CN101274314B - Coating device and its vibration-eliminating method, coating method using the vibration-eliminating method, and manufacture method of coating film - Google Patents
Coating device and its vibration-eliminating method, coating method using the vibration-eliminating method, and manufacture method of coating film Download PDFInfo
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- CN101274314B CN101274314B CN2008100876231A CN200810087623A CN101274314B CN 101274314 B CN101274314 B CN 101274314B CN 2008100876231 A CN2008100876231 A CN 2008100876231A CN 200810087623 A CN200810087623 A CN 200810087623A CN 101274314 B CN101274314 B CN 101274314B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
- B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
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Abstract
The invention provides a coating device which can acquire coating films with high thickness precision and smooth surface as well as in free of uneven coating. The coating device includes: a support roller (20) which uses an outer circumference to support a long ribbon body (16) moves longitudinally, a coating device (10) of a coating head (18) which is provided oppositely with certain gap from the support roller (20) and supplies the coating liquid to the ribbon body, wherein the coating device includes a bracket (30) fixed with the coating head (18 and the support roller (20), and an active vibration eliminating device (32); the active vibration eliminating device (32) includes an actuator (33) for supporting the bracket (30) and driving, a first sensor (34) for detection of the vibration of the bracket (30), a second sensor (35) for detection of fundamental vibration, a third sensor (36) for detection of the vibration of the ribbon body, and a control mechanism which, on the basis of the information of each sensor, generates a control input for eliminating the vibration.
Description
Technical field
The present invention relates to a kind of applying device, relate in particular at the shoestring of advancing continuously (banded supporting mass) thereby the applying device of the coating face of upper coating liquid coating formation uniform thickness.
Background technology
In the fields such as sensitive photographic material or magnetic recording media, employing be the flexible support body (hereinafter referred to as " shoestring ") in the band shape of advancing continuously thus the coating liquid of coating regulation forms the working procedure of coating of coated film.In recent years, in these fields, need to access the thickness and precision height of coated film and the coating technology that does not apply uneven coated film of surface smoothing.
Equally, even have in the working procedure of coating of manufacturing of optical thin film of various functions being applicable to optical compensating film, antireflective film, anti-glare film etc., also need aforesaid coating technology.
As the applying device that coating liquid is coated on banded dignity, such as comprising that roller coating type, intaglio coating-type, roller coat add blade coating (roll coat plus doctor) type, reverse roll coater type, extrusion type, slidingtype application type etc., suitably use according to the purposes difference at present.
Even in these any applying devices, for the uneven coated film of not coating of the thickness and precision height that obtains coated film and surface smoothing, the vibration when removing coating is very important.
Method as the vibration of removing when coating discloses in patent documentation 1 active vibration eliminating device has been applicable to coating section.In addition, in patent documentation 2, also disclose by making the distance between shoestring and the applicator head keep certain applying device to applicator head supply vibration.
Patent documentation 1: JP 2005-319385 communique
Patent documentation 2: JP 2004-89896 communique
But, in coating section, except the vibration from the basis of placing applying device, because the vibration of the off-centre of deflector roll or runout, bearing, the vibration that drives system, dry wind etc., cause sometimes that along the tension change of the tension change of the throughput direction of shoestring and the direction vertical with throughput direction the interference of the coating device whole that becomes one with application roll vibrates.If occur to disturb vibration in applying device, then this vibration causes the mobile change of coating liquid, and the result becomes the reason that causes the unequal fault of coating.
Under such situation, in patent documentation 1 and patent documentation 2, also insufficient for removing the interference vibration, it is uneven that coating may occur.Even thereby the backing roll of fixed bearing applicator head and shoestring makes the distance of applicator head and backing roll keep certain in order to address this problem, the coating that also is difficult to prevent to disturb the impact of vibration to cause is uneven.
Summary of the invention
The present invention proposes in view of such situation just, its purpose is, utilizing coating liquid feed mechanism supply coating liquid, simultaneously, with this coating liquid feed mechanism on the position of predetermined distance, form in the technical field of the coated film of stipulating thickness at the shoestring of carrying continuously, can be by retentive control stability of system state constant and eliminate the vibration of applying device, realize obtaining that the thickness precision is high, surface smoothing and the applying device of the uneven coated film of coating not.
The present invention is in order to realize described purpose, a kind of applying device is provided, it is to possess: with the backing roll of outer peripheral face supporting to the shoestring of the length of vertically advancing, with with described backing roll across certain intervals subtend configuration and supply with the applying device of the coating liquid supply unit of coating liquid to shoestring, it is characterized in that, possess: the support that fixing described coating liquid supply unit and described backing roll form, with active vibration eliminating device, this active vibration eliminating device possesses: the actuator that supports described support and be used for driving, detect the first sensor of the vibration of described support, produce feedback control strategies for the control inputs of the vibration of eliminating support based on the output signal of described first sensor, detection is provided with second sensor of vibration on the basis of described support, produce FEEDFORWARD CONTROL mechanism for the control inputs of eliminating the vibration of foundation based on the output signal of described the second sensor, the 3rd sensor that is installed on the position beyond the described support of the interference vibration that detection is conducted on the spring of described support, produce feedback control strategies for the control inputs of eliminating the vibration that shoestring causes with output signal based on described the 3rd sensor.
The applying device that possesses active vibration eliminating device is by possessing the 3rd sensor, can detect based on the vibration information from the 3rd sensor the interference vibration of conducting on the spring of support.Can produce control inputs by disturb the signal of vibration based on this, suppress to disturb vibration.
In applying device of the present invention, the position that described the 3rd sensor can be installed preferably is disposed at the deflector roll of advancing of supporting shoestring of the upstream of coating liquid supply unit, and then more preferably at the two ends of deflector roll the 3rd sensor is set.This be because, can measure the Tension Difference of the direction vertical with the shoestring throughput direction, can detect in disturbing vibration the power that the direction of rotation around the Z axis of support is given.
In applying device of the present invention, the position of the 3rd sensor and the scope of distance below 10m of described backing roll can be installed preferably.
This be because, if backing roll and position that the 3rd sensor can be installed from too far, then may occur between position and deflector roll with the detected vibration of the 3rd sensor vibration in addition.This is because if vibration vibration in addition occurs to detect, then can not give correct damping force to applying device.
In applying device of the present invention, at least one information of the change of the tension force of preferred described the 3rd sensor detection shoestring, acceleration, speed, displacement or acceleration, speed, displacement change, rotary acceleration, rotary speed and the revolution of deflector roll support is as the vibration information of shoestring.
This be because, if correct understanding comprise any state of shoestring of the revolution of deflector roll, the interference vibration that then can cause from this state prediction shoestring.
In applying device of the present invention, the state change that the controlling organization of produce to be used for eliminating the control inputs of the interference vibration on the spring is preferably control shoestring causes the shoestring vibration control mechanism of the vibration of the support that produces.
This be because, from directly transmit and the interference that comes the interference maximum that shoestring causes on the support.
In applying device of the present invention, preferred shoestring vibration control mechanism drive actuator changes and vibrates in the interference that support produces with the state of eliminating according to described shoestring.
In applying device of the present invention, an eigentone of preferred described support is more than the 80Hz.
In applying device of the present invention, the eigentone that the bed surface of described applying device preferably is set is more than the 10Hz.
By having the controlling organization based on the vibration information of the 3rd sensor, can realize eliminating the vibration of the applying device that shoestring causes, can obtain the applying device of the uneven coated film of the not coating of the thickness and precision height of film and surface smoothing.
Description of drawings
Fig. 1 is the key diagram of the production line of the optical compensating gage that coating method and applying device were suitable among explanation the present invention.
Fig. 2 is the stereogram of the state that arranges of expression applying device.
Fig. 3 is the breach stereogram of the part of expression applicator head.
Fig. 4 is the concept map of the system architecture of the active vibration eliminating device of explanation.
Fig. 5 is the module map in the system architecture of Fig. 4.
Among the figure, 10-applying device, 14-deflector roll, the 15-pillar, 16-shoestring, 17-pillar, the 18-applicator head, 20-backing roll, 28-coated film, the 30-support, 31-applicator head support, 32-is vibration eliminating device initiatively, 33,42-actuator, 34-first sensor, 35-the second sensor, 36-the 3rd sensor, 38-computer, 39-drive unit.
The specific embodiment
Below according to accompanying drawing, the preferred embodiment of the applying device among the present invention is described.
[production line of optical compensating gage]
Fig. 1 is the key diagram of the production line of the optical compensating gage that coating method and applying device were suitable among explanation the present invention.
As shown in Figure 1, the production line of optical compensating gage constitutes the shoestring 16 of exporting the transparent supporting mass that forms as the polymeric layer that is pre-formed alignment films formation usefulness from output machine 66.Shoestring 16 is guided and sends in the polishing device 70 by deflector roll 68.Polishing roll 72 is in order to implement polishing to polymeric layer and to arrange.In the downstream of polishing device 70 dust removal machine 74 is set.Can utilize dust removal machine 74 to remove the dust on the surface that is attached to shoestring 16.
Be arranged at the applying device 10 of active vibration eliminating device 32 in the configuration of the downstream of dust removal machine 74.Thereby the coating liquid that contains discoid liquid crystal can be coated on shoestring 16.Set gradually dry section 76, heated zones 78 in its downstream, thereby can form liquid crystal layer at shoestring 16.And then, in its downstream ultraviolet lamp 80 is set, thus the polymer that can utilize the ultraviolet ray irradiation that liquid crystal cross linking and then formation are needed.So, thus utilizing the up-coiler 82 be arranged at its downstream to reel has formed the shoestring 16 of polymer.
[applying device]
As shown in Figure 2, applying device 10 is made of following structure, that is: will utilize pump etc. to be coated on the applicator head 18 of shoestring 16 from the coating liquid of coating liquid container transport; With applicator head 18 subtend settings, the backing roll cylindraceous 20 of the shoestring 16 during with outer peripheral face supporting coating; The pillar 15 that keeps the rotating shaft of backing roll 20; In order to guide the shoestring 16 of advancing at backing roll 20, from applicator head 18 and the deflector roll 14 of backing roll 20 across the predetermined distance configuration.Keep the pillar 15 of the rotating shaft of the applicator head 18 of applying device 10 and backing roll 20 to be fixed on the support 30 that the actuator 33 with active vibration eliminating device 32 described later supports.In addition, applicator head 18 is fixed on the support 30 by applicator head support 31.
The suitableeest for the thickness that is coated on the kind of coating liquid of shoestring 16 or coating liquid being adjusted to, backing roll 20 and applicator head 18 constitute and can advance in the mode at the interval that can regulate the two.Thereby, fixedly refer in the coating of shoestring 16 at support 30, support 30 is arranged to backing roll 20 keeps predetermined distance with applicator head 18.
Then, the coating method that utilizes applying device 10 is described.Shoestring 16 is output machine output, is directed at backing roll 20 by deflector roll 14.The part of the outer peripheral face of the shoestring 16 coiling backing rolls 20 that are directed.Shoestring 16 is advanced to the diagram direction of arrow continuously with certain speed.At this moment, the non-coated surface of the backing roll 20 supporting shoestring 16 while rotating.
Upstream side configuration deflector roll 14 at backing roll 20.The rotating shaft of deflector roll 14 is supported by pillar 17.Pillar 17 be arranged at from on the support 30 of actuator 33 supporting different the bed surface F or other supports.
As shown in Figure 3, in applicator head 18, form the 18B of bag section of tubular in the mode parallel with the width of shoestring 16.Its 18B of bag section that is coated with application is connected with supply line 18A.In addition, in applicator head 18, the front end of applicator head form have an ejiction opening be coated with application slit 18C.Be coated with application slit 18C and be coated with the application bag 18B of section and be communicated with.
Be coated with the narrow runner that application slit 18C is the 18B of connecting bag section and applicator head front end, to the width prolongation of shoestring 16.Then, 18 the application bag 18B of section that is coated with supplies with the coating liquid that is coated on shoestring 16 needed coating amounts from supply line 18A to applicator head, forms coated film at shoestring 16.
The shoestring 16 of coating liquid coating is output to dry section, the heated zones that is arranged at the downstream, forms liquid crystal layer at shoestring 16.In addition, below omit diagram, the driven roller of the conveying of the jockey pulley of the tension force of control shoestring 16 or control shoestring 16 is arranged on the production line of optical compensating gage.
[active vibration eliminating device]
Then, utilize Fig. 2, the structure about the active vibration eliminating device 32 that is provided with described applying device 10 is described.In this structure, applicator head 18 and pillar 15 are fixed on the support 30.As mentioned above, applicator head 18 is fixed on the support 30 by applicator head support 31.As shown in the figure, support 30, applicator head support 31 and pillar 15 can be respectively member, also can be integrally formed.
Active vibration eliminating device 32 is made of actuator 33, first sensor 34, the second sensor 35, the 3rd sensor 36, computer 38, drive unit 39 at least.
4 corner configuration actuators 33,33 below support 30 ...Support 30 is by actuator 33,33 ... be arranged on bed surface (base surface is set) F.
In addition, be arranged on the support 30 for detection of the first sensor 34 of the vibration of support 30, be arranged on the bed surface F for detection of the second sensor 35 of the vibration on the basis that is provided with support 30.And then, in the present invention, be arranged on the deflector roll 14 for detection of the 3rd sensor 36 of the vibration of shoestring.In the 3rd sensor 36, the information such as the change of the tension force of detection shoestring, acceleration, speed, displacement or the acceleration of deflector roll support, speed, displacement change are as the vibration information of shoestring.
The first sensor 34 that is arranged on the support is made of the acceleration transducer and the position-detection sensor that are arranged on the support 30.First sensor 34 is arranged at each actuator 33,33 for X-axis, Y-axis, Z axis and the direction of rotation of Bracket for Inspection ... on.The second sensor 35 that is arranged on the bed surface F is made of acceleration transducer.The 3rd receptor that is arranged at deflector roll is made of displacement transducer.
But, the corresponding object that detects of the kind of sensor and quantity and suitably being arranged is not limited to embodiment.
Then, the reason that the 3rd sensor 36 is set is described.
About active vibration eliminating device in the past, the usually known vibration of foundation that vibration eliminating device is set except the relevant control technology of shaking and being arranged at the vibration damping of the vibration that the running of the instrument on the support causes.
But, not with applying device 10 of the present invention in the interference vibration that causes of the state change of shoestring 16 of visible continuous conveying enter the example of the control method of the vibration eliminating device under the special environment of support and so on, not to suitably eliminating the research of the vibrations of 30 transmission from shoestring 16 to support.
More specifically, on active vibration eliminating device in the past, precision instrument such as electron microscope or semiconductor exposure device etc. in, the feedback (hereinafter referred to as FB) control support vibration information, control support vibration.And then except FB control, in these precision instruments, feedforward (hereinafter referred to as FF) control will arrange the information of the vibration of foundation of precision instrument, also controls simultaneously the vibration of support.The object of processing ,-sample or the wafer in the semiconductor exposure device in the microscope all is not himself to bring vibration to support.
On the other hand, in the situation of object for the shoestring of advancing continuously of processing, shoestring is advanced the vibration that causes as disturbing vibration to the deflector roll that applies or the transmission of coating liquid supply unit.
As the interference vibration that shoestring in applying device is advanced and caused, the vibration of the off-centre of deflector roll or runout, bearing, the vibration that drives system, dry wind etc. can cause the tension change on the tension change of the throughput direction of shoestring and the direction vertical with throughput direction.
So it is very important in applying device to remove the interference vibration that brings to deflector roll or coating liquid supply unit.
In the situation of the applying device that is arranged at active vibration eliminating device in the past, be so-called interference vibration in order to remove vibration or the off-centre that described shoestring causes, also can by improving the gain of the FB control loop in the active vibration eliminating device, eliminate forced vibration.But the surplus of the hierarchy of control tails off, and when the poorest, may cause that high-gain (high gain) problems such as vibration occur active vibration eliminating device.
On the other hand, if make the gain landing of FB control loop in order preventing from vibrating, then not only to lose sufficient damping property, but also may not to guarantee the performance of shaking of removing of original bed vibration.
Therefore, the present invention possesses tension pick-up or displacement transducer or velocity sensor or the acceleration transducer of shoestring by the deflector roll in the applying device upstream, detect throughput direction and the tension force of the direction vertical with conveying or the change of displacement or speed or acceleration etc. of shoestring, thereby possess the shoestring vibration control loop that changes to control the vibration that shoestring causes based on this.
This shoestring vibration control loop for example uses the output signal of the displacement transducer that is installed on the deflector roll two ends, shoestring is being considered as in the elastomeric situation that is connected with applying device with deflector roll, try to achieve the power that applies as interference to applying device with computing, make the control inputs signal of the symbol of this perturbed force of counter-rotating, make actuator drive to eliminate perturbed force.
Like this, can not cause the high-gain problem and keep the stable constant of the hierarchy of control, can improve under this state active vibration eliminating device except shaking performance.
Then, input the vibration information that detects from first sensor 34, the second sensor 35 and the 3rd sensor 36 to computer 38.In computer 38, based on the vibration information that detects, realize 1) make the FB controlling organization of the control inputs of the vibration that is used for eliminating support; 2) making is used for the FF controlling organization of the control inputs of the elimination vibration of foundation; 3) make to be used for eliminate the controlling organization of the FF control inputs of the vibration that shoestring causes.Controlling organization can be realized any one of software processing, hardware handles.
The control inputs that active computer 38 is processed is imported in the drive unit 39.Drive unit 39 is given the damping force of eliminating vibration based on the actuator 33 of control inputs driving supporting bracket 30 to applying device.Like this, can realize applying device 10 except shaking.
Fig. 4 is the initiatively concept map of the control model of vibration eliminating device 32 of explanation.On the basis 40 of active vibration eliminating device 32, support supporting parts 44 by actuator 42.Be fixed with the acceleration transducer 46 of vibration that can Bracket for Inspection and the displacement transducer 48 of displacement that can Bracket for Inspection at this at this supporting part 44.On basis 40, also be fixed with the acceleration transducer 50 of the vibration that can detect the vibration of foundation.And then the displacement transducer 52 that can detect the vibration of shoestring is fixed on the deflector roll.The control information that reaches 2 sensors 52 that arrange at the two ends of deflector roll from sensor 46, sensor 48, sensor 50 is given control part 54.Control part 54 is based on its Data Control actuator 42.
Inferior, the m of supporting part 44 represents quality, and quality m comprises the quality of support 30 among Fig. 2, applicator head support 31, applicator head 18, backing roll 20 etc.In addition, K represents spring constant, and expression is with respect to the resistance coefficient of position.In addition, C represents decay, and expression is with respect to the resistance coefficient of speed.And then, shoestring can be considered as the elastomer that is connected with applying device with deflector roll.In other words, Kw refers to the spring constant of the vibration that causes with respect to shoestring, and expression is with respect to the resistance coefficient of position.
Then, utilize Fig. 5 that the hierarchy of control of the present invention as model with Fig. 4 is described.
Supporting part 44 is by control part, is the part of expression support, 32 controls of passive/active modes vibration eliminating device.Then, with the part 14, the 40th that four jiaos dotted lines surround, represent interference vibration on the spring and the part of the vibration of foundation.
The mobile of internal signal to supporting part 44 describes.If apply any power from the outside to supporting part 44, then produce acceleration at supporting part 44.The acceleration signal of supporting part 44 is integrated element 132 integrations, and then becomes the signal of speed, to decay section (attenuation coefficient C) transmission that produces with respect to the resistance of speed.Then, the signal of speed further is integrated element 134 integrations, and then becomes displacement signal (position signalling).This displacement signal is to spring section (spring constant K) transmission that produces with respect to the resistance of position.
Detect the information of the acceleration of supporting part 44 with acceleration transducer 46.The acceleration signal that detects is passed to subtracter 122 by bandpass filter (hereinafter referred to as BPF) 98.Detect poor from the desired value of desired value assigning unit 102 and acceleration signal at subtracter 122, to acceleration FB controller 112 transmission deviation signals.
Utilize displacement transducer 48 to detect the displacement signal of supporting part 44.The displacement signal that detects is delivered to 2 subtracters 124,126 by BPF96.Simulated differential and transmit to subtracter 124 as rate signal at analog differentiation device 120.Detect the poor of the desired value of desired value assigning unit 104 and rate signal with subtracter 124, deviation signal is passed to speed FB controller 114.For the measurement noise that does not make displacement signal becomes rate signal with analog differentiation device 120 analog differentiation displacement signals, if only carry out differential, then noise amplification.
Another displacement signal is imported into subtracter 126, and subtracter 126 detects poor from the desired value of desired value assigning unit 106 and displacement signal, and this deviation signal is passed to displacement FB register control 116.
So, in controller 112,114,116, by carrying out FEEDBACK CONTROL with respect to control inputs, the actual vibration state of corresponding applying device is given the damping force that suppresses this vibration to applying device.
As the concrete control law in the controller 112,114,116, can use PID control law or Robust Control Law, adapt to control law etc.
In basis 40, utilize acceleration transducer 50, detected as the signal of acceleration with respect to the vibration of bed vibration.The acceleration signal that detects is passed to subtracter 128 by BPF94, detects poor from the desired value of desired value assigning unit 108 and acceleration signal with subtracter 128.Then, this deviation signal is passed to basis signal controller 118.
Then, in deflector roll 14, utilize the displacement transducer 52 be arranged at deflector roll 14 to be passed to subtracter 130 as the displacement signal of front path (path) displacement detecting by BPF90.Detect poor from the desired value of desired value assigning unit 100 and displacement signal with subtracter 30, be passed to shoestring signal controller 110 as deviation signal.So, in deflector roll 14, the control inputs by the vibration that causes with respect to shoestring carries out FEEDFORWARD CONTROL, and the state of corresponding interference vibration from shoestring suppresses the damping force of this vibration to applying device.The vibration of deflector roll 14 is the interference vibration of spring constant Kw by correct understanding.
The invention is characterized in, except supporting part 44 vibration signal with basis 40, also detect the vibration signal in the deflector roll 14, by producing the control inputs of FEEDFORWARD CONTROL, give the damping force that suppresses the vibration that advancing of shoestring cause to applying device.
Whole control inputs of adduction shoestring signal controllers 110, acceleration FB controller 112, speed FB controller 114, displacement FB register control 116 and basis signal controller 118 and synthetic control inputs is synthesized.
Finally, the power interference of the vibration that synthetic control inputs power, shoestring cause, the power of the vibration of foundation are disturbed, are utilized the power of decay C and utilizes the power of spring K, all are synthesized, and become the power that applies to support.At this moment, synthetic control inputs power play the power eliminated beyond it and effect, so the power that applies to support always synthesize 0 or very little value, thereby can make support static.
Like this, form the technical field of the coated film of regulation thickness at the shoestring of carrying continuously across the position at the interval of regulation with this coating liquid feed mechanism, compared with the past, can eliminate the vibration of applying device, the applying device that can realize to obtain thickness and precision height, the surface smoothing of film and not apply uneven coated film.
To in applying device of the present invention, the distance that the position of the 3rd sensor and backing roll preferably are installed is that the reason of the following scope of 10m describes.
This be because, if far away must cross from, then installing between the position and backing roll of the 3rd sensor, the vibration beyond the vibration that may occur to be detected by the 3rd sensor can not provide accurately damping force to applying device.
Therefore, the distance of preferred the 3rd sensor and support is below the 10m, more preferably below the 5m.
The reason that an eigentone of support 30 is preferably more than the 80Hz describes.What become problem in the interference vibration is low-frequency vibration, and dither is weakened by vibration eliminating device easily.So, if an eigentone height of support 30 then can be avoided and the resonance of disturbing vibration.In addition, under the dither state, the uneven thickness of the coated film of shoestring is not obvious, so an eigentone of support 30 is more high better.
Therefore, an eigentone of support 30 is preferably more than the 100Hz, more preferably more than the 120Hz.
The eigentone that the bed surface of applying device 10 is set is preferably the above reason of 10Hz and is, be under the low state of intensity below the 10Hz in the eigentone on basis, can not guarantee the performance of the vibration eliminating device of the vibration that relative 10Hz is following.In addition, also has the more high better identical reason of an eigentone with support 30.Therefore, the eigentone that the bed surface of applying device 10 is set is preferably more than the 20Hz, more preferably more than the 30Hz.
Formation to the coated film of using applying device 10 describes.As coating liquid, can use the coating liquid that includes organic solvent.But, can also use the viscosity beyond it coating liquid, do not contain the coating liquid of organic solvent.
As shoestring 16, usually can use Rack, specific length and thickness be about 2～200 μ m by plastic sheetings such as PETG (PET), poly-NDA glycol ester, cellulose diacetate, cellulose triacetate, cellulose-acetate propionate, polyvinyl chloride, Vingon, Merlon, polyimides, polyamide; Paper; Apply or be laminated with the paper of the α-TPO of the carbon numbers 2～10 such as polyethylene, polypropylene, ethylene-butylene copolymer; The flexible ribbon thing of the formations such as metallic plate or take this ribbon as base material and then form the ribbon of machined layer on its surface.
In the production line of the optical compensating gage of Fig. 1, utilize output machine 66 conveying band bodies 16, control simultaneously among the slit 18C of applicator head 18 of applying device 10 coating liquid or for the thickness that makes the coated film 28 after the coating becomes certain transporting velocity control shoestring 16 applies.
In the drying after coating etc., for the thickness and precision height that obtains coated film and the coated film 28 of surface smoothing, set dry section 76, heated zones 78, ultraviolet lamp 80 etc.Coating, dried shoestring 16 are wound machine 82 and reel.
Described a series of operation is preferably implemented under good dustless degree and thermophilic humidity environment.Thereby, preferably in Clean room, carry out, particularly preferably applying device 10 is arranged in the high environment of cleannes.So, can adopt and with the mode of downflow system Clean room or clean bench.
More than the embodiment of the applying device among the present invention and coating method is illustrated, but the present invention is not limited to described embodiment, can adopt variety of way.
For example, in the present embodiment, can adopt the coating machine of extrusion type as applying device 10, but also can preferably be suitable for the coating machine beyond it, for example rod is coated with machine and (is also referred to as " rod coater ", also comprises Mel rod coating machine (mayer bar coater), intaglio printing coating machine (direct intaglio printing coating machine, intaglio plate contact coating machine (gravure kiss coater) etc.), roll coater (transferring roller coating machine, reverse roll coating machine etc.), the chill coating machine, jetting type scrapes coating machine, slidingtype funnel (slide hopper) etc.
In addition, as the purposes of applying device 10, be not only applicable to the optical thin films such as optical compensating film, can also be applicable to various coatings.
Implemented emulation in order to show effect of the present invention at last.In emulation, to be equipped on Bracket for Inspection and the vibration that face is set and with the applying device (active) of the active vibration eliminating device of actuator control and then be equipped on the applying device (the present invention) that on deflector roll of the present invention, also is provided with the active vibration eliminating device of sensor and carry out emulation as model, to calculate acceleration constant deviation and displacement constant deviation.The condition of this moment is: the quality m=5 of non-control part, 000Kg, spring constant K=2.0 * 10
6, elastic modelling quantity C=5.0 * 10
2, desired value (acceleration, speed)=0, desired value (displacement)=certain value, the size that comprises on the spring frequency content of disturbing=1～100Hz be 10N power, comprise that it is the power of 1N that the size of the frequency content of=1～100Hz is disturbed in the vibration of foundation.The result is as shown in table 1.
[table 1]
| Active applying device | The present invention | Slip (%) | |
| Acceleration constant deviation [gal] | 0.116 | 0.071 | 39％ |
| Displacement constant deviation [μ m] | 0.0928 | 0.081 | 80％ |
From this result as can be known, applying device of the present invention is compared with the applying device that is equipped on active in the past, can reduce significantly the impact of its vibration.
Claims (11)
1. an applying device is characterized in that,
Described applying device possesses: separates the configuration of certain intervals subtend and supplies with the coating liquid supply unit of coating liquid to shoestring to the backing roll of the shoestring of the length of vertically advancing with described backing roll with outer peripheral face supporting,
Wherein, possess: the support that supports described coating liquid supply unit and described backing roll; With active vibration eliminating device,
This active vibration eliminating device possesses: the actuator that supports described support and be used for driving; Detect the first sensor of the vibration of described support; Produce feedback control strategies for the control inputs of the vibration of eliminating support based on the output signal of described first sensor; Detection will arrange second sensor of vibration on the basis of described support; Produce FEEDFORWARD CONTROL mechanism for the control inputs of the vibration of eliminating the basis based on the output signal of described the second sensor; Detect the vibration of shoestring, and be disposed at the upstream of described coating liquid supply unit, and be arranged on the 3rd sensor on the deflector roll of advancing that supports shoestring; Produce for the FEEDFORWARD CONTROL mechanism of eliminating the control inputs that disturbs vibration with the output signal based on described the 3rd sensor.
2. applying device according to claim 1, wherein,
Described the 3rd sensor is arranged at the two ends of deflector roll.
3. applying device according to claim 1 and 2, wherein,
The position of described the 3rd sensor and the scope of distance below 10m of described backing roll are installed.
4. applying device according to claim 1 and 2, wherein,
At least one information in the change of the tension force of described the 3rd sensor detection shoestring, acceleration, speed, displacement or the acceleration of deflector roll support, speed, the displacement change is as the vibration information of shoestring.
5. applying device according to claim 1 and 2, wherein,
The controlling organization that produce to be used for eliminating the control inputs of described interference vibration is the shoestring vibration control mechanism that the state change of control shoestring causes the vibration of the described support that produces.
6. applying device according to claim 5, wherein,
Described shoestring vibration control mechanism drives described actuator and changes and vibrate in the interference that described support produces with the state of eliminating according to described shoestring.
7. applying device according to claim 1 and 2, wherein,
An eigentone of described support is more than the 80Hz.
8. applying device according to claim 1 and 2, wherein,
The eigentone that the basis of described applying device is set is more than the 10Hz.
9. the vibration resisting method of an applying device is characterized in that,
Described applying device possesses: with the backing roll of outer peripheral face supporting to the shoestring of the length of vertically advancing; Separate the coating liquid supply unit that the certain intervals subtend disposed and supplied with to shoestring coating liquid with described backing roll; Support the support of described coating liquid supply unit and described backing roll; The active vibration eliminating device of the actuator that has the described support of supporting and be used for driving,
Described vibration resisting method comprises:
First sensor according to being arranged in the described active vibration eliminating device detects the vibration of described support;
According to the feedback control strategies that is arranged in the described active vibration eliminating device, produce the first control inputs be used to the vibration of eliminating described support based on the output signal of described first sensor;
According to the second sensor that is arranged in the described active vibration eliminating device, detect the vibration on the basis that described support is set;
According to the first FEEDFORWARD CONTROL mechanism that is arranged in the described active vibration eliminating device, produce be used to the second control inputs of eliminating the described vibration of foundation based on the output signal of described the second sensor;
According to the upstream that is disposed at described coating liquid supply unit, and be arranged on the 3rd sensor on the deflector roll of advancing of supporting shoestring, detect the vibration of shoestring;
According to the second FEEDFORWARD CONTROL mechanism that is arranged in the described active vibration eliminating device, produce the 3rd control inputs that disturbs vibration for eliminating based on the output signal of described the 3rd sensor;
Based on described first, second and third control inputs, drive the actuator that is arranged in the described active vibration eliminating device.
10. a coating method is characterized in that,
Use following applying device, described applying device possesses: with the backing roll of outer peripheral face supporting to the shoestring of the length of vertically advancing; Separate the coating liquid supply unit that the certain intervals subtend disposed and supplied with to shoestring coating liquid with described backing roll; Support the support of described coating liquid supply unit and described backing roll; The active vibration eliminating device of the actuator that has the described support of supporting and be used for driving,
Described coating method comprises:
Utilize described backing roll, support described shoestring with outer peripheral face, and supply with described coating liquid and apply described shoestring from described coating liquid supply unit to described shoestring;
Apply on one side described shoestring, on one side right to use require 9 described vibration resisting methods carry out applying device except shaking.
11. the manufacture method of a coated film is characterized in that,
Use following applying device, described applying device possesses: with the backing roll of outer peripheral face supporting to the shoestring of the length of vertically advancing; Separate the coating liquid supply unit that the certain intervals subtend disposed and supplied with to shoestring coating liquid with described backing roll; Support the support of described coating liquid supply unit and described backing roll; The active vibration eliminating device of the actuator that has the described support of supporting and be used for driving,
The manufacture method of described coated film comprises:
Utilize described backing roll, support described shoestring with outer peripheral face, and supply with described coating liquid and apply described shoestring from described coating liquid supply unit to described shoestring;
Apply on one side described shoestring, on one side right to use require 9 described vibration resisting methods carry out applying device except shaking;
The described shoestring that has applied is carried out drying.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007095562A JP4879070B2 (en) | 2007-03-30 | 2007-03-30 | Coating apparatus and coating method |
| JP2007-095562 | 2007-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101274314A CN101274314A (en) | 2008-10-01 |
| CN101274314B true CN101274314B (en) | 2013-03-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008100876231A Active CN101274314B (en) | 2007-03-30 | 2008-03-25 | Coating device and its vibration-eliminating method, coating method using the vibration-eliminating method, and manufacture method of coating film |
Country Status (4)
| Country | Link |
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| JP (1) | JP4879070B2 (en) |
| KR (1) | KR101429589B1 (en) |
| CN (1) | CN101274314B (en) |
| TW (1) | TWI450767B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5258812B2 (en) * | 2010-02-17 | 2013-08-07 | 東京エレクトロン株式会社 | Slit nozzle cleaning device and coating device |
| WO2011148031A1 (en) * | 2010-05-25 | 2011-12-01 | Metso Paper, Inc. | Method and apparatus for controlling a coating head, and a coating head |
| CN102847649B (en) * | 2012-09-27 | 2015-01-07 | 电子科技大学 | Device for coating protective materials on surfaces of sheet-type electronic components |
| CN103086177A (en) * | 2013-02-19 | 2013-05-08 | 苏州东昇机电科技有限公司 | Unreeling machine and method for controlling unreeling of flexible materials |
| CN103086178B (en) * | 2013-02-19 | 2016-06-29 | 苏州东昇机电科技有限公司 | A kind of winder and the method controlling flexible material rolling |
| FR3078900B1 (en) * | 2018-03-15 | 2020-09-18 | Exel Ind | APPLICATION DEVICE FOR A FLUID PRODUCT WHOSE DOSING RATE DEPENDS ON THE SPEED OF AN OUTLET OF THE SAID FLUID PRODUCT |
| WO2019188931A1 (en) | 2018-03-29 | 2019-10-03 | 富士フイルム株式会社 | Winding condition generation device, winding device, winding defect level predicted value generation device, winding condition calculation method, winding method, and winding defect level predicted value generation method |
| CN109499811A (en) * | 2018-12-21 | 2019-03-22 | 江苏杰立胶粘材料科技有限公司 | A kind of foam tape sizer with spin coating function |
| JP2021146330A (en) | 2020-03-13 | 2021-09-27 | 株式会社リコー | Coating device and image formation system |
| CN113515046B (en) * | 2021-07-19 | 2023-05-16 | 西安理工大学 | Winding tension control method of web coating machine based on feedforward control |
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| CN1575863A (en) * | 2003-07-18 | 2005-02-09 | 住友重机械工业株式会社 | Working table device for table type applicator |
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| DE19652769A1 (en) * | 1996-12-18 | 1998-06-25 | Voith Sulzer Papiermasch Gmbh | Method and device for damping contact vibrations |
| JP2004089896A (en) * | 2002-09-02 | 2004-03-25 | Toppan Printing Co Ltd | Coating apparatus |
| JP4764615B2 (en) * | 2004-05-07 | 2011-09-07 | 富士フイルム株式会社 | Coating apparatus, coating method, and manufacturing method of web with coating film |
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| CN1575863A (en) * | 2003-07-18 | 2005-02-09 | 住友重机械工业株式会社 | Working table device for table type applicator |
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| JP特开2003-62507A 2003.03.04 |
| JP特开2004-33946A 2004.02.05 |
| JP特开2006-167519A 2006.06.29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008253866A (en) | 2008-10-23 |
| KR20080089186A (en) | 2008-10-06 |
| TW200920497A (en) | 2009-05-16 |
| TWI450767B (en) | 2014-09-01 |
| KR101429589B1 (en) | 2014-08-12 |
| JP4879070B2 (en) | 2012-02-15 |
| CN101274314A (en) | 2008-10-01 |
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