CN101354403A - 晶片检测装置用载片台及具备该载片台的晶片检测装置 - Google Patents

晶片检测装置用载片台及具备该载片台的晶片检测装置 Download PDF

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Publication number
CN101354403A
CN101354403A CNA200810092142XA CN200810092142A CN101354403A CN 101354403 A CN101354403 A CN 101354403A CN A200810092142X A CNA200810092142X A CN A200810092142XA CN 200810092142 A CN200810092142 A CN 200810092142A CN 101354403 A CN101354403 A CN 101354403A
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CN
China
Prior art keywords
mentioned
slide holder
air
detection device
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA200810092142XA
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English (en)
Chinese (zh)
Inventor
金应秀
南正道
崔时龙
丁均
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAIKELOON Ltd
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SAIKELOON Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAIKELOON Ltd filed Critical SAIKELOON Ltd
Publication of CN101354403A publication Critical patent/CN101354403A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CNA200810092142XA 2007-07-25 2008-04-08 晶片检测装置用载片台及具备该载片台的晶片检测装置 Pending CN101354403A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020070074752 2007-07-25
KR1020070074752A KR20090011306A (ko) 2007-07-25 2007-07-25 웨이퍼 프로빙 검사장치용 척 및 이를 구비한 웨이퍼 프로빙 검사장치

Publications (1)

Publication Number Publication Date
CN101354403A true CN101354403A (zh) 2009-01-28

Family

ID=40307307

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA200810092142XA Pending CN101354403A (zh) 2007-07-25 2008-04-08 晶片检测装置用载片台及具备该载片台的晶片检测装置

Country Status (3)

Country Link
KR (1) KR20090011306A (ko)
CN (1) CN101354403A (ko)
TW (1) TW200905770A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102305882A (zh) * 2011-05-25 2012-01-04 上海集成电路技术与产业促进中心 测试载片台
CN106483440A (zh) * 2015-08-27 2017-03-08 精工爱普生株式会社 电子部件搬运装置以及电子部件检查装置
CN110940910A (zh) * 2019-12-17 2020-03-31 广东利扬芯片测试股份有限公司 载盘降温系统及晶圆测试设备
CN111755375A (zh) * 2019-03-26 2020-10-09 日本碍子株式会社 晶片载置装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132307A (ko) 2019-11-13 2019-11-27 주식회사 쎄믹스 웨이퍼 냉각 척
KR102673746B1 (ko) * 2021-10-20 2024-06-10 주식회사 쎄믹스 프로버의 콤보 척

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102305882A (zh) * 2011-05-25 2012-01-04 上海集成电路技术与产业促进中心 测试载片台
CN106483440A (zh) * 2015-08-27 2017-03-08 精工爱普生株式会社 电子部件搬运装置以及电子部件检查装置
CN111755375A (zh) * 2019-03-26 2020-10-09 日本碍子株式会社 晶片载置装置
CN110940910A (zh) * 2019-12-17 2020-03-31 广东利扬芯片测试股份有限公司 载盘降温系统及晶圆测试设备

Also Published As

Publication number Publication date
TW200905770A (en) 2009-02-01
KR20090011306A (ko) 2009-02-02

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Legal Events

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20090128