JP4879070B2 - Coating apparatus and coating method - Google Patents

Description

  The present invention relates to a coating apparatus, and more particularly to a coating apparatus that applies a coating liquid onto a continuously running web (band-like support) to form a coating film surface having a uniform thickness.

  In the fields of photographic photosensitive materials and magnetic recording media, a coating process is employed in which a predetermined coating solution is applied to a continuously running belt-like flexible support (hereinafter referred to as “web”) to form a coating film. ing. In recent years, in these fields, there has been a demand for a coating technique capable of obtaining a coating film having high coating film thickness accuracy, a smooth surface and no coating unevenness.

  Similarly, in the coating process applied to the production of an optical film having various functions such as an optical compensation film, an antireflection film, and an antiglare film, the above coating technique is required.

  For example, roll coater type, gravure coat type, roll coat plus doctor type, reverse roll coater type, extrusion type, slide coat type, etc., can be used depending on the application. This is the current situation.

  In any of these coating apparatuses, it is important to remove vibration during coating in order to obtain a coating film having a high coating film thickness accuracy and a smooth surface with no coating unevenness.

As a method for removing vibration during application, Patent Document 1 discloses that an active vibration isolator is applied to an application unit. Patent Document 2 discloses a coating apparatus that keeps the distance between the web and the coating head constant by applying vibration to the coating head.
JP 2005-319385 A JP 2004-89896 A

  By the way, in the applicator, in addition to vibration from the foundation on which the applicator is placed, guide roller eccentricity and vibration, bearing vibration, drive system vibration, drying air, etc. The tension fluctuation and the tension fluctuation in the direction perpendicular to the conveying direction may cause disturbance vibration to the entire coating apparatus integrated with the coater roller. When disturbance vibration is generated in the coating apparatus, the flow of the coating liquid fluctuates due to the vibration, resulting in failure such as coating unevenness.

  Under such circumstances, Patent Literature 1 and Patent Literature 2 are not sufficient for removing disturbance vibration, and there is a possibility that uneven coating occurs. In order to solve the problem, it is difficult to prevent coating unevenness due to the influence of disturbance vibration even if the coating head and the backup roller supporting the web are fixed and the distance between the coating head and the backup roller is fixed. .

  The present invention has been made in view of such circumstances, and a web that is continuously conveyed at a predetermined distance from the coating liquid supply means while supplying the coating liquid from the coating liquid supply means. In the technical field of forming a coating film with a predetermined film thickness, by canceling the vibration of the coating device while maintaining the stability of the control system, the coating thickness is high, the surface is smooth, and the coating is uneven. An object of the present invention is to realize a coating apparatus capable of obtaining a coating film free from any problem.

  In order to achieve the above-mentioned object, the coating apparatus of the present invention is provided with a backup roller that supports a long web running in the longitudinal direction on the outer peripheral surface, and a backup roller that is spaced apart from the backup roller by a predetermined distance. A coating liquid supply unit for supplying the coating liquid to the web, the apparatus comprising: a base on which the coating liquid supply unit and the backup roller are fixed; and an active vibration isolator, An anti-vibration device supports and drives the gantry, a first sensor for detecting vibration of the gantry, and a control for canceling the vibration of the gantry based on an output signal of the first sensor Feedback control means for making an input, a second sensor for detecting the vibration of the foundation on which the gantry is installed, and a control input for canceling the fundamental vibration based on the output signal of the second sensor For canceling vibration caused by the web based on the output signal of the third sensor attached to a portion other than the platform for detecting disturbance vibration transmitted on the spring of the platform, Feedforward control means for generating a control input is provided.

  Since the coating apparatus including the active vibration isolator includes the third sensor, it is possible to detect disturbance vibration transmitted on the spring of the gantry based on the vibration information from the third sensor. By creating a control input based on this disturbance vibration signal, disturbance vibration can be suppressed.

  In the coating apparatus of the present invention, the part to which the third sensor is attached is preferably a guide roller that is disposed upstream of the coating liquid supply unit and supports the running of the web, and the third sensor is a guide. More preferably, it is provided at both ends of the roller. This is because the tension difference in the direction perpendicular to the web conveyance direction can be measured, and the force contributing to the rotation direction around the Z axis of the gantry can be detected in the disturbance vibration.

  In the coating apparatus of this invention, it is preferable that the distance of the site | part to which a 3rd sensor is attached, and the said backup roller is the range of 10 m or less.

  This is because if the backup roller and the part to which the third sensor is attached are too far apart, vibration other than the vibration detected by the third sensor may occur between the part and the guide roller. This is because if vibration occurs in addition to the detected vibration, an accurate damping force cannot be applied to the coating apparatus.

  In the coating apparatus according to the aspect of the invention, the third sensor may include at least one of web tension, acceleration, speed, displacement variation, or guide roller support portion acceleration, speed, displacement variation, rotational acceleration, rotational speed, and rotational speed. The information is preferably detected as web vibration information.

  This is because if any state of the web including the number of rotations of the guide roller is grasped, disturbance vibration caused by the web may be predicted from there.

  In the coating apparatus of the present invention, it is preferable that the control means for generating a control input for canceling disturbance vibration on the spring is a web vibration control means for controlling the vibration of the gantry caused by the change in the web state.

  This is because the web-related disturbances that are transmitted directly from above to the frame are the largest.

  In the coating apparatus of the present invention, it is preferable that the web vibration control means drives the actuator so as to cancel disturbance vibration generated in the gantry due to a change in the state of the web.

  In the coating apparatus of the present invention, it is preferable that a primary natural frequency of the gantry is 80 Hz or more.

  In the coating apparatus of the present invention, it is preferable that the primary natural frequency of the floor surface on which the coating apparatus is installed is 10 Hz or more.

  By providing the control means based on the vibration information of the third sensor, it is possible to cancel the vibration of the coating apparatus caused by the web, the coating film thickness is high, the surface is smooth, and there is no coating unevenness Can be realized.

  Preferred embodiments of a coating apparatus according to the present invention will be described below with reference to the accompanying drawings.

[Production line of optical compensation sheet]
FIG. 1 is an explanatory view for explaining a production line of an optical compensation sheet to which a coating apparatus and a coating method according to the present invention are applied.

  As shown in FIG. 1, the optical compensation sheet production line is configured such that a web 16, which is a transparent support on which a polymer layer for forming an alignment film is previously formed, is fed from a feeder 66. The web 16 is guided by a guide roller 68 and fed into a rubbing processing device 70. The rubbing roller 72 is provided for performing a rubbing process on the polymer layer. A dust remover 74 is installed downstream of the rubbing treatment device 70. The dust attached to the surface of the web 16 can be removed by the dust remover 74.

  A coating device 10 installed in the active vibration isolator 32 is disposed downstream of the dust remover 74. A coating liquid containing disconematic liquid crystal can be applied to the web 16. Downstream of this, a drying zone 76 and a heating zone 78 are sequentially provided so that a liquid crystal layer can be formed on the web 16. Further, an ultraviolet lamp 80 is provided downstream of the liquid crystal so that a desired polymer can be formed by crosslinking the liquid crystal by ultraviolet irradiation. And the web 16 in which the polymer was formed is wound up by the winder 82 provided downstream.

[Coating equipment]
As shown in FIG. 2, the coating apparatus 10 is provided opposite to the coating head 18 for coating the web 16 with the coating liquid fed from the coating liquid tank by a pump or the like. A cylindrical backup roller 20 that supports the web 16 on its outer peripheral surface, a column 15 that holds the rotating shaft of the backup roller 20, and an application head 18 and a backup roller 20 for guiding the web 16 that is running to the backup roller 20. It is comprised by the guide roller 14 arrange | positioned at predetermined intervals. A support column 15 that holds the rotation heads of the coating head 18 and the backup roller 20 of the coating device 10 is fixed to a pedestal 30 supported by an actuator 33 of an active vibration isolator 32 described later. The application head 18 is fixed to the gantry 30 via the application head gantry 31.

  In order to be able to optimally adjust the type of coating liquid applied to the web 16 and the film thickness of the coating liquid, the backup roller 20 and the coating head 18 are configured to be movable so that the distance between them can be adjusted. . Therefore, being fixed to the gantry 30 means that the backup roller 20 and the coating head 18 are installed on the gantry 30 so as to maintain a predetermined interval during application to the web 16.

  Next, a coating method using the coating apparatus 10 will be described. The web 16 is fed from the feeding machine and guided to the backup roller 20 through the guide roller 14. The guided web 16 surrounds a part of the outer peripheral surface of the backup roller 20. The web 16 is continuously run at a constant speed in the direction of the arrow shown in the drawing. At this time, the backup roller 20 supports the non-coating surface of the web 16 while rotating.

  A guide roller 14 is disposed on the upstream side of the backup roller 20. The rotating shaft of the guide roller 14 is supported by the support column 17. The column 17 is installed on a floor F different from the frame 30 supported by the actuator 33 or on another frame.

  The guide roller 14 is provided to support the running of the web. During the running of the web 16, the guide roller 14 functions to support the web 16 while rotating and to guide the web 16 to the backup roller 20.

  The coating head 18 is disposed so as to face the web 16 on which the tip of the coating head continuously travels in a non-contact state. As described above, the gap between the coating head 18 and the web 16 can be adjusted. The coating head 18 is fed from the coating solution tank by a pump. Although not shown, it is preferable to use a metering pump as the pump since the supply flow rate of the coating liquid is stabilized. As the metering pump, for example, various pumps such as a gear pump and a roller pump can be used. For the application of the present invention, a gear pump can be particularly preferably used.

  As shown in FIG. 3, a cylindrical pocket portion 18 </ b> B is formed in the coating head 18 in parallel with the width direction of the web 16. The application pocket 18B is connected to the supply line 18A. In the coating head 18, a coating slit 18C having a discharge port at the tip of the coating head is formed. The application slit 18C communicates with the application pocket 18B.

  The coating slit 18 </ b> C is a narrow channel that connects the pocket portion 18 </ b> B and the tip of the coating head, and extends in the width direction of the web 16. Then, a desired amount of coating solution to be applied to the web 16 from the supply line 18 </ b> A is supplied to the application pocket portion 18 </ b> B of the application head 18, and an application film is formed on the web 16.

  The web 16 coated with the coating liquid is sent to a drying zone and a heating zone provided downstream, and a liquid crystal layer is formed on the web 16. Although not shown, a tension roller for controlling the tension of the web 16 and a driving roller for controlling the conveyance of the web 16 are provided in the optical compensation sheet manufacturing line.

[Active vibration isolation device]
Next, a configuration related to the active vibration isolator 32 on which the coating apparatus 10 is installed will be described with reference to FIG. In this configuration, the coating head 18 and the support column 15 are fixed on the gantry 30. As described above, the coating head 18 is fixed to the gantry 30 via the coating head gantry 31. The gantry 30, the coating head gantry 31, and the support column 15 may be separate members as shown in the figure, or may be formed integrally.

  The active vibration isolator 32 includes at least an actuator 33, a first sensor 34, a second sensor 35, a third sensor 36, a calculator 38, and a drive device 39.

  Actuators 33 are arranged at the four corners of the lower surface of the gantry 30. The gantry 30 is installed on a floor surface (installation base surface) F via actuators 33, 33.

  In addition, a first sensor 34 for detecting the vibration of the gantry 30 is installed on the gantry 30, and a second sensor 35 for detecting the vibration of the foundation on which the gantry 30 is installed is installed on the floor surface F. The Further, in the present invention, a third sensor 36 for detecting the vibration of the web is installed on the guide roller 14. The third sensor 36 detects web tension information such as web tension, acceleration, speed, displacement fluctuation or acceleration, speed, displacement fluctuation of the guide roller support portion.

  The first sensor 34 installed on the gantry includes an acceleration sensor and a position detection sensor installed on the gantry 30. The first sensor 34 is provided in each actuator 33, 33,... For detecting the X-axis, Y-axis, Z-axis and rotation direction of the gantry. The second sensor 35 installed on the floor surface F is configured by an acceleration sensor. The 3rd sensor installed in a guide roller comprises a displacement sensor.

  However, the type and quantity of the sensor are appropriately set according to the object to be detected, and are not limited to the embodiment.

  Next, the reason why the third sensor 36 is provided will be described.

  With respect to conventional active vibration isolator, a control technique relating to vibration isolation of a foundation on which a vibration isolator is installed and vibration suppression by operation of equipment installed on a gantry is generally known.

  However, there is no example relating to a method for controlling the vibration isolator in a specific environment in which disturbance vibrations enter the gantry due to fluctuations in the state of the continuously conveyed web 16 as seen in the coating apparatus 10 of the present invention. It has not been studied to properly cancel the vibration propagated from the base 30 to the gantry 30.

  More specifically, in a precision instrument such as an electron microscope or a semiconductor exposure apparatus on a conventional active vibration isolator, the vibration information of the gantry is feedback (hereinafter referred to as FB) to control the vibration of the gantry. Has been done. Further, in addition to the FB control, in these precision instruments, information on the vibration of the foundation on which the precision instrument is installed is feedforward (hereinafter referred to as FF) control, and the vibration of the gantry is also controlled at the same time. None of the objects to be processed, a sample in a microscope, or a wafer in a semiconductor exposure apparatus, itself gives vibration to the gantry.

  On the other hand, in the case of a web in which an object to be processed travels continuously, vibration caused by the travel of the web is transmitted as disturbance vibration to a guide roller and a coating liquid supply unit where coating is performed.

  Disturbance vibration caused by running of the web in the coating device includes guide roller eccentricity and vibration, bearing vibration, drive system vibration, drying wind, etc., tension fluctuation along the web conveyance direction and perpendicular to the conveyance direction. Tension fluctuation in the direction occurred.

  For this reason, it is important in the coating apparatus to remove disturbance vibrations applied to the guide roller and the coating liquid supply unit.

  In the case of a coating apparatus installed in a conventional active vibration isolator, the gain of the FB control loop in the active vibration isolator is forcibly increased in order to remove the vibration and bias caused by the web, so-called disturbance vibration. It is also possible to cancel the vibration. However, the margin of the control system is reduced, and in the worst case, a high gain problem such as oscillation of the active vibration isolator may occur.

  On the other hand, if the gain of the FB control loop is lowered to prevent oscillation, not only the sufficient vibration damping performance is lost, but the original floor vibration isolation performance may not be maintained.

  Therefore, the present invention provides a web tension sensor, a displacement sensor, a speed sensor, or an acceleration sensor in the guide roller upstream of the coating apparatus, thereby providing a tension, displacement, or speed in the web transport direction and the direction perpendicular to the transport. Alternatively, a web vibration control loop that detects fluctuations such as acceleration and controls vibrations caused by the web based on the fluctuations is provided.

  This web vibration control loop is applied as a disturbance to the coating device when the web is viewed as an elastic body connected to the guide roller and the coating device using, for example, output signals of displacement sensors attached to both ends of the guide roller. The incoming force is obtained by calculation, a control input signal in which the sign of the disturbance force is inverted is generated, and the actuator is driven so as to cancel the disturbance force.

  Thereby, it is possible to improve the vibration isolation performance of the active vibration isolation device while maintaining the stability of the control system without causing a high gain problem.

  Next, vibration information detected from the first sensor 34, the second sensor 35, and the third sensor 36 is input to the computer 38. In the computer 38, based on the detected vibration information, 1) FB control means for making a control input for canceling the vibration of the gantry, 2) FF control means for making a control input for canceling the fundamental vibration, 3) Web origin The control means for creating the FF control input for canceling the vibration of is realized. The control means can be realized by either software processing or hardware processing.

  The control input processed by the computer 38 is input to the drive device 39. The driving device 39 drives the actuator 33 that supports the gantry 30 based on the control input, and a damping force that cancels the vibration is applied to the coating device. Thereby, vibration isolation of the coating apparatus 10 is realized.

  FIG. 4 is a conceptual diagram illustrating a control model of the active vibration isolation device 32. A load receiving portion 44 is supported on the base 40 of the active vibration isolation device 32 via an actuator 42. An acceleration sensor 46 capable of detecting the vibration of the gantry and a displacement sensor 48 capable of detecting the displacement of the gantry are fixed on the load receiving portion 44. An acceleration sensor 50 capable of detecting the vibration of the fundamental vibration is also fixed on the foundation 40. Further, a displacement sensor 52 capable of detecting web vibration is fixed to the guide roller. Vibration information from the sensors 46, 48, 50, and the two sensors 52 provided at both ends of the guide roller is given to the control unit 54. The control unit 54 controls the actuator 42 based on the data.

  Here, m of the load receiving portion 44 means mass, and the mass m includes masses of the gantry 30, the coating head gantry 31, the coating head 18, the backup roller 20, and the like in FIG. K represents a spring constant and represents a coefficient of resistance to position. C represents attenuation and represents a coefficient of resistance to speed. Furthermore, the web can be regarded as an elastic body connected to the guide roller and the coating device. That is, Kw means a spring constant with respect to vibration caused by the web, and indicates a coefficient of resistance to position.

  Next, the control system of the present invention using FIG. 4 as a model will be described with reference to FIG.

  The load receiving portion 44 is a controlled portion, which is a portion representing a gantry, and is controlled by the active vibration isolator 32. And the parts 14 and 40 enclosed with the dotted line of a square are the parts showing the disturbance vibration and fundamental vibration on a spring.

  The flow of internal signals in the load receiver 44 will be described. When any force is applied to the load receiving portion 44 from the outside, the load receiving portion 44 is accelerated. The acceleration signal of the load receiving portion 44 is integrated by the integrating element 132 to become a speed signal, which is transmitted to an attenuation portion (attenuation coefficient C) that generates a resistance force against the speed. Next, the velocity signal is further integrated by the integrating element 134 to become a displacement signal (position signal). This displacement signal is transmitted to a spring portion (spring constant K) that generates a resistance force to the position.

  Information on the acceleration of the load receiving portion 44 is detected by the acceleration sensor 46. The detected acceleration signal is transmitted to the subtractor 122 through a band pass filter (hereinafter referred to as BPF) 98. The subtracter detects the difference between the target value from the target value assigning unit 102 and the acceleration signal, and transmits the deviation signal to the acceleration FB controller 112.

  A displacement signal of the load receiving portion 44 is detected by a displacement sensor 48. The detected displacement signal is transmitted to the two subtracters 124 and 126 via the BPF 96. The subtractor 124 is pseudo-differentiated by the pseudo-differentiator 120 and transmitted as a speed signal. The subtractor 124 detects the difference between the target value of the target value giving unit 104 and the speed signal, and transmits the deviation signal to the speed FB controller 114. The reason why the displacement signal is pseudo-differentiated by the pseudo-differentiator 120 is to prevent the observation noise of the displacement signal from being included in the velocity signal, and if it is simply differentiated, the noise is amplified.

  The other displacement signal is transmitted to the subtractor 126, which detects the difference between the target value from the target value assigning unit 106 and the displacement signal, and transmits the deviation signal to the displacement FB positioning controller 116. .

  In this way, by performing feedback control on the control input in the controllers 112, 114, and 116, a vibration damping force that suppresses this vibration is applied to the coating apparatus according to the actual vibration state of the coating apparatus. It is done.

  As a specific control law in the controllers 112, 114, and 116, a PID control law, a robust control law, an adaptive control law, or the like can be used.

  In the foundation 40, vibration with respect to floor vibration is detected as an acceleration signal by the acceleration sensor 50, and the detected acceleration signal is transmitted to the subtracter 128 via the BPF 94, and the subtracter 128 receives the target from the target value assigning unit 108. The difference between the value and the acceleration signal is detected. Then, the deviation signal is transmitted to the basic signal controller 118.

  Next, in the guide roller 14, the displacement signal detected as the previous path displacement by the displacement sensor 52 installed on the guide roller 14 is transmitted to the subtractor 130 via the BPF 90. The subtractor 130 detects the difference between the target value from the target value assigning unit 100 and the displacement signal, and transmits it to the web signal controller 110 as a deviation signal. In this manner, the guide roller 14 performs feedforward control on the control input of the vibration caused by the web, so that a damping force that suppresses this vibration is obtained according to the state of disturbance vibration from the web. Given to the applicator. The vibration of the guide roller 14 is grasped as a disturbance vibration having a spring constant Kw.

  In the present invention, in addition to the vibration signals of the load receiving portion 44 and the foundation 40, the vibration signal in the guide roller 14 is detected and the control input of the feedforward control is created, so that the vibration caused by the running of the web is reduced. It is characterized in that a damping force to be suppressed is applied to the coating device.

  The control inputs of the web signal controller 110, the acceleration FB controller 112, the speed FB controller 114, the displacement FB positioning controller 116, and the basic signal controller 118 are all added together to synthesize a composite control input.

  Finally, the combined control input, the vibration force disturbance due to the web, the basic vibration force disturbance, the force due to the damping C, and the force due to the spring K are all combined to become a force applied to the gantry. At this time, the composite control input works so as to cancel out the sum of the other forces, so that the total sum of the forces applied to the gantry becomes zero or a very small value, and the gantry can be stopped.

  As a result, in the technical field of forming a coating film having a predetermined film thickness on a web that is continuously conveyed at a position spaced apart from the coating liquid supply means, the vibration of the coating apparatus is canceled as compared with the conventional technique. Thus, it is possible to realize a coating apparatus capable of obtaining a coating film with high film thickness accuracy, a smooth surface and no coating unevenness.

  In the coating apparatus of the present invention, the reason why the distance between the part to which the third sensor is attached and the backup roll is preferably 10 m or less will be described.

  If it is too far away, vibrations other than the vibration detected by the third sensor may occur between the portion where the third sensor is attached and the backup roller, and an accurate vibration control force cannot be applied to the coating device. Because.

  In that sense, the distance between the third sensor and the gantry is preferably 10 m or less, and more preferably 5 m or less.

  The reason why the primary natural frequency of the gantry 30 is preferably 80 Hz or more will be described. Of the disturbance vibrations, the problem is low-frequency vibrations, and high-frequency vibrations are easily dropped by a vibration isolator. Therefore, if the primary natural frequency of the gantry 30 is brought higher, resonance with disturbance vibration can be avoided. Further, since the thickness unevenness of the coating film on the web is not noticeable in the high frequency vibration state, it is desirable that the primary natural frequency of the gantry 30 is higher.

  In that sense, the primary natural frequency of the gantry 30 is more preferably 100 Hz or more, and further preferably 120 Hz or more.

  The reason why the primary natural frequency of the floor surface on which the coating apparatus 10 is installed is preferably 10 Hz or more is that the vibration isolation device with respect to vibration of 10 Hz or less is low in a state where the foundation primary natural frequency is low at 10 Hz or less. This is because performance cannot be maintained. Further, there is the same reason that the higher the primary natural frequency of the gantry 30 is, the more desirable it is. In that sense, the primary natural frequency of the floor surface on which the coating apparatus 10 is installed is preferably 20 Hz or more, and more preferably 30 Hz or more.

  The formation of a coating film using the coating apparatus 10 will be described. As the coating solution, one containing an organic solvent can be used. However, the thing of viscosity other than this and the thing which does not contain an organic solvent can also be used.

  The web 16 is generally polyethylene terephthalate (PET), polyethylene-2,6-naphthalate, cellulose diacetate, cellulose triacetate, cellulose acetate propionate having a predetermined width, a predetermined length, and a thickness of about 2 to 200 μm. Paper coated with α-polyolefins having 2 to 10 carbon atoms such as polyvinyl chloride, polyvinylidene chloride, polycarbonate, polyimide, polyamide, etc., paper, polyethylene, polypropylene, ethylene butene copolymer, etc., metal A flexible strip made of a plate or the like or a strip having a processed layer formed on the surface of the strip can be used.

  In the optical compensation sheet production line in FIG. 1, the coating liquid in the slit 18C of the coating head 18 of the coating apparatus 10 or the film thickness of the coating film 28 immediately after coating becomes constant while the web 16 is fed out from the feeder 66. In this way, application is performed by controlling the conveyance speed of the web 16.

  In drying after coating, the drying zone 76, the heating zone 78, the ultraviolet lamp 80, etc. are set so that the coating film 28 having a high thickness accuracy and a smooth surface can be obtained. The web 16 after coating and drying is wound up by a winder 82.

  It is preferable that the above-described series of steps is performed in an environment of good dust-freeness and optimum temperature and humidity. Therefore, it is preferably performed in a clean room, and in particular, the coating apparatus 10 is preferably installed in an environment with a high degree of cleanliness. For this purpose, a mode in which a downflow clean room or a clean bench is used together can be employed.

  As mentioned above, although embodiment of the coating device and the coating method which concern on this invention was described, this invention is not limited to the said embodiment, Various aspects can be taken.

  For example, in the present embodiment, an extrusion-type coater is employed as the coating apparatus 10, but other coaters such as a bar coater (also referred to as “rod coater”, including a Mayer bar coater), a gravure coater, and the like. (Direct gravure coater, gravure kiss coater, etc.), roll coater (transfer roll coater, reverse roll coater, etc.), die coater, fountain coater, slide hopper, etc.

  Further, the application of the coating apparatus 10 can be applied not only to an optical film such as an optical compensation film but also to various coatings.

Finally, a simulation was performed to show the effect of the present invention. In the simulation, a coating device (active) mounted on an active vibration isolator that detects vibrations of the gantry and the installation surface and controls them with an actuator, and further mounted on an active vibration isolator with a sensor on the guide roller of the present invention. A simulation was performed using the applied coating apparatus (the present invention) as a model, and an acceleration steady-state deviation and a displacement steady-state deviation were calculated. The conditions at this time are: mass of non-control part m = 5,000 Kg, spring constant K = 2.0 × 10 ⁶ , elastic coefficient C = 5.0 × 10 ² , target value (acceleration, speed) = zero, target Value (displacement) = constant value, sprung disturbance = force having a magnitude of 10 N including frequency components of 1 to 100 Hz, fundamental vibration disturbance = force having a magnitude of 1 N including frequency components of 1 to 100 Hz. The results are shown in Table 1.

  As is clear from this result, the coating apparatus of the present invention can greatly reduce the influence of vibration compared to a conventional actively mounted coating apparatus.

Explanatory drawing explaining the production line of the optical compensation sheet | seat with which the coating method and coating device which concern on this invention are applied The perspective view which shows the state in which the coating device was installed Perspective view with part of application head cut out Conceptual diagram explaining the system configuration of an active vibration isolator Block diagram in the system configuration of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Application | coating apparatus, 14 ... Guide roller, 15 ... Support | pillar, 16 ... Web, 17 ... Support | pillar, 18 ... Application | coating head, 20 ... Backup roller, 28 ... Coating film, 30 ... Mount, 31 ... Application head mount, 32 ... Active Vibration isolator, 33, 42 ... Actuator, 34 ... First sensor, 35 ... Second sensor, 36 ... Third sensor, 38 ... Computer, 39 ... Drive device

Claims (9)

A coating apparatus comprising: a backup roller that supports a long web running in the longitudinal direction on an outer peripheral surface; and a coating liquid supply unit that is disposed to face the backup roller at a predetermined interval and supplies the coating liquid to the web. Because
A platform on which the coating liquid supply unit and the backup roller are supported;
An active vibration isolator, the active vibration isolator supporting and driving the gantry, a first sensor for detecting vibration of the gantry, and an output signal of the first sensor Feedback control means for creating a control input for canceling the vibration of the gantry based on the second, a second sensor for detecting the vibration of the foundation on which the gantry is installed, and a basic vibration based on the output signal of the second sensor Feedforward control means for creating a control input for canceling out, a third sensor attached to a part other than the frame for detecting disturbance vibration transmitted on the spring of the frame, and an output signal of the third sensor a coated fabric device Ru provided with a feed-forward control means for making a control input for canceling the disturbance vibration based,
The third sensor is a coating apparatus that detects at least one of web tension or acceleration, speed, and displacement variation of the guide roller support as web vibration information .   2. The coating apparatus according to claim 1, wherein a portion to which the third sensor is attached is a guide roller that is disposed on the upstream side of the coating liquid supply unit and supports the running of the web.   The coating apparatus according to claim 2, wherein the third sensor is provided at both ends of the guide roller.   The coating apparatus according to claim 1, wherein a distance between a portion to which the third sensor is attached and the backup roller is in a range of 10 m or less. The coating apparatus according to any one of claims 1 to 4 , wherein the control means for creating a control input for canceling the disturbance vibration is a web vibration control means for controlling vibration of the gantry caused by web state fluctuation. The coating apparatus according to claim 5, wherein the web vibration control unit drives the actuator so as to cancel disturbance vibration generated in the gantry due to a state change of the web. Coating apparatus of any one of claims 1 to 6 primary natural frequency of the frame is equal to or greater than 80 Hz. The coating apparatus coating apparatus according to any one of claims 1-7 primary natural frequency of the floor surface is 10Hz or more to be installed. The coating method using the coating apparatus according to claim 1.

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