CN101274314A - Coating device - Google Patents
Coating device Download PDFInfo
- Publication number
- CN101274314A CN101274314A CNA2008100876231A CN200810087623A CN101274314A CN 101274314 A CN101274314 A CN 101274314A CN A2008100876231 A CNA2008100876231 A CN A2008100876231A CN 200810087623 A CN200810087623 A CN 200810087623A CN 101274314 A CN101274314 A CN 101274314A
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- Prior art keywords
- vibration
- shoestring
- sensor
- applying device
- support
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
- B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
Abstract
The invention provides a coating device which can acquire coating films with high thickness precision and smooth surface as well as in free of uneven coating. The coating device includes: a support roller (20) which uses an outer circumference to support a long ribbon body (16) moves longitudinally, a coating device (10) of a coating head (18) which is provided oppositely with certain gap from the support roller (20) and supplies the coating liquid to the ribbon body, wherein the coating device includes a bracket (30) fixed with the coating head (18 and the support roller (20), and an active vibration eliminating device (32); the active vibration eliminating device (32) includes an actuator (33) for supporting the bracket (30) and driving, a first sensor (34) for detection of the vibration of the bracket (30), a second sensor (35) for detection of fundamental vibration, a third sensor (36) for detection of the vibration of the ribbon body, and a control mechanism which, on the basis of the information of each sensor, generates a control input for eliminating the vibration.
Description
Technical field
The present invention relates to a kind of applying device, relate in particular at the shoestring of advancing continuously (banded supporting mass) thus go up the applying device that coating liquid coating forms the coating face of uniform thickness.
Background technology
In fields such as sensitive photographic material or magnetic recording media, employing be the flexible support body (hereinafter referred to as " shoestring ") in the band shape of advancing continuously thus the coating liquid of going up the coating regulation forms the working procedure of coating of coated film.In recent years, in these fields, need to access the thickness and precision height of coated film and the coating technology that does not apply uneven coated film of surface smoothing.
Equally, even be applicable to that optical compensating film, antireflective film, anti-dazzle property film etc. have in the working procedure of coating of manufacturing of optical thin film of various functions, also need aforesaid coating technology.
Be coated on banded honorable applying device as applying liquid, for example comprise that roller coating type, intaglio coating-type, roller coat add blade coating (roll coat plus doctor) type, reverse roll coater type, extrusion type, slidingtype application type etc., suitably use according to the purposes difference at present.
Even in these any applying devices, for the uneven coated film of not coating of the thickness and precision height that obtains coated film and surface smoothing, the vibration when removing coating is very important.
Method as the vibration of removing when coating discloses in patent documentation 1 active vibration eliminating device has been applicable to coating portion.In addition, in patent documentation 2, also disclose by making the distance between shoestring and the applicator head keep certain applying device to applicator head supply vibration.
Patent documentation 1: the spy opens the 2005-319385 communique
Patent documentation 2: the spy opens the 2004-89896 communique
But, in coating portion, except vibration from the basis of placing applying device, because the vibration of the off-centre of deflector roll or runout, bearing vibration, driving system, dry wind etc., cause sometimes that along the tension change of the tension change of the throughput direction of shoestring and the direction vertical the interference of the coating device whole that becomes one with application roll vibrates with throughput direction.If vibration takes place to disturb in applying device, then this vibration causes the mobile change of coating liquid, and the result becomes the reason that causes the unequal fault of coating.
Under such situation, in patent documentation 1 and patent documentation 2, also insufficient for removing the interference vibration, it is uneven that coating may take place.Even thereby the backing roll of fixed bearing applicator head and shoestring makes the distance of applicator head and backing roll keep certain in order to address this problem, the coating inequality that also is difficult to prevent to disturb the influence of vibration to cause.
Summary of the invention
The present invention proposes in view of such situation just, its purpose is, utilizing coating liquid feed mechanism supply coating liquid, simultaneously, applying liquid feed mechanism on the position of predetermined distance with this, on the shoestring of carrying continuously, form in the technical field of the coated film of stipulating thickness, can be by the stability status of retentive control system constant and eliminate the vibration of applying device, realize obtaining thickness precision height, surface smoothing and the applying device of the uneven coated film of coating not.
The present invention is in order to realize described purpose, a kind of applying device is provided, it is to possess: with the backing roll of outer peripheral face supporting to the shoestring of the length of vertically advancing, with with described backing roll across certain intervals subtend configuration and supply with the applying device of the coating liquid supply unit of coating liquid to shoestring, it is characterized in that, possess: the support that fixing described coating liquid supply unit and described backing roll form, with active vibration eliminating device, this active vibration eliminating device possesses: the actuator that supports described support and be used to drive, detect the first sensor of the vibration of described support, produce the feedback control strategies of the control input of the vibration that is used to eliminate support based on the output signal of described first sensor, detection is provided with second sensor of vibration on the basis of described support, produce the FEEDFORWARD CONTROL mechanism of the control input that is used to eliminate the vibration of foundation based on described second signal of sensor, the 3rd sensor that is installed on described support position in addition of the interference vibration that detection is conducted on the spring of described support, with the feedback control strategies that produces the control input that is used to eliminate the vibration that shoestring causes based on described the 3rd signal of sensor.
The applying device that possesses active vibration eliminating device can detect the interference vibration of conducting based on the vibration information from the 3rd sensor by possessing the 3rd sensor on the spring of support.Can produce the control input by the signal that disturbs vibration based on this, suppress to disturb vibration.
In applying device of the present invention, the position that described the 3rd sensor can be installed preferably is disposed at the deflector roll of advancing of the supporting shoestring of the upstream that applies the liquid supply unit, and then more preferably at the two ends of deflector roll the 3rd sensor is set.This be because, can measure the Tension Difference of the direction vertical with the shoestring throughput direction, can detect the power of in disturbing vibration, giving to the axial direction of rotation of the Z of support.
In applying device of the present invention, the position of the 3rd sensor and the scope of distance below 10m of described backing roll can be installed preferably.
This be because, if backing roll and position that the 3rd sensor can be installed from too far, then may take place between position and deflector roll with the detected vibration of the 3rd sensor vibration in addition.This is because if vibration vibration in addition takes place to detect, then can not give correct damping force to applying device.
In applying device of the present invention, at least one information of the change of the tension force of preferred described the 3rd sensor detection shoestring, acceleration, speed, displacement or acceleration, speed, displacement change, rotary acceleration, rotary speed and the revolution of deflector roll support is as the vibration information of shoestring.
This be because, if correct understanding comprise any state of shoestring of the revolution of deflector roll, the then interference vibration that can cause from this state prediction shoestring.
In applying device of the present invention, the state change that the controlling organization that produces the control input of the interference vibration be used to eliminate on the spring is preferably control shoestring causes the shoestring vibration control mechanism of the vibration of the support that produces.
This be because, from directly transmit on the support and interference, the interference maximum that shoestring causes.
In applying device of the present invention, preferred shoestring vibration control mechanism drives actuator according to the state change of described shoestring, to eliminate the interference vibration that produces at support.
In applying device of the present invention, an eigentone of preferred described support is more than the 80Hz.
In applying device of the present invention, the eigentone that the bed surface of described applying device preferably is set is more than the 10Hz.
By having controlling organization based on the vibration information of the 3rd sensor, can realize eliminating the vibration of the applying device that shoestring causes, can obtain the applying device of the uneven coated film of the not coating of the thickness and precision height of film and surface smoothing.
Description of drawings
Fig. 1 is the key diagram of the production line of the optical compensating gage that coating method and applying device were suitable among explanation the present invention.
Fig. 2 is the stereogram of the state that is provided with of expression applying device.
Fig. 3 is the breach stereogram of the part of expression applicator head.
Fig. 4 is the concept map of the system architecture of the active vibration eliminating device of explanation.
Fig. 5 is the module map in the system architecture of Fig. 4.
Among the figure, 10-applying device, 14-deflector roll, 15-pillar, 16-shoestring, 17-pillar, 18-applicator head, 20-backing roll, 28-coated film, 30-support, 31-applicator head support, 32-initiatively vibration eliminating devices, 33,42-actuator, 34-first sensor, 35-the second sensor, 36-the three sensor, 38-computer, 39-drive unit.
The specific embodiment
Below according to accompanying drawing, the preferred implementation of the applying device among the present invention is described.
[production line of optical compensating gage]
Fig. 1 is the key diagram of the production line of the optical compensating gage that coating method and applying device were suitable among explanation the present invention.
As shown in Figure 1, the production line of optical compensating gage constitutes the shoestring 16 of exporting the transparent supporting mass that forms as the polymeric layer that is pre-formed alignment films formation usefulness from output machine 66.Shoestring 16 is guided and sends in the polishing device 70 by deflector roll 68.Polishing roll 72 is in order to implement polishing to polymeric layer and to be provided with.In the downstream of polishing device 70 dust removal machine 74 is set.Can utilize dust removal machine 74 to remove the dust on the surface that is attached to shoestring 16.
Be arranged at the applying device 10 of active vibration eliminating device 32 in the configuration of the downstream of dust removal machine 74.Thereby the coating liquid that contains discoid liquid crystal can be coated on shoestring 16.Set gradually dry section 76, heated zones 78 in its downstream, thereby can on shoestring 16, form liquid crystal layer.And then, in its downstream ultraviolet lamp 80 is set, thus the polymer that can utilize the ultraviolet ray irradiation that liquid crystal cross linking and then formation are needed.So, thus utilizing the up-coiler 82 be arranged at its downstream to reel has formed the shoestring 16 of polymer.
[applying device]
As shown in Figure 2, applying device 10 is made of following structure, that is: the coating liquid that will utilize pump etc. to carry from the coating liquid container is coated on the applicator head 18 of shoestring 16; With applicator head 18 subtend settings, the backing roll cylindraceous 20 of the shoestring 16 during with outer peripheral face supporting coating; The pillar 15 that keeps the rotating shaft of backing roll 20; In order to guide the shoestring 16 of on backing roll 20, advancing, from applicator head 18 and the deflector roll 14 of backing roll 20 across the predetermined distance configuration.Keep the pillar 15 of the rotating shaft of the applicator head 18 of applying device 10 and backing roll 20 to be fixed on the support 30 that the actuator 33 with active vibration eliminating device 32 described later supports.In addition, applicator head 18 is fixed on the support 30 by applicator head support 31.
The suitableeest for the thickness that is coated on the kind of coating liquid of shoestring 16 or coating liquid being adjusted to, backing roll 20 and applicator head 18 constitute and can advance in the mode at the interval that can regulate the two.Thereby, fixedly be meant on the support 30 in the coating of shoestring 16, support 30 is arranged to backing roll 20 keeps predetermined distance with applicator head 18.
Then, the coating method that utilizes applying device 10 is described.Shoestring 16 is output machine output, is directed at backing roll 20 by deflector roll 14.The part of the outer peripheral face of the shoestring 16 coiling backing rolls 20 that are directed.Shoestring 16 is advanced to the diagram direction of arrow continuously with certain speed.At this moment, the non-coated surface of backing roll 20 supporting shoestring 16 while rotating.
Upstream side configuration deflector roll 14 at backing roll 20.The rotating shaft of deflector roll 14 is supported by pillar 17.Pillar 17 be set at with on the support 30 of actuator 33 supporting different the bed surface F or other supports.
As shown in Figure 3, in applicator head 18, form the 18B of bag portion of tubular in the mode parallel with the width of shoestring 16.Its 18B of bag portion that is coated with application is connected with supply line 18A.In addition, in applicator head 18, the front end of applicator head form have an ejiction opening be coated with application slit 18C.Be coated with application slit 18C and be coated with the application bag 18B of portion and be communicated with.
Be coated with application slit 18C for connecting the narrow runner of bag 18B of portion and applicator head front end, to the width prolongation of shoestring 16.Then, supply with the coating liquid that is coated on shoestring 16 needed coating amounts to the application bag 18B of portion that is coated with of applicator head 18, on shoestring 16, form coated film from supply line 18A.
The shoestring 16 of coating liquid coating is output to dry section, the heated zones that is arranged at the downstream, forms liquid crystal layer on shoestring 16.In addition, below omit diagram, the driven roller of the conveying of the jockey pulley of the tension force of control shoestring 16 or control shoestring 16 is set on the production line of optical compensating gage.
[active vibration eliminating device]
Then, utilize Fig. 2, the structure about the active vibration eliminating device 32 that is provided with described applying device 10 is described.In this structure, applicator head 18 and pillar 15 are fixed on the support 30.As mentioned above, applicator head 18 is fixed on the support 30 by applicator head support 31.As shown in the figure, support 30, applicator head support 31 and pillar 15 can be respectively member, also can be integrally formed.
Active vibration eliminating device 32 is made of actuator 33, first sensor 34, second sensor 35, the 3rd sensor 36, computer 38, drive unit 39 at least.
4 corner configuration actuators 33,33 below support 30 ...Support 30 is by actuator 33,33 ... be arranged on bed surface (base surface is set) F.
In addition, the first sensor 34 that is used to detect the vibration of support 30 is set at support 30, and second sensor 35 that is used to detect the vibration on the basis that is provided with support 30 is set at bed surface F.And then in the present invention, the 3rd sensor 36 that is used to detect the vibration of shoestring is set at deflector roll 14.In the 3rd sensor 36, information such as the change of the tension force of detection shoestring, acceleration, speed, displacement or the acceleration of deflector roll support, speed, displacement change are as the vibration information of shoestring.
The first sensor 34 that is arranged on the support is made of the acceleration transducer and the position-detection sensor that are arranged on the support 30.First sensor 34 is arranged at each actuator 33,33 for the X-axis, Y-axis, Z axle and the direction of rotation that detect support ... on.Second sensor 35 that is arranged on the bed surface F is made of acceleration transducer.The 3rd receptor that is arranged at deflector roll is made of displacement transducer.
But, the corresponding object that detects of the kind of sensor and quantity and suitably being provided with is not limited to embodiment.
Then, the reason that the 3rd sensor 36 is set is described.
About active vibration eliminating device in the past, the relevant control technology that the removing of the usually known vibration of foundation that vibration eliminating device is set shaken and be arranged at the vibration damping of the vibration that the running of the instrument on the support causes.
But, not with applying device 10 of the present invention in the interference vibration that causes of the state change of shoestring 16 of visible continuous conveying enter the example of control method of the special environment vibration eliminating device down of support and so on, not to suitably eliminating the Research on Vibration of transmitting to support 30 from shoestring 16.
More specifically, on active vibration eliminating device in the past, at precision instrument for example in electron microscope or the semiconductor exposure device etc., the vibration information of feedback (hereinafter referred to as FB) control support, the vibration of control support.And then except FB control, in these precision instruments, feedforward (hereinafter referred to as FF) control will be provided with the information of the vibration of foundation of precision instrument, also controls the vibration of support simultaneously.Object, the sample in the microscope or the wafer in the semiconductor exposure device of processing all are not himself to bring vibration to support.
On the other hand, under the situation of object for the shoestring of advancing continuously of processing, shoestring is advanced the vibration that causes as disturbing vibration to deflector roll that applies or the transmission of coating liquid supply unit.
As the interference vibration that shoestring in applying device is advanced and caused, the vibration of the off-centre of deflector roll or runout, bearing vibration, driving system, dry wind etc. can cause the tension change on the tension change of the throughput direction of shoestring and the direction vertical with throughput direction.
So it is very important in applying device to remove the interference vibration that brings to deflector roll or coating liquid supply unit.
Under the situation of the applying device that is arranged at active vibration eliminating device in the past, in order to remove vibration or the off-centre that described shoestring causes is so-called interference vibration, also can eliminate forced vibration by improving the gain of the FB control loop in the active vibration eliminating device.But the surplus of the hierarchy of control tails off, and when the poorest, may cause that high-gain (high gain) problems such as vibration take place active vibration eliminating device.
On the other hand,, then not only lose sufficient damping property, but also may not guarantee the performance of shaking of removing of original bed vibration if make the gain landing of FB control loop in order to prevent to vibrate.
Therefore, the present invention possesses tension pick-up or displacement transducer or the velocity sensor or the acceleration transducer of shoestring by the deflector roll in the applying device upstream, detect throughput direction and the tension force of the direction vertical or the change of displacement or speed or acceleration etc. of shoestring, change the shoestring vibration control loop of controlling the vibration that shoestring causes thereby possess based on this with conveying.
This shoestring vibration control loop for example uses the output signal of the displacement transducer that is installed on the deflector roll two ends, shoestring is being considered as under the elastomeric situation that is connected with applying device with deflector roll, try to achieve the power that applies as interference to applying device with computing, make the control input signal of the symbol of this perturbed force of counter-rotating, actuator is driven to eliminate perturbed force.
Like this, can not cause the high-gain problem and keep the stable constant of the hierarchy of control, the following performance of shaking of removing that can improve active vibration eliminating device of this state.
Then, the vibration information that detects from first sensor 34, second sensor 35 and the 3rd sensor 36 to computer 38 inputs.In computer 38,, realize 1 based on the vibration information that detects) make the FB controlling organization of the control input of the vibration that is used to eliminate support; 2) make the FF controlling organization of the control input be used to eliminate the vibration of foundation; 3) make the controlling organization of the FF control input be used to eliminate the vibration that shoestring causes.Controlling organization can be realized any one of software processing, hardware handles.
The control input that active computer 38 is handled is imported in the drive unit 39.Drive unit 39 is given the damping force of eliminating vibration based on the actuator 33 of control input driving supporting bracket 30 to applying device.Like this, can realize that removing of applying device 10 shake.
Fig. 4 is the initiatively concept map of the control model of vibration eliminating device 32 of explanation.On the basis 40 of active vibration eliminating device 32, support supporting parts 44 by actuator 42.At this displacement transducer 48 that on this supporting part 44, is fixed with the acceleration transducer 46 of the vibration that can detect support and can detects the displacement of support.On basis 40, also be fixed with the acceleration transducer 50 of the vibration that can detect the vibration of foundation.And then the displacement transducer 52 that can detect the vibration of shoestring is fixed on the deflector roll.The control information that reaches 2 sensors 52 that are provided with at the two ends of deflector roll from sensor 46, sensor 48, sensor 50 is given control part 54.Control part 54 is based on its Data Control actuator 42.
Inferior, the m of supporting part 44 represents quality, and quality m comprises the quality of support 30 among Fig. 2, applicator head support 31, applicator head 18, backing roll 20 etc.In addition, K represents spring constant, and expression is with respect to the resistance coefficient of position.In addition, C represents decay, and expression is with respect to the resistance coefficient of speed.And then, shoestring can be considered as the elastomer that is connected with applying device with deflector roll.In other words, Kw is meant the spring constant of the vibration that causes with respect to shoestring, and expression is with respect to the resistance coefficient of position.
Then, utilize Fig. 5 that the hierarchy of control of the present invention as model with Fig. 4 is described.
Supporting part 44 is controlled portion, is the part of expression support, 32 controls of passive/active modes vibration eliminating device.Then, with the part the 14, the 40th that four jiaos dotted lines surround, represent the interference vibration on the spring and the part of the vibration of foundation.
The mobile of internal signal to supporting part 44 describes.If apply any power, then produce acceleration at supporting part 44 from the outside to supporting part 44.The acceleration signal of supporting part 44 is integrated element 132 integrations, and then becomes the signal of speed, to decay portion (attenuation coefficient C) transmission that produces with respect to the resistance of speed.Then, the signal of speed further is integrated element 134 integrations, and then becomes displacement signal (position signalling).This displacement signal is to spring portion (spring constant K) transmission that produces with respect to the resistance of position.
Detect the information of the acceleration of supporting part 44 with acceleration transducer 46.The acceleration signal that detects is passed to subtracter 122 by bandpass filter (hereinafter referred to as BPF) 98.Detect poor from the desired value of desired value assigning unit 102 and acceleration signal at subtracter 122, to acceleration FB controller 112 transmission deviation signals.
Utilize displacement transducer 48 to detect the displacement signal of supporting part 44.The displacement signal that detects is delivered to 2 subtracters 124,126 by BPF96.Simulated differential and transmit to subtracter 124 at analog differentiation device 120 as rate signal.Detect the poor of the desired value of desired value assigning unit 104 and rate signal with subtracter 124, deviation signal is passed to speed FB controller 114.With analog differentiation device 120 analog differentiation displacement signals is for the observation noise that does not make displacement signal becomes rate signal, if only carry out differential, and then noise amplification.
Another displacement signal is imported into subtracter 126, and subtracter 126 detects poor from the desired value of desired value assigning unit 106 and displacement signal, and this deviation signal is passed to displacement FB register control 116.
So, in controller 112,114,116, by carrying out FEEDBACK CONTROL with respect to the control input, the actual vibration state of corresponding applying device is given the damping force that suppresses this vibration to applying device.
As the concrete control law in the controller 112,114,116, can use PID control law or robust control rule, adapt to control law etc.
In basis 40, utilize acceleration transducer 50, detected with respect to the vibration of bed vibration as the signal of acceleration.The acceleration signal that detects is passed to subtracter 128 by BPF94, detects poor from the desired value of desired value assigning unit 108 and acceleration signal with subtracter 128.Then, this deviation signal is passed to basis signal controller 118.
Then, in deflector roll 14, utilize the displacement transducer 52 be arranged at deflector roll 14 to be passed to subtracter 130 by BPF90 as the displacement signal of preceding path (path) displacement detecting.Detect poor from the desired value of desired value assigning unit 100 and displacement signal with subtracter 30, be passed to shoestring signal controller 110 as deviation signal.So, in deflector roll 14, carry out FEEDFORWARD CONTROL by the control input of the vibration that causes with respect to shoestring, the state of corresponding interference vibration from shoestring suppresses the damping force of this vibration to applying device.The vibration of deflector roll 14 is the interference vibration of spring constant Kw by correct understanding.
The invention is characterized in,, also detect the vibration signal in the deflector roll 14, by producing the control input of FEEDFORWARD CONTROL, give the damping force that suppresses the vibration that advancing of shoestring cause to applying device except supporting part 44 vibration signal with basis 40.
All the control of adduction shoestring signal controller 110, acceleration FB controller 112, speed FB controller 114, displacement FB register control 116 and basis signal controller 118 is imported and is synthesized the control input and synthesized.
Finally, the power interference of the vibration that synthetic control input power, shoestring cause, the power of the vibration of foundation are disturbed, are utilized the power of decay C and utilizes the power of spring K, all are synthesized, and become the power that applies to support.At this moment, synthetic control input power play the power eliminated beyond it and effect, so the power that applies to support always synthesize 0 or very little value, thereby can make support static.
Like this, applying liquid feed mechanism forms the coated film of stipulating thickness on the continuous shoestring of carrying in the position at the interval of regulation technical field with this, compared with the past, the vibration of applying device can be eliminated, the thickness and precision height, surface smoothing of film and the applying device of the uneven coated film of coating not can be realized to obtain.
To in applying device of the present invention, the distance that the position of the 3rd sensor and backing roll preferably are installed is that the reason of the following scope of 10m describes.
This be because, if far away must cross from, then installing between the position and backing roll of the 3rd sensor, the vibration beyond the vibration that may take place to be detected by the 3rd sensor can not provide damping force accurately to applying device.
Therefore, the distance of preferred the 3rd sensor and support is below the 10m, more preferably below the 5m.
The reason that an eigentone of support 30 is preferably more than the 80Hz describes.What become problem in the interference vibration is low-frequency vibration, and dither is weakened by vibration eliminating device easily.So, if the resonance of vibration then can be avoided and disturb to an eigentone height of support 30.In addition, under the dither state, the uneven thickness of the coated film of shoestring is not obvious, so an eigentone of support 30 is high more good more.
Therefore, an eigentone of support 30 is preferably more than the 100Hz, more preferably more than the 120Hz.
The eigentone that the bed surface of applying device 10 is set is preferably the above reason of 10Hz and is, in the eigentone on basis is under the low state of intensity below the 10Hz, can not guarantee the performance of the vibration eliminating device of the vibration that relative 10Hz is following.In addition, also has the high more good identical more reason of an eigentone with support 30.Therefore, the eigentone that the bed surface of applying device 10 is set is preferably more than the 20Hz, more preferably more than the 30Hz.
Formation to the coated film of using applying device 10 describes.As coating liquid, can use the coating liquid that includes organic solvent.But, can also use the viscosity beyond it coating liquid, do not contain the coating liquid of organic solvent.
As shoestring 16, usually can use Rack, specific length and thickness be about 2～200 μ m by PETG (PET), poly-2, plastic sheetings such as 6-(ethylene naphthalate), cellulose diacetate, cellulose triacetate, cellulose-acetate propionate, polyvinyl chloride, Vingon, Merlon, polyimides, polyamide; Paper; Apply or be laminated with the paper of the α-TPO of carbon numbers 2～10 such as polyethylene, polypropylene, ethylene-butylene copolymer; The flexible ribbon thing of formations such as metallic plate or be base material and then the ribbon that forms machined layer on its surface with this ribbon.
In the production line of the optical compensating gage of Fig. 1, utilize output machine 66 to carry shoestring 16, control simultaneously among the slit 18C of applicator head 18 of applying device 10 coating liquid or for the thickness that makes the coated film 28 after the coating becomes certain transporting velocity control shoestring 16 applies.
In the drying after coating etc.,, set dry section 76, heated zones 78, ultraviolet lamp 80 etc. for the thickness and precision height that obtains coated film and the coated film 28 of surface smoothing.Coating, dried shoestring 16 are reeled by up-coiler 82.
Described a series of operation is preferably implemented under good dustless degree and thermophilic humidity environment.Thereby, preferably in Clean room, carrying out, special preferred coated device 10 is set in the high environment of cleannes.So, can adopt and with the mode of downflow system Clean room or clean bench.
More than the embodiment of applying device among the present invention and coating method is illustrated, but the present invention is not limited to described embodiment, can adopt variety of way.
For example, in the present embodiment, can adopt the coating machine of extrusion type as applying device 10, but also can preferably be suitable for the coating machine beyond it, for example rod is coated with machine and (is also referred to as " rod coater ", comprises that also Mel rod coating machine (mayer bar coater), intaglio printing coating machine (directly intaglio printing coating machine, intaglio plate contact coating machine (gravure kiss coater) etc.), roll coater (transferring roller coating machine, reverse roll coating machine etc.), chill coating machine, spray formula scrape coating machine, slidingtype funnel (slide hopper) etc.
In addition,, be not only applicable to optical thin films such as optical compensating film, can also be applicable to various coatings as the purposes of applying device 10.
Implemented emulation in order to show effect of the present invention at last.In emulation, detect support and the vibration that face is set and with the applying device (active) of the active vibration eliminating device of actuator control and then be equipped on the applying device (the present invention) that on deflector roll of the present invention, also is provided with the active vibration eliminating device of sensor and carry out emulation, calculate acceleration constant deviation and displacement constant deviation to be equipped on as model.The condition of this moment is: the quality m=5 of non-control part, 000Kg, spring constant K=2.0 * 10
6, elastic modelling quantity C=5.0 * 10
2, desired value (acceleration, speed)=0, desired value (displacement)=certain value, the size that comprises on the spring frequency content of disturbing=1～100Hz be 10N power, comprise that it is the power of 1N that the size of the frequency content of=1～100Hz is disturbed in the vibration of foundation.The result is as shown in table 1.
[table 1]
| Active applying device | The present invention | Slip (%) | |
| Acceleration constant deviation [gal] | 0.116 | 0.071 | 39％ |
| Displacement constant deviation [μ m] | 0.0928 | 0.081 | 80％ |
From this result as can be known, applying device of the present invention is compared with the applying device that is equipped on active in the past, can reduce the influence of its vibration significantly.
Claims (9)
1. applying device possesses: separates the configuration of certain intervals subtend and supplies with the coating liquid supply unit of coating liquid to the backing roll of the shoestring of the length of vertically advancing with described backing roll with the outer peripheral face supporting, it is characterized in that to shoestring,
Possess: the support that supports described coating liquid supply unit and described backing roll; With active vibration eliminating device,
This active vibration eliminating device possesses: the actuator that supports described support and be used to drive; Detect the first sensor of the vibration of described support; Produce the feedback control strategies of the control input of the vibration that is used to eliminate support based on the output signal of described first sensor; Detection will be provided with second sensor of vibration on the basis of described support; Produce the FEEDFORWARD CONTROL mechanism of the control input that is used to eliminate the vibration of foundation based on described second signal of sensor; The 3rd sensor at described support position is in addition vibrated and is installed in the interference that detection is conducted on the spring of described support; Be used to eliminate the FEEDFORWARD CONTROL mechanism that disturbs the control input of vibrating with producing based on described the 3rd signal of sensor.
2. applying device according to claim 1, wherein,
The position that described the 3rd sensor is installed is the deflector roll of advancing that is disposed at the upstream of described coating liquid supply unit and supports shoestring.
3. applying device according to claim 2, wherein,
Described the 3rd sensor is set at the two ends of deflector roll.
4. according to any described applying device in the claim 1～3, wherein,
The position of described the 3rd sensor and the scope of distance below 10m of described backing roll are installed.
5. according to any described applying device in the claim 1～4, wherein,
At least one information in the change of the tension force of described the 3rd sensor detection shoestring, acceleration, speed, displacement or acceleration, speed, displacement change, rotary acceleration, rotary speed and the revolution of deflector roll support is as the vibration information of shoestring.
6. according to any described applying device in the claim 1～5, wherein,
The controlling organization that generation is used to eliminate the control input of described interference vibration is the shoestring vibration control mechanism that the state change of control shoestring causes the vibration of the described support that produces.
7. applying device according to claim 6, wherein,
Described shoestring vibration control mechanism drives described actuator and changes and vibrate in the interference that described support produces with the state of eliminating according to described shoestring.
8. according to any described applying device in the claim 1～7, wherein,
An eigentone of described support is more than the 80Hz.
9. according to any described applying device in the claim 1～8, wherein,
The eigentone that the bed surface of described applying device is set is more than the 10Hz.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007095562A JP4879070B2 (en) | 2007-03-30 | 2007-03-30 | Coating apparatus and coating method |
| JP2007-095562 | 2007-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101274314A true CN101274314A (en) | 2008-10-01 |
| CN101274314B CN101274314B (en) | 2013-03-13 |
Family
ID=39978015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100876231A Active CN101274314B (en) | 2007-03-30 | 2008-03-25 | Coating device and its vibration-eliminating method, coating method using the vibration-eliminating method, and manufacture method of coating film |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4879070B2 (en) |
| KR (1) | KR101429589B1 (en) |
| CN (1) | CN101274314B (en) |
| TW (1) | TWI450767B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102905798A (en) * | 2010-05-25 | 2013-01-30 | 美卓造纸机械公司 | Method and apparatus for controlling a coating head, and a coating head |
| CN103086178A (en) * | 2013-02-19 | 2013-05-08 | 苏州东昇机电科技有限公司 | Winding machine and method for controlling winding of flexible materials |
| CN103086177A (en) * | 2013-02-19 | 2013-05-08 | 苏州东昇机电科技有限公司 | Unreeling machine and method for controlling unreeling of flexible materials |
| CN110270471A (en) * | 2018-03-15 | 2019-09-24 | 艾格赛尔工业公司 | Feed streams amount depends on the fluid product applying device of flow outlet aperture speed |
| CN113515046A (en) * | 2021-07-19 | 2021-10-19 | 西安理工大学 | Winding tension control method of web coating machine based on feedforward control |
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| JP5258812B2 (en) * | 2010-02-17 | 2013-08-07 | 東京エレクトロン株式会社 | Slit nozzle cleaning device and coating device |
| CN102847649B (en) * | 2012-09-27 | 2015-01-07 | 电子科技大学 | Device for coating protective materials on surfaces of sheet-type electronic components |
| JP7360381B2 (en) * | 2018-03-29 | 2023-10-12 | 富士フイルム株式会社 | Winding condition generation device, winding device, winding condition calculation method, winding method |
| CN109499811A (en) * | 2018-12-21 | 2019-03-22 | 江苏杰立胶粘材料科技有限公司 | A kind of foam tape sizer with spin coating function |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19652769A1 (en) * | 1996-12-18 | 1998-06-25 | Voith Sulzer Papiermasch Gmbh | Method and device for damping contact vibrations |
| JP2004089896A (en) * | 2002-09-02 | 2004-03-25 | Toppan Printing Co Ltd | Coating apparatus |
| TW200507946A (en) * | 2003-07-18 | 2005-03-01 | Sumitomo Heavy Industries | Working table device for table type coating applicator |
| JP4764615B2 (en) * | 2004-05-07 | 2011-09-07 | 富士フイルム株式会社 | Coating apparatus, coating method, and manufacturing method of web with coating film |
-
2007
- 2007-03-30 JP JP2007095562A patent/JP4879070B2/en active Active
-
2008
- 2008-03-19 KR KR1020080025487A patent/KR101429589B1/en active IP Right Grant
- 2008-03-25 CN CN2008100876231A patent/CN101274314B/en active Active
- 2008-03-26 TW TW097110664A patent/TWI450767B/en not_active IP Right Cessation
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102905798A (en) * | 2010-05-25 | 2013-01-30 | 美卓造纸机械公司 | Method and apparatus for controlling a coating head, and a coating head |
| CN102905798B (en) * | 2010-05-25 | 2015-05-27 | 维美德技术有限公司 | Method and apparatus for controlling a coating head, and a coating head |
| CN103086178A (en) * | 2013-02-19 | 2013-05-08 | 苏州东昇机电科技有限公司 | Winding machine and method for controlling winding of flexible materials |
| CN103086177A (en) * | 2013-02-19 | 2013-05-08 | 苏州东昇机电科技有限公司 | Unreeling machine and method for controlling unreeling of flexible materials |
| CN103086178B (en) * | 2013-02-19 | 2016-06-29 | 苏州东昇机电科技有限公司 | A kind of winder and the method controlling flexible material rolling |
| CN110270471A (en) * | 2018-03-15 | 2019-09-24 | 艾格赛尔工业公司 | Feed streams amount depends on the fluid product applying device of flow outlet aperture speed |
| CN113515046A (en) * | 2021-07-19 | 2021-10-19 | 西安理工大学 | Winding tension control method of web coating machine based on feedforward control |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080089186A (en) | 2008-10-06 |
| KR101429589B1 (en) | 2014-08-12 |
| JP2008253866A (en) | 2008-10-23 |
| JP4879070B2 (en) | 2012-02-15 |
| TWI450767B (en) | 2014-09-01 |
| CN101274314B (en) | 2013-03-13 |
| TW200920497A (en) | 2009-05-16 |
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