CN206177311U - Two quality piece sound fork angle rate gyroscope with structure decoupling zero ability - Google Patents
Two quality piece sound fork angle rate gyroscope with structure decoupling zero ability Download PDFInfo
- Publication number
- CN206177311U CN206177311U CN201621106221.8U CN201621106221U CN206177311U CN 206177311 U CN206177311 U CN 206177311U CN 201621106221 U CN201621106221 U CN 201621106221U CN 206177311 U CN206177311 U CN 206177311U
- Authority
- CN
- China
- Prior art keywords
- detection
- frame
- straight beam
- shaped
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a two quality piece sound fork angle rate gyroscope with structure decoupling zero ability, including upper vacuum packaging apron, lower floor's silicon substrate and middle level monocrystalline silicon piece, be equipped with top mechanical structure on the monocrystalline silicon piece of middle level, two minor structure symmetric distributions of top mechanical structure are in quality piece coupling mechanism and two trusss both sides with the combined mechanism of horizontal straight beam, a U type roof beam along the long limit setting of minor structure, and the combined mechanism of truss and horizontal straight beam is connected with the minor structure through a U type roof beam, the straight beam sets up along sub - structure width direction for a U type roof beam of connecting substructure both sides. The utility model discloses a drive modality and detection modality's motion decoupling zero has reduced the quadrature error of top output, also realizes that drive modality and detection modality be first -order modal and second -order modal shape simultaneously, effectively suppresses common drive syntropy, measuring syntropy and Z to interference mold attitudes such as mode, and its top performance is good, and the uniformity is strong, anti vibration disturbance ability reinforce.
Description
Technical field
This utility model belongs to microelectromechanical systems and micro-inertia measuring technology, particularly a kind of to have structure decoupling energy
The double quality blocks tuning fork angular rate gyroscope of power.
Background technology
Micromechanical Inertial Instruments include micromechanical gyro (MMG) and micro-mechanical accelerometer (MMA).Using micro-electronic machining
Technique allows that micro mechanical structure and required electronic circuit are completely integrated on a silicon chip, so as to reach performance, price, body
Product, weight, the high unity of reliability aspects.Thus, this kind of instrument have a series of advantage (as small volume, it is lightweight,
Low price, reliability are high, can produce in enormous quantities etc.), all it is with a wide range of applications at the aspect of the army and the people two.In civilian side
Face, is mainly used in auto industry, industrial monitoring and consumer product and roboticses, such as air bag, anti-lock braking system, driftage speed
Rate sensor, tumble rate sensor, image stability and toy etc.；In military domain, it is mainly used in agile bomb, intelligent cannon
Independent navigation guidance system of bullet, tactical missile, new concept weapon and miniplane etc..
1993, De Leipo laboratorys in the U.S. in glass surface by being covered with a kind of novel microcomputer of silicon layer fabrication techniques
Tool gyro-tuning-fork type linearly coupled gyro.The gyro is made up of double quality blocks, backbar and crossbeam, and gyro is driven using linearly coupled
The mode detected with angular oscillation, can be with the angular speed of axial direction in sensitive gyroscopic plane.Powered motion and sensitivity due to the gyro
Motion is coupled completely, limits the raising of its sensitivity.
2007, Su Yan et al. have developed double quality oscillatory type silicon microthrust test (application number：200710133223.5), driving
Double quality are doing the linearly coupled parallel to substrate in the presence of power, and when having angular speed to be input into, double quality blocks are done parallel to substrate
The linearly coupled perpendicular to driving direction, by detect sensitization capacitance change, test input angle speed.The gyro employs eight
Root drives the sensitive backbar of backbar and eight to realize separating for driven-mode and sense mode.Miss because microelectronic technique is present
Difference, can cause two minor structures not have a good concordance, produce the phenomenons such as sense mode is asynchronous.
2009, Su Yan et al. have developed oscillation type silicon microthrust test (application number again：200920037290.1).Using torsion bar
And crossbeam, gyro is turned about the Z axis, the sensitive motion of gyro is realized, realize the mobile decoupling of driving direction and detection direction.
Torsion bar instead of sensitive backbar, reduce backbar number, reduce impact of the mismachining tolerance to gyro performance.But in body
In silicon technology, the processing to vertical torsion bar has sizable difficulty.
2011, Su Yan et al. have developed the micro- angular oscillation of silicon and export gyro (application number：201110170673.8) and rock
Formula angular rate gyroscope (application number：201120340974.6).The two all using Horizontal torsion rod and crossbeam, realizes the angular oscillation of gyro
Output.The use of Horizontal torsion rod, reduces the requirement to the course of processing.Simultaneously mass link mechanism is provided with, increases work
Make the difference on the frequency of mode and interference modal, increased the stability of gyro.It is crossbeam and fixed pedestal where the two difference
Connected mode it is different.
The content of the invention
The purpose of this utility model is to provide a kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability
Instrument, the gyroscope independently realizes driven-mode and sensed-mode by driving the mutual function of frame, sensitive frame and detection block
Mobile decoupling, the quadrature error of gyro output is reduced, while also realizing that driven-mode and sensed-mode are first step mode
With second-order mode, effectively suppress common driving in the same direction, detection in the same direction and the interference modal such as Z-direction mode, its gyro performance is good,
Concordance is strong, and vibration and interference resistance is strong.
The technical solution for realizing this utility model purpose is：A kind of double quality blocks tuning fork with structure decoupling ability
Angular rate gyroscope, including upper strata Vacuum Package cover plate, lower floor's silicon substrate and middle level monocrystalline silicon piece, middle level monocrystalline silicon piece is provided with
Gyro frame for movement, the gyro frame for movement includes mass bindiny mechanism, two minor structures, two truss and horizontal straight beams
Combined mechanism, two U-shaped beam combination beams, eight the first U-shaped beams and four straight beams, described two minor structures are symmetrically distributed in matter
The both sides of gauge block bindiny mechanism and two truss and the combined mechanism of horizontal straight beam, mass bindiny mechanism and two truss and water
The combined mechanism of straight beam is linearly distributed, and mass bindiny mechanism be located at two truss and horizontal straight beam combined mechanism it
Between, the first U-shaped beam is arranged along the long side of minor structure, and positioned at the two ends on long side, truss passes through with the combined mechanism of horizontal straight beam
First U-shaped beam is connected with minor structure, and U-shaped beam combination beam is arranged along the long side of minor structure, and is located remotely from mass bindiny mechanism
The centre of two the first U-shaped beams of side；Straight beam is arranged along minor structure width, for connecting a U of minor structure both sides
Type beam.
Compared with prior art, its remarkable advantage is this utility model：(1) divided according to function, independent design drives frame,
Sensitive frame and detection block, realize the mobile decoupling of driven-mode and sensed-mode, reduce the quadrature error of gyro output.
(2) crossbeam being connected with two minor structures, this version are replaced with the combined mechanism of truss and horizontal straight beam
Ensure that the driven-mode frequency of sensitive structure, less than model frequency in the same direction is driven, also inhibits Z-direction interference modal.
(3) two minor structures are connected with mass bindiny mechanism, this version both can guarantee that the detection of sensitive structure
Model frequency can realize the motion synchronization of two minor structures again less than detection model frequency in the same direction, also inhibits Z-direction interference mould
State.
(4) two minor structure outsides are respectively by two U-shaped beam combination beams being arranged symmetrically and upper strata Vacuum Package cover plate
With the anchoring of lower floor silicon substrate, this version can suppress two minor structures interference modal along the z-axis direction.
(5) through the appropriate design of above-mentioned key structure, driven-mode and sensed-mode can be caused to be respectively the sensitivity
The single order of structure, second-order modal, and make other interference modals try one's best away from operation mode.Above-mentioned two feature is greatly lowered
Impact of the extraneous vibration environment to gyroscope performance.
Description of the drawings
Fig. 1 is that the overall structure of the double quality blocks tuning fork angular rate gyroscope that this utility model has structure decoupling ability is shown
It is intended to.
Fig. 2 is the truss and level of the double quality blocks tuning fork angular rate gyroscope that this utility model has structure decoupling ability
The structural representation of the combined mechanism of straight beam.
Fig. 3 is the mass connection of the double quality blocks tuning fork angular rate gyroscope that this utility model has structure decoupling ability
Mechanism structure schematic diagram.
Specific embodiment
This utility model is described in further detail below in conjunction with the accompanying drawings.
With reference to Fig. 1 to Fig. 3, a kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability, for measuring Z
Axial angular speed.It includes upper strata Vacuum Package cover plate, lower floor's silicon substrate and middle level monocrystalline silicon piece, on the monocrystalline silicon piece of middle level
It is provided with gyro frame for movement.This utility model employs wafer-grade vacuum encapsulation process, upper strata Vacuum Package cover plate, middle level monocrystalline
Silicon chip is silicon materials with lower floor's silicon substrate, and between upper strata Vacuum Package cover plate, lower floor's silicon substrate closed vacuum cavity is defined,
Middle level monocrystalline silicon piece is arranged in the vacuum cavity, makes gyroscope frame for movement vacantly on lower floor's silicon substrate, and upper strata is true
Empty encapsulation cover plate arrangement signal lead and bond area.Gyroscope frame for movement will not be subject to the pollution of dust granule and extraneous machine
The impact of tool power, improves the performance of gyroscope.
With reference to Fig. 1, the gyro frame for movement includes mass bindiny mechanism 2, two minor structure 1, two truss and water
The first U-shaped beam 6 of the U-shaped beam combination beam 4, eight of combined mechanism 3, two of straight beam and four straight beams 12, described two minor structures 1
It is symmetrically distributed in the both sides of mass bindiny mechanism 2 and two truss and the combined mechanism 3 of horizontal straight beam, mass bindiny mechanism
2 and the combined mechanism 3 of two truss and horizontal straight beam be linearly distributed, and mass bindiny mechanism 2 is located at two truss and water
Between the combined mechanism 3 of straight beam, the first U-shaped beam 6 is arranged along the long side of minor structure 1, and positioned at the two ends on long side, truss and water
The combined mechanism 3 of straight beam is connected by the first U-shaped beam 6 with minor structure 1, and U-shaped beam combination beam 4 is arranged along the long side of minor structure 1,
And it is located remotely from the centre of two the first U-shaped beams 6 of the side of mass bindiny mechanism 2；Straight beam 12 sets along the width of minor structure 1
Put, for connecting the first U-shaped beam 6 of the both sides of minor structure 1.
Two opening directions of U-shaped beam 6 positioned at the same side of minor structure 1 are relative.
With reference to Fig. 3, the mass bindiny mechanism 2 includes 203,4 the second straight beams 202 and 4 of first straight beam of level
Individual second U-shaped beam 201；The second U-shaped beam 201 and son knot that the two ends of horizontal straight beam 203 are oppositely arranged respectively by two openings
Structure 1 connects, and 4 the second straight beams 202 are symmetrically distributed on the first straight beam 203, have one end straight with first per the second straight beam of root 202
The center of beam 203 is connected, and both angles are 45 °, and the other end is anchored with upper strata Vacuum Package cover plate and lower floor's silicon substrate.
Above-mentioned 4 one group two-by-two of the second straight beams 202, are symmetrically distributed in the both sides of the first straight beam 203, positioned at two of the same side
Angle between second straight beam 202 is 90 °.
With reference to Fig. 2, the truss includes V-type truss 301 and horizontal straight beam 302, V-type with the combined mechanism 3 of horizontal straight beam
The summit of truss 301 is connected with the center of horizontal straight beam 302, horizontal straight beam 302 and the homonymy of mass bindiny mechanism 2, V-type truss
301 two free ends and the first U-shaped beam 6 closing side wall is connected, the two ends of horizontal straight beam 302 with upper strata Vacuum Package cover plate
With lower floor's silicon substrate anchoring.
The U-shaped beam combination beam 4 includes two the 3rd U-shaped beams 401, and two openings of the 3rd U-shaped beam 401 are connected, connection
Place's outer wall and upper strata Vacuum Package cover plate and lower floor's silicon substrate anchoring.
The minor structure 1 includes detection module, sensitive frame 13,11, two drive modules of tie-beam, and detection module is arranged on
In sensitive frame 13, the two ends of sensitive frame 13 are connected respectively by two the 5th U-shaped beams 14 with drive module；Two drive modules pass through
Tie-beam 11 is connected, and tie-beam 11 is located at the outside of sensitive frame 13.(the above-mentioned two ends of sensitive frame 13 are the two of its length direction
End, the both sides of sensitive frame 13 are the two ends of its width).
If the drive module include driving 7, three fixed drive electrode 8a of frame, three fixed drive detecting electrode 8b,
Dry driving comb, several driving detection combs and several movable comb, three fixed drive electrode 8a, three fixed drives
Dynamic detecting electrode 8b, several driving combs, several driving detection combs and several movable comb are arranged at driving frame 7
It is interior, drive frame 7 to be located between the U-shaped beam 14 of straight beam 12 and the 5th, fixed drive electrode 8a and fixed drive detecting electrode 8b is spaced
Arrangement, fixed drive electrode 8a two ends connection driving comb, fixed drive detecting electrode 8b two ends connection drives detection comb；It is living
Dynamic comb is located at and drives on frame 7.
The detection module include detection block 5, the first fixed test electrode 9a, the second fixed test electrode 9b, four pieces the
Four 10, four, U-shaped beam the 6th U-shaped beam 15, several fixed test comb and several activity detection comb, detection block 5 is arranged
In sensitive frame 13, the both sides of detection block 5 are connected respectively by two the 6th U-shaped beams 15 with sensitive frame 13, the two ends of detection block 5 difference
By two the 4th U-shaped beams 10 and upper strata Vacuum Package cover plate and lower floor's silicon substrate anchoring, upper fixed test electrode 9a, fixed inspection
Survey electrode 9b, several fixed test comb and several activity detection comb to be arranged in detection block 5, the first fixed test
Electrode 9a is located at second fixed test electrode 9b one end, the first fixed test electrode 9a and the second fixed test electrode 9b both sides point
Several fixed test comb are not provided with, activity detection comb is arranged in detection block 5, the first fixed test electrode 9a and second
Fixed test electrode 9b respectively with detection block 5 on movable comb row into difference detection electric capacity.
Above-mentioned to be connected with the blind end of two the 5th U-shaped beams 14 of one end positioned at sensitive frame 13, opening is respectively facing quick
Sense frame 13 both sides.
The blind end of above-mentioned two the 6th U-shaped beams 15 positioned at the same side of detection block 5 is connected, and opening is respectively facing detection
The two ends of frame 5.
Above-mentioned to be connected with the blind end of two the 4th U-shaped beams 10 of one end positioned at detection block 5, opening is respectively facing detection
The both sides of frame 5, and by opening and upper strata Vacuum Package cover plate and lower floor's silicon substrate anchoring.
Double quality blocks tuning-fork type angular rate gyroscope of the present utility model, using monolateral electrostatic drive, the work of capacitance detecting
Make mode.Apply the alternating voltage with direct current biasing on the fixed drive electrode 8a of minor structure 1, produce the electrostatic force of alternation,
Realize the monolateral electrostatic drive of gyroscope, electrostatic drive power FdFor：
In formula, n for resonator the movable comb number of teeth, ε is dielectric constant, h for structure thickness, d is comb tooth spacing, UdFor
The DC offset voltage of driving voltage, UaFor alternating voltage, ωdFor the angular frequency of alternating voltage, t is the time.Fixed drive is detected
Electrode 8b realizes the electrostatic drive detection of gyroscope.
180 are differed in the electrostatic drive power of a minor structure 1 with the electrostatic drive power in another minor structure 1 is acted on
Degree.Therefore the whole bascule of two minor structures 1 is made opposite simple harmonic quantity line and is shaken in the presence of electrostatic drive power along drive shaft
It is dynamic.When the frequency for driving alternating voltage is consistent with the natural frequency of gyroscope driven-mode, linearly coupled displacement x is：
In formula, Fd0For electrostatic drive power amplitude, kxFor the elastic stiffness of X-direction, QxFor the quality factor of driven-mode.Line
Vibration velocity V is：
When gyro has extraneous input angle speed ω around z-axiszWhen, according to the right-hand rule, detection quality is subject to detection axle side
To Corioli's acceleration acAct on, its size is：
In formula,For dextrorotation angle between input angle speed and linearly coupled speed.
If detection quality is ms, then the qualitative Corioli inertial force F of detection is acted oncFor：
The direction of Corioli inertial force is in opposite direction with Corioli's acceleration, therefore, act on Ge Shi in two minor structures 1 and be used to
Property power it is in opposite direction, formed moment loading on gyroscope structure so that two minor structures 1 are centered on the geometric center of gyro
Make angular oscillation around sensitive axes.So so that the gap between activity detection comb and fixed test comb shakes by certain simple harmonic quantity
Dynamic rule changes, and capacitive differential signal can obtain output voltage signal Jing after electronic circuit process.Output voltage signal is two
The output voltage signal sum of minor structure 1, and the size of output voltage signal is proportional to the size of input angle speed.By phase discriminator
Relatively output voltage signal and the phase relation of pumping signal, then can distinguish the direction of input angle speed.
Gyroscope of the present utility model drives frame, sensitive frame and detection block to realize driven-mode and inspection by independent design
The mobile decoupling of mode is surveyed, the quadrature error of gyro output is reduced, while also realizing that driven-mode is first with sensed-mode
Order mode state and second-order mode, effectively suppress common driving in the same direction, detection in the same direction and the interference modal such as Z-direction mode, its gyro
Performance is good, and concordance is strong, and vibration and interference resistance is strong.
Claims (9)
1. a kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability, it is characterised in that：Including upper strata vacuum
Encapsulation cover plate, lower floor's silicon substrate and middle level monocrystalline silicon piece, middle level monocrystalline silicon piece is provided with gyro frame for movement, the gyro machinery
Structure includes mass bindiny mechanism（2）, two minor structures（1）, two truss and horizontal straight beam combined mechanism（3）, two U
Type beam combination beam（4）, eight the first U-shaped beams（6）With four straight beams（12）, described two minor structures（1）It is symmetrically distributed in quality
Block bindiny mechanism（2）With the combined mechanism of two truss and horizontal straight beam（3）Both sides, mass bindiny mechanism（2）With two
The combined mechanism of truss and horizontal straight beam（3）Linearly distribution, and mass bindiny mechanism（2）It is straight with level positioned at two truss
The combined mechanism of beam（3）Between, the first U-shaped beam（6）Along minor structure（1）Long side arrange, and positioned at the two ends on long side, truss with
The combined mechanism of horizontal straight beam（3）By the first U-shaped beam（6）With minor structure（1）Connection, U-shaped beam combination beam（4）Along minor structure
（1）Long side arrange, and be located remotely from mass bindiny mechanism（2）Two the first U-shaped beams of side（6）Centre；Straight beam
（12）Along minor structure（1）Width is arranged, for connecting minor structure（1）First U-shaped beam of both sides（6）.
2. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 1, its feature exists
In：Positioned at minor structure（1）Two U-shaped beams of the same side（6）Opening direction is relative.
3. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 1, its feature exists
In：The mass bindiny mechanism（2）Including a straight beam of level first（203）, 4 the second straight beams（202）With 4 the 2nd U
Type beam（201）；Horizontal straight beam（203）Two ends respectively by two the second U-shaped beams for being oppositely arranged of being open（201）With minor structure
（1）Connection, 4 the second straight beams（202）It is symmetrically distributed in the first straight beam（203）On, per the straight beam of root second（202）Have one end with
First straight beam（203）Center is connected, and both angles are 45 °, the other end and upper strata Vacuum Package cover plate and lower floor's silicon substrate anchor
Gu.
4. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 3, its feature exists
In：Above-mentioned 4 the second straight beams（202）One group two-by-two, it is symmetrically distributed in the first straight beam（203）Both sides, positioned at two of the same side
Second straight beam（202）Between angle be 90 °.
5. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 3, its feature exists
In：Described two the second U-shaped beams being oppositely arranged that are open（202）Opening be connected.
6. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 1, its feature exists
In：The combined mechanism of the truss and horizontal straight beam（3）Including V-type truss（301）With horizontal straight beam（302）, V-type truss
（301）Summit and horizontal straight beam（302）Center connects, horizontal straight beam（302）With mass bindiny mechanism（2）Homonymy, V-type purlin
Frame（301）Two free ends and the first U-shaped beam（6）Closing side wall connection, horizontal straight beam（302）Two ends with upper strata vacuum
Encapsulation cover plate and lower floor's silicon substrate anchoring.
7. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 1, its feature exists
In：The U-shaped beam combination beam（4）Including two the 3rd U-shaped beams（401）, two the 3rd U-shaped beams（401）Opening is connected, connection
Place's outer wall and upper strata Vacuum Package cover plate and lower floor's silicon substrate anchoring.
8. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 1, its feature exists
In：The minor structure（1）Including detection module, sensitive frame（13）, tie-beam（11）, two drive modules, detection module arranges
In sensitive frame（13）It is interior, sensitive frame（13）Two ends pass through respectively two the 5th U-shaped beams（14）It is connected with drive module；Two drivings
Module passes through tie-beam（11）It is connected, and tie-beam（11）Positioned at sensitive frame（13）Outside；
The drive module includes driving frame（7）, three fixed drive electrodes（8a）, three fixed drive detecting electrodes（8b）、
Several driving combs, several driving detection combs and several movable comb, three fixed drive electrodes（8a）, three it is solid
Surely detecting electrode is driven（8b）, several driving combs, several drive detection combs and several movable comb to be arranged at
Drive frame（7）It is interior, drive frame（7）Positioned at straight beam（12）With the 5th U-shaped beam（14）Between, fixed drive electrode（8a）With fixed drive
Dynamic detecting electrode（8b）It is spaced, fixed drive electrode（8a）Two ends connect driving comb, fixed drive detecting electrode（8b）
Two ends connection drives detection comb；Movable comb tooth position is in driving frame（7）On；
The detection module includes detection block（5）, the first fixed test electrode（9a）, the second fixed test electrode（9b）, four pieces
4th U-shaped beam（10）, four pieces the 6th U-shaped beams（15）, several fixed test comb and several activity detection comb, detection block
（5）It is arranged on sensitive frame（13）It is interior, detection block（5）Both sides pass through respectively two the 6th U-shaped beams（15）With sensitive frame（13）Connection,
Detection block（5）Two ends pass through respectively two the 4th U-shaped beams（10）Anchor with upper strata Vacuum Package cover plate and lower floor's silicon substrate, it is upper solid
Determine detecting electrode（9a）, fixed test electrode（9b）, several fixed test comb and several activity detection comb are respectively provided with
In detection block（5）It is interior, the first fixed test electrode（9a）Positioned at the second fixed test electrode（9b）One end, the first fixed test electricity
Pole（9a）With the second fixed test electrode（9b）Several fixed test comb are respectively provided on two sides with, activity detection comb is arranged on
Detection block（5）On, the first fixed test electrode（9a）With the second fixed test electrode（9b）Respectively with detection block（5）On activity
Detection electric capacity of the comb row into difference.
9. the double quality blocks tuning fork angular rate gyroscope with structure decoupling ability according to claim 8, its feature exists
In：It is above-mentioned positioned at sensitive frame（13）With two the 5th U-shaped beams of one end（14）Blind end be connected, opening is respectively facing sensitivity
Frame（13）Both sides；
It is above-mentioned positioned at detection block（5）Two the 6th U-shaped beams of the same side（15）Blind end be connected, opening is respectively facing detection
Frame（5）Two ends；
It is above-mentioned positioned at detection block（5）With two the 4th U-shaped beams of one end（10）Blind end be connected, opening is respectively facing detection
Frame（5）Both sides, and by opening and upper strata Vacuum Package cover plate and lower floor's silicon substrate anchoring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621106221.8U CN206177311U (en) | 2016-10-08 | 2016-10-08 | Two quality piece sound fork angle rate gyroscope with structure decoupling zero ability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621106221.8U CN206177311U (en) | 2016-10-08 | 2016-10-08 | Two quality piece sound fork angle rate gyroscope with structure decoupling zero ability |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206177311U true CN206177311U (en) | 2017-05-17 |
Family
ID=58677108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621106221.8U Active CN206177311U (en) | 2016-10-08 | 2016-10-08 | Two quality piece sound fork angle rate gyroscope with structure decoupling zero ability |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206177311U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106813654A (en) * | 2016-10-08 | 2017-06-09 | 南京理工大学 | A kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability |
| CN112833869A (en) * | 2021-01-06 | 2021-05-25 | 南京理工大学 | Decoupling type double-mass silicon micromechanical vibration gyroscope structure |
| CN115507831A (en) * | 2022-10-24 | 2022-12-23 | 准懋(杭州)科技有限公司 | Micro-electromechanical gyroscope |
-
2016
- 2016-10-08 CN CN201621106221.8U patent/CN206177311U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106813654A (en) * | 2016-10-08 | 2017-06-09 | 南京理工大学 | A kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability |
| CN106813654B (en) * | 2016-10-08 | 2023-11-03 | 南京理工大学 | Double-mass tuning fork angular rate gyroscope with structural decoupling capability |
| CN112833869A (en) * | 2021-01-06 | 2021-05-25 | 南京理工大学 | Decoupling type double-mass silicon micromechanical vibration gyroscope structure |
| CN112833869B (en) * | 2021-01-06 | 2022-04-19 | 南京理工大学 | Decoupling type double-mass silicon micromechanical vibration gyroscope structure |
| CN115507831A (en) * | 2022-10-24 | 2022-12-23 | 准懋(杭州)科技有限公司 | Micro-electromechanical gyroscope |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106813654A (en) | A kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability | |
| CN100585331C (en) | Double quality oscillatory type silicon micro-gyroscopes | |
| US9599472B2 (en) | MEMS proof mass with split Z-axis portions | |
| CN104807454B (en) | A kind of single-chip integration six degree of freedom micro inertial measurement unit and its processing method | |
| CN108955663B (en) | Resonant double-shaft micro-mechanical wheel type gyroscope | |
| CN101038299A (en) | Uniaxle integrated inertia measurement device based on single mass-block | |
| KR20120043056A (en) | Micromachined inertial sensor devices | |
| CN103900546A (en) | Micro-electromechanical six-axis inertial sensor | |
| CN206177311U (en) | Two quality piece sound fork angle rate gyroscope with structure decoupling zero ability | |
| CN102252668B (en) | Silicon micro angular vibration output gyroscope | |
| CN112747731B (en) | Five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration | |
| CN102798386A (en) | Three-degree-of-freedom resonance silicon micromechanical gyroscope | |
| US20120125103A1 (en) | Z-axis capacitive accelerometer | |
| CN101298987B (en) | Robustness tuning fork vibrating type micromechanical gyroscope | |
| CN101759136B (en) | Fully-decoupled vibrating micromechanical gyroscope | |
| CN209446068U (en) | A kind of double quality blocks tuning-fork type angular rate gyroscope of anti high overload | |
| CN109556589A (en) | A kind of double quality blocks tuning-fork type angular rate gyroscope of anti high overload | |
| CN101498580B (en) | Oscillation type silicon micro-gyroscope | |
| CN110702088B (en) | Wheel type double-shaft micromechanical gyroscope | |
| CN202216695U (en) | Silicon micro angle vibration output gyro | |
| CN106813655A (en) | A kind of double quality blocks tuning-fork type angular rate gyroscope | |
| CN107687845A (en) | A kind of double quality blocks tuning fork angular rate gyroscope for rotating output | |
| CN101135560A (en) | Crewel vibrating silicon micro-gyroscopes | |
| CN202109911U (en) | Single structure three-axle micro electro mechanical gyroscope | |
| CN107782294A (en) | A kind of double quality blocks tuning fork gyroscope with stress isolation ability |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |