CN101363804A - Substrate outer appearance inspection device - Google Patents
Substrate outer appearance inspection device Download PDFInfo
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- CN101363804A CN101363804A CNA2008101443285A CN200810144328A CN101363804A CN 101363804 A CN101363804 A CN 101363804A CN A2008101443285 A CNA2008101443285 A CN A2008101443285A CN 200810144328 A CN200810144328 A CN 200810144328A CN 101363804 A CN101363804 A CN 101363804A
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Abstract
The invention provides a substrate appearance inspection device capable of differentiating solder steep surface and plane surface, which are hard to detect out with colorful high-brightness illumination, and capable of picking-up position out of the solder in white illumination. A colorful camera and infrared camera are arranged above a substrate to make each light receiving faces opposite to the substrate face. A first illumination section respectively irradiating visible lights such as red, green, blue from different directions and a second illumination section irradiating infrared light along light axis of the camera are arranged between the camera and substrate. Color image is formed by reflected light reflected by the incidence substrate of the camera from the first illumination section, shade image is formed by reflected light of camera incidence infrared light. Image of position corresponding to the color image is processed when detecting position out of the welded corner, position corresponding tilt grade of five-grade is determined by using color image and shade image when detecting the welded corner.
Description
Technical field
The present invention relates to a kind of apparatus for substrate appearance inspection, this apparatus for substrate appearance inspection shooting printed base plate (below, be called " component-mounted substrate " or only be called " substrate "), use the image that is generated to come the installment state of judgement part and the surface state of scolding tin etc. whether suitable, wherein, aforesaid substrate is equipped with parts and has finished soldering to each installing component.
Background technology
The applicant develops the apparatus for substrate appearance inspection of more than ever before being called " colored high brightness mode (color high light) ".The apparatus for substrate appearance inspection of this colour high brightness mode (below, only be called " testing fixture ") has two-dimentional color camera and irradiates the lighting device (with reference to patent documentation 1,2) of 3 kinds of color light of red, green, blue from different directions.
Special fair 6-No. 1173 communiques of patent documentation 1:JP
Patent documentation 2:JP spy opens communique 2002-No. 296198
In above-mentioned testing fixture, color camera is configured in the top of substrate, and its sensitive surface and real estate are opposed; Lighting device is configured to, makes the ring-type light source central shaft separately that sends each color light of red, green, blue consistent with the optical axis of filming apparatus.In addition, radius by adjusting each light source and height, from the direction irradiation red light of the elevation angle maximum of relative real estate, the second largest direction irradiation green light from the elevation angle is from the direction irradiation blue light of elevation angle minimum.In addition, can replace the ring-type light source sometimes, use and arranged the lighting device of the structure of a plurality of LED according to concentrically ringed shape.
Optical system according to said structure, if to the tin cream leg that forms on the substrate after the soldering (below, only be called " leg ") throw light on, then direct reflection all takes place on leg (Fillet) surface in the color light from each light source, and, because of the angle of inclination different reflected light of difference color of leg incides in the camera.Particularly, be positioned at the soft part of leg bottom, correspondence incides in the camera from the reflection of light light of the red light source of elevation angle maximum, and in the big part of the gradient that is positioned at leg top, correspondence incides in the camera from the reflection of light light of the blue-light source of elevation angle minimum.In addition, at the middle body of leg, incide in the camera for reflection of light light from green light source.
In the testing fixture of colored high brightness mode, the coloured image that is generated by above-mentioned optical system is carried out binary conversion treatment, extract the zone (following, " color area ") of each color of performance red, green, blue, and the area of each color area of instrumentation and position etc.Then, the reference value of these instrumentation values with login in advance compared, whether size and the heeling condition of differentiating leg be suitable.
Further, in this testing fixture, make each color light of red, green, blue when mixing, become white light by the light quantity of adjusting each light, thereby, take the position that diffuse reflection strengthens as substrate surface and article body following under the reflected white light illumination.Generate the clear coloured image that demonstrates original color and shape at the position beyond the scolding tin like this, therefore can easily carry out following processing, promptly, for example, in order to check the color that has or not parts and extract parts, perhaps extract the literal that is printed on the article body in order to check setup error.In addition, under the situation of the image that demonstration is used to check, can show image, so the user can not feel inharmonious when confirming display image near the state of actual substrate.
Thereby,, can use identical coloured image to come scolding tin is checked and position beyond the scolding tin is checked according to the testing fixture of colored high brightness mode.
In addition, record following technology in the above-mentioned patent documentation 2: except being provided with colored highlight illumination with the lighting device, also be provided with the compensation Lighting Division, this compensation irradiates blue light from the angle that is lower than colored highlight illumination to substrate with Lighting Division, make blue region also comprise to be positioned at the precipitous face of scolding tin side, perhaps pass through to adjust the light quantity of each light, make each color light of colored highlight illumination and compensation become white light with the synthetic light afterwards of the blue light of Lighting Division.
In the optical system of colored high brightness mode, because the scope of the irradiating angle of each color light is defined, the angular range that therefore can be reflected at the dip plane on the coloured image also is defined naturally.Therefore, as shown in Figure 9, become following state under the situation of the reflective condition of considering hemispherical scolding tin 70: at the extremely steep face of the bottom gradient, even be used to detect the blue light of the steep face of the gradient, its normal reflection light also can't incide in the camera 11.In addition, the smooth face at the top, even be used to detect the red light of the slow face of the gradient, its normal reflection light also can't incide in the camera 1.Like this, can't all dark areas in coloured image to the position of camera 1 incident normal reflection light, therefore be difficult to determine that inclined degree is suddenly or smooth.
As the method that addresses this is that, expected following method, that is, increase lighting device, thereby, perhaps reduce the allocation position of lighting device as far as possible from irradiates light on a large scale.
But, in the lighting device of colored high brightness mode,, therefore, must enlarge width at whole orientation in order to increase range of exposures owing to carry out omnibearing illumination, cause lighting device to maximize, can not tackle the present situation that realizes substrate, parts miniaturization.In addition, if reduce Lighting Division, then be difficult to tackle the substrate that high parts are installed.
Summary of the invention
The present invention is in view of the above problems and the invention that proposes that problem is, can differentiate the sheer face and the tabular surface of the scolding tin that is difficult to detect with colored highlight illumination, and can take the position beyond the scolding tin under white illumination samely.It is open that same therewith problem also has in patent documentation 2, and still, it is different fully with the structure of patent documentation 2 to be used for the structure of dealing with problems among the present invention.
The testing fixture that is used to address the above problem, it has: first filming apparatus, its top and sensitive surface that is configured in the substrate of checking object is mutually opposed with real estate, be used to generate the coloured image of described substrate, first lighting device, it is respectively from different with respect to the elevation angle of real estate and with respect to the direction real estate irradiation multi beam visible light of the inclined light shaft of first filming apparatus, wherein, described multi beam visible light is in the relation that becomes white light once mixing, second lighting device, it shines non-visible light to real estate, and, shine this non-visual direction of light with respect to the elevation angle of real estate greater than the illumination direction of described first lighting device the elevation angle with respect to real estate, second filming apparatus, its mode with incident specific reflection light disposes, and generate the shading image of the incident state of this specific reflection light of reflection, wherein, this specific reflection only refers to, in the reflected light that the non-visible light that described second lighting device is shone is reflected by real estate, the reflected light of propagating along the optical axis of described first filming apparatus, check actuating unit, the shading image that it uses the coloured image that described first filming apparatus generated and second filming apparatus to be generated, scolding tin on the described substrate is checked, and, use the image of the counterpart in the described coloured image to carry out inspection for the position beyond the scolding tin; Described inspection actuating unit carries out following processing in to the inspection of scolding tin: in the part corresponding with scolding tin of described coloured image, at the part that shows the color corresponding with the illumination light of first lighting device, direction of illumination based on the illumination light corresponding with the color that is showed is differentiated heeling condition, for the part of dark areas, differentiate heeling condition based on the brightness of the corresponding region in the described shading image.
In the aforesaid substrate appearance inspection device, first filming apparatus and first lighting device are equivalent to the optical system of colored high brightness mode.In addition, preferably first filming apparatus is disposed in the optical axis mode consistent with vertical direction, but be not limited only to this, also can be configured to the slightly relatively state of vertical direction of optical axis.
Second lighting device penetrates non-visible light such as infrared light or ultraviolet light.In this non-visible light, because from the big direction in the elevation angle than the illumination direction of first lighting device, to this non-visible light of real estate irradiation, therefore in the normal reflection light of this illumination light, the normal reflection of propagating along the optical axis direction of first filming apparatus only approaches the normal reflection light of smooth face, just incides the normal reflection light of the face in first filming apparatus from the normal reflection light that is difficult to make visible light.Incide in second filming apparatus and in the shading image that generates, the tabular surface of scolding tin shows as the high zone of brightness ratio other parts at this normal reflection light.On the other hand, for the sheer face of scolding tin,, therefore become the dark areas of counterpart in shading image because the normal reflection light of non-visible light can not incide in second filming apparatus yet.
As previous occur shown in Figure 9, the tabular surface of scolding tin and sheer face all become dark areas in coloured image, but in the shading image of non-visible light, both brightness is obviously different.Thereby, can differentiate the heeling condition of these faces based on the brightness in the shading image.
In the testing fixture of said structure, taking, under the illumination of second lighting device, taking by first filming apparatus under the illumination of first lighting device successively by second filming apparatus, perhaps by light path change device described later, reflected light from the non-visible light of second lighting device is not incided in first filming apparatus, each filming apparatus is taken simultaneously.Like this, at the prevailing position of scattered reflection, and in the same manner, can be created on the coloured image under the caused white illumination of scattered reflection of each visible light in the past.Thereby, also can stably check the position beyond the scolding tin.
In the preferred implementation of above-mentioned testing fixture, first, second filming apparatus is respectively independent filming apparatus, and the optical axis of first filming apparatus is provided with the light path change device, the catoptrical light path of the non-visible light that the change of light path change device is propagated from real estate along this optical axis makes this guides reflected light can not incide the position in first filming apparatus.Dispose second filming apparatus in addition, and on the light path that this light path change device is changed.
According to above-mentioned embodiment, even the reflected light of the non-visible light of second lighting device is propagated along the optical axis of first filming apparatus, this reflected light can not incide first filming apparatus yet and incide in second filming apparatus, thereby can stably generate the coloured image that not influenced by non-visible light.In addition, owing to can carry out visible light illumination and the illumination of non-visible light simultaneously, and drive each filming apparatus simultaneously, therefore can shorten the time of inspection.
In other preferred implementation of described testing fixture, make first, second filming apparatus one turn to a filming apparatus, it is mutually opposed with real estate that this filming apparatus is configured in the top and the sensitive surface of substrate, and, also be provided with incident light switching device shifter and imaging control device, wherein, the incident light switching device shifter switches in the capturing element that incides this filming apparatus each reflected light of visible light and non-visible light successively, and imaging control device makes filming apparatus be switched corresponding to the light of incident and takes.
According to above-mentioned embodiment,, therefore can further dwindle optical system because first, second filming apparatus becomes one.Though need carry out visible light illumination shooting and non-visible light illumination shooting down down respectively,, so can determine two corresponding relations between the image simply owing to the reference object zone of each shooting is consistent.
In other preferred implementation of above-mentioned testing fixture, check that actuating unit carries out following processing in to the inspection of scolding tin: in the dark areas that part produced corresponding in coloured image with scolding tin, the part differentiation that brightness in the shading image is higher than first threshold is tabular surface, the part differentiation that brightness in the shading image is lower than second threshold value is sheer face, wherein, this second threshold value is lower than first threshold.
In the above-described embodiment, determine and the corresponding position of scolding tin of checking object if can wait based on the positional information of login in advance, then, can differentiate heeling condition accurately based on the brightness in deep or light zone at the part that shows as dark areas at this position.
In other preferred implementation, check that actuating unit carries out following processing in to the inspection of scolding tin: in coloured image with the direction of arranging from the corresponding color of each visible light of first lighting device on, with specific dark areas as object, heeling condition is differentiated in brightness based on the corresponding region in the shading image, wherein, specific dark areas is meant, across from the pairing color of visible light, appear at dark areas with the opposed position of the pairing color of other visible light with respect to the direction irradiation of the elevation angle maximum of the basic space of a whole page.
In other preferred implementation, check that actuating unit carries out following processing in to the inspection of scolding tin: in coloured image with the direction of arranging from the corresponding color of each visible light of first lighting device on, with specific dark areas as object, heeling condition is differentiated in brightness based on the corresponding region in the shading image, wherein, specific dark areas is meant, across from the pairing color of visible light, appear at dark areas with the opposed position of the pairing color of other visible light with respect to the direction irradiation of the elevation angle minimum of the basic space of a whole page.
In above-mentioned two embodiments, because in coloured image, only will show reflection scolding tin dip plane feature part adjacent dark areas differentiate heeling condition as object, therefore, even do not handle correctly determining the position corresponding in the coloured image with scolding tin, and exist in this process range under the situation at the high position of specular reflective beyond the scolding tin, can prevent Wei scolding tin with this position erroneous judgement yet.
Testing fixture according to said structure, the part that in coloured image, shows except color with certain visible light, tabular surface and sheer face for the scolding tin that shows as the unconspicuous dark areas of color, also can differentiate its heeling condition based on the brightness of corresponding position in the shading image of non-visible light.In addition, for the position beyond the scolding tin, also be not subjected to the influence of non-visible light illumination, ground same can be taken under white illumination, and can guarantee to check precision.
Description of drawings
Fig. 1 is the block diagram of the structure example of apparatus for substrate appearance inspection.
Fig. 2 is the key diagram of the structure example of optical system.
Fig. 3 is with the state of the visible light of the color camera that leads from leg and the key diagram of coloured image and the corresponding related expression of infrared light image.
Fig. 4 is the table of the classification example of expression inclination grade.
Fig. 5 is the process flow diagram that flow process is checked in expression.
Fig. 6 is the key diagram of other structure example of expression optical system.
Fig. 7 is the key diagram of other structure example of expression optical system.
Fig. 8 is the key diagram of other structure example of expression optical system.
Fig. 9 is expression by the key diagram of the example that hemispherical scolding tin is carried out the image that colored highlight illumination generates.
Embodiment
Below, an example of apparatus for substrate appearance inspection is described, this apparatus for substrate appearance inspection will check whether the installment state of each parts and the shape of leg etc. are suitable through series of processes (solder printing operation, parts installation procedure, the soldering operation) substrate afterwards of making component-mounted substrate as checking object.
Fig. 1 is the block diagram of electrical structure example of the apparatus for substrate appearance inspection of this embodiment of expression.
This testing fixture is respectively arranged with two cameras 1 and Lighting Division 2, as the device of substrate image that generate to check object (below, combination has each camera 1 and each Lighting Division 2 of corresponding relation each other, and distinguishes each with symbol A, B and organize).In addition, this testing fixture is provided with X worktable portion 3, Y worktable portion 4, control and treatment portion 5 etc.In addition not shown other parts of Fig. 1, but this testing fixture also be provided be used to support the base plate supports plate (table) of checking object substrate and be used to transport, be transported into substrate transport into mechanism etc.
X worktable portion 3 supports each camera 1A, 1B and Lighting Division 2A, 2B, Y worktable portion 4 supporting substrate back up pads above the base plate supports plate.Worktable portion 3,4 can both move it along an axle and support object.And have following relation: the moving direction of the moving direction of a side worktable portion and opposite side worktable portion intersects vertically.
Control and treatment portion 5 has following structure: on the control part 50 that computing machine constitutes, be connected with image input part 52A, the 52B corresponding with each camera 1A, 1B, with corresponding lighting control section 53A, 53B, shooting control part 51, X worktable drive division 54, Y worktable drive division 55, input part 56, the display part 57 of each Lighting Division 2A, 2B, the usefulness of communicating by letter interface 58 etc.
In two Lighting Division 2A, 2B (below, be called " the first Lighting Division 2A ", " the second Lighting Division 2B "), the first Lighting Division 2A penetrates each visible light of red, green, blue, and the second Lighting Division 2B penetrates infrared light.In addition, in two camera 1A, 1B, camera 1A is a color camera, takes the reflected light from the visible light of the first Lighting Division 2A.The camera 1B of opposite side is the infrared light camera, takes the reflected light from the infrared light of the second Lighting Division 2B, the shading image.In addition, in order to make explanation simple, adjust the visual field size and location relation of each camera 1A, 1B, make each camera 1A, 1B can take same zone at this, and the corresponding relation of pixel between the known image.
Be provided with interface circuit and A/D change-over circuit at image input part 52A, 52B, be used to receive the picture signal of corresponding separately camera 1A, 1B.In addition, at image input part 52A, the picture signal of each R, G, B is provided with various circuit respectively.
Shooting control part 51 takes these cameras 1A, 1B synchronous (timing) by sending drive signal to each camera 1A, 1B simultaneously.
Lighting control section 53A, 53B control the light quantity of each self-corresponding Lighting Division 2A, 2B and light opportunity.In addition, the lighting control section 53A of the first Lighting Division 2A adjusts each LED21R, the 21G in the Lighting Division 2A, the light quantity of 21B (shown in Figure 2), makes each visible light of red, green, blue become white light when mixing.
Input part 56 is used for carrying out setting operation etc. when teaching (teaching), comprises keyboard, mouse etc.Display part 57 is used for show checking with image and check result etc., is made of liquid crystal panel etc.Use communication to be to send check result to external device (ED) with the purpose of interface 58.
In said structure, in the storer in control part 50, login has the amount of movement of X, Y worktable portion 3,4, the reference object zone that is used to make camera 1 be positioned on the substrate and is distributed.In addition, each parts on the counterpart substrate, login has the setting of inspection area and differentiates the relevant reference value of fine or not judgement etc.The data of these logins in storer (below, be called " check use information ") all be the data of the settings such as image that the user uses qualified substrate when teaching.
Control part 50 is adjusted the amount of movement of X worktable portion 3 and Y worktable portion 4 by X worktable drive division 54 and Y worktable drive division 55, and the visual field of camera 1A, 1B is navigated to the reference object zone of substrate based on above-mentioned inspection information.Then, under the state of this location, Lighting Division 2A, 2B are thrown light on and drive each camera 1A, 1B, generate and check and use image.The inspection that is generated is input to video memory (not shown) in the control part 50 with image via image input part 52A, 52B.Control part 50 is handled these inspections based on various inspections with information and is used image, and parts and leg are checked.
Fig. 2 shows the structure of the optical system of above-mentioned testing fixture.
In the drawings, S is for checking the substrate of object, and 7 expressions are installed in the chip part on the substrate S, and 71 are illustrated in the leg that forms between chip part 7 and the substrate S.
Each camera 1A, 1B and each Lighting Division 2A, 2B are concerned thereby always keep position shown in Figure 2 by not shown supporting units support.
Mutually opposed for camera 1A, the 1B sensitive surface separately that makes this embodiment with the real estate of substrate S, make optical axis 11,12 be in the state consistent, and this camera 1A, 1B are horizontally arranged in the top of substrate S with vertical direction.
The first Lighting Division 2A has following structure,, disposes a plurality of LED21R, 21G, 21B that send the red, green, blue visible light respectively at the inside surface of cheese casing 20 that is.Be formed with outstanding upward cylindric peristome 22 at the top of casing 20, each LED21R, 21G, 21B are arranged in concentric circles in the mode of surrounding this peristome 22 respectively.Wherein, the concentric circles that sends the LED21R of red light is configured in the position nearest with peristome, and the concentric circles that sends the LED21B of blue light is configured in and peristome 22 position farthest, disposes the concentric circles of the LED21G that sends green light between these concentric circless.
The above-mentioned first Lighting Division 2A is configured to the optical axis 11 corresponding to states of the open centre of peristome 22 and color camera 1A.The relation of this first Lighting Division 2A and color camera 1A is identical with the optical system of existing colored high brightness mode, but the inside surface of peristome 22 is processed to minute surface.
The second Lighting Division 2B has following structure, that is, in the casing 24 of rectangular parallelepiped, the flat light source 25 that uses infrared LED (not shown) of packing into (below, be called " infrared light supply 25 "), semi-transparent semi-reflecting lens 26, ir reflector 27 etc.Configuration semi-transparent semi-reflecting lens 26 on the optical axis 12 of infrared camera 1B, configuration ir reflector 27 on the optical axis 11 of color camera 1A, and infrared light supply 25 is configured in across semi-transparent semi-reflecting lens 26 and with ir reflector 27 opposed positions, optical axis 28 is configured to horizontal direction.In addition, each catoptron 26,27 is configured to, the first half face separately favours the state of vertical direction 45 degree towards infrared light supply 25 sides and minute surface.
In addition, though Fig. 2 is not shown, casing 24 lower surfaces of the second Lighting Division 2B and with ir reflector 27 under corresponding position, be formed with the screw hole of external diameter size of the peristome 22 of the corresponding first Lighting Division 2A.In addition, corresponding to the position under camera 1A, the 1B of the upper surface of casing 24, be formed with peephole for shooting respectively.
In the position of above-mentioned screw hole, casing 24 is embedded into peristome 22, thereby two Lighting Division 2A, 2B become the state of connection with relation shown in Figure 2.And this moment, the lower end of ir reflector 27 in almost with limit, the upper end state of contact of the peristome 22 of the first Lighting Division 2A.
The infrared light that infrared light supply 25 penetrates sees through after the semi-transparent semi-reflecting lens 26, reflection on ir reflector 27, thus become the light of propagating along the optical axis of color camera 1A, and by peristome 22.Because the inner face of peristome 22 is minute surfaces, therefore can makes by the light-emitting zone of the infrared light of this minute surface with continuous, and on real estate, also can make the range of exposures of the range of exposures of 3 kinds of visible light and infrared light continuous by the light-emitting zone of the red light of LED21R.
In the reflected light that substrate S reflects above-mentioned infrared light,, import infrared camera 1B via ir reflector 27 and semi-transparent semi-reflecting lens 26 along the light of the direction reflection of the optical axis 11 of camera 1A.Like this, each lens 26,27 structural elements as the second Lighting Division 2A also plays a role as the light path change device simultaneously, and wherein, this light path change device is used to change the catoptrical light path of the infrared light that the optical axis along color camera 1A is propagated from substrate S.
The second Lighting Division 2A roughly shines infrared light to real estate S directly over real estate S, therefore carry out in the reflected light of normal reflection at 71 pairs of infrared lights of leg, along the reflection of the optical axis direction of camera 1A only from level or approach level face (below, these are called " tabular surface ") reflected light, promptly, under the good situation of the shape of leg 71, become the reflected light of bottom.Thus, the shading image that is generated at infrared camera 1B (below, be called " infrared light image ") in, the brightness of the part corresponding with the tabular surface of leg 71 is obviously than other parts height.
On the other hand, in each visible light, be reflected to the light transmission ir reflector 27 of the sensitive surface of camera 1A, and be imported into color camera 1A from the first Lighting Division 2A.Thereby color camera 1A is not subjected to the influence of infrared illumination, receives the reflected light of the visible light illumination of the first Lighting Division 2A, thereby can generate coloured image.
In addition, as mentioned above, become minute surface by inner face with the right cylinder 22 of casing 2A, make the range of exposures of the range of exposures of infrared light of substrate S and each visible light continuous, therefore if the relation of the position between adjustment substrate S and the optical system, make the face at angle of inclination of corresponding each light of leg 71 be in the range of exposures of corresponding respectively light, it is continuous with the scope that can differentiate the angle of inclination according to the territory, area pellucida of infrared light normal reflection then to make the basis color area corresponding with each visible light can differentiate the scope at angle of inclination, and then can check a series of whole face that constitutes leg.
Fig. 3 shows synoptic diagram (a), synoptic diagram (b) and synoptic diagram (c), wherein, synoptic diagram (a) is at above-mentioned leg 71, with the pairing corresponding related synoptic diagram of color that incides the normal reflection light of color camera 1A of the illumination of the first Lighting Division 2A, synoptic diagram (b) expression is by the distribution of color in the coloured image of the generation of the camera 1A under the above-mentioned incident state, synoptic diagram (c) is corresponding to the illumination of the second Lighting Division 2B, and expression is by the distribution of light and shade in the infrared light image of infrared camera 1B generation.In this routine coloured image, in the dip plane of leg 71, the face of the steepest of upper end and the corresponding position of the tabular surface of bottom are the unconspicuous dark areas of color.On the other hand, in infrared light image, the tabular surface that becomes dark areas in the coloured image is the brightest zone, but low a little in the brightness of the position of red area.In addition, the steep part of the gradient becomes dark areas.
Contain as shown in Figure 4 table at the store memory of control part 50.This table is categorized as 5 grades by the color of combined colour image and the brightness of infrared light image with the angle of inclination.Continuously, the grade of gradient steepest is A, slows down with the order of descending slope by B, C, D, E respectively at the angle of inclination of corresponding each grade.In addition, in coloured image brightness significantly low be not color but " secretly " (meaning dark areas).
The range of tilt angles of the corresponding grade A～E that respectively tilts is that the scope according to the irradiating angle of each illumination light derives.
In the inspection that leg is carried out, control part 50 is by the color in the combined colour image and the brightness of infrared view, thereby the above-mentioned table of reference is determined the pixel corresponding to each inclination grade.Thus, at the position that only in coloured image, can't differentiate the angle of inclination for dark areas, can be according to the bright-dark degree in the infrared light image, the face of differentiating the steep inclination grade A of the gradient still is the face of smooth inclination grade E.
In addition, utilize defined threshold respectively each view data of R, G, B to be carried out binary conversion treatment, thereby extract each color in the coloured image.Equally, also extract bright/each zone secretly in the infrared light image by binary conversion treatment.For the threshold value that is used to extract the territory, area pellucida, but be set at the value of " bright " and " bright a little " of component-bar chart 3; For the threshold value that is used to extract dark areas, setting can be distinguished the value of " bright a little " and " secretly ".
As mentioned above, according to the testing fixture of this embodiment, can for than only by the wider scope of the sensing range of colored highlight illumination, differentiate the angle of inclination, and can improve the precision of checking leg.
In addition,, can similarly implement irreflexive white illumination, therefore can produce the coloured image that reveals original color and shape significantly with prior art at the prevailing position of diffuse reflection beyond the scolding tin.Thereby, can guarantee the precision that the position beyond the leg is checked.
Next, with Fig. 5 the inspection flow process that a substrate is carried out is described.
At first, in initial step 1, when the substrate that will check object is transported on the base plate supports plate, then in step 2, control the action of X, Y worktable portion 3,4, each camera 1A, 1B visual field are positioned at the reference object zone of being logined (step 2).When finish the location, under the state that in step 3, throws light on, drive camera 1A, 1B simultaneously, the shooting that is used to check by each Lighting Division 2A, 2B.
When take finishing, 3 kinds of images (R, G, each shading image of B) and the infrared light image that constitutes coloured image is set at the process object image respectively, and to the inspection area (step 4) of the initial inspection object parts of these image settings.
In this set to handle, at first, at the parts of checking object, based on the fox message in the storer, comprise really these parts and near the scope of pad in, setting is called the window of " parts extraction window ".Then, the coloured image in parts extract window, determine to show that the position of each color of red, green, blue is a pad, and pad window (land window) is set at this position.
Login the size of pad window in advance and set number and be used as checking and use information, set a plurality of pad windows usually.In step 4, further set parts body window between each pad window.The size of logining this window in advance is as inspection information.
In step 5, at the article body window, only with color graphics as object, detect the color of parts by binary conversion treatment, and based on this as a result the having or not of judgement part, position and tilt whether suitable.
In step 6,,, carry out the leg inspection by using coloured image and both Flame Image Process of infrared view at the pad window.Particularly, be conceived to the pad window that sets in order, each window carried out the processing of the step 6a～6d shown in the right side of Fig. 5.
In step 6a, at the pad window of having in mind,, extract the colored region of corresponding visible light at coloured image by binary conversion treatment, extract bright and dark each zone at infrared light image.In step 6b, at each pixel in the pad, contrast above-mentioned binary conversion treatment result and table shown in Figure 4 respectively, determine pixel corresponding to each inclination grade A～E.
In step 6c, at the set of pixels zoarium (zone) of each inclination grade, difference instrumentation position and area (number of pixels).In step 6d, compare by reference value, thereby whether the shape of judging the leg in the pad is qualified to each meter side value and login respectively.
If finish the processing to whole pad windows, then step 6e becomes "No", and the leg inspection finishes.Below, to being included in the whole parts in the process object image, similarly carry out parts inspection and leg inspection by step 4,5,6 processing with above-mentioned.
In addition, the inspection of being undertaken by step 5 is not limited only to the inspection of parts, and for example also can differentiate has electrodeless bad phenomenon such as float.
If the inspection that end is carried out the parts in the process object image, then step 7 becomes "Yes".At this, if having other reference object zone, then get back to step 2 from step 8, position camera 1A, 1B processing afterwards once more.
If finish the processing for whole reference objects zone, then step 8 becomes "Yes", enters into step 9, comprehensive a series of check result and output.Then, transport processing (step 10), the end process then of checking the substrate that finishes.
In addition, in the above-described embodiments, in order to make algorithm become simple, at by the pixel shown in the red, green, blue colour display screen of all kinds, also make up the light and shade of infrared light, thereby differentiate the inclination grade, still, also can judge the inclination grade substantially based on the direction of illumination of the illumination light corresponding with color in the coloured image.In coloured image, pixel at the performance color corresponding with the visible light illumination light, do not use infrared light image to judge, and use its color to differentiate, only at the pixel that in coloured image, becomes dark areas, brightness based on infrared light image is differentiated, and also can access same check result.
In addition, setting the pad window makes it become big, desired location is staggered etc. slightly, in order to prevent that the high position (for example pattern of silk screen (silk) printing) of specular reflective beyond the scolding tin is comprised in the mistake differentiation under the situation in the window, also can determine the judgement object of inclination grade based on color arrangement corresponding and the relation between the dark areas with each visible light.
Promptly, on the direction that the color of corresponding each visible light is arranged in coloured image, to and be positioned at across red area, differentiate the light and shade state of corresponding region in the infrared light image of this dark areas with the dark areas of opposed position, other look zone or across blue region and be positioned at dark areas with other opposed position, look zone as object.In the case, at the former dark areas, when the corresponding region in the infrared light image is the territory, area pellucida, can judge that surface state is good; At the latter's dark areas, when the corresponding region in the infrared light image is dark areas, can judge that surface state is good.
Further, in the testing fixture of said structure, use infrared light to detect glossiness from the second Lighting Division 2B, thus also can judgement part whether suitable.Because the upper surface of article body is smooth, therefore, then is shown as dark zone in the image that under white illumination, photographs, and is difficult to differentiate the difference with other parts of same train color if constitute the glossiness height of the encapsulation of main body.But according to the shading image that the second camera 1B takes, glossiness is high more then to access bright image more, therefore by the color inspection of coloured image and the glossiness inspection of infrared light image are engaged, can improve the precision that parts are checked.
In the optical system of the foregoing description, combination camera 1B and the second Lighting Division 2B, then structure correspondingly becomes than complicated in the past, but the structure of the first Lighting Division 2A itself is identical with the lighting device of in the past colored highlight illumination.In addition, make the height of the first Lighting Division 2A identical, and the space between this Lighting Division 2A and camera 1A can dispose the second Lighting Division 2B, can prevent that therefore the structure of optical system from becoming big with conventional device.
In addition, the irradiation of relevant infrared light and the structure of shooting are not limited only to above-mentioned content, also can change the position of infrared light supply 25 and infrared camera 1B.
In addition, in the above-described embodiments, carry out shooting and the shooting under infrared illumination under the visible light illumination simultaneously, take but also can carry out each successively.Like this, under branch comes the situation of taking,, by two camera 1A, 1B are formed as one, thereby the structure of optical system is become simply, and become littler as ensuing shown in Figure 6.
According to the structure example of Fig. 6, replace camera 1A, 1B, with camera 1A in the same manner, the sensitive surface that will have the camera 10 that generates coloured image and infrared light image function is configured to mutually opposed with real estate.The structure of the first Lighting Division 2A is identical with the structure of Fig. 2, but in the second Lighting Division 2B, does not have mirror lens 27, and semi-transparent semi-reflecting lens 26 is configured on the optical axis 11 of camera 10, and infrared light supply 25 also is configured near the optical axis 11.In addition, between this second Lighting Division 2B and camera 1A, dispose light filter switching mechanism 6.
Light filter switching mechanism 6 by tabular light filter support portion 61, connect the turning axle 62 of the center of this light filter support portion 61, the motor formations such as (not shown) that is connected with turning axle.On light filter support portion 61, be formed with respect to the straight line by turning axle 62 and a pair of window portion (not shown) of symmetry, and be provided with visible light in the window portion of a side and see through light filter 63, be provided with infrared light in the window portion of opposite side and see through light filter 64.Form each window portion and light filter 63,64 with the size of the sensitive surface of corresponding camera 10 respectively, and adjust the position of light filter support portion 61, make light filter all be positioned at camera 10 sensitive surface under.
In said structure, control part 50 is unit rotary filter support portion 61 with 180 degree, thereby switches the light filter of position under the sensitive surface be positioned at camera 10, takes when switching camera 10 at every turn.
The capturing element of camera 10 comprises the unit of each visible light of induction red, green, blue and the unit of induction infrared light.Position under the light filter 63 that visible light sees through is configured in sensitive surface and when taking, the signal that control part 50 uses from the visible light corresponding unit generates coloured image; See through that light filter 64 is configured in the position under the sensitive surface and when taking pictures, the signal that control part 50 uses from the infrared light corresponding unit generates infrared light image at infrared light.Then, by these images being carried out and the step 4,5 of Fig. 5,6 same processing, carry out parts inspection and leg inspection.
According to said structure, though must carry out twice shooting to each reference object zone, the supervision time is long, can make the visual field unanimity of twice shooting, determines that therefore the corresponding relation between coloured image and the infrared light image becomes simple.Under the situation of display image for image being carried out the vision contrast, parallax can not appear yet, therefore can show the image of easy assurance corresponding relation.
Fig. 7 and Fig. 8 show the example of realizing the optical system miniaturization by the structure that changes the second Lighting Division 2B.
In these embodiments, use lamellar illuminatian plate 29 as the second Lighting Division 2B, this lamellar illuminatian plate 29 is formed by combining by substrate that disposes infrared light LED and light guide diffusion board.This illuminatian plate 29 has the function that penetrates planar light from the front, in addition, also has and makes the function that the reflected light that shines previously is transmitted through rear side via light guide diffusion board.In addition, as illuminatian plate with this function, for example known LFX series that CCS Inc. is arranged.
The plate face is placed horizontality, and dispose above-mentioned illuminatian plate 29 in the mode of the peristome 22 that stops up the first Lighting Division 2A.In the embodiment of Fig. 7, with the state configuration color camera 1A identical with the example of Fig. 2, and configuration infrared camera 1B makes its optical axis 12 and the optical axis 11 of camera 1A become the state that intersects vertically, and the position configuration ir reflector 27 that intersects at each optical axis 11,12.
According to said structure, from the infrared light of illuminatian plate 29 along the optical axis 11 of camera 1A and shine to real estate.At this moment, in the tabular surface normal reflection of leg 71 and after the infrared light transmission illumination plate 29 that optical axis 11 is propagated, by ir reflector 27 change light paths, thus guiding infrared camera 1B.On the other hand, the illumination of the visible light of the corresponding first Lighting Division 2A and the light transmission illuminatian plate 29 and the ir reflector 27 that reflect along optical axis 11 are directed to color camera 1A.
In the embodiment of Fig. 8, with the example of Fig. 6 in the same manner, use camera 10 and light filter switching mechanism 6 with the function that generates coloured image and infrared light image.In this example,, therefore can dwindle the distance between Lighting Division 2A, 2B and the camera 10 owing to need not semi-transparent semi-reflecting lens 26, ir reflector 27.Thereby, can tackle high parts, and can easily take near substrate S etc.
In addition, in the structure example shown in Fig. 2,6,7,8, though the first Lighting Division 2A penetrates 3 kinds of visible light of red, green, blue from different with respect to the elevation angle of real estate respectively directions, the kind that penetrates visible light also can be two kinds.Also need set the illumination look in this case, for example with green peony (magenta) as illumination look etc., make when mixing each visible light, to produce white light that wherein above-mentioned peony is a color mixture red and green.
Though the shared space of the first Lighting Division 2A is bigger than other parts of optical system, if as the above-mentioned look that will throw light on be set at two kinds, then can realize the miniaturization of casing 20.In this case, generate infrared light image, can differentiate the detection angles of using the parts that colored highlight illumination can't differentiate, and can prevent to check that precision reduces by importing the second Lighting Division 2B shown in above-mentioned each example.
Claims (6)
1. an apparatus for substrate appearance inspection carries out visual examination with the printed circuit board (PCB) after the soldering as object, it is characterized in that having:
First filming apparatus, its top and sensitive surface that is configured in the substrate of checking object is mutually opposed with real estate, is used to generate the coloured image of described substrate,
First lighting device, its respectively from different with respect to the elevation angle of real estate and with respect to the direction of the inclined light shaft of first filming apparatus to real estate irradiation multi beam visible light, wherein, described multi beam visible light is in the relation that becomes white light once mixing,
Second lighting device, it shines non-visible light to real estate, and, shine this non-visual direction of light with respect to the elevation angle of real estate greater than the illumination direction of described first lighting device the elevation angle with respect to real estate,
Second filming apparatus, its mode with incident specific reflection light disposes, and generate the shading image of the incident state of this specific reflection light of reflection, wherein, this specific reflection only refers to, in the reflected light that the non-visible light that described second lighting device is shone is reflected by real estate, the reflected light of propagating along the optical axis of described first filming apparatus
Check actuating unit, the shading image that it uses the coloured image that described first filming apparatus generated and second filming apparatus to be generated, scolding tin on the described substrate is checked, and, used the image of the counterpart in the described coloured image to carry out inspection for the position beyond the scolding tin;
Described inspection actuating unit carries out following processing in to the inspection of scolding tin: in the part corresponding with scolding tin of described coloured image, at the part that shows the color corresponding with the illumination light of first lighting device, direction of illumination based on the illumination light corresponding with the color that is showed is differentiated heeling condition, for the part of dark areas, differentiate heeling condition based on the brightness of the corresponding region in the described shading image.
2. apparatus for substrate appearance inspection according to claim 1, it is characterized in that, described first, second filming apparatus is respectively independent filming apparatus, and the optical axis of described first filming apparatus is provided with the light path change device, the catoptrical light path of the non-visible light that described light path change device change is propagated from real estate along this optical axis, make this guides reflected light can not incide the position in described first filming apparatus, and on the light path that this light path change device is changed, dispose described second filming apparatus.
3. apparatus for substrate appearance inspection according to claim 1, it is characterized in that, make described first, second filming apparatus one turn to a filming apparatus, it is mutually opposed with real estate that this filming apparatus is configured in the top and the sensitive surface of described substrate, and, also be provided with incident light switching device shifter and imaging control device, wherein, described incident light switching device shifter switches in the capturing element that incides this filming apparatus each reflected light of visible light and non-visible light successively, and described imaging control device makes described filming apparatus be switched corresponding to the light of incident and takes.
4. apparatus for substrate appearance inspection according to claim 1, it is characterized in that, described inspection actuating unit carries out following processing in to the inspection of described scolding tin: in the dark areas that part produced corresponding with scolding tin in described coloured image, the part differentiation that brightness in the described shading image is higher than first threshold is tabular surface, the part differentiation that brightness in the described shading image is lower than second threshold value is sheer face, wherein, this second threshold value is lower than first threshold.
5. apparatus for substrate appearance inspection according to claim 1, it is characterized in that, described inspection actuating unit carries out following processing in to the inspection of described scolding tin: in described coloured image with the direction of arranging from the corresponding color of each visible light of first lighting device on, with specific dark areas as object, heeling condition is differentiated in brightness based on the corresponding region in the described shading image, wherein, described specific dark areas is meant, across from the pairing color of visible light, appear at dark areas with the opposed position of the pairing color of other visible light with respect to the direction irradiation of the elevation angle maximum of the basic space of a whole page.
6. apparatus for substrate appearance inspection according to claim 1, it is characterized in that, described inspection actuating unit carries out following processing in to the inspection of described scolding tin: in described coloured image with the direction of arranging from the corresponding color of each visible light of first lighting device on, with specific dark areas as object, heeling condition is differentiated in brightness based on the corresponding region in the described shading image, wherein, described specific dark areas is meant, across from the pairing color of visible light, appear at dark areas with the opposed position of the pairing color of other visible light with respect to the direction irradiation of the elevation angle minimum of the basic space of a whole page.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007207766A JP4389982B2 (en) | 2007-08-09 | 2007-08-09 | Substrate visual inspection device |
| JP2007207766 | 2007-08-09 | ||
| JP2007-207766 | 2007-08-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101363804A true CN101363804A (en) | 2009-02-11 |
| CN101363804B CN101363804B (en) | 2011-05-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101443285A Active CN101363804B (en) | 2007-08-09 | 2008-07-25 | Substrate outer appearance inspection device |
Country Status (2)
| Country | Link |
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| JP (1) | JP4389982B2 (en) |
| CN (1) | CN101363804B (en) |
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| CN112067631A (en) * | 2020-08-13 | 2020-12-11 | 德州职业技术学院（德州市技师学院） | Glass quality detection device |
| CN112986284A (en) * | 2021-02-20 | 2021-06-18 | 苏州天准科技股份有限公司 | Combined type light source structure and optical detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101363804B (en) | 2011-05-25 |
| JP2009042089A (en) | 2009-02-26 |
| JP4389982B2 (en) | 2009-12-24 |
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