KR20080089186A - Coating apparatus - Google Patents

Abstract

A coating apparatus is provided to obtain a coating film having a high film thickness precision and smooth surface appearance and free from stains or spots after coating. A coating apparatus comprises a backup roller(20) whose outer circumferential surface supports an elongated web(16) running in the longitudinal direction, and a coating solution feeding unit spaced apart from the backup roller by a predetermined distance for supplying the coating solution to the web. The coating apparatus further comprises: a support die(30) for supporting the coating solution feeding unit and the backup roller; and an active vibration damping unit(32). The active vibration damping unit comprises: an actuator for supporting and driving the support die; a first sensor(34) for detecting the vibration of the support die; a feed back control section generating control input for removing the vibration of the support die according to the output signals of the first sensor; a second sensor(35) for detecting the vibration of the base on which the support die is disposed; a feed forward control section generating control input for removing the base vibration according to the output signals of the second sensor; a third sensor(36) attached to a portion other than the support die for detecting outer vibration transferred to the spring of the support die; and a feed forward control section generating control input for removing the outer vibration according to the output signals of the third sensor.

Description

Coating device {COATING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus, and more particularly, to a coating apparatus which forms a coating film surface of uniform thickness by applying a coating liquid onto a continuously running web (band-like support).

In the field of a photosensitive material, a magnetic recording medium, etc., the application | coating process which forms a coating film by apply | coating a predetermined | prescribed coating liquid on the strip-shaped flexible support body (henceforth "web") which runs continuously is employ | adopted. In these fields in recent years, a coating technique is desired in which a coating film with a high thickness accuracy and a smooth surface can be obtained without coating stains.

Similarly, in the application | coating process applied to manufacture of the optical film which has various functions, such as an optical compensation film, an antireflection film, and an anti-glare film, the above application | coating technique is calculated | required.

As a coating apparatus which apply | coats a coating liquid to a web surface, there exist a roll coater type, a gravure coat type, a roll coat plus doctor type, a reverse roll coater type, an extrusion type, a slide coat type, etc., and it distinguishes according to a use, What is being written is the current state.

In any of these coating apparatuses, it is important to remove the vibration at the time of coating in order to obtain a coating film with high thickness accuracy of the coating film and smooth surface and without coating stain.

As a method of removing the vibration at the time of application | coating, it is disclosed by patent document 1 to apply an active damping apparatus to an application | coating part. In addition, Patent Document 2 discloses a coating apparatus for maintaining a constant distance between the web and the coating head by applying vibration to the coating head.

[Patent Document 1] Japanese Patent Laid-Open No. 2005-319385

[Patent Document 2] Japanese Patent Application Laid-Open No. 2004-89896

 By the way, in the coating part, in addition to the vibration from the base on which the coating device is installed, the tension fluctuation and conveyance along the conveying direction of the web due to the change of the guide roller, the shaking of the guide roller, the vibration of the bearing, the vibration of the drive system, the dry wind, etc. Tension fluctuations in the direction perpendicular to the direction sometimes caused disturbance vibrations to the entire application device integrated with the coater roller. When the disturbance vibration occurred in the coating device, the vibration caused a fluctuation in the flow of the coating liquid, and as a result, a failure such as uneven coating occurred.

Under such a situation, Patent Literature 1 and Patent Literature 2 cannot say that it is sufficient for the removal of the disturbance vibration, and there was a fear of coating unevenness. In order to solve the problem, it is difficult to fix the coating roller and the backup roller supporting the web, and to prevent the coating stain caused by the disturbance vibration even when the distance between the coating head and the backup roller is constant.

This invention is made | formed in view of such a situation, The technical field which forms a coating film of predetermined film thickness in the web continuously conveyed at the predetermined space | interval with this coating liquid supply means, supplying a coating liquid from a coating liquid supply means. WHEREIN: It aims at realizing the application | coating device which can obtain the coating film with a high thickness precision of a film | membrane, and the surface is smooth, and there is no application | coating stain by removing the vibration of a coating device as it is, maintaining the stability of a control system.

The present invention, in order to achieve the above object, the coating device of the present invention is a backup roller for supporting a long web running in the longitudinal direction on the outer peripheral surface, and is spaced apart from the backup roller at a predetermined interval so as to be opposed to supply the coating liquid to the web An applicator having a coating liquid supply unit, comprising: a mount on which the coating liquid supply unit and the backup roller are fixed, an active vibration suppression device, and an actuator for the active vibration suppression device to support and drive the mount; A first sensor for detecting vibration of the sensor; a feedback control means for making a control input for eliminating vibration of the mount based on the output signal of the first sensor; a second sensor for detecting vibration of the foundation on which the mount is installed; Feedforward control means for making a control input for eliminating basic vibrations based on the output signal of the second sensor; A third sensor attached to a portion other than the mount for detecting disturbance vibration transmitted on a spring, and a feedforward control means for making a control input for eliminating vibration caused by a web based on an output signal of the third sensor. It is characterized by including.

When the coating device provided with the active vibration damping apparatus includes the third sensor, disturbance vibrations transmitted on the spring of the mount can be detected based on the vibration information from the third sensor. Disturbance vibration can be suppressed by creating a control input based on this disturbance vibration signal.

In the coating device of the present invention, it is preferable that the portion to which the third sensor is attached is a guide roller disposed upstream of the coating liquid supply portion to support running of the web, and the third sensor is provided at both ends of the guide roller. It is more preferable. This is because the tension difference in the direction perpendicular to the web conveyance direction can be measured, and the force contributing to the rotational direction around the Z axis of the mount can be detected during the disturbance vibration.

In the coating device of this invention, it is preferable that the distance of the site | part to which a 3rd sensor adheres, and the said backup roller is 10 m or less.

It is because there exists a possibility that vibration other than the vibration detected by the 3rd sensor may generate | occur | produce between the site | part and a guide roller when the site | part to which a backup roller and a 3rd sensor adhere | attaches too much. This is because when vibrations other than the detection vibrations occur, accurate vibration damping force cannot be applied to the coating device.

In the coating device of the present invention, the third sensor may be configured to obtain at least one information of tension, acceleration, speed, displacement of the web or acceleration, speed, displacement, rotational acceleration, rotational speed and rotational speed of the guide roller support. It is preferable to detect as vibration information of a web.

This is because when the state of the web is grasped, including the rotation speed of the guide roller, there is a possibility that the disturbance vibration caused by the web can be predicted therefrom.

In the coating device of the present invention, it is preferable that the control means for making a control input for eliminating disturbance vibration on the spring is a web vibration control means for controlling the vibration of the mount caused by the state variation of the web.

This is because the web origin is the largest among disturbances transmitted directly from above to the trestle.

In the coating apparatus of the present invention, it is preferable that the web vibration control means drives the actuator so as to eliminate disturbance vibration generated in the mount frame due to the change in the state of the web.

In the coating apparatus of this invention, it is preferable that the primary natural frequency of the said mount is 80 Hz or more.

In the coating device of this invention, it is preferable that the 1st natural frequency of the bottom surface in which the said coating device is provided is 10 Hz or more.

(Effects of the Invention)

By providing the control means based on the vibration information of the third sensor, it is possible to eliminate the vibration of the coating device due to the web, and to realize a coating device which can obtain a coating film having a high thickness accuracy of the film and a smooth surface and free of coating stains. Can be.

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of the coating device which concerns on this invention is described according to an accompanying drawing.

[Production line of optical compensation sheet]

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing explaining the manufacturing line of the optical compensation sheet to which the coating device and coating method which concern on this invention are applied.

As shown in FIG. 1, the manufacturing line of an optical compensation sheet is comprised so that the web 16 which is a transparent support body in which the polymer layer for orientation film formation was previously formed from the transmitter 66 may be sent out. The web 16 is guided by the guide roller 68 and sent to the rubbing processing apparatus 70. The rubbing roller 72 is provided in order to perform a rubbing process to a polymer layer. The vibration damper 74 is provided downstream of the rubbing processing apparatus 70. By the vibration damper 74, the dust adhering to the surface of the web 16 can be removed.

Downstream of the vibration damper 74, the coating device 10 provided in the active vibration damper 32 is arrange | positioned. The coating liquid containing the discomatic liquid crystal can be applied to the web 16. In this downstream, the drying zone 76 and the heating zone 78 are provided in order, and the liquid crystal layer can be formed on the web 16. Moreover, the ultraviolet lamp 80 is provided downstream of this, and it can be made to bridge | crosslink a liquid crystal by ultraviolet irradiation, and to form a desired polymer. And the web 16 in which the polymer was formed is wound up by the winding machine 82 provided downstream.

[Application device]

As shown in FIG. 2, the coating device 10 is applied to the application head 18 and the application head 18 which apply | coat the coating liquid conveyed by the pump etc. from the coating liquid tank to the web 16. As shown in FIG. Cylindrical backup roller 20 which is provided to face the web 16 at the time of application | coating on the outer peripheral surface, the support | pillar 15 which hold | maintains the rotation axis of the backup roller 20, and the backup roller 20 is running. In order to introduce the web 16, it is comprised by the guide roller 14 arrange | positioned at predetermined intervals from the application | coating head 18 and the backup roller 20. As shown in FIG. The strut 15 holding the application head 18 of the application device 10 and the rotational axis of the backup roller 20 is fixed to the mount 30 supported by the actuator 33 of the active vibration suppression device 32 described later. It is. In addition, the application head 18 is fixed to the mount 30 via the application head mount 31.

The backup roller 20 and the application head 18 are movable in such a manner that they can be adjusted so as to adjust the type of coating liquid applied to the web 16 and the film thickness of the coating liquid optimally. It is. Therefore, fixing to the mount 30 means that the backup roller 20 and the application head 18 are provided on the mount 30 so as to maintain a predetermined interval during application to the web 16.

Next, the coating method by the coating device 10 is demonstrated. The web 16 is fed from the feeder and introduced into the backup roller 20 through the guide roller 14. The introduced web 16 surrounds a part of the outer circumferential surface of the backup roller 20. The web 16 runs continuously at a constant speed in the direction of the arrow shown in the figure. At this time, the backup roller 20 supports the non-coated surface of the web 16 while rotating.

The guide roller 14 is arrange | positioned at the upstream of the backup roller 20. As shown in FIG. The axis of rotation of the guide roller 14 is supported by the strut 17. The strut 17 is provided on a different floor surface F or a separate mount from the mount 30 supported by the actuator 33.

The guide roller 14 is provided in order to support running of a web. While the web 16 is traveling, the guide roller 14 supports the web 16 while rotating, and functions to introduce the web 16 into the backup roller 20.

The application head 18 is disposed in a non-contact state in proximity to the web 16 on which the application head tip continuously travels. As mentioned above, it is comprised so that the space | interval of the application | coating head 18 and the web 16 may be adjusted. The application head 18 is fed from a coating liquid tank by a pump. Although not shown in the figure, it is preferable to use a metering pump because the supply flow rate of the coating liquid is stabilized as the pump. As a metering pump, although various pumps, such as a gear pump and a roller pump, can be used, for example, a gear pump can be suitably used for application | coating of this invention.

In the application head 18, as shown in FIG. 3, the cylindrical pocket part 18B is formed in parallel in the width direction of the web 16. As shown in FIG. The application pocket 18B is connected to a supply line 18A. In the application head 18, an application slit 18C having a discharge port at the tip of the application head is formed. The application slit 18C is in communication with the application pocket 18B.

The application slit 18C is a narrow flow path connecting the pocket portion 18B and the application head tip, and extends in the width direction of the web 16. And the coating liquid of the desired application amount apply | coated to the web 16 from the supply line 18A is supplied to the application | coating pocket part 18B of the application head 18, and a coating film is formed in the web 16. FIG.

The web 16 to which the coating liquid is applied is sent out to a dry zone and a heating zone formed downstream so that a liquid crystal layer is formed on the web 16. In addition, although not shown, the tension roller which controls the tension of the web 16 and the drive roller which controls conveyance of the web 16 are provided in the manufacturing line of an optical compensation sheet.

[Active vibration damper]

Next, the structure regarding the active damping apparatus 32 in which the above-mentioned coating apparatus 10 is provided is demonstrated by FIG. In this configuration, the application head 18 and the strut 15 are fixed on the mount 30. As described above, the application head 18 is fixed to the mount 30 via the application head mount 31. The mount 30, the application head mount 31, and the support | pillar l5 may be separate members, as shown in the figure, and may form these integrally.

The active vibration damping device 32 is composed of at least an actuator 33, a first sensor 34, a second sensor 35, a third sensor 36, a calculator 38, and a drive device 39.

Actuators 33, 33... Are arranged at four corners of the lower surface of the mount 30. The mount 30 is mounted on the bottom surface (installation base surface) F via the actuators 33, 33.

In addition, the first sensor 34 for detecting the vibration of the mount 30 is installed on the mount 30, the second sensor 35 for detecting the vibration of the foundation on which the mount 30 is installed is the bottom surface It is installed on (F). In addition, in this invention, the 3rd sensor 36 for detecting the vibration of a web is provided in the guide roller 14. As shown in FIG. The third sensor 36 detects information such as tension, acceleration, speed, displacement of the web, or acceleration, speed, displacement, etc. of the guide roller support as the vibration information of the web.

The first sensor 34 installed on the mount consists of an acceleration sensor and a position detection sensor installed on the mount 30. The 1st sensor 34 is provided in each actuator 33,33 ... in order to detect the X-axis, Y-axis, Z-axis, and rotation direction of a mount. The second sensor 35 installed on the bottom surface F is composed of an acceleration sensor. The third sensor installed on the guide roller is composed of a displacement sensor.

However, the kind and quantity of a sensor are suitably provided according to the object to detect, and are not limited to embodiment.

Next, the reason why the third sensor 36 is provided will be described.

With respect to the conventional active vibration suppression apparatus, control techniques relating to vibration suppression of vibrations of the foundation on which the vibration suppression apparatus is installed and vibration suppression by the operation of the apparatus installed on the mount are generally known.

However, there is no example of the control method of the vibration suppression apparatus in a unique environment where disturbance vibrations enter the mount frame due to the state variation of the continuously conveyed web 16 shown in the coating apparatus 10 of the present invention. It has not been considered to appropriately eliminate the vibration transmitted to the mount 30 from the.

More specifically, on a conventional active vibration suppression device, a precision instrument such as an electron microscope or a semiconductor exposure apparatus is used to control the vibration of the mount by feedback (hereinafter referred to as FB) of the vibration information of the mount. In addition to the FB control, these precision instruments simultaneously control the vibration of the mount by controlling the feed forward (hereinafter referred to as FF) of the basic vibration information on which the precision apparatus is installed. The object of processing, the sample in a microscope, and the wafer in a semiconductor exposure apparatus do not apply vibration to a mount itself by itself.

On the other hand, in the case of a web in which the object to be processed travels continuously, the vibration caused by the running of the web is transmitted as disturbance vibration to the guide roller or the coating liquid supplying section where the coating is performed.

The disturbance vibration caused by the running of the web in the coating device is a tension fluctuation along the conveying direction of the web due to the change or shake of the guide roller, the vibration of the bearing, the vibration of the drive system, the dry wind, and the like perpendicular to the conveying direction. Tension fluctuations were occurring.

Therefore, it becomes important for a coating apparatus to remove the disturbance vibration provided to a guide roller or a coating liquid supply part.

In the case of the coating apparatus provided in the conventional active vibration suppression apparatus, in order to remove the vibration, bias, and so-called disturbance vibration which originate in the said web, the vibration of the FB control loop in an active vibration suppression apparatus may be raised excessively. However, there is a risk that the margin of the control system becomes small, and in the worst case, a high gain problem such as oscillation of the active vibration suppression apparatus may occur.

On the other hand, if the gain of the FB control loop is dropped to prevent oscillation, not only the sufficient vibration damping performance is lost but also the vibration damping performance of the original floor vibration may not be maintained.

Thus, the present invention provides a tension sensor, a displacement sensor, a speed sensor, or an acceleration sensor of a web on a guide roller upstream of an application device, so that the tension or displacement or speed or acceleration in a direction perpendicular to the conveyance direction and conveyance of the web, and the like. A web vibration control loop is provided for detecting the variation of and controlling the vibration caused by the web based on this.

This web vibration control loop calculates, by calculation, the force exerted as a disturbance on the applicator when the web is viewed as an elastic body connected to the guide roller and the applicator using, for example, the output signal of the displacement sensor attached to both ends of the guide roller. In addition, the actuator is driven to eliminate the disturbance force by generating a control input signal inverting the sign of the disturbance force.

As a result, the vibration suppression performance of the active vibration suppression apparatus can be improved while maintaining the stability of the control system without causing a high gain problem.

Next, vibration information detected from the first sensor 34, the second sensor 35, and the third sensor 36 is input to the calculator 38. In the calculator 38, based on the detected vibration information, 1) FB control means for making a control input for eliminating the vibration of the mount, 2) FF control means for making a control input for eliminating the basic vibration, 3) vibration from the web A control means for making an FF control input for eliminating this is realized. The control means is realized in both software processing and hardware processing.

The control input processed by the calculator 38 is input to the drive device 39. The driving device 39 is provided with a vibration damping force for driving the actuator 33 supporting the mount 30 based on the control input to eliminate vibration. Thereby, vibration damping of the coating device 10 is realized.

4 is a conceptual diagram illustrating a control model of the active vibration damping device 32. The load receiving portion 44 is supported by the actuator 42 on the base 40 of the active vibration damping device 32. The acceleration sensor 46 which can detect the vibration of a mount, and the displacement sensor 48 which can detect the displacement of a mount are fixed on this load accommodating part 44. As shown in FIG. An acceleration sensor 50 capable of detecting vibration of the foundation vibration is also fixed on the foundation 40. Moreover, the displacement sensor 52 which can detect the vibration of a web is being fixed to the guide roller. Vibration information from the sensor 46, the sensor 48, the sensor 50, and the two sensors 52 provided at both ends of the guide roller is provided to the controller 54. The control unit 54 controls the actuator 42 based on the data.

Here, m of the load receiving part 44 means mass, and in mass m, the mount 30 in FIG. 2, the application head mount 31, the application head 18, and the backup roller 20 are shown. And the like mass. In addition, K means a spring constant and has shown the coefficient of resistance with respect to a position. In addition, C means damping and represents the coefficient of resistance with respect to speed. In addition, the web can be regarded as an elastic body connected to the guide roller and the application device. In other words, Kw means a spring constant for the vibration due to the web, and represents the coefficient of resistance to position.

Next, the control system of the present invention based on FIG. 4 will be described with reference to FIG. 5.

The load receiving portion 44 is a controlled portion, a portion showing a mount frame, and is controlled by the active vibration suppressing device 32. The portions 14 and 40 enclosed by the dotted dotted lines are the portions showing disturbance vibration and basic vibration on the spring.

The flow of the internal signal of the load receiving section 44 will be described. When any force is applied to the load receiving portion 44 from the outside, acceleration occurs in the load receiving portion 44. The acceleration signal of the load receiving portion 44 is integrated into the integrating element 132 to become a signal of speed, and is transmitted to a damping portion (damping coefficient C) in which resistance to speed is generated. The signal of velocity is then also integrated into the integration element 134 to become a displacement signal (position signal). This displacement signal is transmitted to a spring portion (spring constant K) in which resistance to position occurs.

The acceleration information of the load receiving portion 44 is detected by the acceleration sensor 46. The detected acceleration signal is passed to the subtractor 122 through a band pass filter (hereinafter referred to as BPF) 98. In the subtractor, the difference between the target value from the target value providing unit 102 and the acceleration signal is detected and the deviation signal is transmitted to the acceleration FB controller 112.

The displacement signal of the load receiving portion 44 is detected by the displacement sensor 48. The detected displacement signal is transmitted to the two subtractors 124 and 126 via the BPF 96. The subtractor 124 is similarly differentiated to the pseudodifferentiator 120 and transmitted as a speed signal. The subtractor 124 detects a difference between the target value of the target value assigning unit 104 and the speed signal, and transmits a deviation signal to the speed FB controller 114. The similar derivative of the displacement signal to the pseudodifferentiator 120 is to prevent the observed noise of the displacement signal from being carried on the velocity signal, and only differentiates it to amplify the noise.

The other displacement signal is transmitted to the subtractor 126. In the subtractor 126, the difference between the target value from the target value providing unit 106 and the displacement signal is detected and the deviation signal is transmitted to the displacement FB positioning controller 116. do.

In this way, the vibration damping force is applied to the coating device so as to suppress the vibration in accordance with the actual vibration state of the coating device by performing feedback control on the control inputs in the controllers 112, 114, and 116.

As a specific control law in the controllers 112, 114, 116, a PID control law, a robust control law, an adaptive control law, and the like can be used.

In the base 40, the vibration to floor vibration is detected by the acceleration sensor 50 as a signal of acceleration. The detected acceleration signal is transmitted to the subtractor 128 through the BPF 94, and the difference between the target value and the acceleration signal from the target value providing unit 108 is detected in the subtractor 128. The deviation signal is then transmitted to the basic signal controller 118.

Subsequently, in the guide roller 14, the displacement signal detected as the front pass displacement in the displacement sensor 52 provided in the guide roller 14 is transmitted to the subtractor 130 through the BPF 90. In the subtractor 130, the difference between the target value from the target value providing unit 100 and the displacement signal is detected and transmitted to the web signal controller 110 as a deviation signal. In this way, in the guide roller 14, by performing feedforward control with respect to the control input of the vibration resulting from a web, the damping force which suppresses this vibration according to the state of the disturbance vibration from a web is given to an application device. The vibration of the guide roller 14 is understood as the disturbance vibration of the spring constant Kw.

In the present invention, in addition to the vibration signals of the load receiving portion 44 and the base 40, the vibration signal of the guide roller 14 is detected, and the control input of the feedforward control is generated, resulting in the traveling of the web. It is characterized by applying a damping force for suppressing vibration to the coating device.

The combined control inputs are synthesized by adding together the control inputs of the web signal controller 110, the acceleration FB controller 112, the speed FB controller 114, the displacement FB positioning controller 116, and the basic signal controller 118.

Finally, the combined control input, the vibration disturbance due to the web, the disturbance of the basic vibration, the damping C, and the spring K are all combined and applied to the mount. Becomes At this time, since the composite control input acts to remove the sum of the forces other than this, the sum of the forces applied to the mount may be zero or a very small value to stop the mount.

Thereby, in the technical field which forms a coating film of predetermined film thickness in the web continuously conveyed at the predetermined space | interval with this coating liquid supply means, the vibration of a coating apparatus can be eliminated compared with the conventional, and the film thickness It is possible to realize a coating apparatus that can provide a coating film having high precision and smooth surface and free of coating stains.

In the coating device of this invention, the reason why it is preferable that it is the range of 10 m or less of the distance of the site | part to which a 3rd sensor adheres and a backup roll is demonstrated.

This is because if it falls too far, vibrations other than the vibration detected by the third sensor may occur between the portion where the third sensor is attached and the backup roller, so that an accurate vibration damping force cannot be applied to the application device.

In that sense, the distance between the third sensor and the mount is preferably 10 m or less, more preferably 5 m or less.

The reason why it is preferable that the primary natural frequency of the mount 30 is 80 Hz or more is demonstrated. Among disturbance vibrations, a problem is low frequency vibration, and high frequency vibration is easy to remove with a vibration damping device. Therefore, if the primary natural frequency of the mount 30 is taken upward, resonance with the disturbance vibration can be avoided. In addition, in the high frequency vibration state, the primary natural frequency of the mount 30 is so preferable that the thickness variation of the web coating film is inconspicuous.

In that sense, the primary natural frequency of the mount 30 is more preferably 100 Hz or more, and more preferably 120 Hz or more.

The reason why the primary natural frequency of the bottom surface on which the coating device 10 is installed is preferably 10 Hz or more is that the performance of the vibration damping device against vibration of 10 Hz or less in a state where the primary primary natural frequency of the foundation is less than 10 Hz is low. Because you can not keep. In addition, the higher the primary natural frequency of the mount 30, there is a reason that the more preferable. In that sense, it is more preferable that the primary natural frequency of the bottom surface on which the coating device 10 is provided is 20 Hz or more, and even more preferably 30 Hz or more.

Formation of the coating film using the coating device 10 is demonstrated. As the coating liquid, one containing an organic solvent can be used. However, the thing of the viscosity other than this and the thing which does not contain the organic solvent can be used.

As the web 16, generally, it has a predetermined width and a predetermined length, and has a polyethylene terephthalate (PET), polyethylene-2,6-naphthalate, cellulose diacetate, cellulose triacetate, and cellulose acetate propio having a thickness of about 2 to 200 m. Applying α-polyolefins having 2 to 10 carbon atoms such as plastic films such as nate, polyvinyl chloride, polyvinylidene chloride, polycarbonate, polyimide, and polyamide, paper, polyethylene, polypropylene, and ethylene butene copolymer The flexible band-like thing which consists of laminated paper, a metal plate, etc., or the band-like thing which provided the process layer on the surface based on the said band-like thing can be used.

In the manufacturing line of the optical compensation sheet of FIG. 1, the coating liquid in the slit 18C of the coating head 18 of the coating device 10 is also immediately after application while releasing the web 16 from the feeder 66. Application | coating is performed by controlling the conveyance speed of the web 16 so that the film thickness of the coating film 28 may be made constant.

In drying after application | coating, setting of the dry zone 76, the heating zone 78, the ultraviolet lamp 80 etc. is performed so that the coating film 28 of the thickness of a coating film may be high, and the surface is smooth. The web 16 after application | coating and drying is wound up by the winding machine 82. FIG.

It is preferable that the said series of processes are performed in favorable dust-freeness and the optimal temperature-humidity environment. Therefore, it is preferable to be performed in a clean room, and in particular, it is preferable that the coating device 10 is installed in an environment with high cleanliness. For this purpose, the form which uses a clean room of a downflow or a clean bench together can be employ | adopted.

As mentioned above, although embodiment of the coating apparatus and coating method which concern on this invention was described, this invention is not limited to the said embodiment, Various forms can be employ | adopted.

For example, in the present embodiment, an extrusion type coater is adopted as the coating device 10, but a coater other than this, for example, a bar coater (also referred to as a "rod coater", also includes a mayer bar coater) And gravure coater (direct gravure coater, gravure kiss coater, etc.), roll coater (transfer roll coater, reverse roll coater, etc.), die coater, fountain coater, slide hopper and the like.

Moreover, it is applicable to various application | coating as well as optical films, such as an optical compensation film, as a use of the coating device 10. FIG.

Finally, a simulation was performed to show the effect of the present invention. In the simulation, an application device (active) mounted on an active vibration suppression device that detects vibration of the mount and the mounting surface and is controlled by an actuator, and an application device mounted on an active vibration suppression device in which a sensor is also provided in the guide roller of the present invention (this Invention), and the acceleration normal deviation and the displacement normal deviation were computed. At this time, the mass m = 5,000 kg of the non-control part, the spring constant K = 2.0 × 10 ⁶ , the elastic modulus C = 5.0 × 10 ² , the target value (acceleration, velocity) = 0, target value (displacement) = constant value It was set as the force of the magnitude | size 10N containing the frequency component of spring-like disturbance = 1-100 Hz, and the magnitude | size 1N containing the frequency component of fundamental vibration disturbance = 1-100 Hz. The results are shown in Table 1.

As apparent from this result, the coating device of the present invention can significantly reduce the influence of vibration compared to the coating device mounted in the conventional active.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing explaining the manufacturing line of the optical compensation sheet to which the application | coating method and application apparatus which concern on this invention are applied.

2 is a perspective view showing a state where the coating device is installed.

3 is a perspective view of a portion of the application head cut out.

4 is a conceptual diagram illustrating a system configuration of an active vibration suppression apparatus.

FIG. 5 is a block diagram of the system configuration of FIG. 4.

<Explanation of symbols for main parts of the drawings>

10 application device 14 guide roller

15: Holding 16: Web

17: prop 18: application head

20: backup roller 28: coating film

30: mount 31: coating head mount

32: active vibration suppression device 33,42: actuator

34: first sensor 35: second sensor

36: third sensor 38: calculator

39: drive unit

Claims (9)

A coating device comprising a backup roller for supporting a long web running in the longitudinal direction on an outer circumferential surface thereof, and a coating liquid supply part spaced apart from the backup roller at regular intervals so as to be supplied to the web with a coating liquid: A mount on which the coating liquid supply part and the backup roller are supported; And An active vibration suppression device, wherein the active vibration suppression device includes an actuator for supporting and driving the mount, a first sensor for detecting vibration of the mount, and a vibration of the mount based on an output signal of the first sensor. Feedback control means for making a control input for the control; And a third sensor attached to a portion other than the mount for detecting disturbance vibration transmitted on the spring of the mount, and a feedforward control means for making a control input for canceling the disturbance vibration based on an output signal of the third sensor. Applicator characterized in that it comprises a. The coating device according to claim 1, wherein the portion to which the third sensor is attached is a guide roller which is disposed upstream of the coating liquid supply part and supports the running of the web. The applicator according to claim 2, wherein the third sensors are provided at both ends of the guide roller. The coating device according to any one of claims 1 to 3, wherein a distance between the portion where the third sensor is attached and the backup roller is in a range of 10 m or less. The method according to any one of claims 1 to 4, wherein the third sensor comprises: tension, acceleration, speed, displacement of the web or acceleration of the guide roller support, speed, displacement variation, rotational acceleration, rotational speed and rotational speed of the web. At least one of the information is detected as vibration information of the web. 6. The control means according to any one of claims 1 to 5, wherein the control means for making a control input for eliminating disturbance vibrations is a web vibration control means for controlling vibration of the mount caused by a change in state of the web. Application device. 7. The applicator according to claim 6, wherein said web vibration control means drives said actuator to eliminate disturbance vibration generated on said mount by the state variation of said web. The coating device according to any one of claims 1 to 7, wherein the first natural frequency of the mount is 80 Hz or more. The coating device according to any one of claims 1 to 8, wherein the first natural frequency of the bottom surface on which the coating device is installed is 10 Hz or more.

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