CN101075096A - System for balancing and positioning work table of photoetching device - Google Patents
System for balancing and positioning work table of photoetching device Download PDFInfo
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- CN101075096A CN101075096A CN 200710042417 CN200710042417A CN101075096A CN 101075096 A CN101075096 A CN 101075096A CN 200710042417 CN200710042417 CN 200710042417 CN 200710042417 A CN200710042417 A CN 200710042417A CN 101075096 A CN101075096 A CN 101075096A
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Abstract
A balance-positioning system of work-piece table on photo-etching machine is prepared as setting long stroke module on balance mass unit to drive exposure table to move along X and Y directions, arranging balance mass unit on base frame to balance reverse-acting force and reverse-acting torque, setting balance mass drift-proof unit between base frame and master balance mass to compensate drift of balance mass unit along X and Y as well as Rz directions, using control system to control position compensation of long stroke module and master balance mass according to feedback data of measurement unit.
Description
Technical field
The invention belongs to semi-conductive technical field of lithography, relate to the big stroke Precision Position Location System that has balance mass, particularly be applied to the balancing and positioning device of photo-etching machine work-piece platform.
Background technology
After the low live width photoetching machine technique of 300mm high yield occurs, the particularly two platform technology afterwards and the appearance of immersion technology, work stage and mask platform system generally all introduce the vibration damping problem that the counterbalance weight technology solves machine system.So-called counterbalance weight technology is exactly that mover with motor is fixed on the driving element, and stator is fixed on the counterbalance weight, is respectively air-bearing between driving element, counterbalance weight and the frame and is connected; Under the interaction of mover and stator, driving element and counterbalance weight be motion in the opposite direction respectively just, and satisfies momentum conservation.
The main flow thought of the counterbalance weight technology that the work stage positioning system of current litho machine company is adopted is: when exposure desk along X, Y during to accelerated motion, allow counterbalance weight because of being subjected to eccentric moment along the Rz (sense of rotation on X, Y plane, as follows) to the anglec of rotation that produces among a small circle, generally about ± 10 milliradians (mrad).Because long stroke motor and exposure desk etc. all are based upon on the counterbalance weight, the rotation of counterbalance weight also can cause the beat of exposure desk naturally.In order to guarantee the tram of exposure desk in machine system, long stroke module generally adopts the topology layout of H type, and vertical two motors of H type can drive, is used to compensate the deflection of exposure desk; And in order to improve the transverse features frequency of H type, for being rigidly connected, thereby must allow to take place among a small circle relatively rotate (amplitude of fluctuation that is counterbalance weight) between vertical two electric movers and the stator between the mover of two vertical long stroke motors and the crossbeam.As A Simai company (ASML Netherland B.V., United States Patent (USP) 7034920B2 patent Veldhoven), 6885430B2 number disclosed work stage positioning system of United States Patent (USP) of NIKON (Nikon Corporation).Though both are in difference to some extent on the version and on the realization means, basic thought is consistent, promptly allows counterbalance weight to rotate along the eccentric moment that X, Y produce when quickening because of system.
Aforesaid two pieces of patents, if ignore extraneous interference, system all satisfies the relation of momentum conservation, that is to say when exposure desk is got back to initial position, counterbalance weight to also getting back to initial position, but is got back to initial position at Rz to differing at X, Y surely.For make counterbalance weight at Rz to getting back to initial position, must there be the intervention of moment of face in system, therefore, this positioning system does not satisfy the relation of the conservation of angular momentum.
In whole exposure process, owing to the rotation of counterbalance weight, must compensate the deflection angle of exposure desk in time, and compensation magnitude is bigger, this can influence the stability and the precision of system to a certain extent.
Tsing-Hua University applied for the different Chinese patent of a kind of and above-mentioned equilibrium strategy in 2004, and patent No. CN1595299A has introduced the notion of a momenttum wheel in this counterbalance weight technology, its objective is in order to realize not rotating of counterbalance weight.Balance mass system among the patent CN1595299A is made up of a counterbalance weight and a momenttum wheel.Be connected by two-layer guide rail (X to Y to) between counterbalance weight and the basis, counterbalance weight relatively basic framework along X, Y to translation, but can not be along Rz to rotation.Counterbalance weight is used for the reacting force that balanced system produces when quickening along X, Y.Momenttum wheel is positioned at the barycenter of counterbalance weight, and separates through air-bearing between the counterbalance weight, and is connected by an electric rotating machine, and motor stator is fixed on the counterbalance weight, links together by shaft coupling between rotor and the momenttum wheel.Momenttum wheel at X, Y to moving with counterbalance weight, along Rz to rotating relative to its axle center under the effect at electric rotating machine.When counterbalance weight had rotation trend, the electric rotating machine on the momenttum wheel balanced piece and applies an equal-sized opposing torque, counterbalance weight because of equalising torque do not produce along Rz to rotation trend, momenttum wheel then rotates around its axle center under the driving of electric rotating machine.This counterbalance weight technology not only satisfies momentum conservation, simultaneously, also follows the conservation of angular momentum, but its control to momenttum wheel must be accomplished in good time control, otherwise work in system can produce along Rz to vibration.Moreover from the angle of driving moment and structure, system has only a momenttum wheel, is difficult to match suitable electric rotating machine.
The above-mentioned deflecting torque problem that solves the work stage positioning system with swiveling wheel is not to occur the earliest in this piece patent, this technology just occurred in No. the 6028376th, the United States Patent (USP) of Canon Inc. (Canon).But the method for both balances is very different, and the swiveling wheel in Canon Inc.'s patent is that dead axle rotates, and that is to say that the relative machine foundation of rotating shaft of swiveling wheel is fixed.
Summary of the invention
The technical matters that the present invention solves is to provide a kind of balancing and positioning system for workpiece platform of photoetching machine with higher positioning accuracy.
For solving the problems of the technologies described above, the invention provides a kind of new balancing and positioning system for workpiece platform of photoetching machine, it comprises basic framework, long stroke module, exposure desk, balance mass system, anti-system, measuring system and the control system of floating of balance mass, described long stroke module is based upon on the balance mass system, drive exposure desk along X, Y to moving; Exposure desk is the plummer of silicon chip; The balance mass system is based upon on the basic framework, comprises main balance mass and auxilliary balance mass two parts, is respectively applied for the reacting force and the moment of reaction that exposure desk produces the litho machine basis when carrying out accelerated motion under long stroke module drives; The anti-system of floating of balance mass is installed between basic framework and the balance quality system, be used for the compensation balance quality system along X, Y and Rz to drift motion; Measuring system is installed on described long stroke module and the main balance mass, for control system provides feedback data; Control system is according to the motion of the long stroke module of feedback data control and the position compensation of main balance mass.
Described long stroke module comprise two Y to long stroke motor and an X to long stroke motor, two Y are synchronous to long stroke motor movement, be used to realize exposure desk along Y to move, X to long stroke motor be used to realize exposure desk along X to move; Described long stroke module also comprise a Y to guide rail and an X to guide rail, and Y becomes T type layout with X to guide rail to guide rail; Described long stroke module also comprise two Y to slide block and an X to slide block, one of them Y is connected to guide rail with Y with the side direction air-bearing by vertical to slide block, another Y is connected with the top plan of main balance mass by vertical air-bearing to slide block, X is installed in two Y respectively on slide block to the two ends of guide rail, and X is connected by air-bearing between guide rail with X to slide block; Two Y of described long stroke module are installed together to slide block with corresponding Y to the mover of long stroke motor, and stator and main balance mass body are installed together; X is installed together to slide block to the mover and the X of long stroke motor, and stator and X are installed together to guide rail.
Described main balance mass be in the middle of the square frame shape of hollow out or middle not hollow out square, and be connected by vertical air-bearing between main balance mass and the basic framework, main balance mass basic framework is relatively done plane motion.
Described auxilliary balance mass is made up of one or several unit, and each unit comprises columniform balance mass body, electric rotating machine and upper and lower shell, is used for the counter torque that the balance exposure desk produces when the accelerated motion along X, Y and Rz; Further, air supporting is connected with side direction through vertical air supporting between the cylindrical balance mass body of described auxilliary balance mass and the lower casing; The stator of electric rotating machine is fixed on the shell, and mover and columniform balance mass body link together by shaft coupling; Described auxilliary balance mass is installed on the main balance mass by the bottom of the flange on the lower casing from main balance mass.
The anti-system of floating of described balance mass is two axis robot or the little range plane motor of two main relatively balance mass barycenter symmetric arrangement.
Described two axis robot comprise two mechanical arms that link to each other, be used to drive two electric rotating machines of corresponding mechanical arm, be installed in two rotary encoders on the corresponding rotation motor, be installed on shell and support and output shaft on the basic framework.The output shaft of described two axis robot is connected with web joint, and described two axis robot are connected with main balance mass by web joint; Handgrip of the output shaft fixed connection of perhaps described two axis robot is equipped with interface block on the main balance mass, and when needs were proofreaied and correct the position of main balance mass, handgrip matched with interface block, and after correction was finished, handgrip separated with interface block.
The mover of described little range plane motor is installed on the main balance mass, and stator is installed on the basic framework by support.
Balancing and positioning system for workpiece platform of photoetching machine of the present invention, equilibrium activity by balance mass, significantly reduced when work stage is carried load accelerated motion reacting force to the litho machine basis, thereby reduced the difficulty of litho machine system vibration damping, and finally played the beneficial effect that improves the work stage system accuracy.
Description of drawings
Fig. 1: the floor map of litho machine system exposing unit;
Fig. 2: balancing and positioning system for workpiece platform top perspective view;
Fig. 3: balancing and positioning system for workpiece platform removes the face upwarding stereogram behind the basic framework 1;
Fig. 4: Y is to the stereographic map of slide block 7;
Fig. 5: X is to the slide block stereographic map;
Fig. 6: auxilliary balance mass stereographic map;
Fig. 7: the cut-open view of auxilliary balance mass;
Fig. 8: the anti-stereographic map that floats mechanical arm among first kind of embodiment of system of balance mass;
Fig. 9: the anti-stereographic map that floats the work-piece platform balancing positioning systems of second kind of embodiment of system of balance mass is housed;
Figure 10: the anti-stereographic map that floats mechanical arm among second kind of embodiment of system of balance mass;
Figure 11: the anti-stereographic map that floats the work-piece platform balancing positioning systems of the third embodiment of system of balance mass is housed;
Figure 12: the anti-stereographic map that floats the third embodiment midplane motor of system of balance mass;
Figure 13: the control chart of main balance mass.
Wherein: the 101-illuminator; 102-complete machine framework; 103-mask platform system; The 104-objective system; 105-focusing and leveling system; 106-work stage system; 107-work stage laser interferometer; The 1-basic framework; 2-master's balance mass; 3-Y is to long stroke motor stator; 4a, 4b-Y are to long stroke motor; 5-Y is to long stroke electric mover; The 6-web joint; 7,16-Y is to slide block; 8-X is to guide rail; 9-Y is to guide rail; The 10-exposure desk; 11-X is to slide block; 12-X is to long stroke electric mover; 13-X is to long stroke motor; 14-X is to long stroke motor stator; The 15-air-flotation workbench; 17a, 17b-two axis robot; The 18-web joint; 19-Y is to the vertical air-bearing of slide block 16; 20-rotary acceleration sensor; 21a, 21b-assist balance mass; The vertical air-bearing of 22a, 22b, 22c, 22d-master's balance mass 2; 23-Y is to the vertical air-bearing of slide block 7; 24-Y is to the side direction air-bearing of slide block 7; 25-X is to the vertical air-bearing of slide block; 26-X is to the side direction air-bearing of slide block; The 27-electric rotating machine; The last shell of 28-; The 29-lower casing; The 30-shaft coupling; 31-assists the balance mass body; The 32-web joint; 33-mechanical arm output shaft; 34-shell and support; The 35-rotary encoder; The 36-electric rotating machine; The 37-rotary encoder; The 38-electric rotating machine; 39-mechanical arm one; 40-mechanical arm two; 41a, 41b-have two axis robot of handgrip; The 42-interface block; The 43-handgrip; The 44-shell; The little range plane motor of 45a, 45b-; 46-planar motor stator; 47-planar motor mover; The 48-mounting bracket; The 49-control system; The 50-comparer; The 51-controller; The 52-actuator; The 53-measuring system.
Embodiment
Below in conjunction with accompanying drawing preferred embodiment of the present invention is described, can further understands purpose of the present invention, specific structural features and advantage.
Fig. 1 is the 2D view of a kind of photo-etching machine exposal unit, as can be seen from the figure, this photo-etching machine exposal unit mainly comprises complete machine framework 102, illuminator 101, mask platform system 103, objective system 104, focusing and leveling system 105, work stage system 106 and work stage laser interferometer 107 etc.Work stage system 106 wherein is exactly the balancing and positioning system for workpiece platform that our this invention will be set forth.
See also Fig. 2,3, balancing and positioning system for workpiece platform mainly comprises basic framework 1, long stroke module, exposure desk 10, balance mass system, anti-system, measuring system 53 and the control system 49 (consulting Figure 13) etc. of floating of balance mass.
Long stroke module be used for the realization system X, Y to big stroke motion.Long stroke module mainly is made up of to guide rail 8 etc. to guide rail 9 and X to slide block 11, Y to slide block 7,16, X to long stroke motor 13, Y to long stroke motor 4a, 4b, X Y.
Y is made up of mover 5 and stator 3 respectively to long stroke motor 4a, 4b.X is made up of mover 12 and stator 14 to long stroke motor 13.Y is to long stroke motor 4a, 4b synchronized movement, realize jointly balancing and positioning device along Y to move, X to motor 13 be used to realize balancing and positioning device along X to move.
Y is installed in Y to the mover 5 of long stroke motor 4a on slide block 7 by web joint 6, and Y is installed in Y to the mover 5 of long stroke motor 4b on slide block 16 by web joint 18.Y is connected (see figure 4) through vertical air-bearing 23 with side direction air-bearing 24 with Y to slide block 7 between guide rail 9, Y is connected through vertical air-bearing 19 with the upper surface of main balance mass 2 to slide block 16.Y is installed on the main balance mass 2 to guide rail 9.X is installed in X on slide block 11 to the mover 12 of long stroke motor 13, and stator 14 is installed in X on guide rail 8, and X is connected through air-bearing 25,26 to guide rail 8 with X to slide block 11.X is connected to slide block 7 with Y to guide rail 8 one ends, and the other end is connected to slide block 16 with Y.
The balance mass system comprises main balance mass 2 and auxilliary balance mass 21a, 21b three parts, and wherein auxilliary balance mass is not limited to have only 21a, two unit of 21b, can be made up of one or more according to the needs of structure or driving moment.The gross mass of balancing and positioning device is generally 10-30 times of moving-mass (comprise the mover 5 of Y to long stroke motor 4a, 4b, X is to long stroke motor 13, and X is to guide rail 8 and exposure desk 10 etc.).
See also Fig. 6,7, each unit 21a, 21b structure in the auxilliary balance mass are identical, and each auxilliary balance mass unit 21a (perhaps 21b) is made of jointly electric rotating machine 27, last shell 28, lower casing 29, shaft coupling 30 and columniform auxilliary balance mass body 31.Be connected with the side direction air-bearing through vertical air-bearing between auxilliary balance mass body 31 and the lower casing 29; The stator of electric rotating machine 27 is fixed on the shell 28; Rotor links together by shaft coupling 30 and auxilliary balance mass body 31.Each unit 21a, 21b in the auxilliary balance mass are installed on the main balance mass 2 by the flange on the lower casing 29, with main balance mass 2 along X, Y to moving.
M
b: the quality of main balance mass and auxilliary balance mass etc.;
M
m: the systemic velocity of electric mover and load etc.;
J
a: it changes the moment of inertia of the heart to auxilliary balance mass body relatively.
Long stroke module drive exposure desk 10 along X and Y when the accelerated motion, electric mover can impose on the equal-sized reacting force of stator.Before adopting the counterbalance weight technology, the power that stator bore can be directly delivered on the basic framework 1.After adopting the counterbalance weight technology, the power that stator bore has passed to main balance mass 2, and transmission of torque has been given auxilliary balance mass 21a, 21b; Main balance mass 2 and auxilliary balance mass 21a, 21b have also just played corresponding equilibrium activity because of stressed or the relative basic framework 1 of moment move.
The anti-system of floating of balance mass be mainly used in the main balance mass 2 relative basic frameworks 1 of compensation along X, Y and Rz to drift.The anti-system of floating of balance mass has three embodiment, below introduces the particular content of each embodiment in detail.
That Fig. 2 and Fig. 8 represent is the anti-first kind of embodiment of system that float of balance mass.The anti-system of floating of this balance mass is made up of two two axis robot 17a, 17b, symmetric arrangement before and after the barycenter of their main relatively balance masses 2, common realize to main balance mass 2 along X, Y and Rz to drift control.Two two axis robot 17a, 17b structure are identical.Mechanical arm 17b (perhaps 17a) is mainly by mechanical arm 1, mechanical arm 2 40, electric rotating machine 36,38, rotary encoder 35,37, output shaft 33, web joint 32, compositions such as shell and mounting bracket 34.The mechanical arm 1 of mechanical arm 17b (perhaps 17a) is installed on the shell 34, is driven by motor 36, and scrambler 35 is installed on the motor 36; Mechanical arm 40 is installed on the mechanical arm 2 40, is driven by motor 38; Scrambler 37 is installed on the motor 38.Output shaft 33 is connected with main balance mass 2 through web joint 32, and shell and support 34 are installed on the basic framework 1.
That Fig. 9 and Figure 10 represent is anti-second embodiment of system that floats of balance mass.Second kind of embodiment is improved on the basis of first kind of embodiment, the anti-system of floating of this balance mass also is made up of two identical two axis robot 41a, 41b of structure, symmetric arrangement before and after the barycenter of their main relatively balance masses 2, common realize to main balance mass 2 along X, Y and Rz to drift control.Mechanical arm 17b (perhaps 17a) in the structure of mechanical arm 41b (perhaps 41a) and the first kind of scheme is similar, difference is: a handgrip 43 has been connected on the output shaft, when balancing and positioning device need be proofreaied and correct the position of main balance mass 2, just be installed in main balance mass 2 on interface block 42 match, after correction is finished, separate with interface block 42 again.
That Figure 11 and Figure 12 represent is anti-the third embodiment of system that floats of balance mass.The anti-system of floating of this balance mass is made up of two little range plane motor 45a, 45b, the barycenter symmetric arrangement of their main relatively balance masses 2, common realize to main balance mass 2 along X, Y and Rz to drift control.Planar motor 45b (perhaps 45a) is made up of mover 47, stator 46 and mounting bracket 48.Mover 47 is installed on the main balance mass 2, and stator 46 is installed on the basic framework 1 through mounting bracket 48.
The reason that causes main balance mass 2 drift motions mainly comprises pneumatically supported disturbance, windage, the tractive of pipeline etc.The drift of main balance mass 2 must be carried out corresponding compensation, otherwise the stroke of main balance mass 2 meeting overshoots causes system's operate as normal continuously.
Control system 49 (seeing Figure 13) can perhaps in the cycle of delegation's chip unit, perhaps in the exposure cycle of a silicon chip, be controlled to compensate the drift motion of main balance mass 2 the anti-system of floating in the cycle of a chip unit.
For the needs of control system 49, long stroke motor 4a, 4b, 13, main balance mass 2 all have the position data feedback.Measuring system 53 mainly comprises long stroke motor 4a, 4b, 13 scrambler and scrambler of main balance mass 2 etc.Simultaneously, for making motor element arranged a fixing zero point in the complete machine coordinate system, long stroke motor and main balance mass all are furnished with null pick-up.
Figure 13 is exactly the control loop figure of control system 49 above-mentioned.Main balance mass 2 X, Y and Rz to the set-point be transfused to comparer 50, data that comparer 50 feeds back to measuring system 53 and ideal position data relatively after, the result is exported to controller 51, controller 51 is being controlled the actuator 52 of a Three Degree Of Freedom (X, Y and Rz), 52 pairs of main balance masses 2 of actuator are carried out necessary position correction, and measuring system 53 feeds back to comparer 50 with main balance mass 2 new position datas again.
To the impulsive force of basic framework, reduce the vibration damping difficulty of system when the present invention can significantly reduce balancing and positioning system for workpiece platform and carries load accelerated motion, improve the bearing accuracy of system.Quote this technology, the acceleration of long stroke motor, speed and the load quality that carries can obtain large increase, this will make step-by-step scanning photo-etching device (characteristic line breadth 100nm, the alignment precision 30nm) technology of 300mm high yield and follow-up two platform technology etc. become possibility.
Claims (16)
1. balancing and positioning system for workpiece platform of photoetching machine, it comprises basic framework, long stroke module, exposure desk, balance mass system, anti-system, measuring system and the control system of floating of balance mass, it is characterized in that, described long stroke module is based upon on the balance mass system, drive exposure desk along X, Y to moving; The balance mass system is based upon on the basic framework, comprises main balance mass and auxilliary balance mass, is respectively applied for the reacting force and the moment of reaction that produce when the balance exposure desk carries out accelerated motion under the drive of long stroke module; The anti-system of floating of balance mass is installed between basic framework and the balance quality system, the compensation balance quality system along X, Y and Rz to drift motion; Measuring system is installed on described long stroke module and the main balance mass, for control system provides feedback data; Control system is according to the motion of the long stroke module of feedback data control and the position compensation of main balance mass.
2. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 1, it is characterized in that: long stroke module comprise two Y to long stroke motor and an X to long stroke motor, two Y are synchronous to long stroke motor movement, be used to jointly to realize exposure desk along Y to move, X to long stroke motor be used to realize exposure desk along X to move.
3. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 2 is characterized in that: described long stroke module comprise a Y to guide rail and an X to guide rail, and Y becomes T type layout with X to guide rail to guide rail.
4. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 3, it is characterized in that: described long stroke module comprise two Y to slide block and an X to slide block, one of them Y is connected to guide rail with Y with the side direction air-bearing by vertical to slide block, another Y is connected with the top plan of main balance mass by vertical air-bearing to slide block, X is installed in two Y respectively on slide block to the two ends of guide rail, and X is connected with the side direction air-bearing by vertical between guide rail with X to slide block.
5. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 4 is characterized in that: two Y of described long stroke module are installed together to slide block with corresponding Y to the mover of long stroke motor, and stator and main balance mass body are installed together; X is installed together to slide block to the mover and the X of long stroke motor, and stator and X are installed together to guide rail.
6. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 1 is characterized in that: main balance mass is the square of the square frame shape of middle hollow out or middle not hollow out; Be connected by vertical air-bearing between main balance mass and the basic framework, and basic framework be done plane motion relatively.
7. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 1, it is characterized in that: auxilliary balance mass is made up of one or several unit, each unit comprises columniform balance mass body, electric rotating machine and upper and lower shell, is used for the moment of reaction that the balance exposure desk produces when the accelerated motion along X, Y and Rz.
8. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 7 is characterized in that: air supporting is connected with side direction by vertical air supporting between the cylindrical balance mass body of described auxilliary balance mass and the lower casing; The stator of electric rotating machine is fixed on the shell, and mover and columniform balance mass body link together by shaft coupling.
9. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 8 is characterized in that: described auxilliary balance mass is installed on the main balance mass by the bottom of the flange on the lower casing from main balance mass.
10. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 1 is characterized in that: the anti-system of floating of balance mass is two axis robot or the little range plane motor of two main relatively balance mass barycenter symmetric arrangement.
11. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 10 is characterized in that: described two axis robot comprise two mechanical arms that link to each other, be used to drive two electric rotating machines of corresponding mechanical arm, be installed in two rotary encoders on the corresponding rotation motor, be installed on shell and support and output shaft on the basic framework.
12. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 11 is characterized in that: the output shaft of described two axis robot is connected with web joint, and two axis robot are connected with main balance mass by web joint.
13. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 11, it is characterized in that: handgrip of the output shaft fixed connection of described two axis robot, on the main balance mass interface block is installed, when needs are proofreaied and correct the position of main balance mass, handgrip matches with interface block, after correction was finished, handgrip separated with interface block.
14. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 10, it is characterized in that: described little range plane motor comprises mover, stator and mounting bracket, wherein mover is installed on the main balance mass, and stator is installed on the basic framework through mounting bracket.
15. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 1 is characterized in that: long stroke motor and main balance mass body all are equipped with the position data feedback transducer.
16. balancing and positioning system for workpiece platform of photoetching machine as claimed in claim 1, it is characterized in that: control system is in the cycle of a chip unit, perhaps in the cycle of delegation's chip unit, perhaps in the exposure cycle of a silicon chip, the drift motion of compensation balance quality system.
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| CNB2007100424174A CN100492177C (en) | 2007-06-22 | 2007-06-22 | System for balancing and positioning work table of photoetching device |
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| CNB2007100424174A CN100492177C (en) | 2007-06-22 | 2007-06-22 | System for balancing and positioning work table of photoetching device |
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