JP5149942B2 - Head drive device and component mounting device - Google Patents

Description

  The present invention relates to a head driving device and a component mounting device, and in particular, a head driving device including a flat cable having a flat vertical cross section composed of a plurality of wire members, and a component mounting including such a head driving device. Relates to the device.

  2. Description of the Related Art Conventionally, there is known a head drive device including a flat cable having a flat vertical cross section made of a plurality of wire members such as a power supply cable, a signal transmission cable, or a wire member such as an air tube (for example, , See Patent Document 1).

  In Patent Document 1, a beam extending in a predetermined direction, a head mounting body supported by the beam and linearly movable in a predetermined direction along the beam, and a flat cable having a flat vertical cross section (flat cable) And a head driving device including a beam-side fixing member of a flat cable and a head-side fixing member of the flat cable. The flat cable is curved in a U shape along the extending direction of the flat cable at a portion between the beam side fixing member and the head side fixing member, and the longitudinal direction of the vertical cross section of the flat cable is horizontal. Is arranged.

  However, since the flat cable is arranged so that the longitudinal direction of the vertical cross section of the flat cable is horizontal in the head drive device of Patent Document 1, the rigidity against the weight of the flat cable is low, and the flat cable hangs down. It is considered easy. For this reason, in the head drive device of the above-mentioned patent document 1, it is controlled that the flat cable hangs down by supporting the substantially whole area of the lower part of the curved flat cable with the cable support member.

  Conventionally, there has been known a robot drive device capable of suppressing the sag of a flat cable in a configuration including a flat cable having a flat vertical cross section composed of a plurality of wire members (for example, Patent Document 2). reference).

  In Patent Document 2, a traveling rail extending in a predetermined direction, a robot body supported by the traveling rail and movable in a predetermined direction along the traveling rail, and a flat vertical cross section connected to the robot body. A robot drive device including a flat cable (flat cable) is disclosed. The flat cable is curved in a U shape along the direction in which the flat cable extends, and is arranged so that the longitudinal direction of the vertical cross section of the flat cable is vertical. Thereby, compared with the case where the longitudinal direction of the vertical cross section of a flat cable is arrange | positioned horizontally, since the rigidity with respect to the self weight of a flat cable becomes high, it is possible to suppress drooping of a flat cable.

JP 2002-185191 A JP 2009-119566 A

  However, in the robot drive device of Patent Document 2, it is possible to increase the rigidity of the flat cable with respect to its own weight and suppress the drooping of the flat cable, while the longitudinal direction of the vertical cross section of the flat cable is arranged vertically. The traveling rail side portion and the robot body side portion are arranged so as to face each other in the horizontal direction across the U-shaped curved portion of the flat cable. For this reason, when the bending radius of the curved portion of the flat cable is large, the horizontal arrangement space of the flat cable becomes large, and thus there is a problem that the horizontal arrangement space of the robot drive device becomes large.

  The present invention has been made in order to solve the above-described problems, and one object of the present invention is to increase the rigidity of the flat cable against its own weight and suppress the flat cable from hanging down while horizontally arranging the flat cable. It is an object to provide a head driving device capable of suppressing an increase in space, and a component mounting apparatus including such a head driving device.

Means for Solving the Problems and Effects of the Invention

  In order to achieve the above object, a head driving device according to a first aspect of the present invention includes a head support member, a head unit supported by the head support member, and linearly movable in a predetermined direction along the head support member. A flat cable formed to have a flat vertical cross section along a direction orthogonal to the extending direction of the plurality of line members by bundling the plurality of line members connected to the head portion, and the head support member side A support member side cable mounting portion to which the flat cable is attached and a head portion side cable mounting portion to which the flat cable is attached, and the flat cable has a head portion side cable mounting portion. In order to follow the movement of the head portion and move in a predetermined direction, the portion between the support member side cable attachment portion and the head portion side cable attachment portion is flattened. It is curved in a substantially U shape along the direction in which the cable extends, and the longitudinal direction of the vertical cross section of the flat cable is the horizontal plane and the vertical plane at the portion between the support member side cable mounting portion and the head portion side cable mounting portion. It arrange | positions so that it may incline with respect. In addition, the flat cable of this invention is a wide concept including not only what has a flat shape with a flat surface but also what has an unevenness | corrugation on the surface but has a flat shape as a whole. For example, even when a cable in which a plurality of wire members having a circular cross-sectional shape is bundled and the surface has irregularities, the flat cable of the present invention is applicable if it has a flat shape as a whole.

  In the head drive device according to the first aspect of the present invention, as described above, the longitudinal direction of the vertical cross section of the flat cable is the horizontal plane and the vertical plane in the portion between the support member side cable mounting portion and the head portion side cable mounting portion. By arranging the flat cable so as to be inclined, the rigidity against the weight of the flat cable is higher than when the longitudinal direction of the vertical section is horizontally arranged, so that the drooping of the flat cable can be suppressed. it can. Further, the flat cable is arranged by arranging the flat cable so that the longitudinal direction of the vertical cross section of the flat cable is inclined with respect to the horizontal plane and the vertical plane in the portion between the support member side cable mounting portion and the head portion side cable mounting portion. Since the head support member side part and the head part side part are disposed at a position inclined with respect to the horizontal direction with respect to the curved part of the cable, even if the bending radius of the curved part of the flat cable is large, the head support member As compared with a case where the side portion and the head portion side portion are arranged in the horizontal direction, it is possible to suppress an increase in the arrangement space in the horizontal direction of the flat cable. Therefore, in this head drive device, it is possible to suppress an increase in the horizontal arrangement space while increasing the rigidity of the flat cable against its own weight and suppressing the drooping of the flat cable.

  In the head driving device according to the first aspect, preferably, the support member-side cable attachment portion includes a first attachment portion to which the flat cable is fixedly attached, and the flat cable is fixed to the head portion-side cable attachment portion. The first attachment portion of the support member side cable attachment portion and the second attachment portion of the head portion side cable attachment portion are substantially the same angle with respect to the horizontal plane when viewed from a predetermined direction. It arrange | positions so that it may incline and oppose. If comprised in this way, it will be easy only by attaching the head support member side and head part side of a flat cable to the 1st attachment part of a support member side cable attachment part, and the 2nd attachment part of a head part side cable attachment part, respectively. The flat cable can be arranged so that the longitudinal direction of the vertical cross section of the flat cable is inclined with respect to the horizontal plane in the portion between the support member side cable mounting portion and the head portion side cable mounting portion. Moreover, it can suppress that a flat cable twists by arrange | positioning so that a 1st attachment part and a 2nd attachment part may oppose.

  In the head driving device according to the first aspect described above, preferably, a portion between the support member side cable attachment portion and the head portion side cable attachment portion of the flat cable is seen from a predetermined direction with respect to the head support member. The head portion and the vertical surface are arranged so as to be inclined with respect to the horizontal surface and the vertical surface so that the height position overlaps with the head portion on the side opposite to the side where the portion is arranged. If comprised in this way, the arrangement space of the height direction of a head part and a flat cable can be made small, suppressing the arrangement space in the horizontal direction of a flat cable becoming large. As a result, the head drive device can be reduced in size both in the horizontal direction and in the height direction.

  In this case, preferably, the head support member and the support member side cable attachment portion are suspended by being supported from above by the top plate portion, and the head portion side cable attachment portion is supported by the top plate portion from above. Below the support member, it is arranged so as to overlap the head support member when seen in a plan view. With this configuration, in the suspension type head drive device in which the arrangement space in the height direction is limited by the top plate portion, the head portion and The arrangement space in the height direction of the flat cable can be reduced. Therefore, it is possible to reduce the size in both the horizontal direction and the height direction, and in addition to the case where the head portion side cable mounting portion and the head support member are arranged at different positions in plan view, Since the horizontal arrangement space of the head portion side cable attachment portion and the head support member can be reduced, a suspended head drive device that can be further reduced in size in the horizontal direction can be provided.

  In the head driving device according to the first aspect described above, preferably, a portion between the support member side cable attachment portion and the head portion side cable attachment portion of the flat cable is a head support as viewed in plan above the head support member. It is inclined with respect to the horizontal and vertical planes so as to overlap the members. According to this configuration, the horizontal arrangement space for the flat cable and the head support member can be reduced as compared with the case where the flat cable and the head support member are arranged at different positions in plan view. . This also makes it possible to reduce the size of the head driving device in the horizontal direction.

  In the head drive device according to the first aspect described above, preferably, the flat cable is restricted from drooping downward in the vicinity of one of the support member side cable attachment portion and the head portion side cable attachment portion that is disposed above. A sag restricting part is further provided. If comprised in this way, even when the rigidity with respect to the own weight of a flat cable falls by aged deterioration, the drooping of a flat cable can be suppressed reliably by the drooping restriction part.

  A component mounting apparatus according to a second aspect of the present invention includes a transport device that transports a substrate and a head drive device, and the head drive device mounts a component on a head support member and a substrate transported by the transport device. At the same time, the head part supported by the head support member and linearly movable in a predetermined direction along the head support member and the plurality of line members connected to the head part are bundled so that the plurality of line members extend. A flat cable formed so as to have a flat vertical cross section along the orthogonal direction, provided on the head support member side, provided on the support member side cable attachment portion to which the flat cable is attached, and provided on the head portion side, Including a head part side cable attaching part to which the flat cable is attached, and the flat part of the flat cable is determined by the head part side cable attaching part following the movement of the head part. So that it can move in the direction, it is curved in a substantially U-shape along the direction in which the flat cable extends at the portion between the support member side cable attachment portion and the head portion side cable attachment portion, and the support member side cable attachment The longitudinal direction of the vertical cross section of the flat cable is arranged so as to be inclined with respect to the horizontal plane and the vertical plane in the portion between the head portion and the head portion side cable mounting portion. In addition, the flat cable of this invention is a wide concept including not only what has a flat shape with a flat surface but also what has an unevenness | corrugation on the surface but has a flat shape as a whole. For example, even when a cable in which a plurality of wire members having a circular cross-sectional shape is bundled and the surface has irregularities, the flat cable of the present invention is applicable if it has a flat shape as a whole.

  In the component mounting apparatus according to the second aspect of the present invention, as described above, the longitudinal direction of the vertical cross section of the flat cable is the horizontal plane and the vertical plane in the portion between the support member side cable mounting portion and the head portion side cable mounting portion. By arranging the flat cable so as to be inclined, the rigidity against the weight of the flat cable is higher than when the longitudinal direction of the vertical section is horizontally arranged, so that the drooping of the flat cable can be suppressed. it can. Further, the flat cable is arranged by arranging the flat cable so that the longitudinal direction of the vertical cross section of the flat cable is inclined with respect to the horizontal plane and the vertical plane in the portion between the support member side cable mounting portion and the head portion side cable mounting portion. Since the head support member side part and the head part side part are disposed at a position inclined with respect to the horizontal direction with respect to the curved part of the cable, even if the bending radius of the curved part of the flat cable is large, the head support member As compared with a case where the side portion and the head portion side portion are arranged in the horizontal direction, it is possible to suppress an increase in the arrangement space in the horizontal direction of the flat cable. Therefore, in this component mounting apparatus, it is possible to suppress an increase in the horizontal arrangement space of the head driving device while increasing the rigidity of the flat cable with respect to its own weight and suppressing the drooping of the flat cable.

1 is a schematic plan view showing an overall configuration of a component mounting apparatus to which a head driving device according to a first embodiment of the present invention is applied. 1 is a front view showing an overall configuration of a component mounting apparatus to which a head driving device according to a first embodiment of the present invention is applied. It is a bottom view which shows the top-plate part of the component mounting apparatus to which the head drive device by 1st Embodiment of this invention is applied. 1 is a side view showing a head driving device according to a first embodiment of the present invention. It is a figure which shows the head drive device seen from the arrow A direction of FIG. It is a figure which shows the head drive device seen from the arrow Y2 direction of FIG. It is a side view which shows the head drive device by 2nd Embodiment of this invention. It is a front view which shows the head drive device by 3rd Embodiment of this invention. It is a side view which shows the head drive device by 3rd Embodiment of this invention. It is a side view which shows the head drive device by 4th Embodiment of this invention. It is a side view which shows the head drive device by 5th Embodiment of this invention. It is a side view which shows the head drive device by 6th Embodiment of this invention. It is a perspective view for demonstrating the modification of the head drive device of the 1st-6th embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
An example in which the head driving device 60 according to the first embodiment of the present invention is applied to the component mounting apparatus 100 will be described with reference to FIGS.

  The component mounting apparatus 100 according to the first embodiment takes out a bare chip (not shown) from the diced wafer 101 and mounts (mounts) it on the substrate 102, and the package component supplied by the first component supply unit 4. A component mounting apparatus 100 that can be mounted on a substrate 102.

  As shown in FIG. 1, the component mounting apparatus 100 includes a base 1, a transport device 2 that transports and holds a substrate 102 at a predetermined mounting work position, a first component supply unit 4, and a second component supply unit 5. And two head portions 6 for mounting components on the substrate 102, a wafer storage portion 7 for storing the diced wafer 101, and a wafer support device for pulling out and supporting the wafer 101 from the wafer storage portion 7. 8 and.

  The transport device 2 includes a pair of conveyors and is configured to transport the substrate 102 in the X direction. Further, the transport device 2 has a function of positioning and fixing the substrate 102 at a predetermined mounting work position by a positioning mechanism (not shown).

  Two first component supply units 4 are arranged on the front side (Y2 direction side) of the conveying device 2. The first component supply unit 4 includes a tape feeder 4a arranged in parallel in the X direction, and is configured to supply components to the component supply position at the tip by the tape feeder 4a. The component at the component supply position is acquired by the head unit 6.

  The second component supply unit 5 is disposed on the rear side (Y1 direction side) of the transport device 2. The second component supply unit 5 supplies bare chips. Specifically, the second component supply unit 5 uses a chip extraction head unit 9 (to be described later) to place the wafer in a state where the diced wafer 101 is supported by the wafer support device 8 and positioned corresponding to the component to be extracted. A bare chip is taken out from 101 and supplied to the head unit 6.

  The head unit 6 is configured to be movable in the X direction and the Y direction above the transport device 2. The head unit 6 is configured to mount the bare chip and components supplied from the component supply units 4 and 5 on the substrate 102. Specifically, the head unit 6 is configured so that components supplied by the tape feeder 4 a are sucked by the suction nozzle 6 a and mounted on the substrate 102. Further, the head unit 6 is configured so that the bare chip taken out from the wafer 101 by the chip take-out head unit 9 is sucked by the suction nozzle 6 a and mounted on the substrate 102. Moreover, the head part 6 is comprised so that components may be adsorbed using a negative pressure. The detailed configuration of the head unit 6 will be described later.

  The wafer storage unit 7 is configured to store a plurality of diced wafers 101.

  The wafer support device 8 is configured to pull out the wafer 101 stored in the wafer storage unit 7 to the second component supply unit 5 and support it so that bare chips can be taken out by the chip extraction head unit 9. Yes. Further, the wafer support device 8 is configured to support the wafer 101 on the wafer stage 81. Further, the wafer stage 81 of the wafer support device 8 passes through a lower position of the substrate 102 supported by the transfer device 2, and receives a wafer in the vicinity of the predetermined component take-out operation position of the second component supply unit 5 and the wafer storage unit 7. It is configured to be movable between positions (positions indicated by two-dot chain lines in FIG. 1). The wafer stage 81 is provided with a mechanism for pulling the wafer 101 out of the wafer storage unit 7 and moving it onto the wafer stage 81 in a state where the wafer stage 81 is disposed at the wafer receiving position.

  The chip take-out head unit 9 is configured to be movable in the X direction and the Y direction above the wafer support device 8. That is, the chip extraction head unit 9 is attached to a frame member 9a movable in the Y direction so as to be movable in the X direction. Further, as viewed in a plan view, the movable area of the chip extracting head unit 9 and the movable area of the head portion 6 partially overlap. Further, as shown in FIG. 2, the chip takeout head unit 9 is positioned below the head portion 6. As a result, the chip take-out head unit 9 can deliver a bare chip to the head unit 6.

  Next, with reference to FIGS. 1-6, the detailed structure of the two head parts 6 is demonstrated. Note that the two head portions 6 have the same configuration.

  As shown in FIGS. 1 to 4, the two head portions 6 are supported by two head support members 61 extending in the X direction, respectively. Each head portion 6 is configured to be movable in the X direction along the front side surface (Y2 direction side) of the corresponding head support member 61. Specifically, as shown in FIGS. 2 and 4, a pair of rails 611 extending in the X direction are provided on the front side surface of each head support member 61. Each head portion 6 is provided with a pair of sliders 612 (see FIG. 4) that engage with a pair of rails 611 of the corresponding head support member 61 so as to be movable in the X direction. Also, as shown in FIG. 4, a linear motor 613 is provided between the head unit 6 and the head support member 61 as a drive source for moving the head unit 6 in the X direction with respect to the head support member 61. It has been. Thereby, the head part 6 is supported by the head support member 61 so as to be movable in the X direction. Further, as shown in FIG. 4, the surface 61a on the rear side (Y1 direction side) of the head support member 61 is viewed from the X direction so as to face obliquely downward (in the direction between Y1 and Z2). It is inclined with respect to.

  The two head portions 6 are configured to be movable in the Y direction independently of each other. Specifically, as shown in FIGS. 2 to 4, each head support member 61 is fixedly attached to a support plate 62 disposed above. 2 and 3, two pairs of rails 622 extending in the Y direction are attached to the lower surface (surface on the Z2 direction side) of the top panel 10. Each support plate 62 is suspended from the top plate portion 10 by a pair of sliders 621 that are movably engaged with the pair of rails 622 in the Y direction. As shown in FIG. 3, a linear motor stator 623 extending in the Y direction is attached between a pair of rails 622 on the lower surface of the top plate 10. A movable element (not shown) is attached to the upper surface (the surface on the Z1 direction side) of the support plate 62 at a position facing the stator 623. Thereby, each support plate 62 can move in the Y direction independently of each other. Moreover, each head part 6 is comprised so that it may move to a Y direction with the head support member 61, when the corresponding support plate 62 moves to a Y direction.

  Note that hollow standing walls 100A are provided at both ends in the upper surface X direction of the base 1, and plate-like top plate portions 10 are attached to the upper end surfaces of the standing walls 100A on both sides in the X direction. A roof-like member 100B extending in both X and Y directions is provided on the top plate portion 10, and the head support members 61 and the head portions 6 are formed by the top plate portion 10, the roof-like member 100B, and the standing wall 100A. It is firmly suspended (suspended and supported). In addition, an opening is provided in the middle lower portion in the Y direction of each standing wall 100A, and the conveying device 2 is disposed so as to penetrate through the opening in the X direction.

  The head unit 6 is connected to a plurality of wire members such as a power line, a signal line, and a negative pressure supply air tube and a positive pressure supply air tube. Specifically, at least the power lines and the signal lines of the plurality of line members are each covered with an insulating member, and are fused to each other including the air tube to be orthogonal to the extending direction of the plurality of line members. A flat cable 63 having a flat vertical cross section (flat cross sectional shape) along the direction is configured. As shown in FIGS. 4 to 6, the flat cable 63 is attached to the support member side cable attachment portion 64 and the head portion side cable attachment portion 65. Further, as shown in FIG. 4, the support member side cable attachment portion 64 is disposed above (Z1 direction) the head portion side cable attachment portion 65. The flat cable 63 is an example of the “flat cable” in the present invention.

  Specifically, as shown in FIG. 4, the support member side cable attachment portion 64 is attached to the lower surface of the support plate 62 on the rear side (Y1 direction side) of the head support member 61. Further, the support member-side cable mounting portion 64 is arranged so that the head support member 61 and the height position (position in the Z direction) overlap. Further, the support member side cable attachment portion 64 has a cable attachment surface 641 to which the flat cable 63 is fixedly attached. The cable attachment surface 641 has a flat surface shape that supports the entire width of the flat cable 63 in a planar shape. In addition, the cable attachment surface 641 is inclined with respect to the horizontal plane and the vertical plane so as to face the obliquely lower front (the direction between Y2 and Z2) when viewed from the X direction. As shown in FIGS. 4 and 5, the flat cable 63 is fixedly attached to the support member-side cable attachment portion 64 by being arranged so that the longitudinal portion of the flat vertical section abuts the cable attachment surface 641. It has been. Specifically, as shown in FIGS. 3 to 5, the flat cable 63 is restricted from being separated from the cable mounting surface 641 by two pressing shafts 642 extending in the longitudinal direction of a flat vertical section. . The cable attachment surface 641 is an example of the “first attachment portion” in the present invention.

  Further, in the vicinity of the support member side cable mounting portion 64, a metal droop restricting portion 643 is provided that restricts the flat cable 63 from drooping downward when the rigidity against the own weight of the flat cable 63 decreases due to aging. It has been. As shown in FIG. 5, the droop restricting portion 643 is not in contact with the flat cable 63 when the aging of the flat cable 63 has not progressed so much. Further, the sagging restriction portion 643 is curved along the direction in which the flat cable 63 extends.

  Further, as shown in FIG. 4, the head portion side cable attachment portion 65 is disposed below the head support member 61 so as to overlap the head support member 61 when seen in a plan view. The head portion side cable attachment portion 65 is fixedly attached to the head portion 6. Thereby, the head part side cable attaching part 65 is comprised so that the head part 6 may be followed and moved. Moreover, the head part side cable attaching part 65 is arrange | positioned so that the head part 6 and the height position (position of a Z direction) may overlap. Further, the head portion side cable attachment portion 65 has a cable attachment surface 651 to which the flat cable 63 is fixedly attached. The cable attachment surface 651 has a flat surface shape that supports the entire width of the flat cable 63 in a planar shape. Further, as shown in FIG. 4, the cable attachment surface 651 is inclined with respect to the horizontal plane and the vertical plane so as to face obliquely upward rearward (direction between Y1 and Z1) when viewed from the X direction. The cable attachment surface 651 is inclined with respect to the horizontal plane by substantially the same angle as the cable attachment surface 641 when viewed from the X direction, and is disposed at a position facing the cable attachment surface 641. The cable attachment surface 651 is an example of the “second attachment portion” in the present invention.

  Further, as shown in FIGS. 4 to 6, the flat cable 63 is arranged such that the longitudinal portion of the flat vertical cross section (flat cross sectional shape) is in contact with the cable mounting surface 651, and the head side cable mounting portion 65. It is fixedly attached to. Specifically, the flat cable 63 is restricted from being separated from the cable attachment surface 651 by three pressing shafts 652 extending in the longitudinal direction of a flat vertical section. Note that a mounting bracket 653 for fixing an electronic component using a vacant space is fixed to the head portion side cable mounting portion 65.

  Further, the flat cable 63 is curved in a substantially U shape along the direction in which the cable extends at a portion between the support member side cable attachment portion 64 and the head portion side cable attachment portion 65. Thereby, the head part side cable attaching part 65 can follow the movement of the head part 6, and can move to a X direction easily. Further, as shown in FIG. 4, the portion of the flat cable 63 between the support member side cable attachment portion 64 and the head portion side cable attachment portion 65 is inclined with respect to the horizontal plane and the vertical plane as described above. By being attached to the surfaces 641 and 651, the longitudinal direction of the flat vertical section (flat cross-sectional shape) is inclined with respect to the horizontal and vertical planes at substantially the same inclination angle as the inclination angles of the cable attachment surfaces 641 and 651. Is done. Further, the portion of the flat cable 63 between the support member side cable attachment portion 64 and the head portion side cable attachment portion 65 is connected to the head portion 6 on the opposite side (Y1 direction side) of the head portion 6 with respect to the head support member 61. The height positions (positions in the Z direction) are arranged so as to overlap.

  The head driving device 60 according to the first embodiment of the present invention is mainly composed of the head portion 6, the head support member 61, the linear motor 613, the flat cable 63, the support member side cable attachment portion 64 and the head portion side cable attachment portion 65. It is configured. Further, as described above, the head driving device 60 is suspended from the top by the top plate portion 10. Further, when the head unit 6 sucks the bare chip from the chip take-out head unit 9, the chip take-out head unit 9 moves in the Y2 direction to the position close to the transfer device 2 shown in FIG. As described above, the head driving device 60 moves in the Y1 direction, and the head unit 6 and the chip extraction head unit 9 are arranged so as to overlap each other in plan view. At this time, the chip take-out head unit 9 can be moved in the X direction in a space (a substantially triangular space behind the flat cable 63) generated when the flat cable 63 is inclined with respect to the horizontal plane when viewed from the X direction. The cable 91 that is connected to the end member 9a1 (see FIG. 1) in the X2 direction of the frame member 9a that is supported by and extends in the Y1 direction is positioned without causing interference with the head driving device 60. Thus, it is possible to effectively utilize the space generated by the flat cable 63 being inclined with respect to the horizontal plane.

  In the first embodiment, as described above, in the portion between the support member side cable attachment portion 64 and the head portion side cable attachment portion 65, the longitudinal direction of the flat vertical section is inclined with respect to the horizontal plane and the vertical plane. By arranging the flat cable 63 in the vertical direction, the rigidity of the flat cable 63 with respect to its own weight is increased compared to the case where the longitudinal direction of the vertical cross section of the flat cable 63 is horizontally arranged. be able to. Further, by arranging the flat cable 63 so that the longitudinal direction of the flat vertical cross section is inclined with respect to the horizontal plane and the vertical plane at the portion between the support member side cable mounting portion 64 and the head portion side cable mounting portion 65. Since the portion on the head support member 61 side and the portion on the head portion 6 side are inclined with respect to the horizontal direction across the curved portion of the flat cable 63, the bending radius of the curved portion of the flat cable 63 is Even when it is large, it is possible to suppress an increase in the arrangement space in the horizontal direction of the flat cable 63 compared to a case where the portion on the head support member 61 side and the portion on the head portion 6 side are arranged in the horizontal direction. . Therefore, in this head drive device 60, it is possible to suppress an increase in the horizontal arrangement space while increasing the rigidity of the flat cable 63 against its own weight and suppressing the drooping of the flat cable 63.

  In the first embodiment, the support member side cable attachment portion 64 is provided with a cable attachment surface 641 to which the flat cable 63 is fixedly attached, and the flat cable 63 is fixedly attached to the head portion side cable attachment portion 65. The cable attachment surface 651 is provided, and the cable attachment surface 641 of the support member side cable attachment portion 64 and the cable attachment surface 651 of the head portion side cable attachment portion 65 are viewed from a predetermined direction (X direction) with respect to the horizontal plane. Are arranged so as to face each other at substantially the same angle. Accordingly, the head support member 61 side and the head portion 6 side of the flat cable 63 are easily attached to the cable attachment surface 641 of the support member side cable attachment portion 64 and the cable attachment surface 651 of the head portion side cable attachment portion 65, respectively. Further, the flat cable 63 is arranged so that the longitudinal direction of the flat vertical cross section of the flat cable 63 is inclined with respect to the horizontal plane at the portion between the support member side cable mounting portion 64 and the head portion side cable mounting portion 65. Can do. Moreover, it can suppress that the flat cable 63 twists by arrange | positioning the cable attachment surface 641 and the cable attachment surface 651 so that it may oppose. The X direction is the head moving direction in which the head unit 6 moves along the head support member 61, and is an example of the “predetermined direction” in the present invention.

  In the first embodiment, the portion of the flat cable 63 between the support member side cable attachment portion 64 and the head portion side cable attachment portion 65 is viewed from a predetermined direction (X direction) with respect to the head support member 61. Thus, the head unit 6 is disposed at an angle with respect to the horizontal plane and the vertical plane so that the height position of the head unit 6 overlaps with the side opposite to the side on which the head unit 6 is disposed (Y1 direction side). Thereby, the arrangement space in the height direction of the head portion 6 and the flat cable 63 can be reduced while suppressing the arrangement space in the horizontal direction of the flat cable 63 from being increased. As a result, the head driving device 60 can be reduced in size both in the horizontal direction and in the height direction.

  In the first embodiment, the head support member 61 and the support member side cable attachment portion 64 are supported from above by the top plate portion 10, and the head portion side cable attachment portion 65 is supported by the top plate portion 10 from above. The head support member 61 is disposed below the head support member 61 so as to overlap the head support member 61 in plan view. As a result, in the suspended head drive device 60 in which the space for arranging the height direction is limited by the top plate portion 10, the head portion 6 and the The arrangement space in the height direction of the flat cable 63 can be reduced. Accordingly, it is possible to reduce the size in both the horizontal direction and the height direction, and further, compared to the case where the head side cable mounting portion 65 and the head support member 61 are arranged at different positions in plan view. Thus, since the space in the horizontal direction of the head portion side cable attachment portion 65 and the head support member 61 can be reduced, a suspension type head drive device 60 that can be further reduced in size in the horizontal direction is provided. can do.

  In the first embodiment, a sag restricting portion 643 that restricts the flat cable 63 from sagging downward is provided in the vicinity of the support member side cable attaching portion 64 disposed above the head portion side cable attaching portion 65. Thus, even when the rigidity against the own weight of the flat cable 63 is reduced due to deterioration over time, the drooping restriction portion 643 can reliably suppress the drooping of the flat cable 63.

(Second Embodiment)
Next, a second embodiment will be described with reference to FIG. In the second embodiment, unlike the first embodiment, a head driving device 260 having a configuration in which a pair of rails 611a is attached to the lower surface of the head support member 261 will be described.

  In the head driving device 260 according to the second embodiment, as shown in FIG. 7, a pair of rails 611 a extending in the X direction are attached to the lower surface (the surface in the Z2 direction) of the head support member 261. In addition, a pair of sliders 612a that engage with the pair of rails 611a so as to be movable in the X direction are provided on the upper surface (the surface in the Z1 direction) of the head portion side cable attachment portion 265. Further, a linear motor 613a as a drive source for moving the head portion side cable attachment portion 265 in the X direction with respect to the head support member 261 is provided between the head support member 261 and the head portion side cable attachment portion 265. Is provided. Thereby, the head part side cable attaching part 265 is supported by the head support member 261 so as to be movable in the X direction.

  The head portion 206 is disposed on the front side (Y2 direction side) of the head support member 261. Further, a head part side cable attachment part 265 is fixedly attached to the rear surface of the head part 206. Thereby, the head part 206 is moved in the X direction along the head support member 261 by the movement of the head part side cable attachment part 265. The head portion 206 is supported by the head support member 261 via the head portion side cable attachment portion 265.

  In addition, the other structure of 2nd Embodiment is the same as that of the said 1st Embodiment.

  The effect of the second embodiment is the same as that of the first embodiment.

(Third embodiment)
Next, a third embodiment will be described with reference to FIGS. 8 and 9. In the third embodiment, unlike the first embodiment, a head driving device 360 configured to be supported from below by a support base 362 will be described.

  As shown in FIG. 8, the head driving device 360 according to the third embodiment is supported from below by a pair of support bases 362 provided on the base 1. Specifically, a pair of rails 622 a extending in the Y direction are provided on the upper surfaces of the pair of support bases 362. The head support member 361 is supported by the support base 362 from below via a pair of sliders 621a that are movably engaged with the pair of rails 622a in the Y direction. The head support member 361 is attached with a nut (not shown) that is screwed to a ball screw shaft (not shown) extending in the Y direction rotated by the motor 361a. Accordingly, the head support member 361 is configured to move in the Y direction along the rail 622a when the ball screw shaft is rotated by the motor 361a.

  Further, as shown in FIGS. 8 and 9, a pair of rails 611b extending in the X direction are attached to the front surface (surface on the Y2 direction side) of the head support member 361. A pair of sliders 612b (surfaces on the Y1 direction side) of the head portion 306 are engaged with a pair of rails 611b of the head support member 361 so as to be movable in the X direction via the mounting plate 306a. 9) is attached. A ball screw shaft 361c that is rotated by a motor 361b is provided between the pair of rails 611b. A protrusion 306a1 is formed at the center of the mounting plate 306a, and a nut (not shown) that is screwed to the ball screw shaft 361c is fixedly attached to the protrusion 306a1. Accordingly, the head portion 306 is movable in the X direction along the head support member 361 by rotating the ball screw shaft 361c by the motor 361b.

  Further, in the head driving device 360 according to the third embodiment, as shown in FIG. 9, the flat cable 363 has a horizontal plane and a vertical plane so as to overlap the head support member 361 when viewed in plan above the head support member 361. It is arranged to be inclined. The flat cable 363 is an example of the “flat cable” in the present invention. Further, the support member side cable mounting portion 364 is provided integrally with the head support member 361 and is formed so as to extend rearward and obliquely upward (direction between Y1 and Z1). Further, the cable attachment surface 641a of the support member side cable attachment portion 364 is inclined with respect to the horizontal plane and the vertical plane so as to be directed obliquely upward in the front (direction between Y2 and Z1). The cable attachment surface 641a has a flat surface shape that supports the entire width of the flat cable 363 in a planar shape. The cable attachment surface 641a is an example of the “first attachment portion” in the present invention.

  Further, the head portion side cable attachment portion 365 is fixedly attached to the head portion 306 via the attachment plate 306a, and is formed to extend rearward and obliquely upward (direction between Y1 and Z1). ing. Further, the head portion side cable attachment portion 365 is disposed so as to overlap the head support member 361 when viewed in plan above the head support member 361. Further, the cable attachment surface 651a of the head portion side cable attachment portion 365 is inclined with respect to the horizontal plane and the vertical plane so as to be directed obliquely downward (in the direction between Y1 and Z2). The cable attachment surface 651a has a flat surface shape that supports the entire width of the flat cable 363 in a planar shape. Further, the cable attachment surface 641a and the cable attachment surface 651a are disposed so as to be inclined at substantially the same angle with respect to the horizontal plane when viewed from the X direction. Further, the cable attachment surface 641a and the cable attachment surface 651a are arranged to face each other. The cable attachment surface 651a is an example of the “second attachment portion” in the present invention.

  Further, as described above, the portion of the flat cable 363 between the support member side cable attachment portion 364 and the head portion side cable attachment portion 365 is attached to the cable attachment surfaces 641a and 651a that are inclined with respect to the horizontal plane and the vertical plane. Thus, the longitudinal direction of the flat vertical cross section (flat cross sectional shape) is inclined with respect to the horizontal plane and the vertical plane at substantially the same inclination angle as the inclination angles of the cable attachment surfaces 641a and 651a.

  The remaining configuration of the third embodiment is similar to that of the aforementioned first embodiment.

  In the third embodiment, as described above, the portion of the flat cable 363 between the support member-side cable attachment portion 364 and the head portion-side cable attachment portion 365 is located above the head support member 361 in a plan view. The support member 361 is disposed so as to be inclined with respect to the horizontal plane and the vertical plane. Accordingly, the horizontal arrangement space of the flat cable 363 and the head support member 361 can be reduced as compared with the case where the flat cable 363 and the head support member 361 are arranged at different positions in plan view. Therefore, the head driving device 360 can be reduced in size in the horizontal direction.

  The remaining effects of the third embodiment are similar to those of the aforementioned first embodiment.

(Fourth embodiment)
Next, a fourth embodiment will be described with reference to FIG. In the fourth embodiment, unlike the third embodiment, a head driving device 460 having a configuration in which the head-side cable mounting portion 465 is disposed so as to overlap the head portion 306 when viewed in plan above the head portion 306. Will be described.

  In the head driving device 460 according to the fourth embodiment, as shown in FIG. 10, the support member-side cable mounting portion 464 is provided integrally with the head support member 361, and is obliquely above the front (between Y2 and Z1). It is formed so as to extend in the direction of Further, the cable attachment surface 641b of the support member side cable attachment portion 464 is inclined with respect to the horizontal plane and the vertical plane so as to be directed obliquely downward (in the direction between Y2 and Z2). The cable attachment surface 641b has a flat surface shape that supports the entire width of the flat cable 463 in a planar shape. The cable attachment surface 641b is an example of the “first attachment portion” in the present invention.

  The head portion side cable attachment portion 465 is fixedly attached to the head portion 306 via an attachment plate 306a. Further, the head portion side cable attachment portion 465 is disposed so as to overlap the head portion 306 when viewed in plan above the head portion 306. Further, the cable attachment surface 651b of the head portion side cable attachment portion 465 is inclined with respect to the horizontal plane and the vertical plane so as to face obliquely upward rearward (direction between Y1 and Z1). The cable attachment surface 651b has a flat surface shape that supports the entire width of the flat cable 463 in a planar shape. Further, the cable attachment surface 641b and the cable attachment surface 651b are disposed so as to be inclined at substantially the same angle with respect to the horizontal plane when viewed from the X direction. Further, the cable attachment surface 641b and the cable attachment surface 651b are arranged to face each other. The cable attachment surface 651b is an example of the “second attachment portion” in the present invention.

  Further, as described above, the portion of the flat cable 463 between the support member side cable attachment portion 464 and the head portion side cable attachment portion 465 is attached to the cable attachment surfaces 641b and 651b that are inclined with respect to the horizontal plane and the vertical plane. Thus, the longitudinal direction of the flat vertical cross section (flat cross sectional shape) is inclined with respect to the horizontal plane and the vertical plane at substantially the same inclination angle as the inclination angles of the cable attachment surfaces 641b and 651b. The flat cable 463 is an example of the “flat cable” in the present invention.

  The remaining configuration of the fourth embodiment is similar to that of the aforementioned third embodiment.

  The effects of the fourth embodiment are the same as those of the third embodiment.

(Fifth embodiment)
Next, a fifth embodiment will be described with reference to FIG. In the fifth embodiment, unlike the third embodiment, a head drive device 560 having a configuration in which the head portion side cable mounting portion 565 is disposed so as to overlap the head portion 306 when viewed in plan above the head portion 306. Will be described.

  In the head drive device 560 according to the fifth embodiment, as shown in FIG. 11, the support member-side cable attachment portion 564 is provided integrally with the head support member 361. Further, the support member side cable attachment portion 564 is formed in a substantially triangular shape when viewed from the X direction. Further, the cable attachment surface 641c of the support member side cable attachment portion 564 is inclined with respect to the horizontal plane and the vertical plane so as to be directed obliquely upward in the front (direction between Y2 and Z1). The cable attachment surface 641c has a flat surface shape that supports the entire width of the flat cable 563 in a planar shape. The cable attachment surface 641c is an example of the “first attachment portion” in the present invention.

  The head portion side cable attachment portion 565 is fixedly attached to the head portion 306 via an attachment plate 306a. In addition, the head portion side cable attachment portion 565 is disposed so as to overlap the head portion 306 when viewed in plan above the head portion 306. Further, the cable attachment surface 651c of the head portion side cable attachment portion 565 is inclined with respect to the horizontal plane and the vertical plane so as to face obliquely downward rearward (direction between Y1 and Z2). The cable attachment surface 651c has a flat surface shape that supports the entire width of the flat cable 563 in a planar shape. Further, the cable attachment surface 641c and the cable attachment surface 651c are disposed so as to be inclined at substantially the same angle with respect to the horizontal plane when viewed from the X direction. Further, the cable attachment surface 641c and the cable attachment surface 651c are arranged to face each other. The cable attachment surface 651c is an example of the “second attachment portion” in the present invention.

  Further, the portion of the flat cable 563 between the support member side cable attachment portion 564 and the head portion side cable attachment portion 565 is attached to the cable attachment surfaces 641c and 651c inclined with respect to the horizontal plane and the vertical plane as described above. Thus, the longitudinal direction of the flat vertical cross section (flat cross sectional shape) is inclined with respect to the horizontal plane and the vertical plane at substantially the same inclination angle as the inclination angles of the cable attachment surfaces 641c and 651c. The flat cable 563 is an example of the “flat cable” in the present invention.

  The remaining configuration of the fifth embodiment is similar to that of the aforementioned third embodiment.

  The effect of the fifth embodiment is the same as that of the third embodiment.

(Sixth embodiment)
Next, a sixth embodiment will be described with reference to FIG. In the sixth embodiment, unlike the third embodiment, a head driving device 660 having a configuration in which a pair of rails 611c extending in the X direction is provided on the upper surface (the surface in the Z1 direction) of the head support member 661 will be described.

  In the head drive device 660 according to the sixth embodiment, as shown in FIG. 12, a pair of rails 611c extending in the X direction are provided on the upper surface (the surface in the Z1 direction) of the head support member 661. A mounting plate 306b extending in the rear direction (Y1 direction) as viewed from the X direction is fixedly attached to the rear surface (surface in the Y1 direction) of the head portion 306. Also, a pair of sliders 612c that are movably engaged in the X direction with the pair of rails 611c of the head support member 661 are attached to the lower surface (the surface in the Z2 direction) of the attachment plate 306b. Further, a head portion side cable attachment portion 665 is provided on the upper surface (on the surface in the Z1 direction) of the attachment plate 306b. The head portion side cable attachment portion 665 is fixedly attached to the head portion 306 via an attachment plate 306b. A motor 361b that rotates the ball screw shaft 361c is provided between the pair of rails 611c. A protrusion 306b1 is formed at the center of the mounting plate 306b, and a nut (not shown) that is screwed to the ball screw shaft 361c is fixedly attached to the protrusion 306b1. Thereby, the head part side cable attaching part 665 is moved in the X direction with respect to the head support member 661 by rotating the ball screw shaft 361c by the motor 361b. At this time, the head portion 306 is moved in the X direction along the head support member 661 following the movement of the head portion side cable attachment portion 665. Further, the head portion side cable attachment portion 665 is disposed so as to overlap the head support member 661 in a plan view.

  The support member side cable mounting portion 664 is provided integrally with the head support member 661. Further, the support member side cable attaching portion 664 is formed to extend rearward and obliquely upward (direction between Y1 and Z1). In addition, the cable attachment surface 641d of the support member side cable attachment portion 664 is inclined with respect to the horizontal plane and the vertical plane so as to face obliquely upward in the front (direction between Y2 and Z1). The cable attachment surface 641d has a flat surface shape that supports the entire width of the flat cable 663 in a planar shape. The cable attachment surface 641d is an example of the “first attachment portion” in the present invention.

  Further, the cable attachment surface 651d of the head portion side cable attachment portion 665 is inclined with respect to the horizontal plane and the vertical plane so as to face obliquely downward (in the direction between Y1 and Z2). The cable attachment surface 651d has a flat surface shape that supports the entire width of the flat cable 663 in a planar shape. Further, the cable attachment surface 641d and the cable attachment surface 651d are disposed so as to be inclined at substantially the same angle with respect to the horizontal plane when viewed from the X direction. Further, the cable attachment surface 641d and the cable attachment surface 651d are arranged to face each other. The cable attachment surface 651d is an example of the “second attachment portion” in the present invention.

  Further, the portion of the flat cable 663 between the support member side cable attachment portion 664 and the head portion side cable attachment portion 665 is opposite to the side where the head portion 306 is disposed with respect to the head support member 661 (Y1 direction side). ) And the head portion 306 are arranged so as to overlap with each other. Further, as described above, the portion of the flat cable 663 between the support member side cable attachment portion 664 and the head portion side cable attachment portion 665 is attached to the cable attachment surfaces 641d and 651d inclined with respect to the horizontal plane and the vertical plane. Thus, the longitudinal direction of the flat vertical cross section (flat cross sectional shape) is inclined with respect to the horizontal plane and the vertical plane at substantially the same inclination angle as the inclination angles of the cable attachment surfaces 641d and 651d. The flat cable 663 is an example of the “flat cable” in the present invention.

  The remaining configuration of the sixth embodiment is similar to that of the aforementioned third embodiment.

  In the sixth embodiment, as described above, the portion of the flat cable 663 between the support member side cable attachment portion 664 and the head portion side cable attachment portion 665 is viewed from a predetermined direction (X direction), and the head support member. It is arranged so as to be inclined with respect to the horizontal plane and the vertical plane so that the height position overlaps with the head section 306 on the side opposite to the side where the head section 306 is disposed with respect to 661 (the Y1 direction side). Accordingly, the arrangement space in the height direction of the head portion 306 and the flat cable 663 can be reduced while suppressing an increase in the arrangement space in the horizontal direction of the flat cable 663. As a result, the head driving device 660 can be reduced in size both in the horizontal direction and in the height direction.

  The remaining effects of the sixth embodiment are similar to those of the aforementioned third embodiment.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

  For example, in the first to sixth embodiments, the example in which the head driving device of the present invention is applied to a component mounting apparatus has been described, but the present invention is not limited to this. For example, a syringe filled with a solder paste is attached to a head portion that can be moved in the X direction and the Y direction so that the head drive device can be driven up and down, and the solder paste is applied by a nozzle at the lower end of the syringe. The present invention may also be applied to devices other than component mounting devices, such as dispensers, and substrate inspection devices in which a substrate imaging camera is mounted on a head portion that is movable in the X direction or the X and Y directions.

  Moreover, although the said 1st-6th embodiment showed the example which comprises a power cable, a signal wire, etc. as a some line member and mutually fuse | melts and comprises a flat cable (flat cable), this invention is shown to this. Not limited. As shown in FIG. 13, a flat cable having a flat vertical cross section may be formed by bundling a plurality of wire members using a binding band.

  Moreover, in the said 1st-6th embodiment, the flat surface-shaped cable which supports the full width of a flat cable (flat cable) in planar shape as an example of the 1st attachment part and 2nd attachment part for attaching a flat cable. Although the mounting surface is shown, the present invention is not limited to this. A plurality of bosses that are elongated and support the entire width of the flat cable (flat cable) may be provided in the first attachment portion and the second attachment portion in the direction in which the flat cable (flat cable) extends.

2 Transport device 6, 206, 306 Head portion 10 Top plate portion 60, 260, 360, 460, 560, 660 Head drive device 61, 261, 361, 661 Head support member 63, 363, 463, 563, 663 Flat cable ( Flat cable)
64, 364, 464, 564, 664 Support member side cable attaching portion 65, 265, 365, 465, 565, 665 Head portion side cable attaching portion 100 Component mounting device 102 Substrate 641, 641a, 641b, 641c, 641d Cable attaching surface (First mounting part)
643 Sagging restriction portion 651, 651a, 651b, 651c, 651d Cable attachment surface (second attachment portion)

Claims (7)

A head support member;
A head unit supported by the head support member and linearly movable in a predetermined direction along the head support member;
A flat cable formed to have a flat vertical cross section along a direction orthogonal to the extending direction of the plurality of line members by bundling a plurality of line members connected to the head part;
A support member side cable mounting portion provided on the head support member side, to which the flat cable is mounted;
Provided on the head part side, and provided with a head part side cable attaching part to which the flat cable is attached;
The flat cable is disposed between the support member side cable mounting portion and the head portion side cable mounting portion so that the head portion side cable mounting portion can move in the predetermined direction following the movement of the head portion. In the portion extending between the support member side cable mounting portion and the head portion side cable mounting portion. A head driving device arranged such that a longitudinal direction is inclined with respect to a horizontal plane and a vertical plane. The support member side cable attachment portion includes a first attachment portion to which the flat cable is fixedly attached,
The head portion side cable attachment portion includes a second attachment portion to which the flat cable is fixedly attached,
The first attachment portion of the support member side cable attachment portion and the second attachment portion of the head portion side cable attachment portion are opposed to each other by being inclined at substantially the same angle with respect to the horizontal plane when viewed from the predetermined direction. The head driving device according to claim 1, wherein the head driving device is arranged.   A portion between the support member side cable attachment portion and the head portion side cable attachment portion of the flat cable is a side where the head portion is disposed with respect to the head support member when viewed from the predetermined direction. The head driving device according to claim 1, wherein the head driving device is disposed so as to be inclined with respect to a horizontal plane and a vertical plane so that a height position thereof overlaps with the head portion on the opposite side. The head support member and the support member side cable mounting portion are suspended by being supported from above by the top plate portion,
The head portion side cable attachment portion is disposed below the head support member supported from above by the top plate portion so as to overlap the head support member when seen in a plan view. Head drive device.   A portion between the support member side cable attachment portion and the head portion side cable attachment portion of the flat cable has a horizontal plane and a vertical plane so as to overlap the head support member when viewed in plan above the head support member. The head driving device according to claim 1, wherein the head driving device is disposed to be inclined with respect to the head.   The apparatus further comprises a droop restricting portion that restricts the flat cable from drooping downward in the vicinity of one of the support member side cable attaching portion and the head portion side cable attaching portion disposed above. 6. The head driving device according to any one of 5 above. A transfer device for transferring a substrate;
A head drive device,
The head driving device mounts components on a head support member and a substrate transported by the transport device, and is supported by the head support member and linearly movable in a predetermined direction along the head support member. And a flat cable formed so as to have a flat vertical cross section along a direction orthogonal to a direction in which the plurality of line members extend by bundling a plurality of line members connected to the head portion, A support member side cable mounting portion provided on the head support member side, to which the flat cable is attached; and a head portion side cable attachment portion provided on the head portion side to which the flat cable is attached;
The flat cable is disposed between the support member side cable mounting portion and the head portion side cable mounting portion so that the head portion side cable mounting portion can move in the predetermined direction following the movement of the head portion. In the portion extending between the support member side cable mounting portion and the head portion side cable mounting portion. A component mounting apparatus arranged such that a longitudinal direction is inclined with respect to a horizontal plane and a vertical plane.

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