CN102539436A - Foreign matter detecting apparatus and method - Google Patents
Foreign matter detecting apparatus and method Download PDFInfo
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- CN102539436A CN102539436A CN2011103307639A CN201110330763A CN102539436A CN 102539436 A CN102539436 A CN 102539436A CN 2011103307639 A CN2011103307639 A CN 2011103307639A CN 201110330763 A CN201110330763 A CN 201110330763A CN 102539436 A CN102539436 A CN 102539436A
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Abstract
The invention provides a foreign matter detecting apparatus and method. The foreign matter detecting method comprises the following steps: setting the pixel group of a small area including the pixel according to each pixel of the digital image forming the substrate of detecting object; comparing the brightness value of each pixel and the brightness of the pixel group including the pixel; operating the quantity of the deviation degree of each pixel relative to the brightness value of the pixel group according to each pixel via the comparison as the brightness confirmation value; and determining whether exists foreign matter or not based on the brightness confirmation value. The deviation degree of the brightness of the substrate is quite small. As the foreign matter is the object having no fixed shape and naturally formed, the brightness thereof has the characteristics of entirely high brightness level deviation. The difference of the deviation degree of the brightness of the product and foreign matter can be utilized to identify the foreign matter by operating the brightness confirmation value.
Description
Technical field
The present invention relates to foreign body detecting device and foreign matter checking method.
Background technology
For example, when checking attached to foreign matters such as the solder ball between the lead of integrated circuit, mould bits, Soft flocks, testing fixture is in the past carried out the shooting substrate and is also implemented image process method.For example; In the patent documentation 1 disclosed foreign body detecting device; With AD (analog-digital, analog to digital) conversion and the digital picture differential and in addition after the binaryzation, according to the view data of binaryzation; Measure substrate the direction parallel with the conductor length direction " 1 " value and generate measurement data, and then this measurement data binaryzation is generated projection binaryzation data.When judging that qualified products whether; Count with all consecutive numbers of " 1 " " 0 " to projection binaryzation data; As long as have the consecutive numbers higher limit separately and the extraneous consecutive numbers of lower limit of predefined " 0 " and " 1 "; Even have only one, promptly be judged to be and be attached with foreign matter.
When the direct binaryzation of image that gets from the AD conversion; Be difficult to detection of reflected rate lower foreign matter part and the higher foreign matter part of transmissivity; To this problem; In the patent documentation 1 disclosed technology, stress the edge through the differential processing of view data, thereby in processing thereafter, promote the detection of foreign matter part.
Patent documentation 1: Jap.P. open communique spy open flat 7-128249 number
Therefore yet in the structure of patent documentation 1, the lead of substrate is also assessed with the value identical with foreign matter, when foreign matter and lead are overlapping or foreign matter shape during along lead etc., are difficult to detect the edge of foreign matter, thereby can't carry out the foreign matter detection effectively.
Summary of the invention
The present invention does in view of the above problems, and its purpose is to provide a kind of foreign body detecting device and foreign matter checking method that can detect foreign matter more effectively.
For solving above-mentioned problem, the present invention provides a kind of foreign body detecting device, and whether inspection has implemented to comprise printing treatment has foreign matter on interior surface-treated substrate, it is characterized in that comprising: camera head, and take said substrate and export simulating signal; The AD conversion equipment is a digital picture with the analog signal conversion of exporting; The pixel group setting device, to conversion and digital picture each pixel and set the pixel group of the zonule that comprises this pixel; Brightness affirmation value arithmetic unit is to said each pixel and computing representes that the amount of extent of deviation of brightness value of each pixel in the said pixel group is as the brightness affirmation value of this pixel; And decision maker, judge whether there is foreign matter based on said brightness affirmation value.
Under this form, the computing of brightness affirmation value arithmetic unit representes that the amount of extent of deviation of brightness value of each pixel in the pixel group is as brightness affirmation value.When each pixel was the pixel of product, the variable quantity on border was bigger, so departure converges to 0, with respect to this, when being the pixel of foreign matter, because of the briliancy level (gradient) of this foreign matter is separated into various values.Consequently, be easy to only extract the pixel of foreign matter part, thereby can detect foreign matter effectively.
Comparatively it is desirable to, said decision maker carries out three values to the brightness affirmation value of each pixel to be handled.Under this form, the brightness affirmation value of product section further converges to 0, thereby can give prominence to the brightness affirmation value of foreign matter.In addition, comparatively it is desirable to also comprise the intermediate value treating apparatus that the brightness affirmation value that calculates is carried out intermediate value (midian) processing.
Comparatively it is desirable to, foreign body detecting device comprises: display device shows said substrate image; And GUI (graphical user interface, graphic user interface) treating apparatus, when said decision maker is judged to be foreign matter, surround the position that belongs to foreign matter in the said display device institute images displayed with window.Under this form, can be easy to the result of determination that Visual Confirmation ground shows foreign matter.
Comparatively it is desirable to, said decision maker is judged to be foreign matter when the piece of the pixel with the bigger brightness affirmation value of extent of deviation reaches the appointment area.Under this form, can remove noise and the foreign matter that need to detect of differentiation only.Among the present invention, set brightness affirmation value to each pixel, therefore according to the difference of brightness affirmation value, also might judge noise or be difficult for the foreign matter person of distinguishing be foreign matter., can discern this noise etc. effectively and be foreign matter when specifying area at the piece of pixel with the bigger brightness affirmation value of extent of deviation.As the appraisal procedure of area, for example, can judge according to the piece of specifying size (5 pixels * 8 pixels) zone whether to be inscribed within pixel with the bigger brightness affirmation value of extent of deviation.Perhaps, also can whether in the scope of the piece of pixel, move and judge according to 4 pixels * 3 pixel regions with the bigger brightness affirmation value of extent of deviation, and judge based on the area of this displacement or moving range whether qualified.In addition, as additive method, also can make the rectangle inclination of 5 pixels * 8 pixel regions and judge the piece that whether is inscribed within pixel with the bigger brightness affirmation value of extent of deviation.In addition, be used for the pixel region that the piece of pixel with the bigger brightness affirmation value of extent of deviation is assessed is not limited to rectangle.Under the situation that adopts said method, particularly effective when knowing the foreign matter shape in advance.
Comparatively it is desirable to, said brightness affirmation value arithmetic unit, the summation of absolute value of difference of mean value of brightness value of brightness value and each pixel of each pixel of said pixel group that comprises this pixel to each Pixel calcualting is as said brightness affirmation value.Under this form, can use the parameter of computing faster to obtain high-precision brightness affirmation value.
Comparatively it is desirable to, the amount of extent of deviation is represented in minimum value and maximal value and the computing that said brightness affirmation value arithmetic unit is ignored the brightness value of the related pixel of said pixel group.Under this form,, on statistics, ignore the maximal value and the minimum value of the brightness value of the pixel that causes producing noise in the stage of brightness affirmation value calculation step, thus the computing in the determination step becomes fast, simply.
In addition, the present invention provides a kind of foreign matter checking method, and whether inspection has implemented to comprise printing treatment has foreign matter on interior surface-treated substrate, it is characterized in that comprising: the shooting step, and take substrate and export simulating signal; The AD switch process is a digital picture with the analog signal conversion of exporting; Pixel group is set step, to conversion and digital picture each pixel and set the pixel group of the zonule that comprises this pixel; Brightness affirmation value calculation step is to said each pixel and computing representes that the amount of extent of deviation of brightness value of each pixel in the said pixel group is as the brightness affirmation value of this pixel; And determination step, judge whether there is foreign matter based on said brightness affirmation value.
In the said brightness affirmation value calculation step, the amount of extent of deviation is represented in minimum value and maximal value and the computing of ignoring the brightness value of the related pixel of said pixel group.Under this form,, on statistics, ignore the maximal value and the minimum value of the brightness value of the pixel that causes producing noise in the stage of brightness affirmation value calculation step, thus the computing in the determination step becomes fast, simply.
As stated, therefore the extent of deviation of the brightness value of the pixel that the brightness value that the present invention is conceived to the related pixel of product and foreign matter are related different and can carry out foreign matter with high probability and judge can play the remarkable result that detects foreign matter more effectively.
Description of drawings
Fig. 1 is the general profile chart of wanting portion of the related foreign body detecting device of an expression embodiment of the present invention.
Fig. 2 is the block diagram of schematic configuration of the foreign body detecting device of presentation graphs 1.
Fig. 3 is the synoptic diagram that constitutes the substrate of inspection object.
Fig. 4 is the routine process flow diagram of action of the foreign body detecting device of presentation graphs 1.
Fig. 5 is the whether qualified process flow diagram of judging subroutine of the process flow diagram of presentation graphs 4.
Fig. 6 is the skeleton diagram of demonstration example of execution result of the process flow diagram of presentation graphs 4.
Fig. 7 is the synoptic diagram of the substrate among first to fourth embodiment of the present invention.
Fig. 8 is the synoptic diagram of the example of the average brightness among expression first to fourth embodiment of the present invention.
Fig. 9 be Fig. 8 want portion's enlarged drawing.
Figure 10 is the process flow diagram of brightness affirmation value interpretative subroutine of Fig. 4 of expression first embodiment.
Figure 11 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 10.
Figure 12 be Figure 11 want portion's enlarged drawing.
Figure 13 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 10.
Figure 14 is the curve map of the distribution of expression average brightness (brighteness ratio).
Figure 15 is the curve map of difference profile of the difference of expression average brightness.
Figure 16 is the curve map of the difference absolute value of expression average brightness.
Figure 17 implements the curve map after three values to the difference absolute value of average brightness.
Figure 18 is the curve map after the intermediate value that the difference absolute value of average brightness is implemented 3 pixels is handled.
Figure 19 implements the intermediate value processing of 3 pixels and the curve map after three values to the difference absolute value of average brightness.
Figure 20 is the process flow diagram of brightness affirmation value interpretative subroutine of Fig. 4 of expression second embodiment.
Figure 21 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 20.
Figure 22 be Figure 21 want portion's enlarged drawing.
Figure 23 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 20.
Figure 24 is the process flow diagram of brightness affirmation value interpretative subroutine of Fig. 4 of expression the 3rd embodiment.
Figure 25 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 24.
Figure 26 be Figure 25 want portion's enlarged drawing.
Figure 27 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 24.
Figure 28 is the process flow diagram of brightness affirmation value interpretative subroutine of Fig. 4 of expression the 4th embodiment.
Figure 29 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 27.
Figure 30 be Figure 29 want portion's enlarged drawing.
Figure 31 is the synoptic diagram of example of average brightness of execution result of the process flow diagram of expression Figure 27.
Embodiment
Below, based on description of drawings embodiment of the present invention.
At first, with reference to Fig. 1 and Fig. 2 the structure of the appearance inspection device 100 of an embodiment of the present invention is described.In addition, the related appearance inspection device 100 of this embodiment is an example of " foreign body detecting device " of the present invention.This appearance inspection device 100 has following function: judge whether be attached with foreign matters such as solder ball, scum silica frost (dross), element fragment or Soft flocks on the substrate W surface of interior surface-treated substrate as having implemented to comprise printing treatment, and when foreign matter is arranged, show this foreign matter.
With reference to Fig. 1, the related foreign body detecting device of this embodiment is included in housing 10 and contains the microscope carrier 11 of putting the substrate W that constitutes the inspection object.Microscope carrier 11 is embodied as conveyance band mechanism, can be through omitting illustrated driving mechanism moving along the conveyance direction of designated horizontal direction and with the horizontal direction of this conveyance direction quadrature.Below in the explanation, the conveyance direction of microscope carrier 11 is called directions X, horizontal direction rectangular with it is called the Y direction.Microscope carrier 11 can make substrate W stop in the inspection position of appointment and keep.In addition, microscope carrier 11 can finish the substrate W of inspection along the directions X conveyance from specifying the inspection position, and can take out of substrate W from appearance inspection device 100.
Be provided with to what microscope carrier 11 was moved into substrate W at the directions X upstream side of microscope carrier 11 and move into conveyance band 12.In addition, be provided with in the directions X downstream of microscope carrier 11 from what microscope carrier 11 was taken out of substrate W and take out of conveyance band 14.Move into conveyance band 12 after finishing designating step, on microscope carrier 11, move into substrate W blocks ofly.Take out of conveyance band 14 and take out of the substrate W that in appearance inspection device 100, finishes the inspection processing from microscope carrier 11.
In housing 10, comprise: optical camera 20, take substrate W surface and export its simulating signal; And lighting device 30, the substrate W irradiates light on the captured microscope carrier 11 of optical camera 20.These optical cameras 20, lighting device 30 can move along the XY direction above microscope carrier 11 through omitting illustrated driving mechanism.
On the other hand, lighting device 30 is the dome shape that is formed with peristome 321 at the top, and the lens 21 of optical camera 20 towards this peristome 321, are provided with a plurality of Lighting Divisions up and down cut apart in the inner face side of dome from the top.Particularly; Be sequentially provided with upper strata Lighting Division 322, middle level Lighting Division 323 and lower floor's Lighting Division 324 from the summit side that is provided with peristome 321; Be provided with a plurality of White LEDs (light emitting diode, light emitting diode) at each Lighting Division 322 to 324 upper edge Zhou Fangxiang.In addition, Lighting Division 322 also is provided with the infrared illumination device that shines infrared illumination light on the upper strata.Therefore, optical camera 20 uses from the illumination light of 30 pairs of substrate W irradiations of lighting device and takes substrate W upper surface from peristome 321, and the simulating signal of output two dimension (plane).Through the shooting of this optical camera 20, after acquisition and red R under the illumination light of the White LED stated, green G, each image of RGB that blue B is corresponding, and under infrared illumination light, obtain infrared view.In this embodiment, each brightness value of optical camera 20 being taken red R, green G, blue B in the brightness value of the digital picture that the back generates averages and obtains average brightness, with this average brightness as the computing parameter.
With reference to Fig. 2, appearance inspection device 100 is by control device 40 controls.Control device 40 logically comprises microscope carrier control part 41, conveyance band control part 42, camera control part 43, display control unit 45 and lighting control section 46.In addition, handle, logically form image processing part 410, inspection determination process section 420 and GUI handling part 430 for the inspection of stating after carrying out.In addition; Control device 40 comprises CPU (the central processing unit of actuating logic computing; Central processing unit), by ROM (the Read Only Memory of the program of storage control CPU etc.; ROM (read-only memory)), the RAM of temporary transient store various kinds of data (Random Access Memory, RAS), and the memory storage 50 that forms such as the auxilary unit of stored programme or various data (parameter) when device action.
Each control part 41 to 46 is carried out the logic module that microscope carrier 11, conveyance band 12 and 14, optical camera 20, lighting device 30 and display unit 60 are controlled in processing for according to program stored or data in the memory storage 50 through microprocessor.Here, display unit 60 for example is embodied as LCD, the contents processing of display control unit 40.In addition, on display unit 60, be connected with input medias such as omitting illustrated indicating device, operating personnel can suitably import required setting or data according to program stored in the memory storage 50.
Each handling part 410 to 430 does, through the processing that microprocessor is carried out according to program stored in the memory storage 50 or data, the logic module that the simulating signal of output is carried out the inspection of foreign substance of this substrate W when taking based on optical camera 20.
420 performances of inspection determination process section are based on judging the function that whether comprises foreign matter in this image through image processing part 410 image data processed.
With reference to Fig. 3; Substrate W is following substrate; Promptly undressed glass epoxy resin substrate is implemented etch processes and formed Copper Foil part A 1, form resist printing A2, reach the substrate that forms serigraphy part A3 through serigraphy through the resist printing then.In addition, A0 is unprocessed part, and A4 is the lap of Copper Foil part A 1 and resist printing A2.Each several part A0 to A4 all divides with straight border, therefore has the less characteristic of extent of deviation of brightness.
Situation on this substrate W, being attached with foreign matter Ob describes.Solder ball accounts for the overwhelming majority among the foreign matter Ob, and secondly many is scum silica frost.In addition, also can be attached with a spot of element fragment or Soft flocks sometimes.These foreign matters Ob is the object of the on-fixed shape of nature formation, therefore has the higher characteristic of extent of deviation of the brightness that is attended by the briliancy level on the whole.Thus, implement in this embodiment to utilize product and foreign matter brightness extent of deviation difference and discern the Flame Image Process of foreign matter.
Below, an example of the inspection of foreign substance handled through control device 40 is described.
With reference to Fig. 1 and Fig. 4, control device 40 reads product data (step S1) based on the program of checking usefulness.Secondly, set variable N (step S2) based on product information.Here, variable N is the number of the required image of inspection.Take substrate W sometimes as required and repeatedly, so in this embodiment, can stipulate the shooting number of times of each product.
In addition, can be through changing the camera site according to taking number of times mobile optical camera 20 (removable lighting 30 as required).
Then, control device 40 drives microscope carriers 11, move into conveyance band 12 and (as required) taken out of conveyance band 14, makes substrate W stop at the inspection position (step S3) on the microscope carrier 11.Thus, substrate W is as shown in Figure 1 be fixed on lighting device 30 under, but thereby the peristome 321 of optical camera 20 transmission illumination devices 30 take substrate W.
Then, control device 40 will be used to count the variable J that takes number of times and be initialized as 1 (step S4), the camera site (step S5) of mobile optical camera 20 (reaching removable lighting 30 as required) to J image.Then, control device 40 is taken substrate W (step S6) with optical camera 20, and camera data is handled.
The simulating signal that shooting obtains converts digital picture (step S7) into through the AD converter section 411 of image processing part 410.
Thereafter, in detail, control device 40 after state whether qualifiedly judge among the subroutine S8, judge that whether qualified the substrate W that takes is, increase progressively variable J (step S9) and judge whether take number of times reaches the number of wanting (step S10).Be judged to be do not reach when wanting number, control device 40 is back to step S5 and repeats above-mentioned processing.On the other hand, the image that is judged to be inspection reach when wanting number, control device 40 drives microscope carriers 11 and takes out of conveyance band 14 and take out of the substrate W (step S11) that finishes inspection.Then, control device 40 judges whether there is foreign matter (step S12), determining when having foreign matter, shows the window (step S14) that surrounds foreign matter on the image of in step S6, taking.
Below,, judge in the subroutine (step S8) that control device 40 is to each pixel and computing and average brightness (step S801) from the red R of the view data of digital signal acquisition, green G, RGB that blue B is corresponding with reference to Fig. 5 whether qualified.Then, control device 40 is carried out brightness affirmation value interpretative subroutines, to each pixel and computing brightness affirmation value (step S802).As stated, the extent of deviation of substrate W brightness under the state of no foreign matter is lower, and the extent of deviation of the brightness of this part is higher when foreign matter is arranged.Thus, difference of the absolute value of the difference of computing and mean value or dispersion, sum of square of deviations, maximal value and minimum value etc. for example, and the value of computing is made as the judgement data as brightness affirmation value.
Then, the brightness affirmation value of 40 pairs of each pixels of control device is implemented Filtering Processing and is removed noise (step S803).As the method for removing of noise, but illustration is implemented three values processing or intermediate value processing etc.Here, three values are handled and to be meant when arranging pixel according to the size order of brightness value, the pixel value between higher limit (for example 30) and the lower limit (for example 5) is made as 1, and this value in addition is made as 0 processing.In addition, intermediate value is handled and to be meant when arranging a plurality of pixel according to the size order of brightness value, obtains the processing of value of the brightness value of center pixel.This intermediate value when the number of a plurality of pixels is odd number, is got the value of central brightness value in handling, and when being even number, gets the mean value of the brightness value of two pixels of central authorities.
Through these Filtering Processing, the decision content at the position that extent of deviation is less becomes 0, and the decision content at the bigger position of extent of deviation is got the value corresponding with extent of deviation.
Then, control device 40 confirms that decision contents are greater than 0 pixel region (step S804).Then, control device 40 counting region number Ac (step S805).Thereafter, control device 40 is initialized as 1 (step S806) with the variable K of counting region, judges whether K zone is in the permissible range (step S807).
Concrete decision method can adopt the whole bag of tricks.
For example, can adopt the decision box of setting 5 pixels * 8 pixels to judge whether this decision box is inscribed within the zone, and when inscribe, be judged to be the method for foreign matter.When this is judged, also can make decision box rotation and whether judge inscribe.When the shape of the foreign matter that can confirm in advance need to detect, existence can be through setting this decision box and change its angle and validation region, thereby can be easily and differentiate the advantage of foreign matter effectively.
In addition, also can adopt the decision box of setting 4 pixels * 3 pixels, verify whether this decision box can be mobile in the zone, when removable, take a decision as to whether the method for foreign matter based on the size of this removable area.
Perhaps, also can adopt the decision box of checking 4 pixels * 3 pixels whether can be mobile in the zone, when removable, be based on directions X movable distance and Y direction movable distance and take a decision as to whether the method for foreign matter etc.
In addition, also can adopt rectangles such as circle or ellipse decision box in addition.
Usually, foreign matter Ob is of a size of more than the 200 μ m, and pixel size on one side is 19 μ m.Therefore, through judging with the decision box of 5 pixels * 8 pixels, the foreign matter that can carry out very high degree of precision detects.
The result who judges at the foreign matter of step S807 is when determining not for foreign matter, and control device 40 judges that K zone is normally (step S808), and when being judged to be foreign matter, judges that there is foreign matter (step S809) in K zone.Then, control device 40 increases progressively the value (step S810) of variable K and whether judges inspected All Ranges (step S811), when having not determinating area, is back to step S807 and repeats above-mentioned processing.On the other hand, when finishing the judgement of All Ranges, be back to main routine.
With reference to Fig. 6, the processing of the step S14 through main routine (process flow diagram of Fig. 4), control device 40 makes display unit 60 show the for example image of Fig. 6.Fig. 6 is the demonstration example of the image when taking the substrate W of Fig. 3.In the illustrated example, make red display window Wd be cut in foreign matter Ob outward to be easy to Visual Confirmation.
As stated; The related appearance inspection device 100 of this embodiment is that inspection has implemented to comprise whether printing treatment has foreign matter Ob on interior surface-treated substrate W appearance inspection device 100; It comprises: as the optical camera 20 of camera head, take substrate W and export simulating signal; AD converter section 411 is a digital picture with the analog signal conversion of exporting; Pixel group configuration part 413, to conversion and digital picture each pixel and set the pixel group GR of the zonule that comprises this pixel; Brightness affirmation value handling part 414 is to each pixel and computing representes that the amount of extent of deviation of brightness value of each pixel among the pixel group GR is as the brightness affirmation value Vp of this pixel; And inspection determination process section 420, judge whether there is foreign matter Ob based on brightness affirmation value Vp.
In addition, this embodiment is that a kind of the inspection implemented to comprise whether printing treatment has foreign matter Ob on interior surface-treated substrate W foreign matter checking method, and it comprises: shooting step, the simulating signal (step S6) of output substrate W; The AD switch process is digital picture (step S7) with the analog signal conversion of exporting; Pixel group GR sets step, to conversion and digital picture each pixel and set the pixel group GR (step S801) of the zonule that comprises this pixel; Brightness affirmation value calculation step is to each pixel and computing representes that the amount of extent of deviation of brightness value of each pixel among the said pixel group GR is as the brightness affirmation value Vp (step S802) of this pixel; And determination step, judge whether there is foreign matter Ob (step S808) based on brightness affirmation value Vp.
Therefore, in this embodiment, the amount of extent of deviation of brightness value of representing each pixel in the pixel group as brightness affirmation value handling part 414 computings of brightness affirmation value arithmetic unit is as brightness affirmation value Vp; Thus when each pixel is the pixel of product; The variable quantity on border is bigger, thereby departure converges to 0, with respect to this; When being foreign matter Ob, because of the briliancy level of this foreign matter Ob is separated into various values.Consequently, be easy to only extract the pixel of foreign matter Ob part, thereby can detect foreign matter Ob effectively.
In addition, the related appearance inspection device 100 of this embodiment comprises: as the display unit 60 of display device, display base plate image; And GUI handling part 430, when the simulating signal of display unit 60 demonstrations is foreign matter Ob, surround the foreign matter Ob that judges as the inspection determination process section 420 of decision maker with window.Therefore, in this embodiment, can be easy to the result of determination that Visual Confirmation ground shows foreign matter Ob.
In addition, in this embodiment, inspection determination process section 420 has the pixel of the bigger brightness affirmation value Vp of extent of deviation in digital picture piece is to be judged to be foreign matter Ob when specifying area.Therefore, in this embodiment, can remove noise and the foreign matter Ob that need to detect of differentiation only.Therefore in this embodiment, set brightness affirmation value Vp,, also might judge noise or be difficult for and the foreign matter Ob person of distinguishing is foreign matter Ob according to the difference of brightness affirmation value Vp to each pixel., can be effectively this noise etc. be distinguished with foreign matter Ob when specifying area at the piece of pixel with the bigger brightness affirmation value Vp of extent of deviation.
Like this, can detect foreign matter effectively according to this embodiment.
[embodiment]
Below, embodiment involved in the present invention is described.
Use Fig. 1 and device illustrated in fig. 2 to take substrate W illustrated in fig. 3.With the analog signal conversion of the substrate W that takes is after the digital picture, obtains the brightness value union average brightness of each several part.Operation result is as shown in Figure 7.Among the figure prefix be " Ave " numerical value for the average brightness of the red R of view data, green G, RGB that blue B is corresponding, bracket is interior to be each brightness value of RGB.
Fig. 8 is the figure that schematically shows the computing average brightness, Fig. 9 be Fig. 8 want portion's enlarged drawing.As shown in Figure 8, at part A 4, A2, A3, A2, be respectively Ave150, Ave158, Ave255, Ave158 in regular turn from the left average brightness.In addition, as shown in Figure 9 as for foreign matter Ob, central brightness mean value is 150 and the highest, and average brightness successively decreases with briliancy level (gradation), and outer peripheral portion becomes 0.
Secondly, when the brightness affirmation value interpretative subroutine of execution graph 5, implement first to fourth embodiment.
(first embodiment)
Carry out subroutine shown in Figure 10 among first embodiment.
With reference to Figure 10, in this subroutine, at first, the variable P that will be used to count pixel is initialized as 1 (step S8021), and setting with P pixel is the pixel group GR (step S8022) of 3 pixels * 3 pixels at center.
Secondly, obtain Vp (step S8023) according to formula as follows (1) computing.
Wherein, n: the pixel count of the pixel group under P pixel,
Vi: the average brightness of each pixel of the pixel group under P pixel,
The mean value of the average brightness of each pixel of the pixel group under
P pixel
In addition, in this calculation process, ignore maximal value and minimum value in the brightness value of each pixel that forms pixel group and carry out computing.With this Vp typing brightness affirmation value (step S8024) that is P pixel.Then, increase progressively the brightness affirmation value (step S8026) whether P value (step S8025) and judgement have set all pixels.When having the pixel of not judging, be back to step S8022 and repeat above-mentioned processing,, all pixels are back to the subroutine of Fig. 5 after being finished to judge.
Figure 11 is the figure with the brightness affirmation value of computing in the scope that Ar was surrounded that is shown schematically in Fig. 7, Figure 12 be Figure 11 want portion's enlarged drawing.Like Figure 11 and shown in Figure 12, among the result of computing brightness affirmation value, each several part A4, A2, A3, A2 become 0 because of extent of deviation is lower, and only a part of boundary member is residual to have difference.In addition, as for foreign matter Ob, because of the extent of deviation of average brightness is bigger, so brightness affirmation value also becomes the value of the bigger difference of expression.Especially, among first embodiment, when computing brightness affirmation value, in pixel group GR, ignore the maximal value and the minimum value of pixel brightness value, therefore can only extract the bigger position of extent of deviation more efficiently.
Below, when the subroutine of execution graph 5, in the Filtering Processing of step S803, carry out medium filtering and the computing median of 5 amount of pixels.Consequently, shown in figure 13, the border of each several part A4, A2, A3, A2 becomes 0, thereby the result for only appearing foreign matter Ob in one's mind with turning white.
Among first embodiment, brightness affirmation value handling part 414 is suc as formula shown in (1), to each pixel and computing is that the summation of absolute value of difference of brightness value of mean value and each pixel of female group is as brightness affirmation value Vp with pixel group GR.Therefore in this embodiment, can use the parameter of computing faster to obtain high-precision brightness affirmation value Vp.
In addition, among first embodiment,, on statistics, ignore the maximal value and the minimum value of the brightness value of the pixel that causes producing noise, so the computing in the determination step just can be fast, simply in the stage of brightness affirmation value calculation step.
Below, with the variation of diagram shows first embodiment.As Figure 14 to curve map shown in Figure 19 be the brightness value of the last pixel of line (through the horizontal line directly over the foreign matter Ob) L in the plot 7 and the figure that verifies.
With reference to Figure 14, in the stage (stage of the step S801 of execution graph 5) of computing average brightness, the smooth bias free of the average brightness corresponding with the each several part of substrate W ground distributes, and boundary member presents higher contrast ratio.With respect to this, in the part that foreign matter Ob is arranged,, the characteristic that is attended by the briliancy level have deviation ground to distribute because of causing average brightness to be chevron, and contrast is lower.Therefore, confirm that the extent of deviation that average brightness only partly becomes greatly at foreign matter Ob, and in other each several parts of substrate W, diminish.
Then, shown in figure 15, when getting the difference of average brightness, that is, when pressing the difference profile of formula as follows (2) computing Vp, detect the bigger pixel of deviation of average brightness.
Wherein, n is the pixel count of the pixel group on the line L
Shown in figure 16, investigated after the absolute value of getting the difference value of gained in this formula (2), remove the method for noise.
Shown in figure 17, with lower limit 5, higher limit 30 with formula (2) in during difference value three values of gained, though residual have a little noise, can the pixel value of foreign matter part be made as 1, and remainder is made as 0.
Shown in figure 18, when the intermediate value of the difference value of gained in the formula (2) being implemented 3 pixels is handled, can thoroughly remove noise and only obtain the corresponding value of brightness with the foreign matter part.
In addition, shown in figure 19, after the intermediate value that the difference value of gained is implemented 3 pixels in to formula (2) is handled and then when implementing three values, also can thoroughly remove noise and only obtain that foreign matter partly becomes 1 characteristic.
Like this, among first embodiment, the brightness affirmation value Vp that inspection determination process section 420 comprises each pixel carries out three value processed content.Under this form, the brightness affirmation value Vp of product section further converges to 0, can give prominence to the brightness affirmation value Vp of foreign matter Ob like this.
Especially, among first embodiment, when computing brightness affirmation value, ignore the maximal value and the minimum value of brightness value of the pixel of pixel group GR.Therefore, shown in figure 11, need not carry out the light characteristic that Filtering Processing can obtain to detect foreign matter.
(second embodiment)
With reference to Figure 20, when the brightness affirmation value interpretative subroutine of execution graph 5, among second embodiment, replacement formula (1) and utilize formula as follows (3) computing dispersion value.
Shown in figure 21, also in a second embodiment, each several part A4, A2, A3, A2 become 0 because of extent of deviation is lower, and only a part of boundary member is residual to have difference.In addition, shown in figure 22 as for foreign matter Ob, because of the extent of deviation of average brightness causes brightness affirmation value also to become the value of the bigger extent of deviation of expression greatly.
Secondly, when the subroutine of execution graph 5, among second embodiment, in the Filtering Processing of step S803, carry out medium filtering and the computing median of 5 amount of pixels.Consequently, shown in figure 23, the border of each several part A4, A2, A3, A2 becomes 0, and its result for only appearing foreign matter Ob in one's mind with turning white.
(the 3rd embodiment)
With reference to Figure 24, when the brightness affirmation value interpretative subroutine of execution graph 5, among the 3rd embodiment, replacement formula (1) and utilize formula as follows (4) computing sum of square of deviations.
Like Figure 25 and shown in Figure 26, also in the 3rd embodiment, each several part A4, A2, A3, A2 become 0 because of extent of deviation is lower, and only a part of boundary member is residual to have difference.In addition, as for foreign matter Ob, because of the extent of deviation of average brightness causes brightness affirmation value also to become the value of the bigger extent of deviation of expression greatly.
Then, when the subroutine of execution graph 5, among the 3rd embodiment, in the Filtering Processing of step S803, carry out medium filtering and the computing median of 5 amount of pixels.Consequently, shown in figure 27, the border of each several part A4, A2, A3, A2 becomes 0, and its result for only appearing foreign matter Ob in one's mind with turning white.
(the 4th embodiment)
With reference to Figure 28, when the brightness affirmation value interpretative subroutine of execution graph 5, among the 4th embodiment, replacement formula (1) and utilize maximal value and the difference of minimum value of the brightness value of formula as follows (5) computing pixel.
Vp＝MAX(GR)-MIN(GR)……(5)
Like Figure 29 and shown in Figure 30, the result of computing brightness affirmation value is, in the 4th embodiment, each several part A4, A2, A3, A2 become 0 because of extent of deviation is lower, and only boundary member is residual has a difference.In addition, as for foreign matter Ob, because of the extent of deviation of average brightness causes brightness affirmation value also to become the value of the bigger difference of performance greatly.
Then, when the subroutine of execution graph 5, in the Filtering Processing of step S803, carry out medium filtering and the computing median of 3 pixels.Consequently, shown in figure 31, the border of each several part A4, A2, A3, A2 becomes 0, thereby the result for only appearing foreign matter Ob in one's mind with turning white.
Above-mentioned embodiment only illustration preferred embodiment of the present invention, the present invention is not limited to above-mentioned embodiment.Beyond above-mentioned embodiment or embodiment, also can adopt various structures.
For example, particularly, optionally light any Lighting Division in a plurality of Lighting Divisions that also can shine from different perspectives and obtain a plurality of view data of different light angles.
In addition, also optionally light any Lighting Division in a plurality of Lighting Divisions of different emission wavelengths and obtain a plurality of view data of different emission wavelengths.
In addition, the wave filter that also can the camera setting when taking substrate W has the beam split function is obtained a plurality of view data that difference receives optical wavelength with respect to a Lighting Division.
And, to a plurality of view data of different light angles each other, a plurality of view data of different emission wavelengths each other, difference receive optical wavelength a plurality of view data each other, or relate to light angle, emission wavelength and receive both a plurality of view data at least of optical wavelength to implement each other that image operation such as addition subtraction multiplication and division is handled and view data constitute the inspection object.Like this, for checking a plurality of view data, in this embodiment, can stipulate the shooting number of times of each product.
In addition, among first embodiment, when computing brightness affirmation value, ignore the maximal value and the minimum value of brightness value of the pixel of pixel group GR, but also can omit this.Also can be in second, third embodiment, when computing brightness affirmation value, ignore the maximal value and the minimum value of brightness value of the pixel of pixel group GR.
Among each embodiment; Basis as computing; Will with the mean value of red R, green G, RGB that blue B is corresponding as average brightness; But also can perhaps also can only adopt the arbitrary look among red R, green G, the blue B because of the situation of inspection of foreign substance brightness value computing brightness affirmation value according to monochrome data.In addition, also can adopt infrared data.
In addition, when the brightness affirmation value interpretative subroutine of execution graph 5, formula as follows also capable of using (6) computing brightness affirmation value.
In addition, can in the scope of technical scheme of the present invention, implement various changes certainly.
Claims (8)
1. foreign body detecting device, whether inspection has implemented to comprise printing treatment has foreign matter on interior surface-treated substrate, it is characterized in that comprising:
Camera head is taken said substrate and is exported simulating signal;
The AD conversion equipment is a digital picture with the analog signal conversion of exporting;
The pixel group setting device, to conversion and each pixel of digital picture set the pixel group of the zonule that comprises this pixel;
Brightness affirmation value arithmetic unit, the amount of extent of deviation of brightness value of representing each pixel in the said pixel group to said each Pixel calcualting is as the brightness affirmation value of this pixel; And
Decision maker judges whether there is foreign matter based on said brightness affirmation value.
2. foreign body detecting device according to claim 1 is characterized in that:
Said decision maker carries out three values to the brightness affirmation value of each pixel to be handled.
3. foreign body detecting device according to claim 1 is characterized in that comprising:
Display device shows said substrate image; And
The user interface display processing unit when said decision maker is judged to be foreign matter, surrounds the position that belongs to foreign matter in the said display device institute images displayed with window.
4. foreign body detecting device according to claim 1 is characterized in that:
Said decision maker is judged to be foreign matter when the piece of the pixel with the bigger brightness affirmation value of extent of deviation reaches the appointment area.
5. foreign body detecting device according to claim 1 is characterized in that:
Said brightness affirmation value arithmetic unit, the summation of absolute value of difference of mean value of brightness value of brightness value and each pixel of each pixel of said pixel group that comprises this pixel to each Pixel calcualting is as said brightness affirmation value.
6. according to each described foreign body detecting device in the claim 1 to 5, it is characterized in that:
Said brightness affirmation value arithmetic unit, the amount of extent of deviation is represented in minimum value and maximal value and the computing of ignoring the brightness value of the related pixel of said pixel group.
7. foreign matter checking method, whether inspection has implemented to comprise printing treatment has foreign matter on interior surface-treated substrate, it is characterized in that comprising:
The shooting step is taken substrate and is exported simulating signal;
The AD switch process is a digital picture with the analog signal conversion of exporting;
Pixel group is set step, to conversion and each pixel of digital picture set the pixel group of the zonule that comprises this pixel;
Brightness affirmation value calculation step, the amount of extent of deviation of brightness value of representing each pixel in the said pixel group to said each Pixel calcualting is as the brightness affirmation value of this pixel; And
Determination step judges whether there is foreign matter based on said brightness affirmation value.
8. foreign matter checking method according to claim 7 is characterized in that:
Said brightness affirmation value calculation step, the amount of extent of deviation is represented in minimum value and maximal value and the computing of ignoring the brightness value of the related pixel of said pixel group.
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| JP2010235741A JP2012088199A (en) | 2010-10-20 | 2010-10-20 | Method and apparatus for inspecting foreign matter |
| JP2010-235741 | 2010-10-20 |
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| CN111630369A (en) * | 2018-01-24 | 2020-09-04 | Ckd株式会社 | Inspection device, PTP packaging machine, and method for calibrating inspection device |
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| CN112164058B (en) * | 2020-10-13 | 2024-09-17 | 东莞市瑞图新智科技有限公司 | Silk screen region coarse positioning method and device for optical filter and storage medium |
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