CN101298987A - Robustness tuning fork vibrating type micromechanical gyroscope - Google Patents
Robustness tuning fork vibrating type micromechanical gyroscope Download PDFInfo
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- CN101298987A CN101298987A CNA2008100389052A CN200810038905A CN101298987A CN 101298987 A CN101298987 A CN 101298987A CN A2008100389052 A CNA2008100389052 A CN A2008100389052A CN 200810038905 A CN200810038905 A CN 200810038905A CN 101298987 A CN101298987 A CN 101298987A
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Abstract
A haleness type tuning fork vibration type microcomputer top, includes a first baseplate and two groups of symmetrical bar shape fixing electrodes for measurement, four anchor points fixed on the first baseplate, a second baseplate suspended above the first baseplate. the second baseplate includes a left structure and a right structure and a middle structure connected therebetween, wherein the left structure includes a detection quality block vibrating along the detection direction (the y direction), four detection elastic beams between the detection quality block and the driving quality block, a driving quality block vibrating along the driving direction (the X direction) vertical to the detection direction and four driving elastic beams connected with the driving quality block. The middle structure includes two coupled quality block sconnected with the driving elastic blocks, a middle coupled elastic beams connected with the middle coupled quality block. The top has no need to be packed in the vacuum with higher sensitivity and bandwidth, better capacity of resisting disturbance, which is not sensitive to the environment and the machine error with better haleness.
Description
Technical field
The invention belongs to the microelectromechanical systems field, relate to a kind of robustness tuning fork vibrating type micromechanical gyroscope, particularly relate to a kind of left and right structure and connect indirectly, drive and detect the tuning fork vibrating type micromechanical gyroscope that is slide-film damping.
Background technology
Micromechanical gyro is to utilize coriolis effect to detect a kind of micro-inertia sensor of article for rotation angular velocity.Adopt the micromechanical gyro of microelectron-mechanical process technology preparation low because of its cost, volume is little, light weight, low in energy consumption, structure and technology is simple and characteristics such as suitable volume production, is widely used in fields such as Aero-Space, military affairs, automobile, consumption electronic product.Initial micromechanical gyro proposed in 1993, and a mass and an elastic beam are only arranged.Along with the development of silicon micromachining technology, a series of advanced persons' such as surperficial little processing, the little processing of body micro-processing technology has appearred, and make the development of micromechanical gyro stride forward a brand-new developing stage, various micromechanical gyros occur in succession.The tuning fork vibrating type gyro has higher sensitivity and bandwidth, better anti-jamming capability by numerous scholar's research because of it.
For micromechanical gyro, no matter type of drive is selected static driven or Electromagnetic Drive, detection mode selects pressure drag to detect or capacitance detecting, what still encapsulation was chosen is Vacuum Package or atmospheric pressure encapsulation down, be target all with the performance that improves device, yet, the present most precision of micromechanical gyro product is lower and to environmental interference and mismachining tolerance sensitivity, be mainly used in the not high low and middle-end field of accuracy requirement, the present invention efforts be made so that micromechanical gyro keeps high precision can also be applied to than wide spectrum simultaneously, introduce the thinking of product robustness design, in the design phase, structure reasonable in design, the uncertain variation that causes with mismachining tolerance that makes that the performance of micromechanical gyro causes various environmental factors has very strong antijamming capability, thereby improves the reliability and the stability of micromechanical gyro.
Summary of the invention
The object of the present invention is to provide a kind of robustness tuning fork vibrating type micromechanical gyroscope design proposal, and the structure that adapts with it.
For achieving the above object, the present invention proposes following technical solution: a kind of robustness tuning fork vibrating type micromechanical gyroscope, by first substrate and on two groups of symmetries detect with grid shape fixed electorde, be fixed in four anchor points on first substrate, second substrate that is suspended from above first substrate forms; Second substrate is made up of left and right structure and the intermediate structure that connects left and right structure.Left side structure comprise can along the detection side to of (y to) vibration detect mass, detect mass with drive between the mass four detect elastic beams, can along perpendicular to the detection side to of driving direction (x to) vibration drive mass, with drive four driving elastic beams that mass links to each other.Right structure is identical with left structure and symmetrical.Intermediate structure comprises coupling mass pieces in the middle of two that link to each other with the driving elastic beam, passes through the middle coupling elastic beam that four anchor points link to each other with middle coupling mass piece.
Described robustness tuning fork vibrating type micromechanical gyroscope, each detects mass and all is connected with the driving mass by four detection elastic beams, each driving mass drives elastic beams by four and is connected with the intermediate mass piece, and coupling mass piece is anchored together by two the middle elastic beams and first substrate in the middle of each.
Described robustness tuning fork vibrating type micromechanical gyroscope, described driving mass is made up of with the frame that is connected movable bar shaped drive electrode movable bar shaped drive electrode.
Described robustness tuning fork vibrating type micromechanical gyroscope, but described detection mass form with the frame that is connected grid shape detecting electrode by moving grid shape detecting electrode, simultaneously, the thickness of grid shape detecting electrode equals the thickness of described driving mass.
Evenly be covered with damping hole on each middle coupling mass piece that described robustness tuning fork vibrating type micromechanical gyroscope, intermediate structure comprise.
Described robustness tuning fork vibrating type micromechanical gyroscope, detect elastic beam, driving elastic beam and middle elastic beam and all adopt " three sections beams " structure, so-called " three sections beams " structure, finger is made of two sections first section parallel beams, second section beam and angled with it the 3rd section continuous beam, and these three sections beams have identical width and thickness.
Described robustness tuning fork vibrating type micromechanical gyroscope, but the detection on first substrate is corresponding one by one with each grid electrode of the moving grid shape detecting electrode on grid shapes fixed electorde and second substrate;
Described robustness tuning fork vibrating type micromechanical gyroscope, the gap between the detection usefulness grid shape fixed electorde upper surface on first substrate and the grid shape detecting electrode lower surface of second substrate is less than the grill width of grid shape detecting electrode.
Described robustness tuning fork vibrating type micromechanical gyroscope is a slide-film damping between first substrate and second substrate.
Described robustness tuning fork vibrating type micromechanical gyroscope, first substrate are Pyrex 7740 glass substrates, and second substrate is the conduction monocrystalline silicon piece.
The present invention is owing to take above technical scheme, and it has the following advantages:
1. second substrate moves along the direction parallel with first substrate during owing to gyro work, the damping that plays a major role between the grid electrode of detection mass and the fixed electorde on first substrate is a slide-film damping, thereby effectively reduces the air damping that drives and detect mode;
2. owing to effectively reduce air damping, gyro can obtain higher quality factor (Q value) under atmospheric environment, the sensitivity that can effectively improve device, and the needing no vacuum encapsulation gets final product work, has reduced the processing cost of device;
3. the employing of intermediate structure connects left and right structure indirectly, has reduced left and right structure and has directly influenced each other, and has eliminated coupled mode to detecting the interference of mode, and simultaneously, intermediate structure is insensitive for mismachining tolerance, the robustness of the system of raising
4. because intermediate structure has the insensitive characteristic of mismachining tolerance,, improve the stability of little gyrosystem so can adopt damping hole on the intermediate mass piece.
5. all elastic beams adopt " three sections beams " structures, increased driving and detection side to ratio of rigidity, effectively suppressed to drive and detect the coupling of mode.
Description of drawings
Fig. 1 be the embodiment of the invention first substrate and on detection with grid shapes fixed electorde synoptic diagram
Fig. 2 be the embodiment of the invention second substrate and on detection with grid shapes movable electrode synoptic diagram.
Fig. 3 is the local structure for amplifying synoptic diagram of coupling mass piece in the middle of the embodiment of the invention.
Fig. 4 is the elastic beam synoptic diagram of embodiment of the invention sonic type micro mechanical scopperil.
Embodiment
Below in conjunction with accompanying drawing robustness tuning fork vibrating type micromechanical gyroscope of the present invention is further described.
As shown in Figure 1, be formed with two groups of symmetries on first substrate 1 and detect with grid shape fixed electorde 2, the both sides anchor point 3 that links to each other with second substrate 4 is fixed on first substrate 1.
As shown in Figure 2, second substrate 2 that is suspended from first substrate, 1 top is made up of left and right structure and the intermediate structure that connects left and right structure.Left side structure 5 comprise can along the detection side to of (y to) vibration detect mass 6, detect mass with drive between the mass four detect elastic beams 7, can along perpendicular to the detection side to of driving direction (x to) vibration drive mass 8, with drive four driving elastic beams 9 that mass links to each other; The driving mass of left side structure comprises movable bar shaped drive electrode 14 and the frame that is connected movable bar shaped drive electrode; But the detection mass of left side structure comprises moving grid shape detecting electrode 15 and the frame that is connected grid shape detecting electrode; But the thickness that detects on first substrate with grid shape fixed electorde 2 and moving grid shape detecting electrode 14 is equal to the thickness that drives mass 8, and, be 3 microns but detect with the gap between grid shape fixed electorde 2 and the moving grid shape detecting electrode 15.Right structure 10 is identical with left structure and symmetrical.Intermediate structure 11 comprises coupling mass pieces 12 in the middle of two that link to each other with the driving elastic beam, passes through the middle coupling elastic beam 13 that four anchor points link to each other with middle coupling mass piece, and middle coupling mass piece comprises some damping holes 16.
The sonic type micro mechanical scopperil that relates to for the invention described above, adopt Electromagnetic Drive, capacitance detecting and atmospheric pressure encapsulation, specifically, in movable bar shaped drive electrode, apply the alternation drive current of certain frequency, this exchange current is driving two groups of driving masses down and is doing anti-phase harmonic moving along X-direction perpendicular to the externally-applied magnetic field on micromechanical gyro surface (Z to) effect, when the angular velocity around Z-direction puts on system, Y direction produce Ke Shi (Coriolis) acceleration can make two detect masses along perpendicular to the detection side of driving direction to doing anti-phase motion, thereby but causing to detect on the moving grid shape detecting electrode and first substrate changes with respect to initial overlapping area with grid shape fixed electorde overlapping area, thereby cause capacitance variations, because angular velocity and detection capacitance variations proportion relation.Therefore, detect capacitance variations, just can record the angular velocity size by measuring.Because the driving of this gyro and detect motion all in plane, the second substrate place and what play a major role between first substrate and second substrate is slide-film damping, and slide-film damping is more much smaller than press mold damping, so this micromechanical gyro encapsulates under atmospheric environment and can obtain bigger quality factor.
In addition, outstanding feature of this micromechanical gyro is to adopt the syndeton of intermediate structure as the left and right structure of tuning fork vibrating type gyro, and the benefit of doing like this is:
1. reduced left and right sides structure and directly influenced each other, eliminated coupled mode to detecting the interference of mode, simultaneously, intermediate structure is insensitive for mismachining tolerance, the robustness of the system of raising
2. because intermediate structure has the insensitive characteristic of mismachining tolerance,, improve the stability of little gyrosystem so can adopt damping hole (Fig. 3) on the intermediate mass piece,
3. all elastic beams adopt " three sections beams " structure (as shown in Figure 4), promptly by two sections first section parallel beams 17, second section beam 18 and angled with it (scope of angle can be 60 °～85 °, for example get 80 °) continuous the 3rd section beam 19 formations, these three sections beams have identical width and thickness." three sections beams " structure increased driving and detection side to ratio of rigidity, effective reversing of limit structural guaranteed the stability exported and the long-term reliability of structure, effectively suppressed to drive and detect the coupling of mode.
This gyro adopts micro-electronic mechanical system technique to make, the needing no vacuum encapsulation, and have higher sensitivity and bandwidth, better anti-jamming capability; Insensitive to environment and mismachining tolerance, have robustness preferably.
The above-mentioned description to embodiment is can understand and apply the invention for ease of those skilled in the art.The person skilled in the art obviously can easily make various modifications to these embodiment, and needn't pass through performing creative labour being applied in the General Principle of this explanation among other embodiment.Therefore, the invention is not restricted to the embodiment here, those skilled in the art should be within protection scope of the present invention for improvement and modification that the present invention makes according to announcement of the present invention.
Claims (10)
1. robustness tuning fork vibrating type micromechanical gyroscope is characterized in that: comprising:
(a) first substrate (1) and on two groups of symmetries detect with grid shape fixed electorde (2), be fixed in four anchor points (3) on first substrate, be suspended from second substrate (4) above first substrate;
(b) second substrate comprises left and right structure and the intermediate structure that connects left and right structure, left structure (5) comprise can along the detection side to of vibration detect mass (6), detect mass with drive between the mass four detect elastic beams (7), can along perpendicular to the detection side to of driving direction vibration drive mass (8), with drive four driving elastic beams (9) that mass links to each other; Right structure (10) is identical with left structure and symmetrical; Intermediate structure (11) comprises coupling mass pieces (12) in the middle of two that link to each other with the driving elastic beam, passes through the middle coupling elastic beam (13) that four anchor points link to each other with middle coupling mass piece.
2. robustness tuning fork vibrating type micromechanical gyroscope according to claim 1, it is characterized in that: each detects mass and all is connected with the driving mass by four detection elastic beams, each driving mass drives elastic beams by four and is connected with the intermediate mass piece, and coupling mass piece is anchored together by two the middle elastic beams and first substrate in the middle of each.
3. robustness tuning fork vibrating type micromechanical gyroscope according to claim 1 is characterized in that: described driving mass is made up of with the frame that is connected movable bar shaped drive electrode movable bar shaped drive electrode (14).
4. robustness tuning fork vibrating type micromechanical gyroscope according to claim 1, it is characterized in that: but described detection mass is made up of with the frame that is connected grid shape detecting electrode moving grid shape detecting electrode (15), simultaneously, the thickness of grid shape detecting electrode equals the thickness of described driving mass.
5. robustness tuning fork vibrating type micromechanical gyroscope according to claim 1 is characterized in that: evenly be covered with damping hole (16) on each middle coupling mass piece that described intermediate structure comprises.
6. robustness tuning fork vibrating type micromechanical gyroscope according to claim 1 is characterized in that: detection elastic beam, driving elastic beam all adopt " three sections beams " structure with middle elastic beam: be made of two sections first section parallel beams, second section beam and angled with it the 3rd section beam that links to each other.
7. robustness tuning fork vibrating type micromechanical gyroscope according to claim 4 is characterized in that: but the detection on first substrate is corresponding one by one with each grid electrode of the moving grid shape detecting electrode on grid shapes fixed electorde and second substrate.
8. robustness tuning fork vibrating type micromechanical gyroscope according to claim 4 is characterized in that: the gap between the detection usefulness grid shape fixed electorde upper surface on first substrate and the grid shape detecting electrode lower surface of second substrate is less than the grill width of grid shape detecting electrode.
9. robustness tuning fork vibrating type micromechanical gyroscope according to claim 1 is characterized in that: be slide-film damping between first substrate and second substrate.
10. robustness tuning fork vibrating type micromechanical gyroscope according to claim 1 is characterized in that: first substrate is Pyrex 7740 glass substrates, and second substrate is the conduction monocrystalline silicon piece.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106153026A (en) * | 2015-03-30 | 2016-11-23 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope |
| CN110926444A (en) * | 2019-12-19 | 2020-03-27 | 北京航天控制仪器研究所 | Vibration non-sensitive silicon micro-electromechanical gyroscope |
| CN111551161A (en) * | 2020-06-28 | 2020-08-18 | 江苏睦荷科技有限公司 | MEMS vibrating gyroscope structure and manufacturing method thereof |
| CN113847909A (en) * | 2021-11-26 | 2021-12-28 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope |
| CN114543780A (en) * | 2020-11-24 | 2022-05-27 | 北京晨晶电子有限公司 | Angular velocity measuring structure |
| CN115507831A (en) * | 2022-10-24 | 2022-12-23 | 准懋(杭州)科技有限公司 | Micro-electromechanical gyroscope |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102506843B (en) * | 2011-11-09 | 2014-08-13 | 上海工程技术大学 | Indirectly-connected micromechanical gyroscope with tuning fork vibration |
Family Cites Families (3)
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| CN1238694C (en) * | 2003-07-10 | 2006-01-25 | 上海交通大学 | Magnetic suspension rotor azimuth microgyro |
| CN100480629C (en) * | 2005-10-24 | 2009-04-22 | 西北工业大学 | Capacitive micro machinery gyroscope |
| CN1766528B (en) * | 2005-11-11 | 2010-09-15 | 中北大学 | Differential micro-mechanical gyro with higher sensitivity and band width |
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- 2008-06-13 CN CN2008100389052A patent/CN101298987B/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106153026A (en) * | 2015-03-30 | 2016-11-23 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope |
| CN106153026B (en) * | 2015-03-30 | 2019-09-17 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope |
| CN110926444A (en) * | 2019-12-19 | 2020-03-27 | 北京航天控制仪器研究所 | Vibration non-sensitive silicon micro-electromechanical gyroscope |
| CN110926444B (en) * | 2019-12-19 | 2021-12-07 | 北京航天控制仪器研究所 | Vibration non-sensitive silicon micro-electromechanical gyroscope |
| CN111551161A (en) * | 2020-06-28 | 2020-08-18 | 江苏睦荷科技有限公司 | MEMS vibrating gyroscope structure and manufacturing method thereof |
| CN114543780A (en) * | 2020-11-24 | 2022-05-27 | 北京晨晶电子有限公司 | Angular velocity measuring structure |
| CN114543780B (en) * | 2020-11-24 | 2023-04-07 | 北京晨晶电子有限公司 | Angular velocity measuring structure |
| CN113847909A (en) * | 2021-11-26 | 2021-12-28 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope |
| CN115507831A (en) * | 2022-10-24 | 2022-12-23 | 准懋(杭州)科技有限公司 | Micro-electromechanical gyroscope |
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