200908187 九、發明說明 【發明所屬之技術領域】 本發明係有關配設數條纜線的纜線配設構造與基 送裝置，係用於對載置用於搬送半導體晶圓或FPD ( Panel Display ’平板顯示器）基板等之搬送臂的旋轉 伴隨旋轉之機構供應電力或訊號等。 【先前技術】 在例如以半導體製造工程對半導體晶圓或FPD基 實施蝕刻或成膜等之特定處理的半導體製造裝置上， 具備將基板搬送至裝置內各處之搬送臂之基板搬送裝 搬送臂係安裝在例如旋轉台上俾變更臂的伸縮方向。 基板搬送裝置中，由於搬送臂的驅動機構係載置於旋 上’必須在旋轉台配設用於對該驅動機構供應電力或 之多條線條體，例如電線或纜線等。 要在該旋轉台等之旋轉構件上配設多條纜線時， 作法係在該旋轉構件與外殼內之底部之間，直接分散 多條纜線’以該等纜線彼此不致互相磨擦的程度擴大 的配設空間。 [專利文獻1]特開2000-69655號公報發明內容 【發明內容】 [發明擬解決的課題] 但是’近年來，隨著半導體裝置的多功能化，此 板搬 Flat 台的 板等 設有 置。 在該 轉台 訊號 先前 配置 纜線 種基 -5- 200908187 板搬送裝置也被要求小型化’用於配設纜線之空間也被要 求儘量小型化。另方面隨著設置於旋轉台上之搬送臂等的 多功能化，非配設的纜線數也增加’而且供應電力等也增 加以致纜線直徑也有增大的傾向。 若將該項纜線裝入比先前更狹窄的空間，並與先前一 樣將纜線直接分散配設，則纜線的配設空間越狹窄，在旋 轉台旋轉而纜線搖動時，纜線彼此容易互相磨擦或糾纏。 這將對纜線本身施加負載，而有導致纜線之損傷或斷線等 之虞。另外，在旋轉台旋轉而續線搖動時，許多纜線會互 相散亂糾纏搖動而很不容易預測整體的形態或動向的軌 跡。 此時，雖然可以想法利用纜線槽（Cable duct )或纜 線支架（Cable bearer )等彙集成一條，惟若以該種纜線 槽或纜線支架彙集，則纜線數變得越多，或單元纜線的直 徑越大時，纜線槽或纜線支架也會變得越大，因此在狹小 空間中無法裝入纜線槽或纜線支架。設若可以裝入，在旋 轉台旋轉時，許多纜線彼此在纜線槽或電線支架內會互相 磨擦以致有對纜線施加負載之虞。 此外’在專利文獻1中’記載有將形成於環形的多條 單元纜線依次徑向排列’並將該等互相接合而成之扁形環 狀形態之集成纜線彎曲成略呈u字形俾在平面看來呈彎曲 於上下方向之續線裝置。在該纜線裝置中，旋轉彎曲部 時’藉由將彎曲部朝上下方向膨脹來吸收彎曲部之相對旋 轉，以防止纜線的糾纏。在該構造中，由於將彎曲部彎曲 ' 6 - 200908187 成U字形，對於單元纜線的直徑比較小而容易彎曲時有 效。但是，如上所述，單元纜線的直徑越大’不僅本身不 易彎曲成U字形，縱使可以彎曲成U字形，施加於各單 元纜線的彎曲部的負載極大，所以設成該種形態並不適 當。 因此，本發明爲鑑及上述而完成者，其目的在提供一 種纜線的配設構造與基板搬送裝置，其係在旋轉構造配設 纜線時，可以邊抑止對構成纜線之各線條體所旋加之負 載，邊防止纜線隨旋轉構件之旋轉而搖動時之互相磨擦與 糾纏，藉以節省纜線之配設空間。 [解決問題之手段] 爲解決上述課題，本發明之一形態提供一種纜線配線 構造，其特徵爲具備：具有纜線配設空間的外彀；在上述 外殼配設可以相對旋轉俾可窺視該纜線配設空間之旋轉構 件；以及將排列成帶狀之多條線條體互相接合成一體而 成，上述各線條體配設於上述旋轉構件俾排列於垂直方 向，並收容於上述纜線配設空間之扁平纜線；上述扁平纜 線之一端係裝設於由上述旋轉構件之旋轉中心偏離的位 置，另一端則固定於上述外殻，俾捲徑由該處朝上述纜線 配線空間慢慢擴大成螺旋狀。另外，在上述旋轉構件中， 不僅包含例如旋轉台似地以單元旋轉的旋轉構件，而且包 含與固定於旋轉構件本身之旋轉構件本身一起旋轉之旋轉 體，旋轉板等。 200908187 爲解決上述課題，本發明之另一形態提供一種纜線配 線構造，其係可在相對旋轉的旋轉構件上配設纜線；其特 徵爲：上述纜線爲將排列成帶狀之多條線條體互相接合成 一體之扁平纜線；上述扁平纜線之一端係裝設於由上述旋 轉構件之垂直的旋轉中偏離之位置，並配設成捲徑由該處 慢慢朝垂直方向擴大之螺旋狀。 利用本發明，扁平纜線會依照旋轉構件之旋轉描繪螺 旋狀的捲徑變化一般的軌跡（例如扭擺式運動）。如此一 來，即可以簡單預測依照旋轉構件之旋轉而變化的扁平纜 線的形態或軌跡，而且可以防止扁平纜線隨著旋轉構件之 旋轉而搖動時之磨擦或糾纏。另外，又將扁平狀纜線設成 多條線條體互相接合成一體，因此可以防止各線條體之磨 擦或糾纏。此外，藉將扁平電纜的形態設成捲徑慢慢由旋 轉構件朝向纜線配設空間擴大之螺旋狀，則即使構成扁平 纜線之線條體之直徑較大，也可以降低施加於各線條體之 負載。又配設係在垂直方向呈螺旋狀，因此可以更節省水 平方向之纜線配設空間。再者，藉將扁平纜線之一端裝設 於由旋轉構件之旋轉中心偏離之位置，可以更有效利用水 平方向之纜線配設空間。 另外，上述旋轉構件宜由起點角度至終點角度旋轉於 正逆方向；上述扁平纜線長度至少由上述旋轉構件之起始 角度至終點角度爲止宜依照其旋轉角度設成上述扁平狀纜 線之捲徑變化之長度。如此一來，扁平纜線之形態或軌跡 會依旋轉構件所使用之旋轉角度之範圍加以限制’因此’ -8- 200908187 扁平纜線之長度可以與其配合調整至必要的最小限度。 此外，上述扁平纜線的捲徑縮成最小時之上述旋轉構 件之旋轉角度的上述扁平纜線之一端宜由上述扁平續線之 另一端偏離於水平方向。如此一來’可以在扁平續線的捲 徑具有某種程度的寬度。藉此’可以使續線配設空間的高 度方向降低。 再者，扁平纜線的捲徑變得最小時之上述旋轉構件之 旋轉角度的上述扁平纜線之一端由上述旋轉構件之中心看 來，宜偏離於上述扁平纜線之另一端之同側。如此一來’ 當旋轉構件旋轉而扁平纜線鬆散時’可以使其不至於擴大 至水平方向之反對側，因此’也可以更縮小纜線配設空間 的水平方向。 另外，構成扁平纜線的多條線條體宜全部具有相同的 撓曲率。如此一來’當扁平纜線之捲徑搖動而改變時’可 以使各線條體不受任何負載。另外’構成上述扁平纜線的 多條線條體宜具有相同直徑。藉此，可以防止扁平纜線搖 動時，僅對特定的線條體（例如小徑纜線）施加負載。 此外，構成上述扁平纜線的多條線條體中包含一集束 多條的單元纜線的多芯纜線。藉此，可以減少構成扁平纜 線的線條體之總數。 爲解決上述課題，本發明的另一形態提供一基板搬送 機構，其特徵爲具備：設成可以在外殻上面相對旋轉之旋 轉台；用於搬送載置於上述旋轉台上之基板的搬送臂；配 置於上述外殻內之上方而與上述旋轉台一起旋轉於垂直軸 -9- 200908187 周圍的旋轉板；以及扁平纜線，將排列成帶狀之多條線條 體互相接合成一體，並在上述旋轉板與上述外殼底面之間 的空間配設俾使上述各線條體排列成垂直方向；上述扁平 纜線之一 5而裝設於偏離上述旋轉板的旋轉中心之位置，另 一端則裝設於上述外殼，俾捲徑由該處向下慢慢朝向下方 擴大成螺旋狀。 利用本發明，在對與旋轉台一起旋轉之旋轉板上配設 時，可以邊抑制對構成纜線的各線條體施加之負載，邊防 止纜線隨著旋轉台（旋轉板）之旋轉而搖動時之磨擦或糾 纏，進一步節省纜線配設空間。如此一來，可以將基板搬 送裝置整體更小型化。 [發明效果] 利用本發明，要在旋轉構件配設纜線時，邊抑制對構 成纜線的各線條體所施加的負載，並配設成容易預測其形 態或軌跡，即可防止纜線隨著旋轉構件之旋轉而搖動時之 磨擦或糾纏，並且更加節省纜線之配設空間。 【實施方式】 [實施發明之最佳形態] 以下參照附圖詳細說明本發明之較佳實施形態。另 外，在本說明書與圖式中，對於具有實質上相同之功能構 造的構造元件附以相同符號而省略其贅述。 -10- 200908187 (基板搬送裝置） 首先’參照圖式說明適用本發明於搬送基板之基板搬 送裝置時之實施形態。圖1爲表示基板搬送裝置的構造之 剖面圖。基板搬送裝置100具備：箱形外殼110，設成可 在該外殼110上面旋轉自如的圓板狀旋轉台120，以及設 置於旋轉台1 2〇上成伸縮自如於水平方向的搬送臂1 3 0。 在本實施形態中’要以對該旋轉機構供應電力或訊號等之 纜線200配設於外殼1 1 0內之狹窄空間之纜線配設構造爲 例加以說明。 外殼ho上面呈開口的箱體狀，外殻11〇內上部安裝 有用於使旋轉台1 2 0在中心軸（垂直軸）周圍旋轉或轉 動的載台驅動用馬達1 1 2。例如在載台驅動用馬達1丨2設 有凸緣部1 1 3，該凸緣部1 1 3係以螺桿等連結構件安裝於 外殼110的上部內面。載台驅動用馬達112之旋轉軸 (驅動軸）114由外殼110上面之開 口部突出，並透過 凸緣部115裝設於旋轉台120下面。 搬送臂130被構成例如圖1所示由3軸水平多關節機 器人（Scala Robot)所構成之臂（manipulator)。具體地 說搬送臂130將可在水平面內旋轉之2支連桿（link) (第1連桿132，第2連桿134)與終端受動器（End effector) 136串連而成。更詳細地說，配置於最下方之第 1連桿132之基端部透過旋轉軸（肩軸）142安裝成可在 水平面內旋轉於旋轉台1 2 0。 在第1連桿132之前端部透過旋轉軸（肩軸）144在 -11 - 200908187 配置於其上方之第2連桿134之基端部安裝成可 內旋轉。在第2連桿134之前端部透過旋轉軸 146將構成爲可載置與保持基板G之鑷子（pinse 基端部裝設成可以在水平面內旋轉。 在第1，第2連桿132，134內部，內裝傳動 於由裝設於旋轉台1 2 0之未圖示之臂伸縮驅動用 生之驅動力傳達至各連桿部或手部（例如皮帶輪 減速器等）。在圖1所示例子中，構造上，各連 134與絡端受動器136帶動進行旋轉運動，俾使 器136以第1連桿132之基端部之旋轉軸（肩 點，前進移動於其長度方向。 利用上述搬送臂1 3 0可以藉由驅動臂伸縮驅 使臂伸縮於水平方向，以進行基板G之交接。另 臂1 3 0的構造並非侷限於圖1所示者。例如，搬 也可以爲具有可以線性驅動來伸縮的臂的線性滑 送臂。 在此種搬送臂130中，因與旋轉台120 —體 此，可以將臂伸縮於企望的方向。此時，旋轉台 不旋轉一圈以上，利用正旋轉或逆旋轉至企望之 此，可以將纜線200之長度抑制於最小限度。 在該旋轉台120下面裝設有用於穿通配設 120內的上述臂伸縮驅動用馬達等之內部機器之 管122。該配管122係插入貫穿載台驅動用馬達 轉軸114而形成之通孔124，並配置成配管122 在水平面 (肘軸） t ) 136 之 機構，用 馬達所產 ’皮帶， 桿 132， 終端受動 軸）爲基 動用馬達 外，搬送 送臂130 動型的搬 旋轉，因 1 2 0可以 角度。藉 於旋轉台 配設的配 1 12，旋 之下端由 -12- 200908187 載台驅動用馬達112之下方突出而延伸至外殻110內。配 管122下端設有圓板形之旋轉板126。旋轉板126係配置 成可由外殼110內上方窺視外殻110內之配設空間116。 在旋轉板1 2 6下方透過例如L形構件1 5 2裝設有用於 連接配管122內之配設的上部連接器150。因此，該等配 管122’旋轉板126，上部連接器150係與旋轉台120 — 體旋轉。另一方面，在外殻110內底面透過例如L形構件 162設有下部連接器16〇。該等上部連接器150與下部連 接器1 60構成爲例如收容有多個端子於連接器套中的多極 連接器。 上部連接器150係用於互相電連接載置於旋轉台120 之臂伸縮驅動用馬達等之內部機器之配設與纜線200之用 者。另外，下部連接器1 60係用於互相電連接設置於外殻 1 1 0外之電源裝置等之外部機器之配設與纜線200之用 者。此外，內部機器之配設係透過例如上述配管1 22連接 到旋轉台1 20內之內部機器，而外部機器之配設則由例如 設置於外殼1 1 〇底部之孔1 1 8延伸至外殻1 1 0之外而連接 到外部機器。 上部連接器150與下部連接器160係以纜線200連 接。該纜線200係用於供應上述之臂伸縮驅動用馬達之訊 號或電力者，其構成細節容後敍述。此外，在下部連接器 1 6 0裝設有未圖示之配設，該配設由例如外殼1 1 0的孔 1 1 8延伸至外部。然後，該等配線被連接到例如外部的電 源裝置，控制裝置等。 -13- 200908187 在此種構造的基板搬送裝置1 00中’非將纜線200配 設於比外殻110內之旋轉板126更下側之空間116內不 可。此種纜線的配設空間除了要求比先前更高的節省空間 之外，非隨著設置於旋轉台上的搬送臂等之多功能化配設 不可之纜線數目會增加，同時須供應電力等也增加以至於 纜線直徑也增大。 此外，連接纜線2 0 0之一端的上部連接器1 5 0除了旋 轉於垂直軸周圍之外，還固定於連接纜線200之另一端之 下部連接器160係固定於外殼110，因此，纜線200本身 也隨著上部連接器1 5 0之旋轉而搖動並變化其形態。從 而，必須預測纜線200之軌跡來配設纜線200俾使不管變 成何種形態皆可進入狹窄空間U 6內。 可是，如本實施形態的基板搬送裝置1 00所使用的纜 線200用於對旋轉機構供應電力或訊號的纜線係由電力纜 線或訊號纜線等不同直徑的許多纜線所構成，因此，若將 該等纜線原封不動散亂配設時，則當上部連接器1 5 0旋轉 而纜線搖動時，纜線彼此會磨擦或糾纏。如此一來，纜線 本身會有負載，會招致纜線之損傷或斷線等。另外，當上 部連接器1 50旋轉而纜線搖動時，許多纜線會散亂而糾纏 在一起來，因此，要預測整體形態或動向之軌跡非常困 難。 此時，可以想法將該等許多纜線以纜線管或纜線支架 等集束成一條，惟如用此種纜線管或纜線支架集束，則纜 線數目越多或各纜線之直徑越粗，整體上非選擇相當粗的 -14- 200908187 纜線管或纜線支架不可’如本實施形態那樣狹窄的空間 1 1 6是無法放入纜線管或纜線支架本身。設若可以放入， 則在上部連接器1 50旋轉時，纜線管或纜線支架內有許多 纜線彼此磨擦而有對纜線附加負載之虞。 因此，在本實施形態中，將纜線2 0 〇排列成帶狀之多 條線條體互相接合成爲一體化之扁平纜線，並扁平纜線 2 00配設成捲徑朝垂直方向慢慢擴大成螺旋狀。如此一 來，構成纜線200之多條線條體間絶不會互相磨擦或糾 纏，即使構成纜線2 0 0之線條體的直徑較大，也可使各線 條體所受負載減少。 而且由於上部連接器150隨著旋轉板126正旋轉與逆 旋轉，螺旋狀的纜線200的動向只有成爲被捲緊或鬆驰的 單調動向（例如扭擺式運動，扭轉運動），因此，整體的 形態或其動向的軌跡極容易預測。因此，爲不使纜線200 互相磨擦，或接觸到外殼1 1 〇內面，以及容易決定纜線 2〇〇的捲數，長度，以及兩端部之位置等’可以有效使用 狹窄空間內部配設纜線2 0 0。 (纜線的構造例與配設） 茲參照圖式更詳細說明此種本實施態的纜線200之構 造例與配設例。圖2爲圖1所示之纜線200之P-P’剖面 圖。首先，說明纜線的構造例。本實施形態之纜線200也 如圖2所示，係將多條（在此爲5條）之線條體210至 2 5 0排成一列，並將該等接合成一體者。藉此’可使纜線 -15- 200908187 200成爲扁平狀。 各線條體210至250爲對搬送臂之各軸之馬達或終端 受動器等供應電源之多個電源纜線（電源線），在編碼器 (Encoder )或感測器類或各種控制機器與控制器之間授 受控制訊號，而由多個訊號纜線（訊號線）等所構成。另 外，各線條體2 1 0至250不但纜線，也可以包含電線，供 應液體或氣體的中空軟管等所構成者。 此外，各線條體2 1 0至2 5 0係將相同直徑或不同直徑 之多條單元纜線單條或多條集束而成。例如在具有電源纜 線一般的大徑單元纜線與訊號纜線一般的小徑單元纜線 時，以大徑的單元纜線一條做爲線條體，將小徑的單元纜 線做爲多條分別集束之多芯纜線，即可減少構成纜線200 的線條體的總數。 例如，線條體2 1 0，2 3 0，2 5 0分別爲一條大徑的單元 纜線212，23 2，2 52所構成，線條體220爲將3條小徑的 單元纜線222集束的多芯纜線所構成，而線條體240爲將 2條小徑的單元纜線242集束的多芯纜線所構成。 另外，具有多條訊號纜線的多芯纜線所構成的線條體 之屏蔽處理（Shielding treatment)係整批進行。如上 述，訊號纜線藉由屏蔽處理，即可防止由電子機器本身發 生之雜訊（Noise )而導致之誤操作或所發生的雜訊之授 受。此外，不用多芯纜線時，每一個訊號纜線必須分別使 用屏蔽纜線（未圖示）。每一屏蔽纜線係以例如由導體構 成之芯線，覆蓋芯線周圍的絶緣內皮，設置於絶緣內皮周 -16- 200908187 圍的編織線’以及設置於編織線周圍的絶緣外皮所構成。 該等線條體210至250之抗彎强度至少分別被調整成 相同程度之撓曲率。抗彎强度之調整可以例如線條體2 1 0 至250的包皮（Sheath )(例如以絶緣性樹脂所構成的絶 緣外皮）214至2 54之厚度或材質來調整，或以塡充於線 條體220，240內之間隙的編織線226，246或緩衝材料來 調整。此外，編織線係將細線編織成條格狀者，惟也可以 利用銅箔等做爲屏蔽材料以取代編織線。 如上述，藉將線條體2 1 0至250全部設成具有相同撓 曲率，在纜線2 00的捲徑變動時，可以使各線條體210至 2 50不受到負載。另外，還可以使各線條體210至25 0的 抗彎强度的偏移消失，因此，可以使纜線200經時以平行 於垂直方向之狀態而僅變更捲徑的動向。藉此，纜線200 絶不會傾斜，所以可以防止被捲回之纜線200間之接觸。 另外，在本實施形態的纜線200中，不僅各線條體 210至250之撓曲率，而且直徑（粗度）也調整成相同的 程度。對於直徑（粗度）的調整也與撓曲率的調整一樣， 可利用包皮的厚度或材質，以及塡充於各線條體之間隙的 細紗或緩衝材料來調整。例如若將小徑纜線與大徑纜線排 成一列，而將該等接合成扁平形狀時，則纜線200搖動 時’容易在小徑纜線一方施加負載。因此，如同本實施形 態之纜線2 00，藉將各線條體210至2 5 0全部設成相同直 徑時’即可防止纜線200搖動時，僅對特定的線條體（例 如小徑纜線）施加負載。 -17- 200908187 其次，說明纜線200的配設例。在此，將旋轉台1 20 控制成可以正旋轉與逆反轉由起點角度（在此爲〇度 (degree)至終點角度（在此爲270度）爲止旋轉至企望 的角度。此時之纜線200之長度宜設成至少由旋轉台120 之起點角度至終點角度，依照旋轉角度纜線200之捲徑變 化之長度。如此一來，纜線200之形態或軌跡會依照旋轉 台120所使用之旋轉角度之範圍被限定，所以可與其配合 將纜線2 0 0之長度調整至必要之最小限度。 茲參照下面圖3至圖5說明在此情形下，最適當的纜 線2 00之配設例。圖3爲表示旋轉台120在起點角度時之 纜線200之形態之外觀之圖。圖4爲表示旋轉台120在終 點角度時之纜線2 0 0之形態之外觀之圖。 在本實施形態中，係將如圖3所示之旋轉台1 20由起 點角度時之纜線200之狀態到達圖4所示之旋轉台1 20在 終點角度時之纜線2 0 0之狀態爲止之纜線2 0 0之動向（軌 跡）配設於空間1 16內。具體地說，如圖3所示，連接有 纜線2 0 0之一端的上部連接器1 5 0與連接於纜線2 0 0之另 一端之下部連接器1 60配置於垂直方向僅離開高度HAB， 同時於水平方向配置僅離開距離DAB。藉此，纜線200可 以由其內徑側之一端以高度方向配置成螺旋狀至外形側的 另一端。此時，纜線2 0 0之各線條體2 1 0至2 5 0係平行捲 回於上下方向。 在此，在圖5A至圖5D圖示在外殼110的空間116 內配設如上所述之纜線200時之纜線200之動向（軌 -18- 200908187 跡）。圖5A至圖5D爲表示由起點角度至終點角 之纜線200之動向之圖，爲分別由上方所見纜線 圖。此外，在圖5A至圖5D中，略去旋轉台120, 旋轉台1 2 0與旋轉板1 2 6係一體旋轉者，因此在下 轉台1 2 0之角度說明成旋轉板1 2 6之角度。此外 5A至圖5D中，設下部連接部160之位置（固定） 旋轉板1 2 6在起點角度時之上部連接器1 5 0之位 點）爲A。 圖5 A圖示旋轉板1 26在起點角度0度時之續 之捲回狀態。圖5B圖示旋轉板126由起點角度在 旋90度時之纜線200的捲回狀態，圖5C圖示旋_ 由起點角度在圖中右旋轉1 80度時之纜線200之 態。圖5D圖示旋轉板126由起點角度在圖中右旋 角度270度時之纜線200之捲回狀態。 如圖5 A所示，纜線2 0 0在旋轉板1 2 6爲起 時，呈繞得最緊之狀態，纜線2 0 0的捲徑成爲最小 旋轉板126由該狀態旋轉至圖5B，圖5C時，纜線 漸鬆弛，纜線2 00之捲徑也慢慢變大。而如圖5D 旋轉板1 2 6爲終點角度時，纜線2 0 0呈最鬆弛狀態 2〇〇之捲徑也成爲最大。如上所述，纜線200之捲 不管在圖5 A至圖5爲止何種狀態皆能收容於空間 而不受干擾。 如上述，在擴充至高度方向與水平方向之空間 設成螺旋轉之纜線200中，當旋轉台120在起點角 度爲止 200之 惟因爲 面將旋 ，在圖 爲B， 置（起 線2 00 圖中右 板1 2 6 捲回狀 轉終點 點角度 。隨著 2 00逐 所示， ，纜線 回狀態 1 1 6內 116配 度時之 -19- 200908187 纜線200的一端之上部連接器150與另一端之下部連接器 1 60宜在水平方向錯開配置。在本實施形態中’如圖3所 示，上部連接部150與下部連接部160係在水平方向僅錯 開DAB配置。 如上述，藉將旋轉台120在起點角度時之纜線200之 一端與另一端之水平方向之位置錯開，可以使纜線200之 捲徑具有某種程度之寬度。如此一來，可以將纜線200之 配設空間1 1 6之高度方法設成更小。 例如，旋轉台120在起點角度時之纜線200之一端之 上部連接器1 5 0之水平方向之位置，與另一端之下部連接 器160之水平方向之位置一起配置於越靠近旋轉台120之 旋轉中心之位置，捲徑變得越小，所以爲使纜線200不致 互相干擾，必須擴大的垂直方向之空間。 相對地，藉由分開上部連接器1 5 0的水平方向之位置 與另一端的下部連接器1 6 0的水平方向之位置，即可使捲 徑由內側向外側慢慢變大，因此可邊保持纜線2 0 0間互不 干擾的狀態’邊使上部連接器1 5 〇與下部連接器1 6 0之高 度 ΗAB變得更低。藉此’可以謀求節省配設纜線200的 外殻1 1 〇內之空間。 另外’如圖3與圖5所示’旋轉台12〇在起點角度時 之纜線200之一端的上部連接器150的水平面位置宜配置 於另一端之下部連接器1 6 〇的配置側而由旋轉台丨2 〇之旋 轉中心錯開。在本實施形態中，如圖3所示，將上部連接 器150配置於由旋轉台120之旋轉中心僅錯開Da至與下 -20- 200908187 部連接器160同側。 藉此’當旋轉台120旋轉而纜線200逐漸鬆弛 以使其不致朝水平方向之反對側擴大，因此，可以 2 〇 〇之配設空間1 1 6之水平方向縮小。 例如’當旋轉台120在起點角度時之纜線200 之上部連接器150的水平方向之位置越接近中心， 旋轉而纜線2 0 0鬆弛時，纜線2 0 0會越朝與上部 1 5 〇的配設側之相反側之空間（在圖3中比旋轉台 旋轉中心更右側之空間）擴大，反而需要更大的水 的空間。 相對地，藉將旋轉台1 2 0在起點角度時之纜線 一端的上部連接器150之水平方向之位置由旋轉台 旋轉中心錯開配置，即可抑制向其相反側的空間擴 此，可以更縮小水平方向之空間。藉此，可以進一 節省用於配設纜線2 0 0之外殼1 1 0內之空間。 另外，雖然在圖3曾以纜線2 0 0之一端之上部 1 5 0裝設於旋轉板1 2 6之底面之情形爲例，但是不 限於此。例如，也可以在旋轉板1 2 6之側面安裝上 器1 5 0。另外，在圖3係將纜線2 0 0之另一端之下 器1 60裝設於外殼1 1 〇之底面之情形爲例，但是不 限於此。例如也可以在外殼1 1 〇側面安裝下部 160° 可是，上述纜線2 0 0之捲數或長度宜依照纜線 端部之位置，與配設纜線200之空間1 1 6之大小來 時，可 使纜線 之一端 旋轉台 連接器 120之 平方向 200之 120之 大，因 步謀求 連接器 一定侷 部連接 部連接 一定侷 連接器 200之 決定。 -21 - 200908187 例如本實施形態中之纜線200之捲數爲1 . 5。藉此，即可 如圖5A所示，纜線200捲得最緊的旋轉台120由起點角 度旋轉至如圖5D所示纜線200最鬆驰之終點角度爲止 時，在圖5A至圖5D中之任何狀態中，皆可使纜線200 被收容於空間Π 6內。此外，纜線200的捲數並不侷限於 上述者。 再者，在本實施形態中，係以旋轉台1 20做起點角度 〇度，而設終點角度爲270度之情形加以說明，但是不一 定侷限於此。配合旋轉台1 20之使用，終點角度可以設定 於〇度至360度之範圍內任何角度。 另外，本實施形態中，如圖3所示之纜線200，將扁 平纜線配設於旋轉構件下方的纜線空間內，並將扁平纜線 之一端裝設於由旋轉構件之旋轉中心偏離之位置，而將其 另一端裝設於外殻俾捲徑由該處朝向下方之纜線配設空間 慢慢擴大成螺旋狀之情形加以說明，惟並不侷限於此。雖 未圖示，惟在例如旋轉構件上方設有纜線配設空間並在該 空間內配設扁平纜線時，也可以將扁平纜線之一端安裝於 偏離旋轉構件之旋轉中心之位置，並將其另一端安裝於外 殼俾捲徑由該處朝向上方之纜線配設空間慢慢地擴大成螺 旋狀。 以上，已參照附圖說明了本發明之較佳實施形態，惟 本發明不限於有關諸例自不待言。只要是業者，皆可在申 請專利範圍所記載的範圍內思及各種變更例或修正例，至 爲明顯；該等變更例或修正例當然也屬於本發明的技術範 -22 - 200908187 圍。 例如，上述之實施形態中，針對適用本發明於基板搬 送裝置之情形加以說明，但並不限定於此，例如，也可以 適用於例如在產業用機器人之旋轉部或工具機（machine tool )上之轉盤（turntable )等旋轉構件上配設多條纜 線。 [產業上之可利用性] 本發明可以適用於對伴隨旋轉的機構配設供應電力或 訊號等之多條纜線之纜線配設構造以及基板搬送裝置上。 【圖式簡單說明】 圖1爲表示本發明之實施形態之基板搬送裝置之剖面 圖。 圖2爲圖1所示之纜線之P-P’剖面圖。 圖3爲表示旋轉台爲起點角度時之纜線的形態外觀 圖。 圖4爲表示旋轉台爲終點角度時之纜線的形態外觀 圖。 圖5A爲由上方所見旋轉台（旋轉板）在起點角度的 0度時之捲回狀態之圖。 圖5B爲由上方所見旋轉台（旋轉板）由起點角度旋 轉90度時之纜線的捲回狀態之圖。 圖5C爲由上方所見旋轉台（旋轉板）由起點角度旋 -23- 200908187 轉1 8 0度時之纜線的捲回狀態之圖。 圖5 D爲由上方所見旋轉台（旋轉板）由起點角度旋 轉2 7 0度時之纜線的捲回狀態之圖。 【主要元件符號說明】 100:基板搬送裝置，110:外殼，112:載台驅動用 馬達，11 3 :凸緣部，1 14 :旋轉軸（驅動軸），1 1 5 :凸 緣部，1 1 6 :空間（配設空間），：1 1 8 :孔，12 0 :旋轉 台，122 :配管，124 :通孔，126 ··旋轉板，130 :搬送 臂，132、134:連桿，136:最終受動器，142:旋轉軸 (肩軸），144 :旋轉軸（肘軸），146 :旋轉軸（耳 軸），150 :上部連接器，152 : L形構件，160 :下部連 接器，1 6 2 : L 形構件，2 0 0 :纜線，2 1 0、2 2 0、2 3 0、 240、25 0 ：線條體，212、222、232、242、2 5 2 ：單元纜 線，214、224、234、244、2 54 ：包皮，226、246 ：編織 線，G :基板 -24-200908187 IX. INSTRUCTIONS OF THE INVENTION [Technical Fields of the Invention] The present invention relates to a cable arrangement structure and a base feeding device for arranging a plurality of cables for mounting semiconductor wafers or FPDs (panel display) The rotation of the transfer arm such as the "flat panel display" substrate is supplied with electric power, a signal, or the like in association with the rotating mechanism. [Prior Art] A semiconductor manufacturing apparatus that performs a specific process such as etching or film formation on a semiconductor wafer or an FPD substrate by a semiconductor manufacturing process, and a substrate transfer transfer arm that transports the substrate to a transfer arm in the apparatus It is mounted on, for example, a rotating table to change the direction of expansion and contraction of the arm. In the substrate transfer apparatus, since the drive mechanism of the transfer arm is placed on the rotary unit, it is necessary to provide a plurality of linear bodies, such as electric wires or cables, for supplying electric power to the drive mechanism on the rotary table. When a plurality of cables are disposed on the rotating member of the rotating table or the like, the method is to directly disperse a plurality of cables between the rotating member and the bottom of the casing, so that the cables do not rub each other with each other. Expanded space for deployment. [Patent Document 1] JP-A-2000-69655 SUMMARY OF INVENTION Technical Problem [Problems to be Solved by the Invention] However, in recent years, with the versatility of semiconductor devices, boards of such a board-mounted Flat table have been placed. . In the turntable signal, the cable was previously installed. -5- 200908187 The plate transporter was also required to be miniaturized. The space for the cable is also required to be miniaturized as much as possible. On the other hand, as the number of the non-arranged cables increases due to the multi-functionality of the transfer arm or the like provided on the turntable, the supply of electric power and the like also increases, and the cable diameter tends to increase. If the cable is installed in a space narrower than before, and the cable is directly distributed as before, the narrower the space for the cable is, and the cables are easy to each other when the rotary table rotates and the cable is shaken. Rub or entangle with each other. This will impose a load on the cable itself, which may result in damage or disconnection of the cable. In addition, when the rotary table rotates and the continuous line is shaken, many cables are scattered and entangled with each other, and it is difficult to predict the overall shape or the trajectory of the movement. At this time, although it is conceivable to use a cable duct or a cable bearer to collect one, if the cable duct or the cable bracket is assembled, the number of cables becomes larger. Or, the larger the diameter of the unit cable, the larger the cable slot or cable bracket becomes, so that the cable slot or cable bracket cannot be loaded in a small space. If it can be installed, when the rotary table rotates, many cables will rub against each other in the cable slot or the wire holder so that the load is applied to the cable. Further, 'Patent Document 1' describes that an integrated cable in which a plurality of unit cables formed in a ring shape are sequentially arranged in a radial direction and which are joined to each other in a flat annular shape is bent into a slightly U-shaped shape. The plane appears to be a continuous line device that is bent in the up and down direction. In the cable device, when the curved portion is rotated, the relative rotation of the bent portion is absorbed by expanding the curved portion in the up and down direction to prevent entanglement of the cable. In this configuration, since the bent portion is bent into a U-shape, it is effective when the diameter of the unit cable is relatively small and it is easy to bend. However, as described above, the larger the diameter of the unit cable is not only not easily bent into a U shape, but can be bent into a U shape, and the load applied to the bending portion of each unit cable is extremely large, so that the configuration is not appropriate. Therefore, the present invention has been made in view of the above, and an object of the invention is to provide a cable arrangement structure and a substrate transfer device which can suppress the respective line bodies constituting the cable when the cable is disposed in the rotation structure. The load is applied to prevent the cables from rubbing and entanglement when rocking with the rotation of the rotating member, thereby saving the space for the cable. [Means for Solving the Problems] In order to solve the above problems, an aspect of the present invention provides a cable wiring structure including: an outer casing having a cable arrangement space; and the housing is disposed to be relatively rotatable a rotating member for arranging a space in the cable; and a plurality of linear bodies arranged in a strip shape are integrally joined to each other, wherein the respective linear bodies are disposed in the rotating member and arranged in a vertical direction, and are accommodated in the cable a flat cable having a space; one end of the flat cable is disposed at a position deviated from a center of rotation of the rotating member, and the other end is fixed to the outer casing, and a winding diameter is slower from the portion toward the cable wiring space Slowly expand into a spiral. Further, the above-mentioned rotating member includes not only a rotating member that rotates in a unit like a rotating table but also a rotating body that rotates together with the rotating member itself fixed to the rotating member itself, a rotating plate or the like. 200908187 In order to solve the above problems, another aspect of the present invention provides a cable wiring structure in which a cable is disposed on a relatively rotating rotating member, wherein the cable is a plurality of strips to be arranged in a strip shape. a flat cable in which the line bodies are integrally joined to each other; one end of the flat cable is disposed at a position deviated from the vertical rotation of the rotating member, and is disposed such that the winding diameter is gradually expanded from the place to the vertical direction Spiral. With the present invention, the flat cable traces a general trajectory (e.g., a torsional motion) in which the spiral winding diameter changes in accordance with the rotation of the rotating member. In this way, the shape or trajectory of the flat cable which changes in accordance with the rotation of the rotating member can be simply predicted, and the friction or entanglement of the flat cable when it is shaken with the rotation of the rotating member can be prevented. In addition, the flat cable is formed such that a plurality of linear bodies are integrally joined to each other, thereby preventing rubbing or entanglement of the respective linear bodies. Further, by setting the shape of the flat cable so that the winding diameter is gradually expanded by the rotating member toward the cable arrangement space, even if the diameter of the linear body constituting the flat cable is large, the application to each of the linear bodies can be reduced. The load. In addition, the system is spiraled in the vertical direction, so that it is possible to save space in the horizontal direction. Further, by arranging one end of the flat cable at a position deviated from the center of rotation of the rotating member, it is possible to more effectively utilize the cable arrangement space in the horizontal direction. In addition, the rotating member preferably rotates from the starting point angle to the ending angle in the forward and reverse directions; and the length of the flat cable is set to be the volume of the flat cable according to the rotation angle of at least the starting angle to the ending angle of the rotating member. The length of the change in diameter. As a result, the shape or trajectory of the flat cable is limited by the range of rotation angles used by the rotating member. Therefore, the length of the flat cable can be adjusted to the necessary minimum. Further, one end of the flat cable of the rotation angle of the rotating member when the winding diameter of the flat cable is minimized is preferably deviated from the horizontal direction by the other end of the flat continuous line. As a result, it can have a certain width in the winding diameter of the flat line. Thereby, the height direction of the continuous line arrangement space can be lowered. Further, the one end of the flat cable at the rotation angle of the rotating member when the winding diameter of the flat cable is minimized is preferably shifted from the center of the rotating member to the same side of the other end of the flat cable. In this way, when the rotating member is rotated and the flat cable is loose, it can be prevented from expanding to the opposite side in the horizontal direction, so that the horizontal direction of the cable arrangement space can be further reduced. Further, it is preferable that a plurality of line bodies constituting the flat cable have the same flexural curvature. In this way, when the roll diameter of the flat cable is changed by shaking, the respective lines can be free from any load. Further, the plurality of line bodies constituting the above flat cable preferably have the same diameter. Thereby, it is possible to prevent a load from being applied only to a specific line body (for example, a small-diameter cable) when the flat cable is shaken. Further, the plurality of line bodies constituting the flat cable include a multi-core cable in which a plurality of unit cables are bundled. Thereby, the total number of the line bodies constituting the flat cable can be reduced. In order to solve the above problems, another aspect of the present invention provides a substrate transfer mechanism comprising: a turntable that is rotatable relative to a top surface of the casing; and a transfer arm for transporting a substrate placed on the turntable; a rotating plate disposed above the outer casing and rotating with the rotating table around the vertical axis -9-200908187; and a flat cable connecting the plurality of line bodies arranged in a strip shape to each other, and a space between the rotating plate and the bottom surface of the outer casing is disposed such that the respective linear bodies are arranged in a vertical direction; one of the flat cables 5 is disposed at a position deviated from a center of rotation of the rotating plate, and the other end is installed at In the above casing, the winding diameter is gradually spiraled downward from the place downward. According to the present invention, when the rotating plate is rotated together with the rotating table, it is possible to prevent the cable from being shaken with the rotation of the rotating table (rotating plate) while suppressing the load applied to the respective line bodies constituting the cable. Friction or entanglement of time, further saving space for cable deployment. As a result, the entire substrate transfer device can be further miniaturized. [Effect of the Invention] According to the present invention, when a cable is disposed in a rotating member, the load applied to each of the linear bodies constituting the cable is suppressed, and the shape or the trajectory is easily predicted, thereby preventing the cable from following. The friction or entanglement when the rotating member rotates and shakes, and the space for the cable is more saved. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and the drawings, structural elements that have substantially the same functional construction are denoted by the same reference numerals, and the description thereof will be omitted. -10-200908187 (Substrate transport apparatus) First, an embodiment in which the substrate transport apparatus for transporting a substrate of the present invention is applied will be described with reference to the drawings. Fig. 1 is a cross-sectional view showing the structure of a substrate transfer device. The substrate transfer apparatus 100 includes a box-shaped housing 110, a disk-shaped rotary table 120 that is rotatable on the upper surface of the housing 110, and a transfer arm 1 3 0 that is disposed on the rotary table 1 2 to expand and contract in a horizontal direction. . In the present embodiment, a cable arrangement structure in which a cable 200 for supplying electric power, a signal, or the like to the rotating mechanism is disposed in a narrow space in the casing 110 will be described as an example. The casing ho has an open box shape, and a stage driving motor 1 1 2 for rotating or rotating the rotating table 120 around the central axis (vertical axis) is attached to the upper portion of the casing 11 . For example, the stage driving motor 1A2 is provided with a flange portion 1 1 3 which is attached to the upper inner surface of the outer casing 110 by a connecting member such as a screw. The rotary shaft (drive shaft) 114 of the stage drive motor 112 protrudes from the opening portion on the upper surface of the outer casing 110, and is attached to the lower surface of the rotary table 120 through the flange portion 115. The transfer arm 130 is constituted by, for example, a manipulator composed of a three-axis horizontal multi-joint robot (Scala Robot) as shown in Fig. 1 . Specifically, the transfer arm 130 is formed by connecting two links (the first link 132 and the second link 134) rotatable in the horizontal plane and the end effector 136 in series. More specifically, the base end portion of the first link 132 disposed at the lowermost portion is mounted to be rotatable in the horizontal plane by the rotary table 1 220 through the rotating shaft (shoulder shaft) 142. The front end portion of the first link 132 is rotatably attached to the base end portion of the second link 134 disposed above the 011 - 200908187 through the rotating shaft (shoulder shaft) 144. The front end portion of the second link 134 is configured to be placed on the rotating shaft 146 so as to be able to mount and hold the substrate G (the pinse base end portion is mounted to be rotatable in a horizontal plane. In the first, second link 132, 134 The internal drive transmission is transmitted to each link portion or hand (for example, a pulley reducer or the like) by a driving force for telescopic driving of an arm (not shown) mounted on the rotary table 1280. In the example, the structure 134 and the network end effector 136 are rotated to rotate, and the actuator 136 is moved forward in the longitudinal direction by the rotation axis of the base end portion of the first link 132. The transfer arm 1130 can drive the arm to expand and contract in the horizontal direction by the drive arm to perform the transfer of the substrate G. The structure of the arm 1130 is not limited to that shown in Fig. 1. For example, the transfer can also be linear. The linear slide arm that drives the telescopic arm. In this type of transfer arm 130, the arm can be stretched in the desired direction by the rotary table 120. At this time, the rotary table does not rotate more than one turn, and the positive use Rotate or reverse rotate to the hope that the cable 20 can be The length of 0 is suppressed to a minimum. A tube 122 for inserting an internal device such as the arm telescopic drive motor in the arrangement 120 is attached to the lower surface of the rotary table 120. The pipe 122 is inserted into the motor for driving the through-stage driving shaft. The through hole 124 is formed in 114, and is arranged such that the pipe 122 is in the horizontal plane (elbow axis) t) 136, and the motor is used to produce the 'belt, the rod 132, the terminal driven shaft), and the transfer arm 130 is moved. Type of rotation, because 1 2 0 can be angled. The lower end of the rotation is extended by the lower end of the -12-200908187 stage driving motor 112 to the outer casing 110 by the rotary table. The lower end of the pipe 122 is provided with a disk-shaped rotating plate 126. The rotating plate 126 is configured to peek into the arrangement space 116 in the outer casing 110 from above the outer casing 110. An upper connector 150 for connecting the inside of the pipe 122 is mounted under the rotating plate 1 2 6 through, for example, an L-shaped member 152. Therefore, the pipes 122' rotate the plate 126, and the upper connector 150 rotates integrally with the rotary table 120. On the other hand, a lower connector 16A is provided on the inner bottom surface of the outer casing 110 through, for example, the L-shaped member 162. The upper connector 150 and the lower connector 1 60 are configured, for example, as multi-pole connectors in which a plurality of terminals are housed in the connector housing. The upper connector 150 is used for electrically connecting the internal devices of the arm telescopic drive motor or the like placed on the rotary table 120 to the cable 200. Further, the lower connector 160 is used for electrically connecting the external devices of the power supply device and the like provided outside the casing 110 to the cable 200. Further, the internal machine is connected to the internal machine in the rotary table 1 20 through, for example, the above-described piping 12, and the external machine is extended to the outer casing by, for example, a hole 1 1 8 provided at the bottom of the outer casing 1 1 . Connect to an external machine outside of 1 1 0. The upper connector 150 and the lower connector 160 are connected by a cable 200. This cable 200 is used to supply signals or electric power of the above-described arm telescopic drive motor, and its configuration will be described later. Further, an arrangement (not shown) is provided in the lower connector 160, and the arrangement is extended to the outside by, for example, the hole 1 18 of the outer casing 110. Then, the wirings are connected to, for example, an external power source device, a control device, and the like. -13- 200908187 In the substrate transfer apparatus 100 of such a configuration, the cable 200 is not disposed in the space 116 below the rotating plate 126 in the casing 110. In addition to the space saving required by the above-mentioned cable, the number of cables that cannot be equipped with the multi-functional distribution of the transport arm or the like provided on the rotary table increases, and power must be supplied. The increase is also increased so that the cable diameter also increases. In addition, the upper connector 150 of one end of the connection cable 200 is fixed to the outer casing 110 under the other end of the connection cable 200 except for being rotated around the vertical axis. The wire 200 itself also oscillates as the upper connector 150 rotates and changes its shape. Therefore, it is necessary to predict the trajectory of the cable 200 to configure the cable 200 so that it can enter the narrow space U 6 regardless of the form. However, the cable 200 used in the substrate transfer apparatus 100 of the present embodiment is used to supply power or signals to the rotating mechanism, and is composed of a plurality of cables of different diameters such as a power cable or a signal cable. If the cables are left undisturbed, the cables may rub or entangle each other when the upper connector 150 rotates and the cable is shaken. As a result, the cable itself has a load, which may cause damage or disconnection of the cable. In addition, when the upper connector 150 rotates and the cable is shaken, many cables are scattered and entangled, and therefore it is difficult to predict the overall shape or the trajectory of the movement. At this time, it is conceivable to bundle the plurality of cables into one piece by a cable tube or a cable holder or the like, but if the cable tube or the cable holder is bundled, the number of the cables or the diameter of each cable is larger. The thicker, the overall non-selectively thicker -14-200908187 cable tube or cable bracket can not be as narrow as the present embodiment, 1 16 is unable to fit into the cable tube or the cable holder itself. If it can be placed, when the upper connector 150 rotates, there are many cables in the cable or cable holder that rub against each other and have an additional load on the cable. Therefore, in the present embodiment, a plurality of linear bodies in which the cables 20 〇 are arranged in a strip shape are joined to each other to form an integrated flat cable, and the flat cable 200 is arranged such that the winding diameter is gradually expanded in the vertical direction. Spiral. In this way, the plurality of lines constituting the cable 200 are never rubbed or entangled with each other, and even if the diameter of the line body constituting the cable 200 is large, the load on each of the line bodies can be reduced. Moreover, since the upper connector 150 rotates and reverses with the rotating plate 126, the movement of the spiral cable 200 becomes only a monotonous movement (for example, a torsional motion, a torsional motion) that is wound or loosened, and thus, the overall The trajectory of the form or its movement is extremely predictable. Therefore, in order not to rub the cables 200 to each other, or to contact the inner surface of the outer casing 1 1 , and to easily determine the number of windings of the cable 2 , the length, and the positions of the ends, etc., it is possible to effectively use the narrow space. Set cable 2 0 0. (Configuration Example and Arrangement of Cable) A configuration example and an arrangement example of the cable 200 of the present embodiment will be described in more detail with reference to the drawings. Figure 2 is a cross-sectional view of the cable 200 of Figure 1 taken along the line P-P'. First, a structural example of the cable will be described. As shown in Fig. 2, the cable 200 of the present embodiment is formed by arranging a plurality of (here, five) line bodies 210 to 250 in a line and joining them together. By this, the cable -15-200908187 200 can be made flat. Each of the linear bodies 210 to 250 is a plurality of power supply cables (power supply lines) for supplying power to motors or terminal actuators of the respective axes of the transfer arms, in an encoder or a sensor type or various control devices and controls. The control signals are transmitted between the devices, and are composed of a plurality of signal cables (signal lines). Further, each of the linear bodies 2 10 to 250 may be composed of not only a cable but also a wire, a hollow hose for supplying a liquid or a gas, and the like. Further, each of the line bodies 2 1 0 to 2 5 0 is formed by bundling a plurality of unit cables of the same diameter or different diameters. For example, when a large-diameter unit cable having a power cable and a small-diameter unit cable of a signal cable are used, a large-sized unit cable is used as a line body, and a small-diameter unit cable is used as a plurality of lines. By simply arranging the multi-core cables, the total number of line bodies constituting the cable 200 can be reduced. For example, the line bodies 2 1 0, 2 3 0, 2 5 0 are respectively composed of a large-diameter unit cable 212, 23 2, 2 52, and the line body 220 is a bundle of three small-diameter unit cables 222. The multi-core cable is constructed, and the line body 240 is a multi-core cable that bundles two small-diameter unit cables 242. Further, the Shielding treatment of the line body composed of the multi-core cable having a plurality of signal cables is carried out in batches. As described above, the signal cable can be prevented from being mishandled or the noise generated by the noise generated by the electronic device by the shielding process. In addition, when a multi-core cable is not used, each signal cable must use a shielded cable (not shown). Each of the shielded cables is composed of, for example, a core wire composed of a conductor, covering the insulating endothelium around the core wire, a braided wire disposed around the insulating endothelium -16 - 200908187, and an insulating sheath disposed around the braided wire. The flexural strengths of the line bodies 210 to 250 are adjusted to at least the same degree of flexural curvature, respectively. The adjustment of the bending strength can be adjusted, for example, by the thickness or material of the sheath of the line body 2 1 0 to 250 (for example, an insulating sheath made of an insulating resin) 214 to 2 54 or by the line body 220. , the braided wire 226, 246 or the cushioning material in the gap in 240 is adjusted. Further, the braided wire is a braided wire, but a copper foil or the like may be used as a shielding material instead of the braided wire. As described above, by setting all of the line bodies 2 10 to 250 to have the same bending curvature, when the winding diameter of the cable 200 is changed, the respective line bodies 210 to 2 50 can be prevented from being loaded. Further, since the deflection of the bending strength of each of the linear bodies 210 to 205 can be eliminated, the cable 200 can be changed only in a state parallel to the vertical direction with respect to the vertical direction. Thereby, the cable 200 is never tilted, so that the contact between the cables 200 being wound back can be prevented. Further, in the cable 200 of the present embodiment, not only the flexural curvature of each of the linear bodies 210 to 250 but also the diameter (thickness) is adjusted to the same extent. The adjustment of the diameter (thickness) is also the same as the adjustment of the flexural curvature, and can be adjusted by using the thickness or material of the sheath and the spun yarn or cushioning material which is filled in the gap between the respective lines. For example, when the small-diameter cable and the large-diameter cable are arranged in a row, and these are joined into a flat shape, when the cable 200 is shaken, it is easy to apply a load to the small-diameter cable. Therefore, as with the cable 200 of the present embodiment, when all the line bodies 210 to 250 are set to the same diameter, it is possible to prevent the cable 200 from being shaken only to a specific line body (for example, a small-diameter cable). ) Apply a load. -17- 200908187 Next, an example of the arrangement of the cable 200 will be described. Here, the rotary table 1 20 is controlled so that the positive rotation and the reverse rotation are rotated from the starting point angle (here, the degree to the end point angle (here, 270 degrees) to the desired angle. The length of the wire 200 should be set to at least the starting point angle to the end point angle of the rotating table 120, according to the length of the winding angle of the rotation angle cable 200. Thus, the shape or trajectory of the cable 200 is used according to the rotating table 120. The range of the angle of rotation is limited, so that the length of the cable 200 can be adjusted to the minimum necessary. Referring to Figures 3 to 5 below, the most suitable cable 200 in this case is illustrated. Fig. 3 is a view showing the appearance of the cable 200 at the starting point angle of the rotary table 120. Fig. 4 is a view showing the appearance of the cable 200 at the end angle of the rotary table 120. In the embodiment, the state of the cable 200 when the rotary table 1 20 shown in FIG. 3 is from the starting point angle reaches the state of the cable 200 when the rotary table 1 20 shown in FIG. 4 is at the end angle. Cable 2 0 0 movement (track) is set in space 1 16 Specifically, as shown in FIG. 3, the upper connector 150 connected to one end of the cable 200 is connected to the lower connector 1 60 connected to the other end of the cable 200 in the vertical direction. The height HAB is disposed at the same time in the horizontal direction only by the distance DAB. Thereby, the cable 200 can be arranged in a height direction from one end of the inner diameter side to the other end of the outer shape side. At this time, the cable 200 Each of the line bodies 2 1 0 to 2 0 0 is wound in parallel in the up and down direction. Here, the cable 200 in the case where the cable 200 as described above is disposed in the space 116 of the casing 110 is illustrated in FIGS. 5A to 5D. The movement direction (track-18-200908187 track). Figures 5A to 5D are diagrams showing the movement of the cable 200 from the starting point angle to the ending angle, which are respectively seen from above. In addition, in Figs. 5A to 5D In the middle, the rotary table 120 is omitted, and the rotary table 120 is rotated integrally with the rotary plate 1 2 6 , so that the angle of the rotary plate 1 2 6 is described at the angle of the lower turntable 1 2 0. Further, in 5A to 5D, The position of the lower connecting portion 160 (fixed), the rotating plate 1 2 6 at the starting point angle, the upper connector 1 500 position) A. Fig. 5A illustrates the rewinding state of the rotating plate 1 26 at the starting angle of 0 degrees. Fig. 5B illustrates the rewinding state of the cable 200 when the rotating plate 126 is rotated by 90 degrees from the starting point angle, and Fig. 5C illustrates the state of the cable 200 when the starting angle is rotated by 180 degrees to the right in the drawing. Fig. 5D illustrates the rewinding state of the cable 200 when the rotating plate 126 is rotated by a right angle of 270 degrees in the drawing. As shown in FIG. 5A, when the rotating plate 1 2 6 is up, the cable 200 is in the tightest state, and the winding diameter of the cable 200 becomes the minimum rotating plate 126 is rotated from the state to FIG. 5B. At the time of Fig. 5C, the cable is gradually loosened, and the winding diameter of the cable 200 is gradually increased. When the rotating plate 1 2 6 is the end angle as shown in Fig. 5D, the cable 200 is in the most relaxed state. As described above, the volume of the cable 200 can be accommodated in the space regardless of the state of Figs. 5A to 5 without being disturbed. As described above, in the cable 200 which is expanded to the space in the height direction and the horizontal direction, when the rotary table 120 is at the starting point angle 200, since the surface will be rotated, the figure is B, set (starting line 2 00 In the figure, the right plate 1 2 6 is turned back to the end point angle. As 200 is shown, the cable is back to the state 1 1 6 in 116. -19- 200908187 One end of the cable 200 connector 150 and the other end lower connector 1 60 are preferably arranged to be shifted in the horizontal direction. In the present embodiment, as shown in Fig. 3, the upper connecting portion 150 and the lower connecting portion 160 are arranged in the horizontal direction only by shifting the DAB. By shifting the position of one end of the cable 200 at the starting point angle in the horizontal direction of the other end, the winding diameter of the cable 200 can be made to have a certain width. Thus, the cable 200 can be The height method of the space 1 1 6 is set to be smaller. For example, the rotary table 120 is at the position of the starting point of the cable 200 at the upper end of the connector 150 in the horizontal direction, and the other end is connected to the connector 160. Positioned together in the horizontal direction The closer to the center of rotation of the rotary table 120, the smaller the winding diameter becomes, so that the cables 200 do not interfere with each other, and the space in the vertical direction must be enlarged. In contrast, by separating the upper connector 150 The position in the horizontal direction and the position of the lower end connector 160 in the horizontal direction at the other end can make the winding diameter gradually increase from the inside to the outside, so that the state in which the cable 200 does not interfere with each other can be maintained. The height ΗAB of the upper connector 1 5 〇 and the lower connector 160 is made lower. This makes it possible to save space in the outer casing 1 1 of the cable 200. As shown in Fig. 5, the horizontal position of the upper connector 150 at one end of the cable 200 at the starting point angle is preferably disposed on the arrangement side of the lower end connector 16 6 而 and is rotated by the rotary table 2 In the present embodiment, as shown in Fig. 3, the upper connector 150 is disposed so that only the Da is displaced from the center of rotation of the rotary table 120 to the same side as the lower -20-200908187 connector 160. When the rotary table 120 rotates and the cable 200 gradually relaxes It is not allowed to expand toward the opposite side in the horizontal direction, and therefore, the horizontal direction of the space 1 1 6 can be reduced. For example, 'the level of the upper connector 150 of the cable 200 when the rotary table 120 is at the starting angle The closer the position of the direction is to the center, the more the cable 200 is loosened, the more the cable 200 will face the opposite side of the side of the upper 15 〇 (in Figure 3, the center of rotation of the rotating table is more The space on the right side is enlarged, but it requires a larger space of water. In contrast, the position of the horizontal connector of the upper connector 150 at one end of the cable at the starting point angle of the rotary table 1 20 is shifted from the center of rotation of the rotary table. , it can suppress the expansion of the space to the opposite side, and the space in the horizontal direction can be further reduced. Thereby, the space inside the casing 110 for arranging the cable 200 can be further saved. Further, although the case where the upper portion of the cable 200 is mounted on the bottom surface of the rotating plate 1 2 6 in Fig. 3 has been exemplified, the present invention is not limited thereto. For example, the upper 150 1 may be attached to the side of the rotating plate 1 2 6 . Further, in Fig. 3, the case where the other end of the cable 200 is attached to the bottom surface of the casing 1 1 is taken as an example, but is not limited thereto. For example, the lower portion 160 may be attached to the side of the outer casing 1 1 . However, the number or length of the cable 200 is preferably in accordance with the position of the cable end and the size of the space of the cable 200. Therefore, one of the ends of the cable can be rotated by 120 in the flat direction of the connector 120, and the connection of the connector must be determined by a certain partial connection of the connector. -21 - 200908187 For example, the number of windings of the cable 200 in the present embodiment is 1.5. Thereby, as shown in FIG. 5A, when the rotary table 120 that is most tightly wound by the cable 200 is rotated from the starting point angle to the end angle of the most relaxed cable 200 as shown in FIG. 5D, in FIGS. 5A to 5D. In any of the states, the cable 200 can be housed in the space Π6. Further, the number of windings of the cable 200 is not limited to the above. Further, in the present embodiment, the case where the rotary table 1 20 is used as the starting point angle and the end point angle is 270 degrees is described, but it is not limited thereto. With the use of the rotary table 1 20, the end angle can be set at any angle within the range of twist to 360 degrees. Further, in the present embodiment, as shown in FIG. 3, the cable 200 is disposed in the cable space below the rotating member, and one end of the flat cable is attached to the center of rotation of the rotating member. The position is set, and the other end is attached to the case where the winding diameter of the casing is gradually expanded into a spiral shape from the downwardly disposed cable arrangement space, but is not limited thereto. Although not shown, for example, when a cable arrangement space is provided above the rotating member and a flat cable is disposed in the space, one end of the flat cable may be attached to a position deviating from the rotation center of the rotating member, and The other end is attached to the outer casing, and the winding space from which the winding diameter is upward is gradually expanded into a spiral shape. Hereinabove, the preferred embodiments of the present invention have been described with reference to the drawings, but the present invention is not limited to the related examples. It is obvious that the present invention can be variously modified or modified as long as it is within the scope of the patent application. These modifications or corrections are of course also included in the technical scope of the present invention -22 - 200908187. For example, in the above-described embodiment, the case where the present invention is applied to the substrate transfer device will be described. However, the present invention is not limited thereto. For example, the present invention can be applied to, for example, a rotating portion of an industrial robot or a machine tool. A plurality of cables are arranged on the rotating member such as a turntable. [Industrial Applicability] The present invention can be applied to a cable arrangement structure and a substrate transfer apparatus for supplying a plurality of cables for supplying electric power or signals to a mechanism accompanying rotation. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a substrate transfer apparatus according to an embodiment of the present invention. Figure 2 is a cross-sectional view of the cable of Figure 1 taken along the line P-P'. Fig. 3 is a perspective view showing the appearance of a cable when the turntable is at a starting point angle. Fig. 4 is a perspective view showing the appearance of a cable when the rotary table is at the end angle. Fig. 5A is a view showing a rewinding state at a 0 degree angle of the starting point of the rotating table (rotating plate) seen above. Fig. 5B is a view showing the winding-back state of the cable when the rotary table (rotating plate) seen above is rotated by 90 degrees from the starting point angle. Fig. 5C is a view showing the winding-back state of the cable when the rotary table (rotating plate) seen from above is rotated from the starting point angle -23 - 200908187 to 180 degrees. Fig. 5D is a view showing the winding-back state of the cable when the rotary table (rotating plate) is rotated from the starting point angle by 270 degrees. [Description of main component symbols] 100: Substrate transfer device, 110: Housing, 112: Stage drive motor, 11 3 : Flange, 1 14 : Rotary shaft (drive shaft), 1 1 5 : Flange, 1 1 6 : space (with space), : 1 1 8 : hole, 12 0 : rotary table, 122 : piping, 124 : through hole, 126 · · rotating plate, 130 : transfer arm, 132, 134: connecting rod, 136: final actuator, 142: rotating shaft (shoulder shaft), 144: rotating shaft (elbow shaft), 146: rotating shaft (trunnion), 150: upper connector, 152: L-shaped member, 160: lower connector , 1 6 2 : L-shaped member, 2 0 0 : cable, 2 1 0, 2 2 0, 2 3 0, 240, 25 0 : line body, 212, 222, 232, 242, 2 5 2 : unit cable Line, 214, 224, 234, 244, 2 54 : foreskin, 226, 246: braided wire, G: substrate-24-