | 一种用于直动式阀门的密封阀胶套 |
JP6488091B2 (ja) * | 2014-09-25 | 2019-03-20 | 水ing株式会社 | ダイヤフラム弁、軸封装置、および弁体保持部 |
KR102380749B1 (ko) * | 2020-09-22 | 2022-04-05 | 주식회사 엠에스티 | 차단막 보호용 보호커버를 구비한 진공밸브 |
KR102380748B1 (ko) * | 2020-09-22 | 2022-04-05 | 주식회사 엠에스티 | 원관형 굴곡 차단막을 구비한 진공밸브 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS591903B2 (ja) | 1979-09-26 | 1984-01-14 | 東洋電装株式会社 | ロ−リングダイヤフラム |
JP3333023B2 (ja) * | 1993-11-29 | 2002-10-07 | 積水化学工業株式会社 | 真空弁 |
JPH10132077A (ja) | 1996-11-01 | 1998-05-22 | Nok Corp | ダイアフラム |
JP3777311B2 (ja) | 2001-07-26 | 2006-05-24 | シーケーディ株式会社 | 真空圧力制御弁 |
-
2008
- 2008-05-14 JP JP2008126832A patent/JP2009074681A/ja active Pending
- 2008-08-25 KR KR1020080082729A patent/KR100987466B1/ko active IP Right Grant
- 2008-08-29 CN CN2008102149212A patent/CN101377255B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN101377255A (zh) | 2009-03-04 |
KR20090023146A (ko) | 2009-03-04 |
KR100987466B1 (ko) | 2010-10-13 |
JP2009074681A (ja) | 2009-04-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |