CN101277006B - Substrate conveying device and cable wiring construction - Google Patents
Substrate conveying device and cable wiring construction Download PDFInfo
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- CN101277006B CN101277006B CN2008100885372A CN200810088537A CN101277006B CN 101277006 B CN101277006 B CN 101277006B CN 2008100885372 A CN2008100885372 A CN 2008100885372A CN 200810088537 A CN200810088537 A CN 200810088537A CN 101277006 B CN101277006 B CN 101277006B
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- flat cable
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G11/00—Arrangements of electric cables or lines between relatively-movable parts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- Condensed Matter Physics & Semiconductors (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electric Cable Arrangement Between Relatively Moving Parts (AREA)
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Abstract
The invention relates to a layout configuration, which is capable of prohibiting the load added to each wire body making up the cable, preventing mutual friction or mutual winding from generating when the cable moves along with the rotation of the rotary member so as to much more save the layout space of cable when the cable is configured on the rotary member. The layout configuration includes a housing (110) that holds the cable, a rotary plate (126) which can be relatively and rotatably mounted above the housing around the vertical axis, a flat cable (200) configured on the rotary plate in such a manner that each of wire bodies is arranged along the vertical direction. One end of the cable (200) is mounted on a position staggered from the rotating centre of the rotary plate in order to mount the other end of the cable (200) on the housing in such a manner that the twist of the winding diameter is gradually increased from the position down.
Description
Technical field
The present invention relates to configuration has supplies such as electric power and signal the mechanism of rotation as the rotating platform that is equipped with the carrying arm that is used to carry semiconductor wafer or FPD (Flat Panel Display (flat-panel monitor)) substrate etc. the cable wiring construction of being furnished with many cables and substrate transfer apparatus.
Background technology
For example in semiconductor fabrication, the substrate of semiconductor wafer or FPD substrate etc. is applied in the semiconductor-fabricating device of predetermined process of etching and film forming etc., for substrate being transported to each place in the device, has the substrate transfer apparatus of carrying arm and be provided with.The carrying arm for example is installed on the rotating platform in the mode of the flexible direction that can change arm.In this substrate transfer apparatus, carry on rotating platform because will carry the driving mechanism of arm, so will being used for that electric power and signal are supplied with many line styles of this driving mechanism such as electric wire and cable etc., requirement is configured in rotating platform.
When will be for example on many cable configurations rotating parts the time at this rotating platform etc., all the time, many cables directly are configured between the bottom in this rotating parts and the housing dispersedly,, increase the distribution space of cable not make the degree of these cable phase mutual friction.
, in recent years, be accompanied by the multifunction of semiconductor-fabricating device, even if also require the unit miniaturization for this substrate transfer apparatus, the space that is used for cable wiring also requires to save as far as possible spatialization.On the other hand, be accompanied by the multifunction of carrying arm of being arranged on the rotating platform etc., existing the cable count that must dispose also increases, and the electric power of Gong Geiing also increases the tendency that the diameter of cable also increases further.
For this cable being put into than in the former narrow space, if with the same directly decentralized configuration cable of prior art, then the distribution space of cable is narrow and small more, when the rotating platform rotation, during cable movement, therefore easy more phase mutual friction or winding mutually between the cable may add from one's body at cable to cause cable fault, broken string etc. by load.In addition, when the rotating platform rotation, during cable movement, because the twining movement mutually dispersedly of many cables is very difficult so want the track of predicted entire form and motion.
In this case, also consider with cable duct tube and cable bearer (ベ ア: bear) etc. these many cables are accumulated 1, but when compiling with this cable duct tube and cable bearer, because cable count is many more, and the diameter of monomer cable is thick more, cable duct tube and cable bearer are also thick more, so cable duct tube and cable bearer self can not be put in the narrow space.Even if temporarily can put into, when rotating platform rotates, also may be in the mutual friction or on cable, add load mutually of many cables in cable duct tube and the cable bearer.
In addition, in patent documentation 1, record following cable unit, promptly, be disposed with many monomer cables that form ring-type along diametric(al) in turn, they are bonded with each other and form the integrated cable of pancake annular form, and this integrated cable is bent to roughly U word shape with form tortuous along the vertical direction in vertical view.In this cable unit, when rotoflector portion, bend is distending along the vertical direction, thus, absorbs the relative rotation of bend, prevents that cable from twining.In this device, because bend is converted into U word shape, so be effective to the situation of the smaller easy bending of diameter of monomer cable.But, like that the diameter of monomer cable is big more as described, not only will bend to the U word shape all the more difficulty that becomes itself, even and if can bend to U word shape, because the load that is added on the sweep of each monomer cable becomes greatly, also is unsuitable so form this form.
[patent documentation 1] TOHKEMY 2000-69655 patent gazette
Summary of the invention
Therefore, the present invention proposes in view of this problem, its purpose is, a kind of Wiring construction and substrate transfer apparatus of cable are provided, when with cable configurations on rotating parts the time, can suppress to be added in the load on each the line body that constitutes cable, and phase mutual friction or winding mutually take place when preventing to move, save the distribution space of cable more when the rotation of cable accompanying rotation parts.
In order to solve described problem, according to viewpoint of the present invention, provide a kind of distribution structure, it is characterized in that, comprising: housing with cable wiring space; To look down the mode in this cable wiring space, can be provided in the rotating parts in the described housing with the relative rotation, with make be arranged in many banded line bodies be bonded with each other form incorporate, described each line body is configured on the described rotating parts in the mode of arranging along vertical direction, and be housed in the cable of the flat in the described cable wiring space, one end of described flat cable is installed in from the position that the pivot of described rotating parts staggers, increasing the spiral helicine mode of winding diameter gradually to described cable wiring space, the other end of cable is installed on the described housing from this.In addition,, for example not only comprise as rotating platform, also comprise the rotary body that is installed on the rotating parts main body and rotates with the rotating parts main body, swivel plate etc. as the rotating parts main body of monomer rotation for described rotating parts.
In order to solve described problem, according to another viewpoint of the present invention, a kind of cable wiring construction is provided, with cable configurations on can counterrotating rotating parts, it is characterized in that, described cable is to make to be arranged in many banded line bodies and to be bonded with each other and to form incorporate flat cable, and an end of described flat cable is installed in from the position that the vertical pivot of described rotating parts staggers, carries out distribution from this to the helically that vertical direction increases winding diameter gradually.
If according to such the present invention, then the flat cable is described the track (for example reversing the oscillator motion) that changes with the correspondingly spiral helicine winding diameter of the rotation of rotating parts.Thus, the easily form and the track of the flat cable that correspondingly changes of the rotation of prediction and rotating parts, the phase mutual friction in the time of can preventing to be accompanied by the rotation flat cable movement of rotating parts or twine mutually.And, form incorporate flat cable because employing is bonded with each other many line bodies, so can prevent the phase mutual friction of each line body or winding mutually.In addition, become from rotating parts by the form that makes the flat cable and to increase the helical form of winding diameter gradually,, also can reduce the load that is added on each line body even if it is big to constitute the diameter of line body of flat cable to the cable wiring space.And,, can save the cable wiring space of horizontal direction more because carry out distribution to form spiral helicine mode along vertical direction.Further, be installed in from the position that the pivot of rotating parts staggers, expeditiously the cable wiring space of usage level direction by a end with the flat cable.
In addition, preferred described rotating parts rotates along both forward and reverse directions to the terminal point angle from its initial point angle, and the length of described flat cable is the length that correspondingly makes the winding diameter variation of described flat cable from the initial point angle of described rotating parts to the terminal point angle and its anglec of rotation at least.Thus, because correspondingly limit the form and the track of flat cable with the scope of the anglec of rotation of using by rotating parts, can be so be mated with the length adjustment of flat cable to necessary irreducible minimum.
In addition, the preferred anglec of rotation of the described rotating parts that becomes hour at the winding diameter of described flat cable, an end of described flat cable and the other end along continuous straight runs of described flat cable stagger.Thus, can make the winding diameter of flat cable hold to a certain degree expansion.Thus, can lower the short transverse of flat cable more.
In addition, the preferred anglec of rotation of the described rotating parts that becomes hour at the winding diameter of flat cable, an end of observing described flat cable from the center of described rotating parts staggers in an identical side with the other end of described flat cable.Thus, because when rotating parts rotation flat cable is untied, the opposition side expansion to horizontal direction is not bigger, so even if can make it narrower about the horizontal direction in cable wiring space yet.
In addition, many line bodies that preferably constitute described flat cable all have the same rate of curving.Thus, when the mode that changes with the winding diameter of flat cable is moved, can on each line body, not add load.And many line bodies that preferably constitute described flat cable all have identical diameter.Thus, when the flat cable movement, can prevent from only on specific line body (for example minor diameter cable), to add load.
In addition, preferably constitute in many line bodies of described flat cable, comprise the multicore cable that boundling has many monomer cables.Thus, can reduce the sum of the line body that constitutes the flat cable.
In order to solve described problem, according to other viewpoint of the present invention, can provide a kind of is the plate carrying mechanism, it is characterized in that, comprising: can be arranged on the rotating platform above the housing with the relative rotation; Be used to carry the carrying arm of the substrate of lift-launch on described rotating platform; Be provided in top in the described housing, can be with the swivel plate of described rotating platform around vertical axle rotation; With make be arranged in many banded line bodies be bonded with each other form incorporate, described each line body is configured in flat cable in the space between described swivel plate and the described housing bottom surface in the mode of arranging along vertical direction, one end of described flat cable is installed in from the position that the pivot of described swivel plate staggers, increasing the spiral helicine mode of winding diameter downwards gradually, the other end of cable is installed on the described housing from this.
If according to such the present invention, then when with cable configurations on the swivel plate that rotates with rotating platform the time, can suppress to be added in the load on each the line body that constitutes cable, and the phase mutual friction takes place or twine ground mutually when preventing to move when the rotation of cable accompanying rotation platform (swivel plate), save the distribution space of cable more.Thus, can make the miniaturization more of whole base plate Handling device.
The effect of invention
If according to the present invention, then when with cable configurations on rotating parts the time, can suppress to be added in the load on each the line body that constitutes cable, and by carrying out distribution in the mode of its form of easy prediction and track, can prevent the phase mutual friction when moving or twine mutually, save the distribution space of cable more when the rotation of cable accompanying rotation parts.
Description of drawings
Fig. 1 is the profile of the substrate transfer apparatus of expression embodiments of the present invention.
Fig. 2 is the profile of the P-P ' of cable shown in Figure 1.
Fig. 3 is the figure of expression when the outward appearance of the cable form of rotating platform during in the initial point angle.
Fig. 4 is the figure of expression when the outward appearance of the cable form of rotating platform during in the terminal point angle.
Fig. 5 A is the figure that observes from the top when the reeling condition of the cable of rotating platform (swivel plate) when spending as 0 of initial point angle.
Fig. 5 B observes from the top as the figure of rotating platform (swivel plate) in the reeling condition of revolving the cable when turning 90 degrees from the initial point angle.
Fig. 5 C observes from the top as the figure of rotating platform (swivel plate) in the reeling condition of the cable when initial point angle Rotate 180 is spent.
Fig. 5 D observes from the top when rotating platform (swivel plate) rotating 270 the figure of reeling condition of cable when spending from the initial point angle.
Symbol description
100 substrate transfer apparatus
110 housings
112 cable drive motor
113 flange portion
114 rotating shafts (driving shaft)
115 flange portion
116 spaces (distribution space)
118 holes
120 rotating platforms
122 pipe arrangements
124 through holes
126 swivel plates
130 carrying arms
132,134 link rods
136 end effectors
142 rotating shafts (shoulder axle)
144 rotating shafts (elbow angle axle)
146 rotating shafts (toggle shaft)
150 top connectors
152 L word parts
160 bottom connectors
162 L word parts
200 cables
210,220,230,240,250 line bodies
212,222,232,242,252 monomer cables
214,224,234,244,254 crusts
226,246 litzendraht wires
The G substrate
Embodiment
Below, with reference to accompanying drawing, preferred forms of the present invention is described in detail.In addition, in this specification and accompanying drawing,, give identical label, and omit repeat specification them by for having the inscape that identical functions constitutes in fact.
(substrate transfer apparatus)
At first, describe with reference to the execution mode of accompanying drawing when applying the present invention to the substrate transfer apparatus of carrying substrate.Fig. 1 is the profile of the formation of expression substrate transfer apparatus.Substrate transfer apparatus 100 have the case shape housing 110, can be arranged on the discoideus rotating platform 120 above this housing 110 with rotating freely and be arranged on the carrying arm 130 that can along continuous straight runs freely stretches on the rotating platform 120.In the present embodiment, will in the narrow space in the housing 110, dispose the cable wiring construction that is used for to the cable 200 of this rotating mechanism supply capability and signal etc. as example.
Carrying arm 130 constitutes the arm (manipulator) that is made of for example as shown in Figure 13 axle horizontal articulated robots (SCARA robot).Specifically, carrying arm 130 is connected in series by 2 link rods (the 1st link rod 132, the 2 link rods 134) that will can rotate in horizontal plane and end effector 136 and forms.More specifically, being configured in, the base end part of the 1st link rod 132 of below is rotatably installed in horizontal plane on the rotating platform 120 by rotating shaft (shoulder axle) 142.
The base end part that is disposed at the 2nd link rod 134 of the 1st link rod 132 tops is rotatably installed in horizontal plane on the leading section of the 1st link rod 132 by rotating shaft (elbow angle axle) 144.On the leading section of the 2nd link rod 134, the base end part that also can keep the end effector that constitutes forceps 136 of substrate G as mounting is installed rotatably in horizontal plane by rotating shaft (toggle shaft) 146.
In the inside of the 1st, the 2 link rod 132,134, built-in the not shown arm telescopic drive that will be installed on the rotating platform 120 is delivered to the transmission mechanism (for example belt pulley, belt, reductor etc.) of each link rod portion or arm part with the actuating force that motor produced.In the example depicted in fig. 1, constitute,, make end effector 136 along its length direction translatory movement, and make each link rod 132,134 and end effector 136 be rotated motion linkedly as initial point with rotating shaft (the shoulder axle) 142 of the base end part of the 1st link rod 132.
If according to described carrying arm 130, then by actuating arm telescopic drive motor, make the arm along continuous straight runs flexible, can carry out the transfer of substrate G.In addition, the formation of carrying arm 130 is not limited to formation shown in Figure 1.For example carrying arm 130 also can be the carrying arm with linear slide type of the arm that can stretch by Linear Driving.
In this carrying arm 130, because rotate, so can make arm flexible along needed direction with rotating platform 120 with becoming one.At this moment, the rotation that rotating platform 120 is carried out more than 1 time by positive rotation or contrary rotation, and rotates to desired angle.Thus, the length of cable 200 can be suppressed to Min..
At the lower surface of this rotating platform 120, the pipe arrangement 122 that is used to make the described arm telescopic drive that is provided in the rotating platform 120 to pass through with the distribution of the internal unit of motor etc. is installed.In the through hole 124 that this pipe arrangement 122 is inserted into the rotating shaft 114 that runs through platform drive motor 112 and forms, the lower end of pipe arrangement 122 is stretched out with the below of motor 112 from cable drive and is extended to housing 110 and be configured interiorly.In the lower end of pipe arrangement 122 discoideus swivel plate 126 is installed.Swivel plate 126 is configured in top in the housing 110 in the mode in the distribution space 116 in housing 110.
Below swivel plate 126, the top connector 150 of the distribution in the connecting pipings 122 for example is installed by L word parts 152.Thereby these pipe arrangements 122, swivel plate 126, top connector 150 rotate with rotating platform 120 with becoming one.On the other hand, on the bottom surface in housing 110, for example bottom connector 160 is installed by L word parts 162.These top connectors 150 and bottom connector 160 constitute for example with the multipolar connector of a plurality of terminal accommodating in connector shell.
In the substrate transfer apparatus 100 that constitutes like this, cable 200 must be configured in the space 116 of swivel plate 126 downsides in the housing 110.The distribution space requirement of this cable is more saved the space than prior art, and on the other hand, the quantity that is accompanied by the cable that the multifunction of the carrying arm that is arranged on the rotating platform etc. must dispose increases, and the electric power of supplying with etc. also increases, and the diameter of cable also increases.
In addition, because the top connector of stube cable 200 1 ends 150 is around vertical axle rotation, and the bottom connector 160 of the other end of stube cable 200 is fixed on the housing 110, so follow the rotation of top connector 150, cable 200 self also moves, and its form changes.Thereby the track of prediction cable 200 all must dispose cable 200 in the mode that enters in the narrow space 116 no matter become which type of form.
; substrate transfer apparatus 100 employed cables 200 as present embodiment; because electric power and signal are supplied with the such cable of rotating mechanism to be made of power cable many cables different with the signal cable equal diameter; if so directly dispose these cables dispersedly; when connector 150 rotatable cables in top move, phase mutual friction or winding mutually take place between the cable then.Therefore, may load cause cable fault, broken string etc. from adding on one's body at cable.In addition, when 150 rotations of top connector, during cable movement,, be very difficult so will predict the track of whole form and motion because many cables twine the ground motion dispersedly mutually.
At this moment, also consider many these cables to be accumulated 1 with cable duct tube and cable bearer etc., but when compiling with this cable duct tube and cable bearer, cable count is many more, and the diameter of each cable is thick more, must select quite thick on the whole cable duct tube and cable bearer, cable duct tube and cable bearer self can not be put in the narrow like that space 116 of present embodiment.Even if supposition can be put into, when top connector 150 rotation, also may be in the mutual friction or on cable, add load mutually of many cables in cable duct tube and the cable bearer.
Therefore, in the present embodiment, make cable 200 adopt many line bodies that will be arranged in band shape to be bonded with each other and form incorporate flat cable, and make flat cable 200 carry out distribution in the spiral helicine mode that increases winding diameter to vertical direction gradually.Thus, can not make phase mutual friction or winding mutually take place between many line bodies that constitute cable 200,, also can reduce the load that is added on each line body even if the diameter of the line body of formation cable 200 is big.
And, because pass through top connector 150 with swivel plate 126 positive rotation or contrary rotation, the motion of spiral helicine cable 200 becomes just or rolls or unclamp the dullness motion (for example reversing oscillator motion, twist motion) that such winding diameter changes, so the form of as easy as rolling off a log predicted entire and its movement locus.Therefore, because determine volume number, the length of cable 200, the position at both ends etc. easily, so that the phase mutual friction does not take place cable 200, or do not contact, so can use narrow space to carry out cable 200 distributions expeditiously with the inner surface of housing 110.
(the formation example and the distribution of cable)
Describe in more detail with reference to the formation example and the distribution example of accompanying drawing the cable 200 of such present embodiment.Fig. 2 is the profile of the P-P ' of cable 200 shown in Figure 1.At first, the formation example to cable describes.As shown in Figure 2, the cable 200 of present embodiment is arranged in row with the line body 210～250 of many (being 5 here), and they are joined together the formation one.Thus, cable 200 can be made flat pattern.
Each line body 210～250 by power supply is supplied with the carrying arm each the motor or many feed cables (power line) of end effector etc. and be used for many barss cable formations such as (holding wires) of transfer control signal between encoder, transducer class or various control appliance and controller.In addition, each line body 210～250 is not only cable, and can comprise the line body that pipe by the hollow of electric wire, feed fluid or gas etc. constitutes.
And each line body 210～250th constitutes many monomer cable boundlings of same diameter or different-diameter by per 1 or every many ground together.When having the monomer cable of the such minor diameter of such large diameter monomer cable of feed cable for example and signal cable, by with large diameter monomer cable per 1 as the line body, the monomer cable boundling of many minor diameters is got up to make multicore cable, can reduce the sum of the line body that constitutes cable 200.
For example, line body 210,230,250 is made of 1 large diameter monomer cable 212,232,252 respectively, line body 220 is made of the multicore cable that monomer cable 222 boundlings with 3 minor diameters get up to obtain, and line body 240 is made of the multicore cable that monomer cable 242 boundlings with 2 minor diameters get up to obtain.
In addition, the line body that is made of the multicore cable with many barss cable has all been carried out shielding processing.Like this, by signal cable is carried out shielding processing, can prevent the misoperation that causes from the noise that electronic equipment self produces or the transmission of the noise that produces.And, when not using multicore cable, need use shielded type cable (not shown) to each signal cable.Comprise as each shielded type cable, for example the heart yearn that constitutes by conductor, cover insulation endothelium around the heart yearn, be arranged on the litzendraht wire around the insulation endothelium and be arranged on insulation sheath around the litzendraht wire.
These line bodies 210～250 are adjusted bending strength in the mode of the rate of curving that obtains same degree at least respectively.The adjustment of bending strength, for example can adjust, perhaps adjust by the litzendraht wire 226,246 or the padded coaming of filling in the gap in the online body 220,240 by the crust (for example insulation sheath that constitutes by insulative resin) of line body 210～250,214～254 thickness or material.In addition, litzendraht wire is woven into clathrate with fine rule and obtains, but also can replace litzendraht wire with Copper Foil etc. as shield member.
By making line body 210～250 all have the identical rate of curving, when the winding diameter of cable 200 changes the ground motion, can on each line body 210～250, not add load like this.Again because can eliminate the deviation of the bending strength of each line body 210～250, so can make cable 200 change such motion only to carry out winding diameter in parallel with the vertical direction all the time state.Thus, because cable 200 does not tilt, so come in contact between the cable 200 that can prevent to reel.
In addition, in the cable 200 of present embodiment, not only adjust the rate of curving of each line body 210～250, and so that diameter (thickness) reaches the mode of same degree adjusts.About the adjustment of diameter (thickness), also same with the adjustment of the rate of curving, thickness or material that can be by crust, the filament or the padded coaming that are filled in the gap of each line body are adjusted.If for example with minor diameter cable and large-diameter cable be arranged in row, make flat pattern and they are joined together, then when moving, cable 200 easily load is added on the minor diameter cable.Thereby, by cable 200, make each line body 210～250 all have identical diameter as present embodiment, only be added on the specific line body (for example minor diameter cable) and can prevent from when cable 200 motions, will load.
Below, the distribution example of cable 200 is described.Here, by positive rotation and contrary rotation, the mode that can rotate to needed angle is controlled so that rotating platform 120 is from initial point angle (being 0 degree (degree) here) to terminal point angle (being 270 degree (degree) here).The length of cable 200 at this moment preferably is at least the length that makes the winding diameter variation of cable 200 from the initial point angle of rotating platform 120 to terminal point angle and its anglec of rotation accordingly.Thus, because correspondingly limit the form and the track of cable 200, so match and the length adjustment of cable 200 can be arrived necessary Min. with it with the scope of the anglec of rotation of using by rotating platform 120.
Below, with reference to Fig. 3～Fig. 5 the distribution example of best in this case cable 200 is described.Fig. 3 is the figure of expression when the form outward appearance of the cable 200 of rotating platform 120 during in the initial point angle, and Fig. 4 is the figure that represents when the form outward appearance of the cable 200 of rotating platform 120 during in the terminal point angle.
In the present embodiment, the mode that enters in the space 116 with the motion (track) of the cable 200 of the state of the cable 200 during in the terminal point angle from the state of the cable 200 of rotating platform shown in Figure 3 120 when the initial point angle to rotating platform shown in Figure 4 120 is carried out distribution.Specifically, as shown in Figure 3, only leave height H along vertical direction
ABGround and along continuous straight runs only leave distance D
ABDispose the bottom connector 160 that the top connector 150 that is connected with an end of cable 200 is connected with the other end with cable 200.Thus, cable 200 can be configured to from the helical form of an end to the other end of outside diameter along short transverse of its internal side diameter.At this moment, cable 200 is reeled each filament 210～250 up and down abreast.
Here, Fig. 5 A～5D is illustrated in the space 116 of housing 110, as described the motion (track) of the cable 200 when configuration cable 200 like that.Fig. 5 A～5D is the figure of the motion of the cable 200 of expression from the initial point angle to the terminal point angle, is respectively the figure that observes cable 200 from the top.In addition, in Fig. 5 A～5D, omitted rotating platform 120, but because rotating platform 120 and swivel plate 126 rotate integratedly, so below the angle of rotating platform 120 angle as swivel plate 126 is described.In addition, in Fig. 5 A～5D, make the position (fixing) of bottom connector 160 be B, make the position (initial point) of the top connector 150 when swivel plate 126 is the initial point angle be A.
Fig. 5 A represents the reeling condition when the cable 200 of swivel plate 126 when spending (degree) as 0 of initial point angle.Fig. 5 B represent when swivel plate 126 from the initial point angle reeling condition that the cable 200 when turning 90 degrees (degree) is revolved on the right to figure, Fig. 5 C represents the reeling condition when swivel plate 126 cable 200 during Rotate 180 degree (degree) on the right of the initial point angle is to figure.Fig. 5 D represents the reeling condition when the cable 200 of swivel plate 126 when the right rotation is as 270 degree (degree) of terminal point angle to figure from the initial point angle,
Shown in Fig. 5 A, when swivel plate 126 was the initial point angle, cable 200 was in the state of rolling most, and the winding diameter of cable 200 becomes minimum.Along with swivel plate 126 rotates to Fig. 5 B from this state, Fig. 5 C, cable 200 unclamps, and the winding diameter of cable 200 increases gradually.And shown in Fig. 5 D, when swivel plate 126 was the terminal point angle, cable 200 was in the state that unclamps most, and the winding diameter of cable 200 also becomes maximum.Like this, even if certain state that the reeling condition of cable 200 is Fig. 5 A in the 5D does not interfere yet, can be housed in the space 116.
Like this, on helically is configured in cable 200 in the space 116 of short transverse and horizontal direction expansion, the top connector 150 of an end of the cable 200 as rotating platform 120 during and as the configuration of staggering of the bottom connector 160 preferred along continuous straight runs of the other end for the initial point angle.As shown in Figure 3, in the present embodiment, top connector 150 and the bottom connector 160 along continuous straight runs D that only staggers
ABBe configured.
Like this, stagger, can make the winding diameter of cable 200 hold to a certain degree expansion by making when the position of the horizontal direction of the end of rotating platform 120 cable 200 during for the initial point angle and the other end.Thus, can make the short transverse in distribution space 116 of cable 200 lower.
Because in the time of for example will working as rotating platform 120 for the initial point angle as the position of the horizontal direction of the top connector 150 of an end of cable 200 and as the position configuration of the horizontal direction of the bottom connector 160 of the other end on the position near pivot of rotating platform 120, winding diameter is more little, so, must increase the space of vertical direction for cable 200 is not interfered mutually.
Relative therewith, because the position of the horizontal direction by making top connector 150 and separately as the position of the horizontal direction of the bottom connector 160 of the other end, can winding diameter be increased gradually, so can keep between the cable 200 state of not interfering mutually, and make the height H of top connector 150 and bottom connector 160
ABLower.Thus, can reach the purpose in the space in the housing 110 of saving configuration cable 200.
And, show as Fig. 3 and Fig. 5 A, the position as the horizontal direction of the top connector 150 of an end of cable 200 in the time of preferably will working as rotating platform 120 for the initial point angle is configured in configuration side as the bottom connector 160 of the other end from the pivot of rotating platform 120 with staggering.As shown in Figure 3, in the present embodiment, only depart from D from the pivot of rotating platform 120
AGround is configured in top connector 150 and bottom connector 160 the same side mutually.
Thus, because, when cable 200 unclamps, can not expand significantly, so even if can make it narrower for the horizontal direction in the distribution space 116 of cable 200 to the opposition side of horizontal direction when rotating platform 120 rotation yet.
For example when rotating platform 120 is the initial point angle as the position of the horizontal direction of the top connector 150 of an end of cable 200 more near the center, when rotating platform 120 rotations, when cable 200 unclamps, because cable 200 expand to more bigly with the space that sets the side opposition side of top connector 150 space of the pivot right side of rotating platform 120 (among the Fig. 3 from), so need the space of big horizontal direction on the contrary.
Relative therewith, by make when rotating platform 120 during for the initial point angle as the pivot of the position deviation rotating platform 120 of the horizontal direction of the top connector 150 of an end of cable 200 be configured, can suppress to expand to significantly the space of its opposition side, so also can make the space of horizontal direction narrower.Therefore, can reach the purpose in the space in the housing 110 of saving configuration cable 200 more.
In addition, in Fig. 3, exemplified the example of the situation on the bottom surface that will be installed in swivel plate 126, but may not be defined in this as the top connector 150 of an end of cable 200.For example also top connector 150 can be installed on the side of swivel plate 126.In addition, in Fig. 3, exemplified the example of the situation on the bottom surface that will be installed in housing 110, but may not be defined in this as the bottom connector 160 of the other end of cable 200.For example also bottom connector 160 can be installed on the side of housing 110.
, preferably correspondingly determine the volume number and the length of described cable 200 with the size in the space 116 of the position of the end of cable 200, configuration cable 200.For example the volume numerical example of the cable in the present embodiment 200 is as being 1.5.If according to this number, then when shown in Fig. 5 A, making rotating platform 120 that cable 200 rolls most from the initial point angle, rotate to when shown in Fig. 5 D, making the terminal point angle that cable 200 unclamps most, in any state of Fig. 5 A～5D, cable 200 can both be housed in the space 116.In addition, the volume number of cable 200 is not limited to described number.
In addition, in the present embodiment, we have illustrated that the initial point angle that makes rotating platform 120 is 0 degree (degree), and the terminal point angle is the situation of 270 degree (degree), but may not be defined in this.Also can with the use of rotating platform 120 correspondingly, make the terminal point angle be any angle in the scope of 0 degree (degree)～360 degree (degree).
In addition, in the present embodiment, following situation is illustrated, promptly, for example cable 200 as shown in Figure 3 is such, in the cable wiring space of flat cable configurations below rotating parts, and an end of flat cable is installed in from the position that the pivot of rotating parts staggers, increasing the spiral helicine mode of winding diameter gradually from this cable wiring space downwards, the other end of cable is installed on the housing.But may not be defined in this.But though the not shown top that also can for example the cable wiring space ought be arranged on rotating parts, and with the flat cable configurations in this space the time, one end of flat cable is installed in from the position that the pivot of rotating parts staggers, increasing the spiral helicine mode of winding diameter gradually from this distribution space upward, the other end of cable is installed on the housing.
More than, with reference to accompanying drawing preferred forms of the present invention is illustrated, but the present invention is not limited to relevant example certainly.If those skilled in the art, in the category of then putting down in writing in claims, it is self-evident can expecting various modifications or revise example, this is also belonged to certainly technical scope of the present invention.
For example in described execution mode, the situation that applies the present invention to substrate transfer apparatus is illustrated, but may not be defined in this, for example also can be applied to the situation of many cable configurations on the rotating parts of industrial machinery people's rotary unit and the rotating platform in the work mechanism etc.
The possibility of industrial application
The present invention can be applied to dispose the cable wiring of the supplies such as electric power and signal with many cables of the mechanism of rotation consisted of and substrate transfer apparatus.
Claims (9)
1. cable wiring construction is characterized in that: comprises,
Housing with cable wiring space;
To look down the mode in this cable wiring space, can be provided in the rotating parts in the described housing with the relative rotation; And
Be housed in the cable of the flat in the described cable wiring space, this cable is bonded with each other by many line bodies that are arranged in band shape and forms as one, and described each line body is configured on the described rotating parts in the mode of arranging along vertical direction;
One end of described flat cable is installed in from the position that the pivot of described rotating parts staggers, and the other end is installed on the described housing in the spiral helicine mode that increases winding diameter from this position towards described cable wiring space gradually.
2. cable wiring construction according to claim 1 is characterized in that:
Described rotating parts rotates along both forward and reverse directions to the terminal point angle from its initial point angle;
The length of described flat cable is the length that the winding diameter from the initial point angle of described rotating parts to terminal point angle and the corresponding described flat cable of its anglec of rotation changes at least.
3. cable wiring construction according to claim 2, it is characterized in that: the anglec of rotation of the described rotating parts that becomes hour at the winding diameter of described flat cable, an end of described flat cable and the other end along continuous straight runs of described flat cable stagger.
4. cable wiring construction according to claim 2, it is characterized in that: the anglec of rotation of the described rotating parts that becomes hour at the winding diameter of described flat cable, observe from the center of described rotating parts, an end of described flat cable staggers in an identical side with the other end of described flat cable.
5. cable wiring construction according to claim 1 is characterized in that: many line bodies that constitute described flat cable all have the same rate of curving.
6. cable wiring construction according to claim 5 is characterized in that: many line bodies that constitute described flat cable all have identical diameter.
7. cable wiring construction according to claim 1 is characterized in that: in many line bodies that constitute described flat cable, comprise the multicore cable that boundling has many monomer cables.
8. substrate conveying mechanism is characterized in that: comprises,
Can be arranged on the rotating platform above the housing with the relative rotation;
Be used to carry the carrying arm of the substrate of lift-launch on described rotating platform;
Be provided in the top in the described housing, can be with the swivel plate of described rotating platform around vertical axle rotation; And
Be configured in the flat cable in the space between described swivel plate and the described housing bottom surface, this cable is bonded with each other and forms as one and described each line body is arranged along vertical direction by being arranged in many banded line bodies,
One end of described flat cable is installed in from the position that the pivot of described swivel plate staggers, and the other end of this cable is installed on the described housing in the spiral helicine mode that increases winding diameter from this position downwards gradually.
9. cable wiring construction is used for cable configurations it is characterized in that can counterrotating rotating parts:
Described cable is by being arranged in the be bonded with each other cable of the flat that forms as one of many banded line bodies;
One end of the cable of described flat is installed in from the position that the vertical pivot of described rotating parts staggers, and is configured to increase gradually to vertical direction from this position the helical form of winding diameter.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-080639 | 2007-03-27 | ||
| JP2007080639A JP5037191B2 (en) | 2007-03-27 | 2007-03-27 | Substrate transfer device and cable wiring structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101277006A CN101277006A (en) | 2008-10-01 |
| CN101277006B true CN101277006B (en) | 2010-11-10 |
Family
ID=39916063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100885372A Expired - Fee Related CN101277006B (en) | 2007-03-27 | 2008-03-27 | Substrate conveying device and cable wiring construction |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5037191B2 (en) |
| KR (1) | KR100978409B1 (en) |
| CN (1) | CN101277006B (en) |
| TW (1) | TWI445115B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5628509B2 (en) * | 2009-10-21 | 2014-11-19 | 株式会社アイエイアイ | Electric press device |
| JP5149942B2 (en) * | 2010-07-21 | 2013-02-20 | ヤマハ発動機株式会社 | Head drive device and component mounting device |
| US20120108979A1 (en) * | 2010-10-27 | 2012-05-03 | Gore Enterprise Holdings, Inc. | Imaging catheter with rotatable array |
| JP5718134B2 (en) * | 2011-04-11 | 2015-05-13 | ヤマハ発動機株式会社 | robot |
| LU91826B1 (en) * | 2011-06-17 | 2012-12-18 | Ipalco Bv | Device for unwinding and winding up one or more lines |
| CN104995090B (en) | 2013-03-31 | 2017-05-03 | 深圳市大疆创新科技有限公司 | payload mounting platform |
| CN104515633B (en) * | 2013-09-26 | 2016-09-07 | 纳米新能源（唐山）有限责任公司 | Abrasive voltage power induction cable |
| CN104552289A (en) * | 2013-10-29 | 2015-04-29 | 精工爱普生株式会社 | Robot |
| CN106044397B (en) * | 2016-07-07 | 2018-09-21 | 诺力机械股份有限公司 | One discharge plate wire box |
| JP7031958B2 (en) * | 2016-12-27 | 2022-03-08 | 株式会社ディスコ | Transmission line cover assembly and processing equipment |
| JP6859756B2 (en) * | 2017-03-03 | 2021-04-14 | オムロン株式会社 | Control systems, controllers, control methods, and control programs |
| CN107766667B (en) * | 2017-10-27 | 2021-04-13 | 中国空间技术研究院 | Method for designing direction of space motion cable |
| CN107866820A (en) * | 2017-12-26 | 2018-04-03 | 哈尔滨思哲睿智能医疗设备有限公司 | A kind of bar linkage structure mechanical arm rotates string-passing structure |
| JP7081311B2 (en) * | 2018-06-04 | 2022-06-07 | 京セラドキュメントソリューションズ株式会社 | Image forming device |
| JP7290312B2 (en) * | 2018-07-03 | 2023-06-13 | 株式会社アイエイアイ | Actuator and SCARA robot |
| JP2020088995A (en) * | 2018-11-21 | 2020-06-04 | ゲイツ・ユニッタ・アジア株式会社 | Wiring structure between rotating members |
| JP7016326B2 (en) * | 2019-01-09 | 2022-02-04 | 上銀科技股▲分▼有限公司 | Coupling module |
| US10836052B2 (en) | 2019-02-06 | 2020-11-17 | Hiwin Technologies Corp. | Connection module using in robot |
| JP7022091B2 (en) * | 2019-03-11 | 2022-02-17 | ファナック株式会社 | robot |
| EP3999285B1 (en) * | 2019-07-17 | 2024-01-24 | Abb Schweiz Ag | Robot arm link and robot |
| JP7564692B2 (en) * | 2020-11-24 | 2024-10-09 | ニデックインスツルメンツ株式会社 | Industrial Robots |
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| JPS5316516B2 (en) * | 1972-06-12 | 1978-06-01 | ||
| JPS6113530U (en) * | 1984-06-25 | 1986-01-27 | 三菱電線工業株式会社 | Optical/power cable winding device |
| JPS6146191U (en) * | 1984-08-29 | 1986-03-27 | ぺんてる株式会社 | Wiring device between arms of articulated robot |
| JPS62207114A (en) * | 1986-03-05 | 1987-09-11 | 三菱電機株式会社 | Cable wiring structure at rotating part |
| JPH06318045A (en) * | 1993-05-07 | 1994-11-15 | Kokusai Electric Co Ltd | Turning display device |
| KR200152377Y1 (en) * | 1996-09-30 | 1999-07-15 | 김재복 | Curl cable of robot for moving section |
| JP3284936B2 (en) * | 1997-08-25 | 2002-05-27 | 住友電装株式会社 | Transfer cable |
| JP4635301B2 (en) * | 2000-06-28 | 2011-02-23 | シンフォニアテクノロジー株式会社 | Industrial robot |
-
2007
- 2007-03-27 JP JP2007080639A patent/JP5037191B2/en not_active Expired - Fee Related
-
2008
- 2008-03-26 TW TW097110778A patent/TWI445115B/en not_active IP Right Cessation
- 2008-03-26 KR KR1020080027985A patent/KR100978409B1/en not_active IP Right Cessation
- 2008-03-27 CN CN2008100885372A patent/CN101277006B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR100978409B1 (en) | 2010-08-26 |
| TW200908187A (en) | 2009-02-16 |
| TWI445115B (en) | 2014-07-11 |
| JP2008245390A (en) | 2008-10-09 |
| JP5037191B2 (en) | 2012-09-26 |
| CN101277006A (en) | 2008-10-01 |
| KR20080087739A (en) | 2008-10-01 |
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