CN1575863A - Working table device for table type applicator - Google Patents
Working table device for table type applicator Download PDFInfo
- Publication number
- CN1575863A CN1575863A CNA2004100696870A CN200410069687A CN1575863A CN 1575863 A CN1575863 A CN 1575863A CN A2004100696870 A CNA2004100696870 A CN A2004100696870A CN 200410069687 A CN200410069687 A CN 200410069687A CN 1575863 A CN1575863 A CN 1575863A
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- China
- Prior art keywords
- mentioned
- platform
- along
- rail portion
- type applicator
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- Coating Apparatus (AREA)
- Spray Control Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Provided is a stage apparatus for a table coater which can prevent the occurrence of application nonuniformity by minute vibration. In the stage apparatus, a nozzle part 60 is transported uniaxially above a substrate table 30 arranged on a stone surface plate 20 installed on a frame 10 by a slider. The slider includes two Y-axis driving mechanisms 40A and 40B by two linear motors having movable parts which can travel along two rail parts 21A and 21B installed to extend uniaxially in parallel with each other on both sides of the stone surface plate. The yoke part of each linear motor is arranged along the rail parts through arm parts 11A and 11B extending uniaxially which are set to be separated structurally from the stone surface plate, and at least one vibration removing unit 25 is installed between the frame and the stone surface plate.
Description
Technical field
The present invention relates to a kind of table device, particularly relate to a kind of workbench (ス テ one ジ) device that is applicable to table type applicator (テ one Block Le コ one ).
Background technology
As an example of coating machine, the coating machine that for example will be formed on by the thin film cladding that certain material is made on the glass substrate is arranged in the process of making liquid crystal board.Up to now, this coating machine is to adopt the spin coated mode, to be so-called spin coated machine.But there is the almost all discarded problem of coating material that is dropped in the costliness on the substrate in the spin coated machine on its structure.
Therefore, begin to provide table type applicator to replace the spin coated machine in recent years.Table type applicator is to make the spray nozzle part of the jet with coating material of certain-length or the workbench that is equipped with processed substrate along the machine that a direction of principal axis slides and applies, and has the few advantage (for example with reference to patent documentation 1) of discarded amount of coating material.
But, the nearest processed substrate (2m * 2m) for example, so requirement can corresponding with it table device that constantly maximizes.
One example of the working table device for table type applicator that proposes as large-scale processed substrate usefulness is described below with reference to Fig. 6, Fig. 7.In Fig. 6, Fig. 7, fixing stone platform 160 on the pallet 150.A top side of stone platform 160 is provided with depressed part, is provided with the substrate platform 100 that is used for carrying processed substrate and its sorption is kept in this depressed part.With the both sides of the corresponding stone platform 160 in the both sides of substrate platform 100, promptly high than depressed part part is provided with rail portion 110A, the 110B of extension parallel to each other.Below its bearing of trend is called Y-axis.On this rail portion 110A, 110B, be assembled with Y- axis driving mechanism 120A, 120B respectively, so that can move along rail portion 110A, 110B.Y- axis driving mechanism 120A, 120B are realized by linear motor.That is, dispose the fixed magnet part (yoke part) of linear motor along rail portion 110A, 110B, Y- axis driving mechanism 120A, 120B have the moving coil part of linear motor.
Also be provided with the Z axle driving mechanism 130A, the 130B that extend upward from it on Y-axis driving mechanism 120A, the 120B.Z axle driving mechanism 130A, 130B are to Z-direction, the i.e. drive source of direction up and down, are to be used for being located at along the Z-direction bogie mechanism of the spray nozzle part 140 between them.
That is, spray nozzle part 140 utilizes Y- axis driving mechanism 120A, 120B to move along Y direction with Z axle driving mechanism 130A, 130B, can also utilize Z axle driving mechanism 130A, 130B to move along Z-direction.
The length of the spray nozzle part of assembling in this table device 140 as shown in Figure 6, bigger than the width that carries the processed substrate (not having expression among the figure) on substrate platform 100, the small otch of size that forms along its length from its foot sprays or the coating material that drips.
The moving part integral body that will comprise Y- axis driving mechanism 120A, 120B, Z axle driving mechanism 130A, 130B and spray nozzle part 140 below is called sliding part and partly describes.
Action during the coating of the sliding part part that is driven by above-mentioned working table device for table type applicator is as follows:
(イ) make spray nozzle part 140 be moved down into the coating height, in front of processed substrate, temporarily stop.
(ロ) begin to quicken and coating simultaneously, until arriving certain speed from halted state.
(Ha) the coating in terminal one side shifting of constant speed to processed substrate.
When (ニ) applying, in front of the terminal of processed substrate, slow down, stop.
(ホ) stop after, with spray nozzle part 140 certain altitude that only rises, get back to the coating starting position.
As mentioned above, the structure of table type applicator in the past is as follows:
(A) spray nozzle part 140 carries on the sliding part part.
(B) being used for driving sliding part linear motor partly is configured on the stone platform 160.
(C) rail portion 110A, the 110B and the substrate platform 100 that partly slide of sliding part also is arranged on the stone platform 160.
Its result, the reaction force that produces during the acceleration and deceleration of sliding part part is directly born by stone platform 160.Therefore, stone platform 160 vibrates itself during the acceleration and deceleration of sliding part part, becomes to produce the irregular reason of coating.
That is, table type applicator in the past is because the influence of the vibration that produces when being subjected to processed substrate applied, and it is bigger the irregular zone of coating to occur.Occurring the irregular part of coating in substrate for film deposition can not use, be the zone of having to discard.
Patent documentation 1 Japan Patent spy opens the 2000-167463 communique
Summary of the invention
Therefore, purpose of the present invention is exactly the influence by the vibration that will produce when reducing coating as the yoke part and the applying mechanism part of the linear motor of vibration source, narrows down to Min. with the irregular zone of coating occurring.
If employing the present invention, a kind of working table device for table type applicator can be provided, this working table device for table type applicator comprises the 1st sliding part, the 1st sliding part can transport spray nozzle part at platform upper edge one direction of principal axis that is arranged on the pallet, it is characterized in that above-mentioned the 1st sliding part is made of linear motor; Make the movable part of this linear motor can be along being arranged on rail portion walking on the above-mentioned platform, that extend along an above-mentioned direction of principal axis; Thereby the yoke of above-mentioned linear motor is provided with along the mode of above-mentioned rail portion by the arm that separates setting on the structure with above-mentioned platform, extends along an above-mentioned direction of principal axis to be situated between; At least be provided with 1 damper unit between above-mentioned pallet and the above-mentioned platform.
In addition, above-mentioned the 1st sliding part is made of 2 driving mechanisms that can constitute along 2 linear motors of 2 above-mentioned rail portion walkings, and these 2 rail portion are in the both sides of above-mentioned platform, be provided with in the mode along the extension parallel to each other of an above-mentioned direction of principal axis; Above-mentioned arm also is provided with 2 in the mode of extending parallel to each other along an above-mentioned direction of principal axis; Be assembled with the driving mechanism up and down that can move along the vertical direction respectively in above-mentioned 2 driving mechanisms; Set up said nozzle portion between the portion moving up and down of driving mechanism about in the of these 2.
Above-mentioned arm is arranged on above-mentioned pallet, perhaps is arranged on the floor that is provided with above-mentioned pallet
Above-mentioned platform is the stone platform, be provided with depressed part above it, be provided with the substrate platform that is used for carrying processed substrate in this depressed part, on corresponding position, the both sides of this substrate platform, than the high part in the bottom of above-mentioned depressed part, be respectively arranged with the above-mentioned rail portion of using the stone material identical to make with above-mentioned stone platform.
Above-mentioned rail portion is provided with the linear scale that extends along an above-mentioned direction of principal axis, and in the movable part of above-mentioned linear motor with the opposed position of above-mentioned linear scale on be provided with the linear transducer head.
Guide the movable part of above-mentioned linear motor along an above-mentioned direction of principal axis with respect to above-mentioned rail portion by pressure-feed air bearing.
The invention effect
Therefore the structure of working table device for table type applicator in the past becomes platform vibration itself and produces and apply irregular reason because the reaction force that produces during the sliding part acceleration and deceleration is directly born by platform.Be directed to this, in the structure of table device of the present invention, because reaction force is not directly to be born by platform, but bear by pallet, even therefore because reaction force makes the workbench vibration, vibration has also been decayed by the damper unit that is provided with between pallet and the platform, therefore can prevent that the coating that produces because of microvibration is irregular.Certainly, no matter be that what reason makes floor self produce vibration, this vibration also can both be decayed by damper unit.
Description of drawings
Fig. 1 is the front view of the working table device for table type applicator of the 1st embodiment of the present invention.
Fig. 2 is the perspective view of table device shown in Figure 1.
Fig. 3 is used for the linear motor that constitutes Y-axis driving mechanism shown in Figure 1 being described and being used for being provided with the arm of its yoke and the figure of the relation between the stone platform.
Fig. 4 is the figure of the relation between the movable part that is used for illustrating linear motor shown in Figure 3, the rail portion that guides its walking and linear scale, the linear transducer head.
Fig. 5 is the front view of the working table device for table type applicator of the 2nd embodiment of the present invention.
Fig. 6 is a side view of handling the scheme of the working table device for table type applicator of using and proposing as large substrate.
Fig. 7 is the front view of working table device for table type applicator shown in Figure 6.
Fig. 8 is the perspective view that is used for illustrating the spray nozzle part in the table type applicator.
The specific embodiment
The 1st embodiment of working table device for table type applicator of the present invention is described below with reference to Fig. 1～Fig. 4.If briefly explain the feature of table device of the present invention, that is exactly to have improved the version of Y-axis driving mechanism and the relation of pallet and platform.Therefore, 2 Z axle driving mechanisms and the form that is erected at the spray nozzle part between them also can be with illustrated with Fig. 6, Fig. 7 identical.Therefore, omit 2 Z axle driving mechanisms and be erected at the detailed description of the nozzle between them below.
In Fig. 1, Fig. 2, stone platform 20 is configured on the pallet 10 across a plurality of damper units 25.Stone platform 20 has the mid portion of a side above the grinding and the depressed part that forms, is provided with in this depressed part to be used for the substrate platform 30 that carries processed substrate and its sorption is kept.In the corresponding both sides, the both sides with substrate platform 30 of stone platform 20, promptly high than depressed part part is provided with uses stone material rail portion 21A that make, parallel to each other extension, the 21B identical with stone platform 20.Be respectively arranged with on these rail portion 21A, 21B that have can be along Y-axis driving mechanism 40A, the 40B of movable part of rail portion 21A, 21B walking.Y- axis driving mechanism 40A, 40B are realized by linear motor, its detailed structure back narration.
As illustrating with Fig. 6, Fig. 7, Y- axis driving mechanism 40A, 40B are provided with Z axle driving mechanism 50A, 50B.Z axle driving mechanism 50A, 50B are to Z-direction, i.e. the drive source of direction up and down is to be used for being located at along the Z-direction bogie mechanism of the spray nozzle part 60 between them.Spray nozzle part 60 can utilize Y- axis driving mechanism 40A, 40B to move along Y direction with Z axle driving mechanism 50A, 50B, can utilize Z axle driving mechanism 50A, 50B to move along Z-direction.
The both sides of pallet 10 be provided with the height and position that extends up to rail portion 21A, 21B along the both sides of stone platform 20 and with guide rail 21A, 21B arm 11A, 11B along equidirectional extension.
As shown in Figure 3, yoke (fixed magnet part) 41B of the linear motor of formation Y-axis driving mechanism 40B is arranged on the upper end of arm 11B.Yoke (fixed magnet part) 41B is fixed on the inner face side up and down of コ font yoke and forms by a plurality of permanent magnet 42B being separated certain intervals.On the other hand, the mutual magneto motive moving coil 43B of portion constitutes in this wise from the side that the movable part 44B that walks at rail portion 21B extends to yoke 41B and between yoke (the ヨ one Network portion) 41B.
As shown in Figure 4, be provided with in the side of rail portion 21B and follow away linear scale (linear scale) 45B that direction is extended, be provided with linear transducer head 46B with the opposed position of linear scale 45B at the movable part 44B of Y-axis driving mechanism 40B.
And the cross sectional shape of movable part 44B is for surrounding the shape of 3 faces of rail portion 21B at least, being provided with 1 pressure-feed air bearing 47-1B, 47-2B respectively at least with 2 opposed inner face side of face at least.Pressure-feed air bearing 47-1B, 47-2B are by making the state walking of movable part 44B to float from rail portion 21B to rail portion 21B blowing out pressurised air.
The structure of Y-axis driving mechanism 40A is also identical with said structure.
If the structure that brief description is above is then as follows:
A. apply nozzle 60 and be erected at sliding part promptly between 2 Y-axis driving mechanism 40A, the 40B.
B. the yoke 41A, the 41B that are used for driving the linear motor of sliding part are fixed on arm 11A, the 11B that is arranged on the pallet 10.
D. between pallet 10 and stone platform 20, be provided with damper unit 25.
If being situated between, employing said structure, the reaction force that yoke 41A, 41B are produced during the sliding part acceleration and deceleration born by workbench 10 by arm 11A, 11B.And,, therefore reduced from stone platform 20 with external vibration owing between workbench 10 and stone platform 20, be provided with damper unit 25.In order to improve the effectiveness in vibration suppression of damper unit 25, bottom surface one side that is preferably in stone platform 20 disposes 3 damper units 25 at least.Under the situation of 3 damper units 25 of configuration, be configured in order to make the stone platform 20 good precision of acquisition easily, to be preferably in corresponding position, the summit of equilateral triangle.
Owing to act on the reaction force on the stone platform 20 when having reduced the sliding part acceleration and deceleration, therefore also reduced the error that causes by vibration between linear scale 45A (not expression among the figure), 45B and linear transducer head 46A (not representing among the figure), the 46B.
In addition, in the present invention, the vibration that becomes the above-mentioned reaction force generation of problem is microvibration, even because above-mentioned reaction force makes yoke 41A, 41B one side produce microvibration, because the gap between the 43A of moving coil portion (not shown), 43B and permanent magnet 42A (not shown), the 42B is bigger than it, therefore can not give the walking of sliding part, i.e. the movable part 44A (not shown) of Y- axis driving mechanism 40A, 40B, the walking of 44B brings obstacle.
Fig. 5 represents the 2nd embodiment of the present invention.The manner be not be used for that yoke 41A is set, 41B arm 71A, 71B are arranged on the pallet 10, but it is arranged on the floor that pallet 10 is set.At this moment, though the microvibration that the reaction force that produces during the sliding part acceleration and deceleration causes might pass to pallet 10 by the floor, but, reduced the vibration of passing to stone platform 20 thus by between workbench 10 and stone platform 20, being separated with damper unit 25 as mentioned above.In addition, the shape of arm 71A, 71B also can be identical with arm 11A, the 11B in the 1st embodiment.
More than with regard to 2 embodiments the present invention has been described, but stone platform 20 and rail portion 21A, 21B also can be with other materials, for example ceramic material replaces stone material to realize.Table device of the present invention also may be as action as follows.That is, 2 Y- axis driving mechanism 40A, 40B generation thrusts are poor, also can make spray nozzle part 60 produce small rotatablely moving thus.The so-called small central part that rotatablely moves exactly with the length direction of spray nozzle part 60 be the center in horizontal plane just as if the horizontal hunting motion.
In industrial utilizability
The present invention comprises the worker who makes the sliding part that the driven portion can move along a direction of principal axis Make table apparatus, can fully be applicable to the vibration that requires the reduce driven portion Table device.
Claims (7)
1. working table device for table type applicator, it comprises the 1st sliding part, the 1st sliding part can transport spray nozzle part at platform upper edge one direction of principal axis that is arranged on the pallet, it is characterized in that above-mentioned the 1st sliding part is made of linear motor; Make the movable part of this linear motor can be along being arranged on rail portion walking on the above-mentioned platform, that extend along an above-mentioned direction of principal axis; Thereby the yoke of above-mentioned linear motor is provided with along the mode of above-mentioned rail portion by the arm that separates setting on the structure with above-mentioned platform, extends along an above-mentioned direction of principal axis to be situated between; At least be provided with 1 damper unit between above-mentioned pallet and the above-mentioned platform.
2. working table device for table type applicator as claimed in claim 1, it is characterized in that, above-mentioned the 1st sliding part is made of 2 driving mechanisms that can constitute along 2 linear motors of 2 above-mentioned rail portion walkings, and these 2 rail portion are in the both sides of above-mentioned platform, be provided with in the mode along the extension parallel to each other of an above-mentioned direction of principal axis; Above-mentioned arm also is provided with 2 in the mode of extending parallel to each other along an above-mentioned direction of principal axis; Be assembled with the driving mechanism up and down that can move along the vertical direction respectively in above-mentioned 2 driving mechanisms; Set up said nozzle portion between the portion moving up and down of driving mechanism about in the of these 2.
3. working table device for table type applicator as claimed in claim 1 or 2 is characterized in that above-mentioned arm is arranged on the above-mentioned pallet.
4. working table device for table type applicator as claimed in claim 1 or 2 is characterized in that above-mentioned arm is arranged on the floor that is provided with above-mentioned pallet.
5. as each the described working table device for table type applicator in the claim 2～4, it is characterized in that, above-mentioned platform is the stone platform, be provided with depressed part above it, be provided with the substrate platform that is used for carrying processed substrate in this depressed part, on corresponding position, the both sides of this substrate platform, than the high part in the bottom of above-mentioned depressed part, be respectively arranged with the above-mentioned rail portion of using the stone material identical to make with above-mentioned stone platform.
6. as each the described working table device for table type applicator in the claim 1～5, it is characterized in that, above-mentioned rail portion is provided with the linear scale that extends along an above-mentioned direction of principal axis, and in the movable part of above-mentioned linear motor with the opposed position of above-mentioned linear scale on be provided with the linear transducer head.
7. as each the described working table device for table type applicator in the claim 1～6, it is characterized in that, guide the movable part of above-mentioned linear motor by pressure-feed air bearing with respect to above-mentioned rail portion along an above-mentioned direction of principal axis.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003276959 | 2003-07-18 | ||
| JP2003276959 | 2003-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1575863A true CN1575863A (en) | 2005-02-09 |
| CN1323765C CN1323765C (en) | 2007-07-04 |
Family
ID=34587142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100696870A Expired - Fee Related CN1323765C (en) | 2003-07-18 | 2004-07-19 | Working table device for table type applicator |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100591941B1 (en) |
| CN (1) | CN1323765C (en) |
| TW (1) | TW200507946A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101326625B (en) * | 2006-03-06 | 2010-04-21 | 株式会社爱发科 | Stage unit |
| CN101274314B (en) * | 2007-03-30 | 2013-03-13 | 富士胶片株式会社 | Coating device and its vibration-eliminating method, coating method using the vibration-eliminating method, and manufacture method of coating film |
| CN104722444A (en) * | 2013-12-23 | 2015-06-24 | 昆山国显光电有限公司 | Coating device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006231201A (en) * | 2005-02-24 | 2006-09-07 | Tokyo Ohka Kogyo Co Ltd | Coating device |
| KR101343502B1 (en) | 2009-07-24 | 2013-12-19 | 엘지디스플레이 주식회사 | Coater chuck of coating apparatus |
| JP6704658B2 (en) * | 2016-10-13 | 2020-06-03 | 住友重機械工業株式会社 | Stage equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2206157Y (en) * | 1994-12-31 | 1995-08-30 | 廖继伦 | Paint spraying machine |
| CN2251444Y (en) * | 1995-05-24 | 1997-04-09 | 洪进忠 | Omnibearing automatic paint spraying machine |
| JPH09201558A (en) * | 1996-01-29 | 1997-08-05 | Techno Kapura:Kk | Applicator |
| JP2000005676A (en) * | 1998-06-23 | 2000-01-11 | Toshiba Corp | Coating apparatus |
| JP2000167463A (en) * | 1998-12-08 | 2000-06-20 | Toray Ind Inc | Nozzle and coating liquid applicator and applying method and manufacture of plasma display panel member |
-
2004
- 2004-06-29 TW TW093119222A patent/TW200507946A/en not_active IP Right Cessation
- 2004-07-16 KR KR1020040055393A patent/KR100591941B1/en not_active IP Right Cessation
- 2004-07-19 CN CNB2004100696870A patent/CN1323765C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101326625B (en) * | 2006-03-06 | 2010-04-21 | 株式会社爱发科 | Stage unit |
| CN101274314B (en) * | 2007-03-30 | 2013-03-13 | 富士胶片株式会社 | Coating device and its vibration-eliminating method, coating method using the vibration-eliminating method, and manufacture method of coating film |
| CN104722444A (en) * | 2013-12-23 | 2015-06-24 | 昆山国显光电有限公司 | Coating device |
| CN104722444B (en) * | 2013-12-23 | 2017-03-29 | 昆山国显光电有限公司 | A kind of apparatus for coating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1323765C (en) | 2007-07-04 |
| KR100591941B1 (en) | 2006-06-20 |
| TWI291899B (en) | 2008-01-01 |
| TW200507946A (en) | 2005-03-01 |
| KR20050009217A (en) | 2005-01-24 |
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