CN101276125B - 激光发生装置 - Google Patents

激光发生装置 Download PDF

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Publication number
CN101276125B
CN101276125B CN2008100898086A CN200810089808A CN101276125B CN 101276125 B CN101276125 B CN 101276125B CN 2008100898086 A CN2008100898086 A CN 2008100898086A CN 200810089808 A CN200810089808 A CN 200810089808A CN 101276125 B CN101276125 B CN 101276125B
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CN
China
Prior art keywords
external resonator
signal
external
resonator
optical path
Prior art date
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Expired - Fee Related
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CN2008100898086A
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English (en)
Chinese (zh)
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CN101276125A (zh
Inventor
增田久
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Sony Corp
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Sony Corp
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Publication of CN101276125A publication Critical patent/CN101276125A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3507—Arrangements comprising two or more nonlinear optical devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/15—Function characteristic involving resonance effects, e.g. resonantly enhanced interaction

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
CN2008100898086A 2007-03-28 2008-03-28 激光发生装置 Expired - Fee Related CN101276125B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-085305 2007-03-28
JP2007085305A JP4420051B2 (ja) 2007-03-28 2007-03-28 レーザ光発生装置

Publications (2)

Publication Number Publication Date
CN101276125A CN101276125A (zh) 2008-10-01
CN101276125B true CN101276125B (zh) 2011-03-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008100898086A Expired - Fee Related CN101276125B (zh) 2007-03-28 2008-03-28 激光发生装置

Country Status (6)

Country Link
US (1) US7773643B2 (https=)
EP (1) EP1975681B1 (https=)
JP (1) JP4420051B2 (https=)
KR (1) KR101417061B1 (https=)
CN (1) CN101276125B (https=)
TW (1) TW200900828A (https=)

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US20100253769A1 (en) * 2008-09-04 2010-10-07 Laser Light Engines Optical System and Assembly Method
US8830564B2 (en) * 2009-01-23 2014-09-09 Ipg Photonics Corporation Apparatus for controlling resonant conditions within nonlinear resonator
US10678061B2 (en) 2009-09-03 2020-06-09 Laser Light Engines, Inc. Low etendue illumination
DE102010022585B4 (de) * 2010-06-03 2012-03-08 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Erzeugen von phasenkohärenten Lichtfeldern mit vorgebbarem Wert ihrer Frequenz und optischer Frequenz-Synthesizer
KR101047171B1 (ko) 2011-01-11 2011-07-07 김영태 엔코더용 레이저조사장치
JP6166032B2 (ja) 2012-11-06 2017-07-19 浜松ホトニクス株式会社 半導体デバイス検査装置及び半導体デバイス検査方法
US9509112B2 (en) 2013-06-11 2016-11-29 Kla-Tencor Corporation CW DUV laser with improved stability
US9293882B2 (en) 2013-09-10 2016-03-22 Kla-Tencor Corporation Low noise, high stability, deep ultra-violet, continuous wave laser
EP3086172A4 (en) * 2013-12-20 2017-07-26 Sony Corporation Light source device and method for converting wavelength
CN103837166B (zh) * 2014-03-03 2016-01-20 中国人民解放军国防科学技术大学 光程差匹配的远程光纤干涉系统相位噪声抑制方法与装置
EP2990866A1 (en) * 2014-08-25 2016-03-02 Ludwig-Maximilians-Universität München Method and device for cavity-enhanced broadband intrapulse difference frequency generation
FR3047118B1 (fr) * 2016-01-22 2018-03-02 Centre National De La Recherche Scientifique - Cnrs - Dispositif de generation d’un faisceau de photons polychromatique et spatialement autoadapte
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system
WO2019208205A1 (ja) * 2018-04-26 2019-10-31 ソニーセミコンダクタソリューションズ株式会社 光位相制御装置、および表示装置
KR102068125B1 (ko) * 2018-11-28 2020-01-20 주식회사 한화 파장 선택 장치
CN109346918B (zh) * 2018-12-26 2020-09-15 吉林大学 一种便携式阻抗自适应激光二极管驱动模块
KR102255408B1 (ko) * 2019-12-13 2021-05-24 주식회사 루트로닉 레이저 장치
EP4248589A1 (en) * 2020-11-19 2023-09-27 Telefonaktiebolaget LM Ericsson (publ) Optical filter and methods
CN114578323B (zh) * 2020-12-01 2025-05-13 上海禾赛科技有限公司 注入锁定控制方法、注入锁定控制装置及激光雷达
CN113189768B (zh) * 2021-04-12 2022-11-11 山西大学 一种提取真空边模的装置和方法
JP7192156B2 (ja) * 2021-05-21 2022-12-19 レーザーテック株式会社 光源装置及び検査装置
KR102773663B1 (ko) * 2022-12-23 2025-02-27 한국과학기술연구원 레이저 장치 및 그를 포함하는 레이저 시스템
CN116380424A (zh) * 2023-03-24 2023-07-04 浙江可胜技术股份有限公司 镜场反射光线大气传输损失率测量系统、方法及控制系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5621774A (en) * 1993-11-30 1997-04-15 Hitachi, Ltd. Method and apparatus for synchronizing parallel data transfer
US6285691B1 (en) * 1998-05-01 2001-09-04 Sony Corporation Laser light generating method and apparatus
CN1516911A (zh) * 2001-03-16 2004-07-28 英特尔公司 调谐激光器的方法和设备
DE102005015497A1 (de) * 2005-03-31 2006-10-12 Nlg-New Laser Generation Gmbh Stabilisierung kaskadierter optischer Resonatoren

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08116122A (ja) * 1994-10-18 1996-05-07 Sony Corp 連続発振紫外線レーザー光発生装置
JP3514073B2 (ja) * 1997-06-10 2004-03-31 株式会社ニコン 紫外レーザ装置及び半導体露光装置
JP3997450B2 (ja) * 1998-03-13 2007-10-24 ソニー株式会社 波長変換装置
JP2001300301A (ja) 2000-04-24 2001-10-30 Nitto Denko Corp ガス吸着体及びその使用方法
JP2002099007A (ja) * 2000-09-21 2002-04-05 Sony Corp レーザ光発生装置およびそれを用いた光学装置
JP3885511B2 (ja) 2001-04-11 2007-02-21 ソニー株式会社 レーザー光発生装置及び方法
JP3885529B2 (ja) 2001-08-06 2007-02-21 ソニー株式会社 レーザー光発生装置
US7110426B2 (en) * 2001-08-06 2006-09-19 Sony Corporation Laser beam generating apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5621774A (en) * 1993-11-30 1997-04-15 Hitachi, Ltd. Method and apparatus for synchronizing parallel data transfer
US6285691B1 (en) * 1998-05-01 2001-09-04 Sony Corporation Laser light generating method and apparatus
CN1516911A (zh) * 2001-03-16 2004-07-28 英特尔公司 调谐激光器的方法和设备
DE102005015497A1 (de) * 2005-03-31 2006-10-12 Nlg-New Laser Generation Gmbh Stabilisierung kaskadierter optischer Resonatoren

Also Published As

Publication number Publication date
US7773643B2 (en) 2010-08-10
EP1975681A1 (en) 2008-10-01
US20080240176A1 (en) 2008-10-02
TW200900828A (en) 2009-01-01
CN101276125A (zh) 2008-10-01
KR101417061B1 (ko) 2014-07-08
JP4420051B2 (ja) 2010-02-24
EP1975681B1 (en) 2013-12-18
KR20080088440A (ko) 2008-10-02
JP2008242270A (ja) 2008-10-09
TWI379146B (https=) 2012-12-11

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