CN101330291A - Method for repairing and regulating resistance network of high precision digital-to-analog converter - Google Patents
Method for repairing and regulating resistance network of high precision digital-to-analog converter Download PDFInfo
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- CN101330291A CN101330291A CNA2008100700126A CN200810070012A CN101330291A CN 101330291 A CN101330291 A CN 101330291A CN A2008100700126 A CNA2008100700126 A CN A2008100700126A CN 200810070012 A CN200810070012 A CN 200810070012A CN 101330291 A CN101330291 A CN 101330291A
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- 238000005259 measurement Methods 0.000 claims description 17
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Abstract
The invention relates to a method for repairing and adjusting a resistance network of a high precision digital-to-analog converter. The method ensures that the errors of the differentiation and the integral line of a quantized weighting resistance are not more than plus or minus one second LSB through repairing and adjusting the resistance value of the quantized weighting resistance. The method comprises the following steps: measuring, recording, calculating, judging and controlling the cyclical process of repairing and adjusting the resistance on the basis of enough precision outputted in the states of different control codes, and repairing and adjusting from low order to high lower bit by bit. The repairing and the adjusting of the high order weighting resistance can be on the pre-condition of accomplishing the repairing and the adjusting of a low order weighting resistance network and a combined weighting resistance network thereof and a standard specific value; the error between the due weighting relations of ideal design or between outputting weighing voltage or current represented by the high order weighting resistance and quantized voltage or current represented by the low order weighting resistance which is repaired and adjusted well can be less than 1/(2(n plus 2<k> minus1)) of minimum significant digit 1LSB of the converter. The method is suitable for a R-2R resistance network with n bits and a digital-analog and modulus converter with n plus k bits of a parallel weighting resistance network with k bits, and is applied to the manufacture of the digital-analog and modulus converter.
Description
(1) technical field
The present invention relates to a kind of method for repairing and regulating of resistor network, particularly a kind of method for repairing and regulating of resistance network of high precision digital-to-analog converter is applicable in the making of digital-to-analogue (D/A) transducer.
(2) background technology
In production of integrated circuits, particularly when making with the resistor network is the digital to analog converter (D/A) of core (hereinafter to be referred as D/A converter), because the imperfection of processes makes the resistance off-design value and the circuit parasitic effects of each branch road in the resistor network, must be to the resistance of resistance from repairing accent successively accurately to a high position than low level, power electric current on the resistor network is changed in strict accordance with predetermined weights, could guarantee that like this D/A converter changes successively in strict accordance with the step of a least significant bit from the low level to a high position, thereby guarantee the differential and the integral linearity precision of D/A converter.
The conventional method that resistor network is repaiied accent comprises in laser trimming film resistor on the accurate spacer, the integrated circuit chip that the Zener short circuit repaiies in accents, the integrated circuit chip methods such as fuse, satisfies resistor network and repaiies the accent requirement when the transistor array that the temperature of resistance value and absolute value is required also can adopt disposable programmable ROM to control when not being strict especially waits.The method relatively preferably of resistor network being repaiied accent is a laser trimming film resistor method, it has continuously and can adjust, characteristics such as temperature characterisitic is good, it is to have certain material selectivity ground that the mode that any one film resistor heat denatured in the integrated circuit causes its resistance to increase continuously is adjusted film resistor by the micron order bundle spot superlaser that can locate.The existing at present business equipment of film resistor laser trimming method can have been bought in the integrated circuit.Be difficult for accomplishing that resistance can adjust continuously on Zener short circuit, the fuse methods engineering.The technology that these resistance are repaiied accent is that industry general technology person knows, no longer detailed saying.
In general, be 12 and 12 following D/A converters employing R-2R resistor network structures of core with the resistor network, as Fig. 1.Usually repair accent R and 2R resistance from low level successively to high-order (as Fig. 1, a left side be high-order, right be low level), guarantee the strictness of electric current inflow resistor network by 1/2,1/4,1/8 ..., 1/2
NEqual proportion changes.Among Fig. 1, I
OutGenerally connect the input of operational amplifier, and the switching network among the figure is at 2R
H1～2R
HnEach branch road just have a pair of electronic switch that forms by electronic device (as MOS transistor) right, make 2R
H1～2R
HnEach branch road is not to be exactly the input of receiving operational amplifier with receiving, because the virtual earth effect of operational amplifier makes no matter switching network is ground connection or the input that connects operational amplifier, the 2R that is connected with switching network
H1～2R
HnThis end all is an earth potential.When the matching precision of processes need be adjusted inadequately, generally be to adjust R from right to left
L1～R
LnOr 2R
H1～2R
HnResistance (Fig. 1) makes R
L1～R
LnThe contiguous 2R in electric current and its left side on the resistance
H2～2R
Hn+1Electric current equates on the resistance, in fact can not accomplish absolute the equating on the mathematical meaning, and the error between them just can be accepted when ± 1/2LSB (least significant bit).Employing is adjusted these resistance such as methods such as laser trimmings, just thinks less than ± 1/2 least significant bit (LSB) when current error between them to have reached requirement, can descend a pair of R
LAnd 2R
HBetween the adjustment of electric current, so repair always and be transferred to all R
LAnd 2R
HAll repair and transferred, then finish the accent of repairing of this D/A, if certainly wherein certain to R
LAnd 2R
HNeed not repair and transfer the just criterion of satisfied ± 1/2LSB of its current error, then need not repair accent.Such method for repairing and regulating can guarantee the differential error of D/A converter.
When the figure place of D/A converter is higher than 12, with 14 D/A converters is example, sometimes do not adopt R-2R resistor network structure separately, but being respectively the resistance (shown in the empty frame B of Fig. 2) of 1/2R, R, 2R with 3 resistances, power electric current in the Senior Two position more than 12 obtains, as shown in Figure 2 with R-2R resistor network structure (shown in Fig. 2 void frame A) combination in parallel over the ground below 12.Low 12 bit positions are still repaiied accent according to preceding method, because 3 resistance of highest order are in parallel, equivalent resistance 2R with low 12 resistor networks has constituted 4 branch roads in parallel like this, therefore repairing when transferring the increase method in resistance value to be reference with a branch road of electric current minimum, and other 3 resistance serve as with reference to transferring to guarantee that by repairing adjacent bit error is in ± 1/2LSB with that resistance of minimum current branch road respectively.
Said method can only guarantee that generally the differential error of this high-precision d/a converter is less than 1/2LSB, error is bigger on the integral linearity error, usually all than the big several least significant bit power electric currents of ideal value, this has influenced high-precision d/a converter greatly and has repaiied accent rate of finished products or D/A performance.
(3) summary of the invention
For overcoming the problems referred to above, the big and lower shortcoming of rate of finished products at the integral linearity error, the invention provides a kind of method for repairing and regulating of resistance network of high precision digital-to-analog converter, at the bigger problem of integral linearity error in the above-mentioned background technology, proposing high-order parallel branch resistance repaiies accent and must consider the error convergence problem, provided relevant with weight electronic switch number in the high precision digital-to-analog converter accent resistance standard of newly repairing, adopt the new high-order branch road resistance that can guarantee to repair repairing of accent precision and transfer resistance standard to repair accent, the integral linearity error that just can guarantee D/A converter is less than 1/2LSB even lower.
The technical scheme that the present invention solves the problems of the technologies described above is, the method for repairing and regulating of a kind of resistance network of high precision digital-to-analog converter of the present invention, be applicable to and utilize n position R-2R resistor network and corresponding electronic switch or have the n+k figure place weighted-voltage D/A converter that k position weight resistor network in parallel and n position R-2R resistor network and corresponding electronic switch form quantization weight voltage or electric current, by repairing of quantization weight resistance wherein transfer to guarantee its differential and integral linearity error be not more than ± production of integrated circuits of 1/T LSB in, wherein T is the real number more than or equal to 2.It is characterized in that may further comprise the steps:
Step 1: digital to analog converter output control code is set, make that to increase a high ohmically electronic switch of weight from low level to a high position be effective status to digital to analog converter on preface ground successively, and every the setting on digital to analog converter output control code and the respective weights resistance behind the electronic switch effective status, all measure and write down the output voltage or the current value of a digital to analog converter, be called for short the output valve of digital to analog converter.When digital to analog converter output control code is set, make when digital to analog converter has only the ohmically electronic switch of lowest order weight effective that the output valve of digital to analog converter is recorded and as digital to analog converter least significant bit, i.e. 1LSB.
Step 2: the digital to analog converter resistor network is repaiied accent and was carried out before the measurement next time after at least twice measurement.After at least twice measurement, a preceding measured value and back one-shot measurement value are carried out the calculating of an error ratio.Deduct aforementioned 1LSB value again after back one-shot measurement value being deducted the twice of a preceding measured value, mathematical formulae is expressed as OUT
m-2 * OUT
M-1-LSB, wherein OUT
mExpression back one-shot measurement value, OUT
M-1Represent a preceding measured value, with error difference and the 1/T LSB (n+2 that obtains
k-1) compares, wherein T is the real number more than or equal to 2, LSB is aforementioned digital to analog converter least significant bit, n is the figure place of digital to analog converter R-2R resistor network decision, also be the weight electronic switch sum that comprises in the R-2R resistor network simultaneously, k is a weight resistance figure place directly in parallel in the digital to analog converter, 2
kThe sum of the electronic switch of the direct weight resistor network in parallel of-1 expression.If aforementioned error difference is than 1/T LSB/ (n+2
k-1) big, two weight resistance that weight electronic switch of one-shot measurement correspondence is associated then need be repaiied accent, weight resistance that promptly links to each other and the weight resistance that links to each other with a lower R-2R resistor network thereof with electronic switch, by such as increases such as laser trimming, Zener fuses or reduce the method for these two resistance, make the error absolute value less than 1/T/ (n+2
k-1) times LSB and more than or equal to zero, the related resistors network of so finishing before next time measuring is repaiied accent.
Step 3: repeating step " 1 " and " 2 " R-2R resistor network resistance in all digital to analog converters all satisfies error judgment standard in the step " 2 ".If only comprise the R-2R resistor network in the digital to analog converter, even if then the digital to analog converter resistor network is repaiied to transfer and is finished, this moment k=0.Also contain direct weight resistance in parallel if digital to analog converter is more high-order, then also need carry out following step.
Step 4: will finish that R-2R resistor network integral body is considered as an equivalent resistance in the digital to analog converter of repairing accent, promptly ownership barytron switch is simultaneously effectively or simultaneously invalidly promptly can be considered an equivalent resistance in the R-2R resistor network.By being set, digital to analog converter output control code makes to have only R-2R resistor network equivalent resistance effective, measure and record digital to analog converter output valve and when effective separately respectively with other weight resistance directly in parallel resulting digital to analog converter surveying record output valve corresponding weights output valve compare, obtain corresponding 2
k-1 error comparison value.Find out this 2
k-1 is subtracted each other and obtains that symbol is " just " and absolute value the maximum in the error comparison value, by first resistance that links to each other with direct weight resistance in parallel in the R-2R resistor network being carried out the accent of repairing that resistance increases such as the method for increase resistance such as laser trimming, make in the error comparison value symbol for just and absolute value the maximum all less than 1/T LSB/ (n+2
k-1) and more than or equal to zero.
Step 5: calculate 2 according to abovementioned steps " 4 " again
k-1 error comparison value, find out this 2
k-1 subtract each other obtain in the error comparison value symbol for " bearing " and absolute value greater than 1/TLSB/ (n+2
k-1) person, and the method by increasing resistance such as laser trimming etc. is that " bearing " and absolute value are greater than 1/T LSB/ (n+2 to symbol
k-1) corresponding direct weight resistance in parallel is repaiied transfer to increase its resistance, up to its error comparison value less than 1/T LSB/ (n+2
k-1) and more than or equal to zero.
Step 6: repairing accent and also can adopt the method for repairing and regulating that reduces resistance such as Zener fuse etc. in step " 4 " and " 5 " to resistance, be not difficult to find out, only need be with " just ", " bearing " wherein, " increase resistance " corresponding changing into " born ", " just ", " reducing resistance " just can adapt to the method for repairing and regulating that reduces resistance.
This method also is applicable to and comprises in other T type resistor network D/A converter of similar R-2R resistor network that lateral resistance and longitudinal electrical resistance resistance value ratio be not equal to 1: 2.
Institute repaiies and transfers digital to analog converter can reach differential error absolute value and integral linearity Error Absolute Value all respectively smaller or equal to 1/TLSB.Work as T=2, the time be common digital to analog converter desired ± 1/2LSB.
Be applicable to that resistor network is repaiied accent in other integrated circuit that comprises the preceding method feature, as integrated circuits such as some modulus (A/D) transducer or DDS.
This method is not only applicable to be merely able to the accent mode of repairing that resistance is increased, as film resistor laser positioning irradiation and fuse method for repairing and regulating; Also be applicable to reduce resistance (accent is repaiied in short circuit as Zener), perhaps both can increase resistance, can reduce the mode of resistance again.
Beneficial effect:
With 14 D/A converters is example, and the structure of employing is high 23 weight resistance directly in parallel, and low 12 is the R-2R resistor network, and circuit structure is with reference to figure 3, this moment n=12, k=2.Experiment shows, adopts this method than background technology method, can improve the integrated circuit (IC) chip rate of finished products about 40%.
(4) description of drawings
Fig. 1 is the schematic diagram of the normal R-2R resistor network structure that adopts of general D/A converter.
Fig. 2 is the D/A converter structural representation with high k position weight resistance in parallel, low n position R-2R resistor network.
Fig. 3 is 14 D/A converter structural representations that of the embodiment of the invention has high 2 weight resistance in parallel, low 12 R-2R resistor networks.
(5) embodiment
The specific embodiment of the present invention is not limited only to following description, can adopt other similar methods defined in summary of the invention to reach same target according to the spirit of this method.
This method comprises the measurement subsystem that can test out n+k figure place weighted-voltage D/A converter output voltage or electric current of enough accuracy, this subsystem can be to carry out the wafer level probe test system that resistor network is repaiied accent in the chip, also can be the integrated circuit modules test macro that can carry out after resistor network in the chip is repaiied the part encapsulation of accent or finished encapsulation.The recording subsystem that also comprises measured value, register system can be that manual record also can be other telltale register systems etc., as contain the electronic recording system of calculating storaging unit.Comprise also and can calculate the subsystem element of relatively judging that this subsystem element can be artificial calculating and judgement, also can be other systems that this function is arranged, and is the system of core as electronic computer.Comprising that also controlling in the described converter chip resistor network according to judged result repaiies the tune system, can be artificial also automation subsystem.The industry those skilled in the art of these systems are familiar with, and introduce no longer in detail.
The accent process of repairing of resistor network comprises the cyclic process that transducer is repaiied accent at measurement, record, calculating, judgement and the controlling resistance of the enough accuracy of different control code state outputs.
It is to repair quantization weight voltage or the electric current of turning parallel operation low level electronic switch and resistor network decision, the perhaps linear combination of low level weight voltage or electric current earlier suddenly that resistor network is repaiied pacing.Quantification voltage or the electric current of representing with the linear combination of repairing the low level resistor network that mixes up or low level weight voltage or electric current is the contrast reference quantity again, repaiies the resistor network of transferring high quantization weight voltage of representative or electric current one by one, by turn.In other words, a high weight resistance repaiies accent and must transfer that to finish be precondition with repairing of low level weight resistor network and linear combination weight resistor network thereof.
This method for repairing and regulating also comprises one by one, repair quantization weight voltage or the electric current of heightening a resistor network representative by turn and repaiied quantification voltage that the low level resistor network that mixes up represents or the error between the due weight relationship of electric current Design Theory must less than with all electronic switch number (n+2
k-1) a relevant error criterion.The numerical value of this error criterion is expressed as 1/2LSB/ (n+2 with mathematical formulae
k-1), wherein LSB is transducer minimum quantization voltage or current weights value, or is referred to as least significant bit.
This method is not only applicable to be merely able to method for repairing and regulating that resistance is increased, as film resistor laser positioning irradiation and fuse method for repairing and regulating; Also be applicable to reduce resistance (accent is repaiied in short circuit as Zener), perhaps both can increase resistance, can reduce the method for resistance again.
In the method with aforementioned error criterion 1/2LSB/ (n+2
k-1) 1/2LSB is reduced to any degree 1/T LSB, and wherein T is the real number greater than 2, then can obtain the effect that transducer integral linearity degree Error Absolute Value is no more than 1/T LSB.
Repair with 14 D/A converters below and be adjusted to example, as shown in Figure 3, it is 2 that T requires.If low 12 are realized R with the R-2R network
L1～R
LnResistance value equal R respectively
0, R
H1～R
HnResistance value all equal 2R respectively
03 resistances of high 2 usefulness are respectively 2R
0, R
0, 1/2R
0Weight resistance R (1)～R (2
k-1) parallel connection realizes, at examples of implementation, and n=12, k=2 is referring to accompanying drawing 3.Because resistor network switch unreasonably thinks of the processes imperfection, generally change figure place greater than 8, promptly n+k＞8 o'clock will obtain the accent of repairing that higher chip yield just need be carried out resistor network.
Referring to Fig. 3, will represent the R of lowest order earlier by the converter circuit inner control logic
H1By electronic switch SW
1Receive virtual earth "-" end (is virtual earth to call this end in the following text) of operational amplifier OPAM, all the other electronic switches are all held with receiving, also are "+" ends of OPAM.On enough " voltmeter " of precision shown in Figure 3, read and write down a V
OutMagnitude of voltage V
1, this value is sent to " calculating able to programme, control unit CU " shown in Figure 3, this is worth the power voltage of corresponding D/A minimum, i.e. 1LSB.Then with SW
2Insert virtual earth, measure V
OutMagnitude of voltage and be recorded as V
2, calculate (V
2-2V
1-V
1)/V
1Value, be recorded as b
1At this moment, V
2Just representative " a high quantization weight voltage ", V
1Just representative " linear combination of low level weight voltage or electric current ", only this linear combination is exactly V
1.If artificial or automatic judgement is b
1＞1/2LSB/ (n+2
k-1)=(1/2/ (12+2
2-1))=1/30, then manually or automatically controls laser system LS irradiation R
H2, slightly increase R
H2Resistance, the step value of its increase can come to determine by experiment, general and R
H2Shape and repair and transfer the position relevant, the technical staff who is engaged in this work is familiar with this fine setting technology, is not further elaborated here.Herein, 1/2LSB/ (n+2
k-1) aforementioned just error criterion.Measure V once more
OutMagnitude of voltage and be recorded as new V
2, V here
2Be the value that actual measurement is arrived, rather than V
2This symbol (back is narrated analogue and no longer illustrated) calculates new b once more
1Numerical value is if satisfy condition 0≤b
1＜(1/2/ (n+2
k-1))=1/30, then can stop this weight resistance and repair accent,, then continue suitably to increase R if do not satisfy
H2Resistance, up to satisfying this condition.If b
2＜-1/30, then manually or automatically control laser system LS irradiation R
L1, slightly increase R
L1Resistance, measure V
OutMagnitude of voltage and be recorded as new V
2, calculate new b
1Numerical value is if satisfy condition-1/30＜b
1≤ 0, then can stop this weight resistance and repair accent, if do not satisfy, then continue suitably to increase R
L1Resistance, up to satisfying this condition.So just finish SW
2The inferior low level weight resistance of representative is repaiied accent.Here lowest order weight voltage V
1Directly, do not repair accent as the reference of a high weight.
Next carry out SW
3The weight of the low level once more resistance of representative is repaiied accent.Similarly, keep front SW
1, SW
2On off state is with SW
3Insert the virtual earth state, measure V
OutMagnitude of voltage and be recorded as V
3, calculate (V
3-2V
2-V
1)/V
1Value, be recorded as b
2At this moment, V
3Just representative " a high quantization weight voltage ", " 2V
2-V
1" just representative " a kind of linear combination of low level weight voltage or electric current ", (V
3-2V
2-V
1) representation theory designs due weight relationship, its theoretical value should be " 0 ".Certainly also there are other " linear combination of low level weight voltage or electric current " forms, this and SW
3Low level electronic switch combination state before is corresponding, and to this, industry those skilled in the art know this, repeat no more.At this moment, if artificial or judgement automatically is b
2＞1/30, then manually or automatically control laser system LS irradiation R
H3, slightly increase R
H3Resistance.Measure V
OutMagnitude of voltage and be recorded as new V
3, calculate new b
2Numerical value is if satisfy condition 0≤b
2＜1/30, then can stop this weight resistance and repair accent, if do not satisfy, then continue suitably to increase R
H3Resistance, up to satisfying this condition.If b
2＜-1/30, then manually or automatically control laser system LS irradiation R
L2, slightly increase R
L2Resistance, measure V
OutMagnitude of voltage and be recorded as new V
3, calculate new b
2Numerical value is if satisfy condition-1/30＜b
2≤ 0, then can stop this weight resistance and repair accent, if do not satisfy, then continue suitably to increase R
L2Resistance, up to satisfying this condition.So just finish SW
3The inferior low level weight resistance of representative is repaiied accent.
Similarly, keep front SW
1～SW
N-1On off state is with SW
nInsert the virtual earth state, measure V
OutMagnitude of voltage and be recorded as V
n, calculate (V
n-2V
N-1-V
1)/V
1Value, be recorded as b
N-1If artificial or automatic judgement is b
N-1＞1/30, then manually or automatically control laser system LS irradiation R
Hn, slightly increase R
HnResistance.Measure V
OutMagnitude of voltage and be recorded as new V
n, calculate new b
N-1Numerical value is if satisfy condition 0≤b
N-1＜1/30, then can stop this weight resistance and repair accent, if do not satisfy, then continue suitably to increase R
HnResistance, up to satisfying this condition.If b
N-1＜-1/30, then manually or automatically control laser system LS irradiation RL
N-1, slightly increase R
Ln-1Resistance, measure V
OutMagnitude of voltage and be recorded as new V
n, calculate new b
N-1Numerical value is if satisfy condition-1/30＜b
N-1≤ 0, then can stop this weight resistance and repair accent, if do not satisfy, then continue suitably to increase R
L2Resistance, up to satisfying this condition.So just finish SW
nCertain weight resistance of representative is repaiied accent.When n=12, just finished low 12 R-2R network resistors and repaiied accent.
Next carry out the accent of repairing of high 2 weight resistor networks in parallel.The repairing of this moment transfers that to repair accent slightly different with aforementioned R-2R network, and difference is in the difference of " linear combination of the low level weight voltage " mode of use, to make things convenient for the accent of repairing of high 2 weight resistor networks in parallel.Repair accent and will use the V that measures previously
n(be V for this example
12) and V
1At first whether decision will repair and transfer the resistance R that is associated with the R-2R network
L12This can decide like this, at first is all electronic switches are resetted (comprising front R-2R resistor network switch), promptly all receives ground, respectively switch SW (1), SW (2), SW (3) is inserted virtual earth singly separately and (promptly inserts virtual earth and measure V again
OutAfter reset receive ground), measure V
OutMagnitude of voltage and be recorded as V (1), V (2), V (3) respectively, calculate (V (1)-2 more respectively
0V
n)/V
1, (V (2)-2
1V
n)/V
1, (V (3)-2
2V
n)/V
1Value (promptly with " linear combination of low level weight voltage " or summary of the invention " 4 " in " respectively separately effectively time resulting digital to analog converter surveying record output valve corresponding weights output valve " compare), these values are recorded as b (1), b (2), b (3) respectively, judge whether these b (1), b (2), b (3) exist the " (1/ (2 (n+2 less than aforementioned error criterion decision
k-1)))=-1/30 ",, just need carry out resistance R if exist
L12Repair accent, find out wherein minimum person this moment, if there is no, then do not need resistance R
L12Repair accent.If desired to resistance R
L12Repair accent, suppose b (1)＜b (2)＜-(1/ (2 (n+2
k-1)))=-1/30, then b (1) just is equivalent to above-mentioned minimum person.This moment is by manually or automatically controlling laser system LS irradiation R
L12, slightly increase R
L12Resistance, planar survey V before utilizing
1, V
12Corresponding on off state remeasures V
1And V
12Numerical value, remeasure the numerical value of V (1) with measuring related V (1) on off state of b (1) again, and form new b (1) value, up to-1/30＜b (1)≤0, b this moment (2) promptly satisfies-1/30＜b (1)≤0 naturally because the folder of mathematics is forced characteristic and satisfied the accent condition of not repairing naturally.
Repair the accent resistance R when not existing
L12Condition or exist but repaiied transfer and satisfy b (1), b (2) does not repair the accent condition, what this moment was remaining all is the situation of b (k) more than or equal to " 0 ", for this example, only remaining b (3) is relevant repaiies accent, suppose at this moment with resistance R
L12Repair and transfer or relevantly (need repair and transfer R
L12) or uncorrelatedly (do not need to repair and transfer R
L12) V
12B under the situation (3) 〉=1/30, show that then the related resistance R (3) of b (3) is less than normal, need manually or automatically to control laser system LS irradiation R (3), slightly increase the resistance of R (3), again to measure the numerical value that related V (3) on off state of b (3) remeasures V (3), and form new b (3) value, up to 0≤b (1)＜1/30.
So far just finished the accent work of repairing of resistance in all D/A converter internal resistance networks.
Claims (3)
1. the method for repairing and regulating of a resistance network of high precision digital-to-analog converter, be applicable to and utilize n position R-2R resistor network and corresponding electronic switch or have the n+k figure place weighted-voltage D/A converter that k position weight resistor network in parallel and n position R-2R resistor network and corresponding electronic switch form quantization weight voltage or electric current, by repairing of quantization weight resistance wherein transfer to guarantee its differential and integral linearity error be not more than ± production of integrated circuits of 1/T LSB in, wherein T is the real number more than or equal to 2, it is characterized in that may further comprise the steps:
(1) digital to analog converter output control code is set, make that to increase a high ohmically electronic switch of weight from low level to a high position be effective status to digital to analog converter on preface ground successively, and every the setting on digital to analog converter output control code and the respective weights resistance behind the electronic switch effective status, all measure and write down the output voltage or the current value of a digital to analog converter, the output valve that is called for short digital to analog converter, when digital to analog converter output control code is set, make when digital to analog converter has only the ohmically electronic switch of lowest order weight effective, the output valve of digital to analog converter is recorded and as digital to analog converter least significant bit, i.e. 1LSB;
(2) the digital to analog converter resistor network is repaiied accent and was carried out before the measurement next time after at least twice measurement, after at least twice measurement, a preceding measured value and back one-shot measurement value are carried out the calculating of an error ratio, deduct aforementioned 1LSB value again after back one-shot measurement value being deducted the twice of a preceding measured value, mathematical formulae is expressed as OUT
m-2 * OUT
M-1-LSB, wherein OUT
mExpression back one-shot measurement value, OUT
M-1Represent a preceding measured value, with error difference and the 1/T LSB (n+2 that obtains
k-1) compares, wherein T is the real number more than or equal to 2, LSB is aforementioned digital to analog converter least significant bit, n is the figure place of digital to analog converter R-2R resistor network decision, also be the weight electronic switch sum that comprises in the R-2R resistor network simultaneously, k is a weight resistance figure place directly in parallel in the digital to analog converter, 2
kThe sum of the electronic switch of the direct weight resistor network in parallel of-1 expression.If aforementioned error difference is than 1/T LSB/ (n+2
k-1) big, two weight resistance that weight electronic switch of one-shot measurement correspondence is associated then need be repaiied accent, weight resistance that promptly links to each other and the weight resistance that links to each other with a lower R-2R resistor network thereof with electronic switch, by such as increases such as laser trimming, Zener fuses or reduce the method for these two resistance, make the error absolute value less than 1/T/ (n+2
k-1) times LSB and more than or equal to zero, the related resistors network of so finishing before next time measuring is repaiied accent;
(3) repeating step (1) and (2), R-2R resistor network resistance all satisfies error judgment standard in (2) in all digital to analog converters, if only comprise the R-2R resistor network in the digital to analog converter, even if then the digital to analog converter resistor network is repaiied to transfer and is finished, this moment k=0, also contain direct weight resistance in parallel if digital to analog converter is more high-order, then also need carry out following step;
(4) will finish that R-2R resistor network integral body is considered as an equivalent resistance in the digital to analog converter of repairing accent, be that ownership barytron switch is simultaneously effectively or simultaneously invalidly promptly can be considered an equivalent resistance in the R-2R resistor network, by being set, digital to analog converter output control code makes to have only R-2R resistor network equivalent resistance effective, measure and record digital to analog converter output valve and when effective separately respectively with other weight resistance directly in parallel resulting digital to analog converter surveying record output valve corresponding weights output valve compare, obtain corresponding 2
k-1 error comparison value, find out this 2
k-1 is subtracted each other and obtains that symbol is " just " and absolute value the maximum in the error comparison value, by first resistance that links to each other with direct weight resistance in parallel in the R-2R resistor network being carried out the accent of repairing that resistance increases such as the method for increase resistance such as laser trimming, make in the error comparison value symbol for just and absolute value the maximum all less than 1/T LSB/ (n+2
k-1) and more than or equal to zero;
(5) calculate 2 according to abovementioned steps (4) again
k-1 error comparison value, find out this 2
k-1 subtract each other obtain in the error comparison value symbol for " bearing " and absolute value greater than 1/T LSB/ (n+2
k-1) person, and the method by increasing resistance such as laser trimming etc. is that " bearing " and absolute value are greater than 1/T LSB/ (n+2 to symbol
k-1) corresponding direct weight resistance in parallel is repaiied transfer to increase its resistance, up to its error comparison value less than 1/T LSB/ (n+2
k-1) and more than or equal to zero;
(6) in step (4) and (5), repairing accent and also can adopt the method for repairing and regulating that reduces resistance such as Zener fuse etc. resistance, only need will be wherein " just ", " bearing ", " increase resistance " corresponding changing into " born ", " just ", " reducing resistance " just can adapt to the method for repairing and regulating that reduces resistance.
2. the method for repairing and regulating of described a kind of resistance network of high precision digital-to-analog converter as claimed in claim 1, its feature also is:
Institute repaiies and transfers digital to analog converter can reach differential error absolute value and integral linearity Error Absolute Value all respectively smaller or equal to 1/TLSB, when T=2, be common digital to analog converter desired ± 1/2LSB.
3. as the method for repairing and regulating of claim 1,2 described a kind of resistance network of high precision digital-to-analog converter, its feature also is:
Be applicable to that resistor network is repaiied accent in other integrated circuit that comprises claim 1,2 method features, as integrated circuits such as some modulus (A/D) transducer or DDS.
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