CN101314098A - 一种多晶硅尾气的净化方法以及使用该方法的净化装置 - Google Patents
一种多晶硅尾气的净化方法以及使用该方法的净化装置 Download PDFInfo
- Publication number
- CN101314098A CN101314098A CNA2008100453699A CN200810045369A CN101314098A CN 101314098 A CN101314098 A CN 101314098A CN A2008100453699 A CNA2008100453699 A CN A2008100453699A CN 200810045369 A CN200810045369 A CN 200810045369A CN 101314098 A CN101314098 A CN 101314098A
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- Prior art keywords
- regeneration
- hydrogen
- tower
- tail gas
- circulating hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 32
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000000746 purification Methods 0.000 title claims abstract description 16
- 239000001257 hydrogen Substances 0.000 claims abstract description 57
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 57
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 238000011069 regeneration method Methods 0.000 claims abstract description 47
- 230000008929 regeneration Effects 0.000 claims abstract description 46
- 238000001179 sorption measurement Methods 0.000 claims abstract description 38
- 239000007789 gas Substances 0.000 claims abstract description 34
- 239000003463 adsorbent Substances 0.000 claims abstract description 29
- 238000001816 cooling Methods 0.000 claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 230000001172 regenerating effect Effects 0.000 claims abstract description 8
- 150000002431 hydrogen Chemical class 0.000 claims abstract description 7
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 230000000274 adsorptive effect Effects 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000005046 Chlorosilane Substances 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 6
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 6
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000004229 Alkannin Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000004172 quinoline yellow Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000007420 reactivation Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000002151 riboflavin Substances 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000004149 tartrazine Substances 0.000 description 1
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- Separation Of Gases By Adsorption (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
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CN2008100453699A CN101314098B (zh) | 2008-02-05 | 2008-02-05 | 一种多晶硅尾气的净化方法 |
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CN2008100453699A CN101314098B (zh) | 2008-02-05 | 2008-02-05 | 一种多晶硅尾气的净化方法 |
Publications (2)
Publication Number | Publication Date |
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CN101314098A true CN101314098A (zh) | 2008-12-03 |
CN101314098B CN101314098B (zh) | 2010-08-18 |
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CN2008100453699A Expired - Fee Related CN101314098B (zh) | 2008-02-05 | 2008-02-05 | 一种多晶硅尾气的净化方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101791487A (zh) * | 2010-03-30 | 2010-08-04 | 中国天辰工程有限公司 | 回收多晶硅生产的尾气中氯化氢的方法 |
CN107311108A (zh) * | 2016-04-26 | 2017-11-03 | 内蒙古盾安光伏科技有限公司 | 一种避免吸附柱再生延时生产工艺 |
CN107648979A (zh) * | 2016-07-26 | 2018-02-02 | 新特能源股份有限公司 | 一种处理多晶硅生产中尾气的方法及系统 |
CN109847731A (zh) * | 2019-01-31 | 2019-06-07 | 内蒙古通威高纯晶硅有限公司 | 一种还原尾气回收活性炭吸附塔再生工艺及再生系统 |
CN112494991A (zh) * | 2020-12-28 | 2021-03-16 | 大连福佳·大化石油化工有限公司 | 具备热解吸剂流程的冷态吸附塔系统 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1025110C (zh) * | 1992-09-24 | 1994-06-22 | 中国石油化工总公司 | 变压吸附提浓氢气的工艺 |
CN201168536Y (zh) * | 2008-02-05 | 2008-12-24 | 四川亚连科技有限责任公司 | 多晶硅尾气净化装置 |
-
2008
- 2008-02-05 CN CN2008100453699A patent/CN101314098B/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101791487A (zh) * | 2010-03-30 | 2010-08-04 | 中国天辰工程有限公司 | 回收多晶硅生产的尾气中氯化氢的方法 |
CN101791487B (zh) * | 2010-03-30 | 2012-01-25 | 中国天辰工程有限公司 | 回收多晶硅生产的尾气中氯化氢的方法 |
CN107311108A (zh) * | 2016-04-26 | 2017-11-03 | 内蒙古盾安光伏科技有限公司 | 一种避免吸附柱再生延时生产工艺 |
CN107648979A (zh) * | 2016-07-26 | 2018-02-02 | 新特能源股份有限公司 | 一种处理多晶硅生产中尾气的方法及系统 |
CN109847731A (zh) * | 2019-01-31 | 2019-06-07 | 内蒙古通威高纯晶硅有限公司 | 一种还原尾气回收活性炭吸附塔再生工艺及再生系统 |
CN112494991A (zh) * | 2020-12-28 | 2021-03-16 | 大连福佳·大化石油化工有限公司 | 具备热解吸剂流程的冷态吸附塔系统 |
CN112494991B (zh) * | 2020-12-28 | 2024-05-14 | 大连福佳·大化石油化工有限公司 | 具备热解吸剂流程的冷态吸附塔系统 |
Also Published As
Publication number | Publication date |
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CN101314098B (zh) | 2010-08-18 |
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Denomination of invention: Purification method for polysilicon tail gas and purifier employing the method Effective date of registration: 20110323 Granted publication date: 20100818 Pledgee: Chengdu high investment financing Company limited by guarantee Pledgor: Yalian Science and Technology Co., Ltd., Sichuan Registration number: 2011990000088 |
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Owner name: SICHUAN TIANCAI TECHNOLOGY CO., LTD. Free format text: FORMER NAME: YALIAN SCIENCE AND TECHNOLOGY CO., LTD., SICHUAN |
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Address after: 610065 science and Technology Park, Sichuan University, 24 south section of first ring road, Sichuan, Chengdu 515 Patentee after: Sichuan Tiancai Technology Co., Ltd. Address before: 610065 science and Technology Park, Sichuan University, 24 south section of first ring road, Sichuan, Chengdu 515 Patentee before: Yalian Science and Technology Co., Ltd., Sichuan |
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