CN101281031B - 距离/速度计和距离/速度测量方法 - Google Patents

距离/速度计和距离/速度测量方法 Download PDF

Info

Publication number
CN101281031B
CN101281031B CN2008100963225A CN200810096322A CN101281031B CN 101281031 B CN101281031 B CN 101281031B CN 2008100963225 A CN2008100963225 A CN 2008100963225A CN 200810096322 A CN200810096322 A CN 200810096322A CN 101281031 B CN101281031 B CN 101281031B
Authority
CN
China
Prior art keywords
determination object
distance
mentioned
displacement
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008100963225A
Other languages
English (en)
Chinese (zh)
Other versions
CN101281031A (zh
Inventor
上野达也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Publication of CN101281031A publication Critical patent/CN101281031A/zh
Application granted granted Critical
Publication of CN101281031B publication Critical patent/CN101281031B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/87—Combinations of systems using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CN2008100963225A 2007-04-03 2008-04-01 距离/速度计和距离/速度测量方法 Expired - Fee Related CN101281031B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007097244 2007-04-03
JP2007-097244 2007-04-03
JP2008054699A JP5530069B2 (ja) 2007-04-03 2008-03-05 距離・速度計および距離・速度計測方法
JP2008-054699 2008-03-05

Publications (2)

Publication Number Publication Date
CN101281031A CN101281031A (zh) 2008-10-08
CN101281031B true CN101281031B (zh) 2011-07-20

Family

ID=40013611

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008100963225A Expired - Fee Related CN101281031B (zh) 2007-04-03 2008-04-01 距离/速度计和距离/速度测量方法

Country Status (5)

Country Link
US (1) US7990521B2 (https=)
JP (1) JP5530069B2 (https=)
KR (1) KR100946264B1 (https=)
CN (1) CN101281031B (https=)
TW (1) TW200912354A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108027440A (zh) * 2015-09-01 2018-05-11 国立大学法人东京大学 运动检测装置及使用它的三维形状测量装置

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5530070B2 (ja) * 2007-06-06 2014-06-25 アズビル株式会社 距離・速度計および距離・速度計測方法
EP2128560B1 (de) * 2008-05-28 2015-07-01 Leica Geosystems AG Interferometrisches Distanzmessverfahren mit spektral trennbarem Doppelchirp und ebensolche Vorrichtung
US8063348B1 (en) * 2009-06-02 2011-11-22 The United States Of America As Represented By The Secretary Of The Army Dual color retro-reflection sensing device
US20110149269A1 (en) * 2009-12-17 2011-06-23 Tom Van Esch Method and device for measuring the speed of a movable member relative a fixed member
JP5639922B2 (ja) * 2011-02-23 2014-12-10 アズビル株式会社 速度計測装置および方法
EP2887008A1 (en) * 2013-12-17 2015-06-24 Universitat Politècnica de Catalunya A method of measuring a change in an optical path using differential laser self-mixing interferometry and a differential laser self-mixing interferometry measuring system
WO2016030227A1 (en) * 2014-08-29 2016-03-03 Asml Netherlands B.V. Method for controlling a distance between two objects, inspection apparatus and method
EP3245476A4 (en) 2015-01-13 2018-08-29 Dscg Solutions, Inc. A multiple beam range measurement process
JP6018662B2 (ja) * 2015-03-31 2016-11-02 アズビル株式会社 計数装置、物理量センサ、計数方法および物理量計測方法
WO2017187510A1 (ja) * 2016-04-26 2017-11-02 株式会社日立製作所 距離計測装置、距離計測方法、及び形状計測装置
CN107655446B (zh) * 2017-10-30 2023-09-22 成都捷测科技有限公司 激光测量装置
CN108303705A (zh) * 2017-12-27 2018-07-20 西安理工大学 Nd:YAG固体激光器自混合速度传感器及其测速方法
US11157113B2 (en) 2018-04-13 2021-10-26 Apple Inc. Self-mixing interference based sensors for characterizing touch input
EP3581962A1 (de) * 2018-06-11 2019-12-18 Hexagon Technology Center GmbH Dual-beam fmcw distanzmessverfahren mit kompensation eines geschwindigkeitsabhängigen distanzmessfehlers
US11112235B2 (en) * 2019-04-05 2021-09-07 Apple Inc. Handling obstructions and transmission element contamination for self-mixing particulate matter sensors
US11774342B2 (en) 2019-04-05 2023-10-03 Apple Inc. Particulate matter sensors based on split beam self-mixing interferometry sensors
US11692809B2 (en) 2019-09-18 2023-07-04 Apple Inc. Self-mixing interferometry-based absolute distance measurement with distance reference
FR3109627B1 (fr) * 2020-04-27 2022-10-14 Michelin & Cie Systeme de generation de signal representatif du profil d’une surface en mouvement par rapport au systeme
US11874110B2 (en) 2020-09-25 2024-01-16 Apple Inc. Self-mixing interferometry device configured for non-reciprocal sensing
JP7610459B2 (ja) * 2021-04-02 2025-01-08 株式会社デンソー 測距装置
CN115729362A (zh) * 2021-08-31 2023-03-03 华为技术有限公司 一种输入检测装置及相关输入设备
EP4445095A1 (en) * 2021-12-08 2024-10-16 ams International AG Optoelectronic device, self-mixing interferometer and method for operating a self-mixing interferometer
US12376763B2 (en) 2022-06-29 2025-08-05 Apple Inc. Non-contact respiration sensing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100965A (en) * 1997-04-02 2000-08-08 Commissariat A L'energie Atomique Laser speed measurement and range finding device
CN1589396A (zh) * 2001-09-21 2005-03-02 株式会社山武 物理量测定方法及其装置
CN101319892A (zh) * 2007-06-06 2008-12-10 株式会社山武 距离/速度计和距离/速度测量方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2885807B2 (ja) * 1988-10-21 1999-04-26 東京航空計器株式会社 距離検出装置
JP3774751B2 (ja) * 1994-03-08 2006-05-17 国立大学法人静岡大学 半導体レーザデジタル振動計測装置
JP2954871B2 (ja) * 1996-03-25 1999-09-27 株式会社先進材料利用ガスジェネレータ研究所 光ファイバセンサ
US7139446B2 (en) * 2005-02-17 2006-11-21 Metris Usa Inc. Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar
JP5172077B2 (ja) * 2005-05-06 2013-03-27 アズビル株式会社 距離・速度計および距離・速度計測方法
EP1953567A3 (en) * 2007-01-25 2010-09-22 Yamatake Corporation Counting device, distance meter, counting method, and distance measuring method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100965A (en) * 1997-04-02 2000-08-08 Commissariat A L'energie Atomique Laser speed measurement and range finding device
CN1589396A (zh) * 2001-09-21 2005-03-02 株式会社山武 物理量测定方法及其装置
CN101319892A (zh) * 2007-06-06 2008-12-10 株式会社山武 距离/速度计和距离/速度测量方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2000-65931 2000.03.03
JP特开2006-313080 2006.11.16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108027440A (zh) * 2015-09-01 2018-05-11 国立大学法人东京大学 运动检测装置及使用它的三维形状测量装置

Also Published As

Publication number Publication date
KR20080090317A (ko) 2008-10-08
CN101281031A (zh) 2008-10-08
US20100321668A1 (en) 2010-12-23
TW200912354A (en) 2009-03-16
JP5530069B2 (ja) 2014-06-25
KR100946264B1 (ko) 2010-03-09
TWI359953B (https=) 2012-03-11
JP2008275594A (ja) 2008-11-13
US7990521B2 (en) 2011-08-02

Similar Documents

Publication Publication Date Title
CN101281031B (zh) 距离/速度计和距离/速度测量方法
CN101203729B (zh) 测距/测速仪和测距/测速方法
CN101319892B (zh) 距离/速度计和距离/速度测量方法
US7961302B2 (en) Physical quantity sensor and physical quantity measuring method
US7649631B2 (en) Distance/speed meter and distance/speed measuring method
US7920249B2 (en) Device and method for measuring relative movement
KR101241000B1 (ko) 단일의 셀프 믹싱 레이저를 이용하여 객체와 광 입력장치의 2차원 상대 이동을 측정하는 방법
Du et al. Measurement of the velocity inside an all-fiber DBR laser by self-mixing technique
US20220107409A1 (en) Optical sensor device for determining distance to object and velocity of the object, and identifying the shape and structure of the object
EP1978377A2 (en) Distance/speed meter and distance/speed measuring method
JP5530068B2 (ja) 距離・速度計および距離・速度計測方法
JP5184785B2 (ja) 距離計および距離計測方法
CN115265618B (zh) 一种灵敏度可调的大振幅信号分布式弱光栅阵列解调方法
JP5612240B2 (ja) 距離計および距離計測方法
Bhardwaj et al. Impact analysis of different trade-off parameters on coherent sensing applications of single-mode self-mixing optical feedback interferometry
JP5461761B2 (ja) 距離・速度計および距離・速度計測方法
Bhardwaj et al. Point-of-use refractometer using self-mixing optical feedback interferometry with predictive measurement for flowmetry applications: VK Bhardwaj et al.
JP2008175547A (ja) 距離計および距離計測方法
JP5503842B2 (ja) 物理量センサおよび物理量計測方法
Al Roumy Analysis of the different signal acquisition schemes of an optical feedback based laser diode interferometer
Tucker et al. Fluid flow rate measurement using the change in laser junction voltage due to the self-mixing effect
EP4232865A1 (en) Systems and methods for eye tracking in a head-mounted device using low-coherence interferometry
CN114353930A (zh) 腔内干涉增强自混合干涉的微位移检测装置及检测方法
Zhang et al. Study on laser diode self-mixing vibrometer with wide dynamic range

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110720

Termination date: 20170401

CF01 Termination of patent right due to non-payment of annual fee