CN102662074A - Framework type vibration angular rate sensor and measurement system using swinging mass block - Google Patents
Framework type vibration angular rate sensor and measurement system using swinging mass block Download PDFInfo
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- CN102662074A CN102662074A CN2012101842544A CN201210184254A CN102662074A CN 102662074 A CN102662074 A CN 102662074A CN 2012101842544 A CN2012101842544 A CN 2012101842544A CN 201210184254 A CN201210184254 A CN 201210184254A CN 102662074 A CN102662074 A CN 102662074A
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Abstract
The invention discloses a framework type vibration angular rate sensor using a swinging mass block, comprising four cantilever thin sheet vibration beams, which are mutually connected through the swinging mass block. The four cantilever beams are divided into two orthometric pairs, and respectively are a driving arm group and a sensitive arm group of the vibration angular rate sensor; an entire vibration system is fixedly connected with an outer framework, and is fixed with a package shell through the outer framework; driving arms generate bending vibration generated under external excitation, so as to cause the mass block to swing; sensitive arms are driven to do twisting vibration through the swinging of the mass block; when an external input rotation angular speed omega exists around a Z shaft, a Coriolis force is generated by swinging the side face of the mass block, so that the sensitive arms generate the bending vibration, and the driving arms are driven to do twisting vibration through the mass block; and the bending vibration of the sensitive arms and the twisting vibration of the driving arms can be detected, so that the external input rotation angular speed omega is measured. Therefore, the functions of the angular rate sensor is realized, so that the traditional single-vibration beam type angular rate sensor has an angular rate measurement error, caused by inter-axial interference and sensitive matrix movement.
Description
Technical field
The present invention relates to a kind of angular rate sensor, particularly a kind of frame-type angle of throw rate sensor that adopts the wobble quality piece also relates to the measuring system of using this kind angle of throw rate sensor simultaneously.
Background technology
The angle of throw rate sensor is based on the inertial sensor of a kind of measured angular speed that brother's formula vibration principle develops.In recent years, along with the development of micromachining technology, the micro mechanical vibration angular rate sensor demonstrates huge advantage because of characteristics such as its unique low power consumption, small size, low costs in national defence and consumer electronics field.It is widely used in automotive electronics (like the anti-system, anti-skidding control and electronic stability control etc. of sidewindering), consumer electronics (, panel computer stable like camera and virtual controlling etc.), attitude is controlled industrial automation aspects such as (like robot application and model aircraft applications); In addition in military fields such as navigation, Aero-Space also extensive application.
Traditional angular rate sensor based on the vibration of brother's formula; Oscillating mode angular rate sensors such as its design type such as tuning-fork-type, cantilever beam type, wheeled type, interdigitated electrode structure, semi-girder end mass piece type, little solid type and two cantilever free beam types, the beam type that wherein singly shakes angle of throw rate sensor is used more.Along with the development of MEMS technology, the beam angular rate sensor that shakes comprises that the tuning fork angular rate sensor has obtained using widely, but is based on structural drawback, still has the between centers coupled interference that is difficult to overcome, and on angle speed is measured, tangible measuring error occurs; In addition, when there was tangible acceleration movement in matrix, its beam angular rate sensor acceleration sensitive to external world that singly shakes produced the angular velocity measurement error equally, has reduced measuring accuracy, has limited the applied environment and the field of this type of angular rate sensor.
Summary of the invention
In view of this; One of the object of the invention provides a kind of frame-type angle of throw rate sensor that adopts the wobble quality piece, and it effectively solves the angular rate measurement error that traditional beam vibration type angular rate sensor between centers that singly shakes disturbs and the matrix motion sensitive is caused; Improve and improved the measuring accuracy and the sensitivity of angle of throw rate sensor, expanded the applied environment and the field of angle of throw rate sensor; Two of the object of the invention has provided a kind of measuring system.
One of the object of the invention is realized through following technical scheme:
Adopt the frame-type angle of throw rate sensor of wobble quality piece; Comprise external frame structure, wobble quality piece, actuating arm I, actuating arm II, responsive arm I and responsive arm II; Said actuating arm I actuating arm II's is measure-alike; Responsive arm I and responsive arm II's is measure-alike, all adopts the thin type sheet structure;
The end of said actuating arm I, actuating arm II, responsive arm I and responsive arm II be connected to the wobble quality piece around; With the wobble quality piece is that cross structure is formed at the center; Wherein, Actuating arm I and actuating arm II are oppositely arranged, and responsive arm I and responsive arm II are oppositely arranged, and constitute vibrational system jointly;
The other end of said actuating arm I, actuating arm II, responsive arm I and responsive arm II is connected to the inside casing face of external frame structure, makes the unsettled inside that is arranged at the external frame structure of a whole set of vibrational system;
Under extraneous incentive action, actuating arm I, II will produce vibration, drive the wobble quality piece simultaneously and swing at driving direction, make responsive arm I, II produce twisting vibration; When existing extraneous angular speed to import Ω along the Z axle; Produce Ge Shili in wobble quality piece sensitive direction side; The wobble quality piece will be created in the swing on the sensitive direction, drive responsive arm I, II produces flexural vibrations, and detect the correlation parameter that obtains these flexural vibrations by extraneous detection system.
Further, said external frame structure is square framework, and said actuating arm I, actuating arm II, responsive arm I and responsive arm II are connected in the center of each frame body medial surface on its corresponding respectively external frame structure;
Further, said wobble quality piece is square or rectangular structure;
Further, said actuating arm I, actuating arm II, responsive arm I and responsive arm II are thin slice square-section girder construction or cylindrical girder construction;
Further, the fixed position of said actuating arm I, actuating arm II, responsive arm I and responsive arm II and wobble quality piece is positioned on the lateral symmetry axle of side around it;
Further, when cross section that the wobble quality piece is parallel to actuating arm and responsive arm during for square, the length of actuating arm and responsive arm according to the resonance frequency of system at interval or bandwidth of operation decide; When the cross section that the wobble quality piece is parallel to actuating arm and responsive arm was the square-section, actuating arm and responsive arm were taked the same size design;
Further, said wobble quality piece, external frame structure, actuating arm I, actuating arm II, responsive arm I, responsive arm II adopt micro-processing technology and same material to make;
Further, material therefor comprises alloy, quartz, polysilicon and silicon dioxide.
Two of the object of the invention is realized through following technical scheme:
Adopt the measuring system of frame-type angle of throw rate sensor as stated.
The invention has the beneficial effects as follows:
1. the present invention adopts the actuating arm group to be connected with the right-angled intersection mode of responsive arm group angle 90 degree and through the oscillating mass piece; The employing of four semi-girders is converted into the flexural vibrations and the twisting vibration of semi-girder with the swing of wobble quality piece, and the quadrature connected mode effectively reduces the between centers that tradition singly shakes between the beam vibration face and disturbs, and has improved the measured angular velocity accuracy;
2. actuating arm group of the present invention and responsive arm group and outside framework is connected and outside framework is overlooked and is cuboid, in addition frame fixation the orthogonality of actuating arm and responsive arm, the vibration coupling that has effectively limited between actuating arm and the responsive arm is disturbed;
3. the present invention adopts the rectangular parallelepiped thin slice actuating arm beam and the responsive arm beam of square-section, has effectively limited the swaying direction of wobble quality, makes mass only remarkable in the swing of pairwise orthogonal direction, has eliminated the coupled vibrations of mass on the pairwise orthogonal direction;
4. actuating arm group of the present invention, responsive arm group, mass and outside framework composition are overlooked the center about mass and are symmetrical structure; Actuating arm group and responsive arm group one end and outside framework are fixed simultaneously; The other end and mass are connected; Its symmetry structure has effectively been eliminated the susceptibility to the matrix acceleration, has improved the angular velocity measurement precision;
5. the present invention adopts the actuating arm group to be connected through the oscillating mass piece with responsive arm group, has effectively improved the stability of vibration of semi-girder, makes the mode of vibration of vibrational system more stable;
6. the wobble quality piece that adopt actuating arm group of the present invention and responsive arm group junction is rectangular parallelepiped or square, makes it when extraneous input angular velocity, produce symmetrical taxi driver brother's formula power on the two sides, for the bending of responsive arm provides desirable vibratory drive power; Effectively restriction actuating arm and responsive arm vibration mode are flexural vibrations or twisting vibration simultaneously, and its responsive arm Oscillation Amplitude is relevant with extraneous input angle speed with torsional amplitude.
Entire system of the present invention is fixed through outside framework and extraneous packaging body, has effectively reduced the influence that the vibration performance of the vibrational system that extraneous encapsulation forms actuating arm, responsive arm and mass produces.
Other advantages of the present invention, target and characteristic will be set forth in instructions subsequently to a certain extent; And to a certain extent; Based on being conspicuous to those skilled in the art, perhaps can from practice of the present invention, obtain instruction to investigating of hereinafter.Target of the present invention and other advantages can realize and obtain through following instructions.
Description of drawings
In order to make the object of the invention, technical scheme and advantage clearer, will combine accompanying drawing that the present invention is made further detailed description below, wherein:
Fig. 1 adopts the frame-type angle of throw rate sensor side plan structure figure of wobble quality piece;
Fig. 2 adopts the frame-type angle of throw rate sensor actuating arm working state figure of wobble quality piece;
Fig. 3 adopts the extraneous input angular velocity figure of the frame-type angle of throw rate sensor of wobble quality piece;
Fig. 4 adopts the responsive arm working state figure of the frame-type angle of throw rate sensor of wobble quality piece;
Fig. 5 adopts the frame-type angle of throw rate sensor working state figure of wobble quality piece;
Fig. 6 adopts the frame-type angle of throw rate sensor wiring layout of wobble quality piece.
Embodiment
Below will carry out detailed description to the preferred embodiments of the present invention with reference to accompanying drawing.Should be appreciated that preferred embodiment has been merely explanation the present invention, rather than in order to limit protection scope of the present invention.
As shown in Figure 1; The present invention adopts the frame-type angle of throw rate sensor of wobble quality piece to comprise external frame structure 101, wobble quality piece 401, actuating arm I 201, actuating arm II 202; Responsive arm I 301 and responsive arm II 302; Actuating arm I 201 actuating arm II's 202 is measure-alike, and responsive arm I 301 and responsive arm II's 302 is measure-alike, all adopts the thin type sheet structure; The end of actuating arm I 201, actuating arm II 202, responsive arm I 301 and responsive arm II 302 be connected to wobble quality piece 401 around; With the wobble quality piece is that cross structure is formed at the center; Wherein, Actuating arm I 201 and actuating arm II 202 are oppositely arranged, and responsive arm I 301 is oppositely arranged with responsive arm II 302, constitutes vibrational system jointly; The other end of actuating arm I 201, actuating arm II 202, responsive arm I 301 and responsive arm II 302 is connected to the inside casing face of external frame structure 101, makes the unsettled inside that is arranged at external frame structure 101 of a whole set of vibrational system;
In the present embodiment; External frame structure 101 is square framework; Actuating arm I201, actuating arm II202, responsive arm I301 and responsive arm II302 are connected in the center of each frame body medial surface on its corresponding respectively external frame structure 101; Wobble quality piece 401 is a rectangular structure; Actuating arm I 201, actuating arm II 202, responsive arm I 301 and responsive arm II 302 are the square sheet structure, and the fixed position of actuating arm I 201, actuating arm II 202, responsive arm I 301 and responsive arm II 302 and wobble quality piece is positioned on the lateral symmetry axle of side around it.
In the present embodiment, two actuating arms of the present invention are set to thin slice measure-alike, the square-section the beam that shakes, and this helps in suitable driving excitation down, the vibration mode that the generation of actuating arm beam is required; Two responsive arms are thin slice measure-alike, the square-section the beam that shakes, and this helps responsive thin arm beam and under the effect of Ge Shili, produces the suitable bending shape of shaking, and this bending shape of shaking is detected by external detection system; Actuating arm is identical with responsive arm sheet thickness, and is positioned on the same cross section of mass with the dead center of mass, this help reducing actuating arm group and responsive arm group to the mass oscillatory can influence; Actuating arm of the present invention is identical with responsive arm sheet thickness, and an end is fixed in the center of outside framework medial surface, and this symmetrical structure is more conducive to actuating arm and responsive arm produces the required shape of shaking, and also for mass oscillation space is provided.Certainly, actuating arm and responsive arm can also adopt cylindrical girder construction, or other can realize the girder construction of testing goal.
In the present embodiment, be square because wobble quality piece 401 is parallel to the cross section of actuating arm and responsive arm, the length of actuating arm and responsive arm is decided according to the resonance frequency of system at interval.
As further improvement; Said wobble quality piece 401, external frame structure 101, actuating arm I201, actuating arm II202, responsive arm I301, responsive arm II302 adopt micro-processing technology and same material to make, and material therefor comprises alloy, quartz, polysilicon and silicon dioxide etc.
Principle of work of the present invention is following:
In conjunction with accompanying drawing 2; In conjunction with corresponding four coordinate systems, under dynamic excitation, when actuating arm is in basic mode resonance duty; Actuating arm I 201 around the y1 axle x1 axially on; In flexural vibrations, simultaneously actuating arm II 202 is crooked with the vibration frequency of Ω 3=Ω 1 on axially at x3 around y3 with angular velocity Ω 1, and the flexural vibrations of actuating arm will drive wobble quality piece 401 and on x1 and x3 are axial, do periodic oscillations; Because responsive arm is connected with wobble quality piece 401, under the mass of swing drives, responsive arm I 301 will be that Ω 2 produces twisting vibration with the frequency around the x2 axle, and responsive arm II 302 produces twisting vibration around the x4 axle with frequency omega 4 simultaneously.
In conjunction with accompanying drawing 3; When there is external world's input angular velocity of rotation Ω in the frame-type angle of throw rate sensor 100-5 of wobble quality piece around the z direction; Because the swing that wobble quality piece 401 produces under the actuating arm flexural vibrations; To produce Ge Shili this moment on the x2 of mass and x4 direction, thereby cause the swing of wobble quality piece 401 on x2 and x4 direction.
In conjunction with accompanying drawing 4, only consider that the basic mode of responsive arm group reaches resonance under the effect of brother's formula power.Responsive arm I 301 axially produces at x2 around y2
ω2 flexural vibrations, responsive arm II 302 axially produces at x4 around y4 and with frequency does simultaneously
ω4 flexural vibrations; In addition, the actuating arm I 201 that connects through mass produces around x1 and with frequency does
ω1 twisting vibration, actuating arm II 202 produces around x1 and with frequency does
ω3 twisting vibrations.The resonance flexural vibrations take place in responsive arm I, II under the effect of brother's formula power; Actuating arm I, II produce twisting vibration equally together; And this crooked amplitude and torsional amplitude are all relevant with extraneous input angular velocity of rotation Ω; Through the detection of crooked amplitude of outer bound pair and torsional amplitude, thereby reach the detection of input angular velocity Ω to external world, realized the measurement function of angular rate sensor angular speed.
Accompanying drawing 5 has provided the synthetic operation constitutional diagram of the frame-type angle of throw rate sensor 100-7 of wobble quality piece, promptly when extraneous input angular velocity is Ω, and the frame-type angle of throw rate sensor 100-4 of wobble quality piece, the resultant vibration figure of 100-6.
Assembling process of the present invention is following:
As shown in Figure 6; Adopt the frame-type angle of throw rate sensor assembly structure (100-8) of wobble quality piece; Wherein wobble quality piece 401 is designed to the rectangular parallelepiped or the square of square-section or square sectional, decides according to the frequency and the frequency interval of concrete system requirements; Wobble quality piece 401 helps the stable of semi-girder (201,202,301,302) vibration shape, and is in free state on wobble quality block length [L401] direction.Actuating arm I, II and responsive arm I, II and wobble quality piece 401 are connected each other; The length of actuating arm [L201/L202], width [W201/W202] is identical respectively with thickness [H201/H202] size, and thickness [H201/H202] size is much smaller than width [W201/W202] and length [L201/L202] size; The end thickness [0.5 * H201] of its actuating arm I 201, actuating arm II 202 and the center of width [0.5 * W301] and the center [0.5 * L401] on mass 401 length directions are mutually permanently connected; The inboard center [0.5 * H101-1/0.5 * L101-1] of the center of other end thickness [0.5 * H201] and external frame structure frame [101-1] is connected fixing; Its actuating arm II 202 takes to be connected fixing with wobble quality piece 401 and outside framework limit [101-3] with actuating arm I 201 the same symmetric modes.The length [L301/L302] of responsive arm I, II, width [W301/W302] is identical respectively with thickness [H301/H302] size, and the size of thickness [H301/H302] is much smaller than the size of width [W301/W302] and length [L301/L302]; The center of the end of its responsive arm II and thickness [0.5 * H302] and width [0.5 * W302] and the center [0.5 * L401] on wobble quality piece 401 length directions are mutually permanently connected; The inboard center [0.5 * H101-2/0.5 * L101-2] of the center of other end thickness [0.5 * H302] and outside framework frame [101-2] is connected fixing; Its responsive arm I 301 takes to be connected fixing with wobble quality piece 401 and outside framework [101-3] with responsive arm II 302 the same symmetric modes.Thickness [H301/H302] size of the thickness [H201/H202] of work in-process actuating arm I, II and responsive arm can be taked identical, symmetry processing; The width [W301/W302] of wide [W201/W202] of actuating arm and responsive arm is decided according to the width [W401] of wobble quality piece 401 and the size of thickness [H401].The mid-depth of actuating arm and responsive arm is on the plane of [0.5 * L401], and the angle of its two arms group becomes 90 degree, i.e. perpendicular quadrature installation.Outer rim [101-1,101-2,101-3,101-4], [W101-1, W101-2, W101-3, W101-4] is all identical for its width, adopts symmetrical structure; Its thickness [H101-1, H101-2, H101-3, H101-4] all can be taked identical dimensioned.Outside framework [101-1,101-2,101-3, the 101-4] outside is fixed with the outer enclosure body and outside framework 101 adopts the cuboid structure.In addition, packaging body will provide the required swing of wobble quality piece space on the direction of the length [L401] of wobble quality piece.
In addition, the application of this angle of throw rate sensor is extensive, and the measuring system that adopts frame-type angle of throw rate sensor of the present invention is also within protection scope of the present invention.
Explanation is at last; Above embodiment is only unrestricted in order to technical scheme of the present invention to be described; Although with reference to preferred embodiment the present invention is specified, those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement technical scheme of the present invention; And not breaking away from the aim and the scope of present technique scheme, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (9)
1. adopt the frame-type angle of throw rate sensor of wobble quality piece; It is characterized in that: said angle of throw rate sensor comprises external frame structure (101), wobble quality piece (401), actuating arm I (201), actuating arm II (202), responsive arm I (301) and responsive arm II (302); Said actuating arm I (201) actuating arm II's (202) is measure-alike; Responsive arm I (301) and responsive arm II's (302) is measure-alike, all adopts the thin type sheet structure;
The end of said actuating arm I (201), actuating arm II (202), responsive arm I (301) and responsive arm II (302) be connected to wobble quality piece (401) around; With the wobble quality piece is that cross structure is formed at the center; Wherein, Actuating arm I (201) and actuating arm II (202) are oppositely arranged, and responsive arm I (301) and responsive arm II (302) are oppositely arranged, and constitute vibrational system jointly;
The other end of said actuating arm I (201), actuating arm II (202), responsive arm I (301) and responsive arm II (302) is connected to the inside casing face of external frame structure (101), makes the unsettled inside that is arranged at external frame structure (101) of a whole set of vibrational system;
Under extraneous incentive action, actuating arm I, II will produce vibration, drive wobble quality piece (401) simultaneously and swing at driving direction, make responsive arm I, II produce twisting vibration; When existing extraneous angular speed to import Ω along the Z axle; Produce Ge Shili in wobble quality piece (401) sensitive direction side; Wobble quality piece (401) will be created in the swing on the sensitive direction; Drive responsive arm I, II produces flexural vibrations, and detects the correlation parameter that obtains these flexural vibrations by extraneous detection system.
2. the frame-type angle of throw rate sensor of employing wobble quality piece according to claim 1; It is characterized in that: said external frame structure (101) is square framework, and said actuating arm I (201), actuating arm II (202), responsive arm I (301) and responsive arm II (302) are connected in the center that its corresponding respectively external frame structure (101) goes up each frame body medial surface.
3. the frame-type angle of throw rate sensor of employing wobble quality piece according to claim 1 is characterized in that: said wobble quality piece (401) is square or rectangular structure.
4. according to the frame-type angle of throw rate sensor of claim 1 or 2 or 3 described employing wobble quality pieces, it is characterized in that: said actuating arm I (201), actuating arm II (202), responsive arm I (301) and responsive arm II (302) are thin slice square-section girder construction or cylindrical girder construction.
5. the frame-type angle of throw rate sensor of employing wobble quality piece according to claim 4 is characterized in that: the fixed position of said actuating arm I (201), actuating arm II (202), responsive arm I (301) and responsive arm II (302) and wobble quality piece is positioned on the lateral symmetry axle of side around it.
6. the frame-type angle of throw rate sensor of employing wobble quality piece according to claim 5; It is characterized in that: when cross section that wobble quality piece (401) is parallel to actuating arm and responsive arm during for square, the length of actuating arm and responsive arm according to the resonance frequency of system at interval or bandwidth of operation decide; When the cross section that wobble quality piece (401) is parallel to actuating arm and responsive arm was the square-section, actuating arm and responsive arm were taked the same size design.
7. the frame-type angle of throw rate sensor of employing wobble quality piece according to claim 1 is characterized in that: said wobble quality piece (401), external frame structure (101), actuating arm I (201), actuating arm II (202), responsive arm I (301), responsive arm II (302) adopt micro-processing technology and same material to make.
8. the frame-type angle of throw rate sensor of employing wobble quality piece according to claim 7, it is characterized in that: material therefor comprises alloy, quartz, polysilicon and silicon dioxide.
9. adopt measuring system like the arbitrary described frame-type angle of throw rate sensor of claim 1 to 7.
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| CN201210184254.4A CN102662074B (en) | 2012-06-06 | 2012-06-06 | Framework type vibration angular rate sensor and measurement system using swinging mass block |
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| CN201210184254.4A CN102662074B (en) | 2012-06-06 | 2012-06-06 | Framework type vibration angular rate sensor and measurement system using swinging mass block |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104953888A (en) * | 2014-03-27 | 2015-09-30 | 纳米新能源（唐山）有限责任公司 | Micro-vibration sensor |
| CN107264838A (en) * | 2017-06-21 | 2017-10-20 | 西北工业大学深圳研究院 | A kind of chip satellite and its attitude control method based on electroactive polymer |
| CN107351073A (en) * | 2017-07-31 | 2017-11-17 | 北京航空航天大学 | A kind of kinematic robot of vibratory drive |
| CN113933538A (en) * | 2021-09-18 | 2022-01-14 | 重庆邮电大学 | Piezoresistive high-g-value accelerometer |
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| CN2247813Y (en) * | 1995-01-23 | 1997-02-19 | 东南大学 | Direct bonded silicon integrated micro-vibration gyro |
| CN1199171A (en) * | 1997-05-09 | 1998-11-18 | 利顿系统公司 | Monolithic vibrating beam angular velocity sensor |
| CN201689108U (en) * | 2010-04-16 | 2010-12-29 | 重庆仙通智能仪表有限公司 | Asynchronous driving piezoelectric-vibration angular rate sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2247813Y (en) * | 1995-01-23 | 1997-02-19 | 东南大学 | Direct bonded silicon integrated micro-vibration gyro |
| CN1199171A (en) * | 1997-05-09 | 1998-11-18 | 利顿系统公司 | Monolithic vibrating beam angular velocity sensor |
| CN201689108U (en) * | 2010-04-16 | 2010-12-29 | 重庆仙通智能仪表有限公司 | Asynchronous driving piezoelectric-vibration angular rate sensor |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104953888A (en) * | 2014-03-27 | 2015-09-30 | 纳米新能源（唐山）有限责任公司 | Micro-vibration sensor |
| CN104953888B (en) * | 2014-03-27 | 2017-01-18 | 纳米新能源（唐山）有限责任公司 | Micro-vibration sensor |
| CN107264838A (en) * | 2017-06-21 | 2017-10-20 | 西北工业大学深圳研究院 | A kind of chip satellite and its attitude control method based on electroactive polymer |
| CN107264838B (en) * | 2017-06-21 | 2019-05-21 | 西北工业大学深圳研究院 | A kind of chip satellite and its attitude control method based on electroactive polymer |
| CN107351073A (en) * | 2017-07-31 | 2017-11-17 | 北京航空航天大学 | A kind of kinematic robot of vibratory drive |
| CN113933538A (en) * | 2021-09-18 | 2022-01-14 | 重庆邮电大学 | Piezoresistive high-g-value accelerometer |
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| CN102662074B (en) | 2014-02-19 |
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